JP2000332098A - 半導体集積回路装置およびその製造方法 - Google Patents

半導体集積回路装置およびその製造方法

Info

Publication number
JP2000332098A
JP2000332098A JP11136656A JP13665699A JP2000332098A JP 2000332098 A JP2000332098 A JP 2000332098A JP 11136656 A JP11136656 A JP 11136656A JP 13665699 A JP13665699 A JP 13665699A JP 2000332098 A JP2000332098 A JP 2000332098A
Authority
JP
Japan
Prior art keywords
insulating film
groove
integrated circuit
circuit device
semiconductor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP11136656A
Other languages
English (en)
Japanese (ja)
Other versions
JP2000332098A5 (2
Inventor
Yoshifumi Onishi
良史 大西
Kunihiko Watanabe
邦彦 渡辺
Toshiyuki Kikuchi
俊之 菊池
Takashi Hashimoto
尚 橋本
Hideaki Kurosaki
秀彰 黒崎
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP11136656A priority Critical patent/JP2000332098A/ja
Publication of JP2000332098A publication Critical patent/JP2000332098A/ja
Publication of JP2000332098A5 publication Critical patent/JP2000332098A5/ja
Pending legal-status Critical Current

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JP11136656A 1999-05-18 1999-05-18 半導体集積回路装置およびその製造方法 Pending JP2000332098A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11136656A JP2000332098A (ja) 1999-05-18 1999-05-18 半導体集積回路装置およびその製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11136656A JP2000332098A (ja) 1999-05-18 1999-05-18 半導体集積回路装置およびその製造方法

Publications (2)

Publication Number Publication Date
JP2000332098A true JP2000332098A (ja) 2000-11-30
JP2000332098A5 JP2000332098A5 (2) 2005-09-02

Family

ID=15180437

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11136656A Pending JP2000332098A (ja) 1999-05-18 1999-05-18 半導体集積回路装置およびその製造方法

Country Status (1)

Country Link
JP (1) JP2000332098A (2)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2002056363A1 (fr) * 2001-01-12 2002-07-18 Stmicroelectronics Sa Structure d isolation de couches enterrees par tranchees enterrees, et procede de fabrication

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2002056363A1 (fr) * 2001-01-12 2002-07-18 Stmicroelectronics Sa Structure d isolation de couches enterrees par tranchees enterrees, et procede de fabrication
FR2819629A1 (fr) * 2001-01-12 2002-07-19 St Microelectronics Sa Circuit integre a risque de percage reduit entre des couches enterrees, et procede de fabrication

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