JP2000500529A - 金属層の電解析出のための方法 - Google Patents

金属層の電解析出のための方法

Info

Publication number
JP2000500529A
JP2000500529A JP9519399A JP51939997A JP2000500529A JP 2000500529 A JP2000500529 A JP 2000500529A JP 9519399 A JP9519399 A JP 9519399A JP 51939997 A JP51939997 A JP 51939997A JP 2000500529 A JP2000500529 A JP 2000500529A
Authority
JP
Japan
Prior art keywords
metal
container
anode
workpiece
current
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
JP9519399A
Other languages
English (en)
Japanese (ja)
Other versions
JP2000500529A5 (2
Inventor
ヴォルフガング ダームス
ハインリヒ マイヤー
シュテファン クレッチュマー
Original Assignee
アトーテヒ ドイッチュラント ゲゼルシャフト ミット ベシュレンクテル ハフツング
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by アトーテヒ ドイッチュラント ゲゼルシャフト ミット ベシュレンクテル ハフツング filed Critical アトーテヒ ドイッチュラント ゲゼルシャフト ミット ベシュレンクテル ハフツング
Publication of JP2000500529A publication Critical patent/JP2000500529A/ja
Publication of JP2000500529A5 publication Critical patent/JP2000500529A5/ja
Withdrawn legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D3/00—Electroplating: Baths therefor
    • C25D3/02—Electroplating: Baths therefor from solutions
    • C25D3/38—Electroplating: Baths therefor from solutions of copper
    • C—CHEMISTRY; METALLURGY
    • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D5/00—Electroplating characterised by the process; Pretreatment or after-treatment of workpieces
    • C25D5/18—Electroplating using modulated, pulsed or reversing current
    • C—CHEMISTRY; METALLURGY
    • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D5/00—Electroplating characterised by the process; Pretreatment or after-treatment of workpieces
    • C25D5/60—Electroplating characterised by the structure or texture of the layers
    • C25D5/615—Microstructure of the layers, e.g. mixed structure
    • C25D5/617—Crystalline layers
    • C—CHEMISTRY; METALLURGY
    • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D5/00—Electroplating characterised by the process; Pretreatment or after-treatment of workpieces
    • C25D5/60—Electroplating characterised by the structure or texture of the layers
    • C25D5/623—Porosity of the layers
    • C—CHEMISTRY; METALLURGY
    • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D5/00—Electroplating characterised by the process; Pretreatment or after-treatment of workpieces
    • C25D5/627—Electroplating characterised by the visual appearance of the layers, e.g. colour, brightness or mat appearance
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00—Apparatus or processes for manufacturing printed circuits
    • H05K3/22—Secondary treatment of printed circuits
    • H05K3/24—Reinforcing of the conductive pattern
    • H05K3/241—Reinforcing of the conductive pattern characterised by the electroplating method; means therefor, e.g. baths or apparatus
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S205/00—Electrolysis: processes, compositions used therein, and methods of preparing the compositions
    • Y10S205/92—Electrolytic coating of circuit board or printed circuit, other than selected area coating

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Electroplating Methods And Accessories (AREA)
  • Electrolytic Production Of Metals (AREA)
  • Electroplating And Plating Baths Therefor (AREA)
  • Manufacturing Of Printed Wiring (AREA)
JP9519399A 1995-11-21 1996-11-21 金属層の電解析出のための方法 Withdrawn JP2000500529A (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE19545231.3 1995-11-21
DE19545231A DE19545231A1 (de) 1995-11-21 1995-11-21 Verfahren zur elektrolytischen Abscheidung von Metallschichten
PCT/EP1996/005140 WO1997019206A1 (de) 1995-11-21 1996-11-21 Verfahren zur elektrolytischen abscheidung von metallschichten

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2009230437A Division JP5417112B2 (ja) 1995-11-21 2009-10-02 金属層の電解析出のための方法

Publications (2)

Publication Number Publication Date
JP2000500529A true JP2000500529A (ja) 2000-01-18
JP2000500529A5 JP2000500529A5 (2) 2004-09-16

Family

ID=7779164

Family Applications (2)

Application Number Title Priority Date Filing Date
JP9519399A Withdrawn JP2000500529A (ja) 1995-11-21 1996-11-21 金属層の電解析出のための方法
JP2009230437A Expired - Lifetime JP5417112B2 (ja) 1995-11-21 2009-10-02 金属層の電解析出のための方法

Family Applications After (1)

Application Number Title Priority Date Filing Date
JP2009230437A Expired - Lifetime JP5417112B2 (ja) 1995-11-21 2009-10-02 金属層の電解析出のための方法

Country Status (9)

Country Link
US (1) US6099711A (2)
EP (1) EP0862665B1 (2)
JP (2) JP2000500529A (2)
AT (1) ATE190677T1 (2)
CA (1) CA2233329C (2)
DE (2) DE19545231A1 (2)
ES (1) ES2144789T3 (2)
TW (1) TW420728B (2)
WO (1) WO1997019206A1 (2)

Cited By (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002235189A (ja) * 2001-02-05 2002-08-23 Sansha Electric Mfg Co Ltd めっき電流供給電源装置
JP3374130B2 (ja) 1999-01-21 2003-02-04 アトーテヒ ドイッチュラント ゲゼルシャフト ミット ベシュレンクテル ハフツング 集積回路製造に際し高純度銅から成る導体構造を電解形成するための方法
WO2005100641A1 (ja) * 2004-04-15 2005-10-27 Neomax Co., Ltd. 物品への耐水素性付与方法
JP2006265632A (ja) * 2005-03-24 2006-10-05 Ishihara Chem Co Ltd 電気銅メッキ浴、並びに銅メッキ方法
JP2006283169A (ja) * 2005-04-04 2006-10-19 Okuno Chem Ind Co Ltd 酸性電気銅めっき液、及び含硫黄有機化合物の電解消耗量の少ない電気銅めっき方法
JP2008506841A (ja) * 2004-09-16 2008-03-06 マクダーミッド　インコーポレーテッド 電流プロフィールの可変による銅メッキ硬度を制御するための電解メッキ方法
JP2009167506A (ja) * 2008-01-21 2009-07-30 Ebara Udylite Kk 酸性電解銅めっき液およびこれを用いる微細配線回路の作製方法
JP2012518084A (ja) * 2009-02-17 2012-08-09 アトテック ドイチェランド ゲーエムベーハー スルーシリコンビア（ｔｓｖ）内にチップ−チップ間、チップ−ウェハー間及びウェハー−ウェハー間の銅インターコネクトを電着するプロセス
JP2014513211A (ja) * 2011-04-26 2014-05-29 アトーテヒ ドイッチュラント ゲゼルシャフト ミット ベシュレンクテル ハフツング 銅の電解析出用水性酸浴
JP2014159608A (ja) * 2013-02-19 2014-09-04 Sumitomo Metal Mining Co Ltd フレキシブル配線板の製造方法ならびにフレキシブル配線板
JP2016538419A (ja) * 2013-10-22 2016-12-08 アトテツク・ドイチユラント・ゲゼルシヤフト・ミツト・ベシユレンクテル・ハフツングＡｔｏｔｅｃｈ Ｄｅｕｔｓｃｈｌａｎｄ ＧｍｂＨ 電気銅めっき方法
JP2021530611A (ja) * 2018-06-15 2021-11-11 トデスカン，アルベルト ステンレス鋼製の物体をコーティングするための電解処理プロセス
JP2022545091A (ja) * 2019-08-19 2022-10-25 アトテック ドイチェランド ゲーエムベーハー ウント コ カーゲー 銅で充填されたマイクロビアを含む高密度相互接続プリント回路基板の製造方法

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DE19736350C1 (de) * 1997-08-21 1999-08-05 Atotech Deutschland Gmbh Verfahren zur Konzentrationsregulierung von Stoffen in Elektrolyten und Vorrichtung zur Durchführung des Verfahrens
US6793796B2 (en) 1998-10-26 2004-09-21 Novellus Systems, Inc. Electroplating process for avoiding defects in metal features of integrated circuit devices
US6946065B1 (en) 1998-10-26 2005-09-20 Novellus Systems, Inc. Process for electroplating metal into microscopic recessed features
DE19915146C1 (de) * 1999-01-21 2000-07-06 Atotech Deutschland Gmbh Verfahren zum galvanischen Bilden von Leiterstrukturen aus hochreinem Kupfer bei der Herstellung von integrierten Schaltungen
DE19925373B4 (de) * 1999-06-02 2006-04-06 Robert Bosch Gmbh Verfahren und Vorrichtung zum Galvanisieren
US20040045832A1 (en) * 1999-10-14 2004-03-11 Nicholas Martyak Electrolytic copper plating solutions
US6294060B1 (en) 1999-10-21 2001-09-25 Ati Properties, Inc. Conveyorized electroplating device
JP2001267726A (ja) * 2000-03-22 2001-09-28 Toyota Autom Loom Works Ltd 配線基板の電解メッキ方法及び配線基板の電解メッキ装置
US6491806B1 (en) 2000-04-27 2002-12-10 Intel Corporation Electroplating bath composition
NL1015348C2 (nl) * 2000-05-31 2001-12-03 D R P P B V Dutch Reverse Puls Methode ter verbetering van electrolytische metaal neerslagverdeling op een substraat met behulp van Periodic Reversal Current waarbij gebruik wordt gemaakt van Oplosbare-, Inerte- en Hybride Anoden.
DE10061186C1 (de) * 2000-12-07 2002-01-17 Astrium Gmbh Verfahren und Anordnung zur galvanischen Abscheidung von Nickel, Kobalt, Nickellegierungen oder Kobaltlegierungen mit periodischen Strompulsen und Verwendung des Verfahrens
US20040060728A1 (en) * 2001-01-04 2004-04-01 Philippe Steiert Method for producing electroconductive structures
US6620303B2 (en) * 2001-05-21 2003-09-16 Hong Kong Polytechnic University Process for making nickel electroforms
US6881318B2 (en) * 2001-07-26 2005-04-19 Applied Materials, Inc. Dynamic pulse plating for high aspect ratio features
KR20040045390A (ko) * 2001-10-16 2004-06-01 신꼬오덴기 고교 가부시키가이샤 소경홀의 구리 도금 방법
JP2003183879A (ja) * 2001-12-18 2003-07-03 Learonal Japan Inc 電解めっき方法
US6919011B2 (en) * 2001-12-27 2005-07-19 The Hong Kong Polytechnic University Complex waveform electroplating
US6558525B1 (en) 2002-03-01 2003-05-06 Northwest Aluminum Technologies Anode for use in aluminum producing electrolytic cell
US7077945B2 (en) * 2002-03-01 2006-07-18 Northwest Aluminum Technologies Cu—Ni—Fe anode for use in aluminum producing electrolytic cell
JP3964263B2 (ja) * 2002-05-17 2007-08-22 株式会社デンソー ブラインドビアホール充填方法及び貫通電極形成方法
US7247222B2 (en) * 2002-07-24 2007-07-24 Applied Materials, Inc. Electrochemical processing cell
US7128823B2 (en) * 2002-07-24 2006-10-31 Applied Materials, Inc. Anolyte for copper plating
US20040134775A1 (en) * 2002-07-24 2004-07-15 Applied Materials, Inc. Electrochemical processing cell
US7223323B2 (en) 2002-07-24 2007-05-29 Applied Materials, Inc. Multi-chemistry plating system
KR100389061B1 (ko) * 2002-11-14 2003-06-25 일진소재산업주식회사 전해 동박 제조용 전해액 및 이를 이용한 전해 동박 제조방법
DE10259362A1 (de) * 2002-12-18 2004-07-08 Siemens Ag Verfahren zum Abscheiden einer Legierung auf ein Substrat
EP1475463B2 (en) † 2002-12-20 2017-03-01 Shipley Company, L.L.C. Reverse pulse plating method
US20040118691A1 (en) * 2002-12-23 2004-06-24 Shipley Company, L.L.C. Electroplating method
DE10261493A1 (de) * 2002-12-23 2004-07-08 METAKEM Gesellschaft für Schichtchemie der Metalle mbH Anode zur Galvanisierung
KR20040073974A (ko) * 2003-02-14 2004-08-21 롬 앤드 하스 일렉트로닉 머트어리얼즈, 엘.엘.씨. 전기도금 조성물
US20050157475A1 (en) * 2004-01-15 2005-07-21 Endicott Interconnect Technologies, Inc. Method of making printed circuit board with electroplated conductive through holes and board resulting therefrom
EP1598449B1 (en) * 2004-04-26 2010-08-04 Rohm and Haas Electronic Materials, L.L.C. Improved plating method
US20050284766A1 (en) * 2004-06-25 2005-12-29 Herdman Roderick D Pulse reverse electrolysis of acidic copper electroplating solutions
DE102004045451B4 (de) 2004-09-20 2007-05-03 Atotech Deutschland Gmbh Galvanisches Verfahren zum Füllen von Durchgangslöchern mit Metallen, insbesondere von Leiterplatten mit Kupfer
FR2881146B1 (fr) * 2005-01-27 2007-10-19 Snecma Moteurs Sa Procede de reparation d'une surface de frottement d'une aube a calage variable de turbomachine
EP1712660A1 (de) * 2005-04-12 2006-10-18 Enthone Inc. Unlösliche Anode
EP1717351A1 (de) * 2005-04-27 2006-11-02 Enthone Inc. Galvanikbad
DE502005003655D1 (de) * 2005-05-25 2008-05-21 Enthone Verfahren und Vorrichtung zur Einstellung der Ionenkonzentration in Elektrolyten
US7425255B2 (en) * 2005-06-07 2008-09-16 Massachusetts Institute Of Technology Method for producing alloy deposits and controlling the nanostructure thereof using negative current pulsing electro-deposition
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JP5073736B2 (ja) * 2006-03-30 2012-11-14 アトテック・ドイチュラント・ゲーエムベーハー 孔及びキャビティの金属による電解充填法
US20070278107A1 (en) * 2006-05-30 2007-12-06 Northwest Aluminum Technologies Anode for use in aluminum producing electrolytic cell
DE102008031003B4 (de) 2008-06-30 2010-04-15 Siemens Aktiengesellschaft Verfahren zum Erzeugen einer CNT enthaltenen Schicht aus einer ionischen Flüssigkeit
US10011917B2 (en) 2008-11-07 2018-07-03 Lam Research Corporation Control of current density in an electroplating apparatus
US11225727B2 (en) 2008-11-07 2022-01-18 Lam Research Corporation Control of current density in an electroplating apparatus
US9385035B2 (en) 2010-05-24 2016-07-05 Novellus Systems, Inc. Current ramping and current pulsing entry of substrates for electroplating
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US20120024713A1 (en) 2010-07-29 2012-02-02 Preisser Robert F Process for electrodeposition of copper chip to chip, chip to wafer and wafer to wafer interconnects in through-silicon vias (tsv) with heated substrate and cooled electrolyte
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CN103179806B (zh) * 2011-12-21 2019-05-28 奥特斯有限公司 组合的通孔镀覆和孔填充的方法
EP2735627A1 (en) 2012-11-26 2014-05-28 ATOTECH Deutschland GmbH Copper plating bath composition
JP6411741B2 (ja) * 2013-05-20 2018-10-24 国立大学法人 熊本大学 電解処理方法及び電解処理装置
KR102426521B1 (ko) 2015-04-20 2022-07-27 아토테크 도이칠란트 게엠베하 운트 콤파니 카게 전해 구리 도금 배쓰 조성물 및 그 사용 방법
EP3344800B1 (en) 2015-08-31 2019-03-13 ATOTECH Deutschland GmbH Aqueous copper plating baths and a method for deposition of copper or copper alloy onto a substrate
EP3135709B1 (en) 2015-08-31 2018-01-10 ATOTECH Deutschland GmbH Imidazoyl urea polymers and their use in metal or metal alloy plating bath compositions
ES2681836T3 (es) 2015-09-10 2018-09-17 Atotech Deutschland Gmbh Composición de baño para chapado de cobre
US11035051B2 (en) 2016-08-15 2021-06-15 Atotech Deutschland Gmbh Acidic aqueous composition for electrolytic copper plating
EP3360988B1 (en) 2017-02-09 2019-06-26 ATOTECH Deutschland GmbH Pyridinium compounds, a synthesis method therefor, metal or metal alloy plating baths containing said pyridinium compounds and a method for use of said metal or metal alloy plating baths
EP3470552B1 (en) 2017-10-13 2020-12-30 ATOTECH Deutschland GmbH An acidic aqueous composition for electrolytically depositing a copper deposit
ES2800292T3 (es) 2017-11-09 2020-12-29 Atotech Deutschland Gmbh Composiciones de electrodeposición para deposición electrolítica de cobre, su uso y un método para depositar electrolíticamente una capa de cobre o aleación de cobre sobre al menos una superficie de un sustrato
ES2881029T3 (es) 2018-01-09 2021-11-26 Atotech Deutschland Gmbh Aditivo de ureileno, su uso y un método para su preparación
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US11716819B2 (en) * 2018-06-21 2023-08-01 Averatek Corporation Asymmetrical electrolytic plating for a conductive pattern
JP7087759B2 (ja) * 2018-07-18 2022-06-21 住友金属鉱山株式会社 銅張積層板
CN112210801A (zh) * 2019-07-09 2021-01-12 江西博泉化学有限公司 一种用于高纵横比电路板通孔电镀的电镀液及其电镀方法
EP4018790A1 (en) 2019-08-19 2022-06-29 Atotech Deutschland GmbH & Co. KG Manufacturing sequences for high density interconnect printed circuit boards and a high density interconnect printed circuit board
EP3901331A1 (en) 2020-04-23 2021-10-27 ATOTECH Deutschland GmbH Acidic aqueous composition for electrolytically depositing a copper deposit
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EP4032930B1 (en) 2021-01-22 2023-08-30 Atotech Deutschland GmbH & Co. KG Biuret-based quaternized polymers and their use in metal or metal alloy plating baths
CN113106527B (zh) * 2021-04-19 2024-09-10 深圳铱创科技有限公司 不溶性阳极及脉冲电镀设备
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Cited By (16)

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Publication number Priority date Publication date Assignee Title
JP3374130B2 (ja) 1999-01-21 2003-02-04 アトーテヒ ドイッチュラント ゲゼルシャフト ミット ベシュレンクテル ハフツング 集積回路製造に際し高純度銅から成る導体構造を電解形成するための方法
JP2002235189A (ja) * 2001-02-05 2002-08-23 Sansha Electric Mfg Co Ltd めっき電流供給電源装置
US7972491B2 (en) 2004-04-15 2011-07-05 Hitachi Metals, Ltd. Method for imparting hydrogen resistance to articles
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WO1997019206A1 (de) 1997-05-29
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CA2233329C (en) 2005-07-26
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