JP2000332098A5 - - Google Patents

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Publication number: JP2000332098A5
Authority: JP; Japan
Prior art keywords: shallow groove; insulating film; groove; embedded insulating; embedded
Prior art date: 1999-05-18
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Pending

Application number

JP1999136656A

Other languages

English (en)

Japanese (ja)

Other versions

JP2000332098A (ja

Filing date

1999-05-18

Publication date

2005-09-02

1999-05-18 Application filed filed Critical

1999-05-18 Priority to JP11136656A priority Critical patent/JP2000332098A/ja

1999-05-18 Priority claimed from JP11136656A external-priority patent/JP2000332098A/ja

2000-11-30 Publication of JP2000332098A publication Critical patent/JP2000332098A/ja

2005-09-02 Publication of JP2000332098A5 publication Critical patent/JP2000332098A5/ja

Status Pending legal-status Critical Current

Links

238000000034 method Methods 0.000 description 2
239000004065 semiconductor Substances 0.000 description 2
239000000758 substrate Substances 0.000 description 2
238000000151 deposition Methods 0.000 description 1
238000002955 isolation Methods 0.000 description 1

JP11136656A 1999-05-18 1999-05-18 半導体集積回路装置およびその製造方法 Pending JP2000332098A (ja)

Priority Applications (1)

Application Number	Priority Date	Filing Date	Title
JP11136656A JP2000332098A (ja)	1999-05-18	1999-05-18	半導体集積回路装置およびその製造方法

Applications Claiming Priority (1)

Application Number	Priority Date	Filing Date	Title
JP11136656A JP2000332098A (ja)	1999-05-18	1999-05-18	半導体集積回路装置およびその製造方法

Publications (2)

Publication Number	Publication Date
JP2000332098A JP2000332098A (ja)	2000-11-30
JP2000332098A5 true JP2000332098A5 (2)	2005-09-02

Family

ID=15180437

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
JP11136656A Pending JP2000332098A (ja)	1999-05-18	1999-05-18	半導体集積回路装置およびその製造方法

Country Status (1)

Country	Link
JP (1)	JP2000332098A (2)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
FR2819629B1 (fr) *	2001-01-12	2003-07-04	St Microelectronics Sa	Circuit integre a risque de percage reduit entre des couches enterrees, et procede de fabrication

1999
- 1999-05-18 JP JP11136656A patent/JP2000332098A/ja active Pending

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