JP2000294504A5 - - Google Patents

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Publication number
JP2000294504A5
JP2000294504A5 JP2000063610A JP2000063610A JP2000294504A5 JP 2000294504 A5 JP2000294504 A5 JP 2000294504A5 JP 2000063610 A JP2000063610 A JP 2000063610A JP 2000063610 A JP2000063610 A JP 2000063610A JP 2000294504 A5 JP2000294504 A5 JP 2000294504A5
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JP
Japan
Prior art keywords
composition
layer
photoresist
molecular weight
substrate
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JP2000063610A
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English (en)
Japanese (ja)
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JP4789300B2 (ja
JP2000294504A (ja
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Priority claimed from US09/264,061 external-priority patent/US6316165B1/en
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Publication of JP2000294504A publication Critical patent/JP2000294504A/ja
Publication of JP2000294504A5 publication Critical patent/JP2000294504A5/ja
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Publication of JP4789300B2 publication Critical patent/JP4789300B2/ja
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Expired - Lifetime legal-status Critical Current

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JP2000063610A 1999-03-08 2000-03-08 フォトレジストレリーフイメージの形成方法 Expired - Lifetime JP4789300B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US09/264,061 US6316165B1 (en) 1999-03-08 1999-03-08 Planarizing antireflective coating compositions
US09/264061 1999-03-08

Publications (3)

Publication Number Publication Date
JP2000294504A JP2000294504A (ja) 2000-10-20
JP2000294504A5 true JP2000294504A5 (2) 2007-03-29
JP4789300B2 JP4789300B2 (ja) 2011-10-12

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JP2000063610A Expired - Lifetime JP4789300B2 (ja) 1999-03-08 2000-03-08 フォトレジストレリーフイメージの形成方法

Country Status (6)

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US (2) US6316165B1 (2)
EP (1) EP1035442B1 (2)
JP (1) JP4789300B2 (2)
KR (1) KR100869484B1 (2)
DE (1) DE60042353D1 (2)
TW (1) TWI253544B (2)

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