JP2000354733A - 排ガスの処理方法およびそれを用いた装置 - Google Patents

排ガスの処理方法およびそれを用いた装置

Info

Publication number
JP2000354733A
JP2000354733A JP11167580A JP16758099A JP2000354733A JP 2000354733 A JP2000354733 A JP 2000354733A JP 11167580 A JP11167580 A JP 11167580A JP 16758099 A JP16758099 A JP 16758099A JP 2000354733 A JP2000354733 A JP 2000354733A
Authority
JP
Japan
Prior art keywords
exhaust gas
gas
water
soluble
wet cleaning
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
JP11167580A
Other languages
English (en)
Japanese (ja)
Other versions
JP2000354733A5 (th
Inventor
Michitaka Hishiike
通隆 菱池
Ryuichi Nakanishi
隆一 中西
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sumitomo Seika Chemicals Co Ltd
Original Assignee
Sumitomo Seika Chemicals Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sumitomo Seika Chemicals Co Ltd filed Critical Sumitomo Seika Chemicals Co Ltd
Priority to JP11167580A priority Critical patent/JP2000354733A/ja
Publication of JP2000354733A publication Critical patent/JP2000354733A/ja
Publication of JP2000354733A5 publication Critical patent/JP2000354733A5/ja
Withdrawn legal-status Critical Current

Links

Classifications

    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02C—CAPTURE, STORAGE, SEQUESTRATION OR DISPOSAL OF GREENHOUSE GASES [GHG]
    • Y02C20/00—Capture or disposal of greenhouse gases
    • Y02C20/30—Capture or disposal of greenhouse gases of perfluorocarbons [PFC], hydrofluorocarbons [HFC] or sulfur hexafluoride [SF6]

Landscapes

  • Treating Waste Gases (AREA)
JP11167580A 1999-06-15 1999-06-15 排ガスの処理方法およびそれを用いた装置 Withdrawn JP2000354733A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11167580A JP2000354733A (ja) 1999-06-15 1999-06-15 排ガスの処理方法およびそれを用いた装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11167580A JP2000354733A (ja) 1999-06-15 1999-06-15 排ガスの処理方法およびそれを用いた装置

Publications (2)

Publication Number Publication Date
JP2000354733A true JP2000354733A (ja) 2000-12-26
JP2000354733A5 JP2000354733A5 (th) 2006-06-08

Family

ID=15852395

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11167580A Withdrawn JP2000354733A (ja) 1999-06-15 1999-06-15 排ガスの処理方法およびそれを用いた装置

Country Status (1)

Country Link
JP (1) JP2000354733A (th)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006175364A (ja) * 2004-12-22 2006-07-06 National Institute Of Advanced Industrial & Technology フッ素含有物からのフッ素回収方法及びフッ素回収装置
JP2008000728A (ja) * 2006-06-26 2008-01-10 Hitachi Ltd 過弗化物の処理方法及び処理装置
JP2008037712A (ja) * 2006-08-08 2008-02-21 Taiyo Nippon Sanso Corp ホウ素系ガス中の金属不純物の除去方法
KR101190545B1 (ko) 2011-01-18 2012-10-16 주식회사 루미스탈 수소화물 기상 성장법에 있어서 발생되는 부산물 처리 방법 및 장치
CN112705016A (zh) * 2020-12-30 2021-04-27 四川雅吉芯电子科技有限公司 一种单晶硅外延片生产用废气处理系统
JPWO2022210389A1 (th) * 2021-03-30 2022-10-06

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006175364A (ja) * 2004-12-22 2006-07-06 National Institute Of Advanced Industrial & Technology フッ素含有物からのフッ素回収方法及びフッ素回収装置
JP2008000728A (ja) * 2006-06-26 2008-01-10 Hitachi Ltd 過弗化物の処理方法及び処理装置
JP2008037712A (ja) * 2006-08-08 2008-02-21 Taiyo Nippon Sanso Corp ホウ素系ガス中の金属不純物の除去方法
KR101190545B1 (ko) 2011-01-18 2012-10-16 주식회사 루미스탈 수소화물 기상 성장법에 있어서 발생되는 부산물 처리 방법 및 장치
CN112705016A (zh) * 2020-12-30 2021-04-27 四川雅吉芯电子科技有限公司 一种单晶硅外延片生产用废气处理系统
CN112705016B (zh) * 2020-12-30 2022-11-25 四川雅吉芯电子科技有限公司 一种单晶硅外延片生产用废气处理系统
JPWO2022210389A1 (th) * 2021-03-30 2022-10-06
WO2022210389A1 (ja) * 2021-03-30 2022-10-06 前田建設工業株式会社 汚染物質処理システム及び汚染物質処理方法
JP7894855B2 (ja) 2021-03-30 2026-07-24 前田建設工業株式会社 難分解性有機フッ素化合物を含む物質の処理システム及び難分解性有機フッ素化合物を含む物質の処理方法

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