JP2012507858A5 - - Google Patents
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- Publication number
- JP2012507858A5 JP2012507858A5 JP2011534486A JP2011534486A JP2012507858A5 JP 2012507858 A5 JP2012507858 A5 JP 2012507858A5 JP 2011534486 A JP2011534486 A JP 2011534486A JP 2011534486 A JP2011534486 A JP 2011534486A JP 2012507858 A5 JP2012507858 A5 JP 2012507858A5
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- liquid medium
- acoustic energy
- transducer
- rinse
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
- 239000000758 substrate Substances 0.000 claims description 93
- 239000007788 liquid Substances 0.000 claims description 84
- 239000000356 contaminant Substances 0.000 claims description 22
- 238000000034 method Methods 0.000 claims description 21
- 238000004140 cleaning Methods 0.000 claims description 14
- 230000005499 meniscus Effects 0.000 claims description 10
- 230000005540 biological transmission Effects 0.000 claims description 9
- 238000006073 displacement reaction Methods 0.000 claims description 7
- 239000000126 substance Substances 0.000 claims description 6
- 230000027455 binding Effects 0.000 claims description 4
- 230000003993 interaction Effects 0.000 claims description 4
- 239000004065 semiconductor Substances 0.000 claims 21
- 239000003795 chemical substances by application Substances 0.000 claims 9
- 239000002131 composite material Substances 0.000 claims 3
- 239000000203 mixture Substances 0.000 claims 3
- 229920002401 polyacrylamide Polymers 0.000 claims 2
- 238000006243 chemical reaction Methods 0.000 claims 1
- PCLIRWBVOVZTOK-UHFFFAOYSA-M 2-(1-methylpyrrolidin-1-ium-1-yl)ethyl 2-hydroxy-2,2-diphenylacetate;iodide Chemical compound [I-].C=1C=CC=CC=1C(O)(C=1C=CC=CC=1)C(=O)OCC[N+]1(C)CCCC1 PCLIRWBVOVZTOK-UHFFFAOYSA-M 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US12/262,094 US8585825B2 (en) | 2008-10-30 | 2008-10-30 | Acoustic assisted single wafer wet clean for semiconductor wafer process |
| US12/262,094 | 2008-10-30 | ||
| PCT/US2009/005638 WO2010096041A1 (en) | 2008-10-30 | 2009-10-14 | Acoustic assisted single wafer wet clean for semiconductor wafer process |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2012507858A JP2012507858A (ja) | 2012-03-29 |
| JP2012507858A5 true JP2012507858A5 (2) | 2012-11-29 |
Family
ID=42129948
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2011534486A Withdrawn JP2012507858A (ja) | 2008-10-30 | 2009-10-14 | 半導体ウエハ処理のための音響を用いた枚葉式ウエハ湿式洗浄 |
Country Status (6)
| Country | Link |
|---|---|
| US (2) | US8585825B2 (2) |
| JP (1) | JP2012507858A (2) |
| KR (1) | KR20110079830A (2) |
| CN (1) | CN102197462B (2) |
| TW (1) | TW201029060A (2) |
| WO (1) | WO2010096041A1 (2) |
Families Citing this family (16)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US8171877B2 (en) * | 2007-03-14 | 2012-05-08 | Lam Research Corporation | Backside mounted electrode carriers and assemblies incorporating the same |
| US8075701B2 (en) * | 2008-06-30 | 2011-12-13 | Lam Research Corporation | Processes for reconditioning multi-component electrodes |
| US8276604B2 (en) * | 2008-06-30 | 2012-10-02 | Lam Research Corporation | Peripherally engaging electrode carriers and assemblies incorporating the same |
| US8957564B1 (en) * | 2010-06-29 | 2015-02-17 | Silicon Light Machines Corporation | Microelectromechanical system megasonic transducer |
| US8926762B2 (en) | 2011-09-06 | 2015-01-06 | Taiwan Semiconductor Manufacturing Company, Ltd. | Apparatus and methods for movable megasonic wafer probe |
| US9117760B2 (en) * | 2013-01-30 | 2015-08-25 | Taiwan Semiconductor Manufacturing Co., Ltd. | Method and system for energized and pressurized liquids for cleaning/etching applications in semiconductor manufacturing |
| US10079164B2 (en) | 2013-09-18 | 2018-09-18 | Naura Akrion Inc. | System, apparatus, and method for processing substrates using acoustic energy |
| US10343193B2 (en) * | 2014-02-24 | 2019-07-09 | The Boeing Company | System and method for surface cleaning |
| US10688536B2 (en) * | 2014-02-24 | 2020-06-23 | The Boeing Company | System and method for surface cleaning |
| US11141762B2 (en) | 2015-05-15 | 2021-10-12 | Acm Research (Shanghai), Inc. | System for cleaning semiconductor wafers |
| US10507498B2 (en) * | 2016-06-15 | 2019-12-17 | Taiwan Semiconductor Manufacturing Company Ltd. | Apparatus for particle cleaning |
| KR102517663B1 (ko) * | 2017-11-15 | 2023-04-05 | 에이씨엠 리서치 (상하이), 인코포레이티드 | 반도체 웨이퍼를 세정하는 방법 |
| JP7230037B2 (ja) * | 2018-01-23 | 2023-02-28 | エーシーエム リサーチ （シャンハイ） インコーポレーテッド | 基板の洗浄方法及び洗浄装置 |
| JP6709010B2 (ja) * | 2019-04-16 | 2020-06-10 | 株式会社ホロン | 被洗浄体の異物除去装置およびその異物除去方法 |
| KR102395972B1 (ko) * | 2020-07-29 | 2022-05-09 | 가천대학교 산학협력단 | 초고주파 진동을 이용한 고종횡비 나노채널의 세정 또는 에칭방법 |
| CN118649930A (zh) * | 2024-05-29 | 2024-09-17 | 苏州元脑智能科技有限公司 | 芯片处理方法、系统、装置、设备及存储介质 |
Family Cites Families (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US550785A (en) * | 1895-12-03 | J e friend | ||
| US4715392A (en) | 1983-11-10 | 1987-12-29 | Nippon Kogaku K. K. | Automatic photomask or reticle washing and cleaning system |
| US5505785A (en) | 1994-07-18 | 1996-04-09 | Ferrell; Gary W. | Method and apparatus for cleaning integrated circuit wafers |
| JPH1133506A (ja) | 1997-07-24 | 1999-02-09 | Tadahiro Omi | 流体処理装置及び洗浄処理システム |
| US7520284B2 (en) * | 2000-06-30 | 2009-04-21 | Lam Research Corporation | Apparatus for developing photoresist and method for operating the same |
| CN1193410C (zh) * | 2000-09-01 | 2005-03-16 | 株式会社德山 | 残渣洗涤液 |
| JP2002093765A (ja) * | 2000-09-20 | 2002-03-29 | Kaijo Corp | 基板洗浄方法および基板洗浄装置 |
| US7810513B1 (en) | 2002-09-30 | 2010-10-12 | Lam Research Corporation | Substrate preparation using megasonic coupling fluid meniscus and methods, apparatus, and systems for implementing the same |
| US7240679B2 (en) | 2002-09-30 | 2007-07-10 | Lam Research Corporation | System for substrate processing with meniscus, vacuum, IPA vapor, drying manifold |
| US7696141B2 (en) * | 2003-06-27 | 2010-04-13 | Lam Research Corporation | Cleaning compound and method and system for using the cleaning compound |
| US7111632B2 (en) | 2003-09-22 | 2006-09-26 | Seagate Technology Llc | Ultrasonic cleaning device for removing undesirable particles from an object |
| JP2006005246A (ja) * | 2004-06-18 | 2006-01-05 | Fujimi Inc | リンス用組成物及びそれを用いたリンス方法 |
| US7560384B2 (en) * | 2005-02-23 | 2009-07-14 | Jsr Corporation | Chemical mechanical polishing method |
| KR101369197B1 (ko) | 2006-01-20 | 2014-03-27 | 아크리온 테크놀로지즈 인코포레이티드 | 평평한 물품을 처리하는 음향 에너지 시스템, 방법 및 장치 |
-
2008
- 2008-10-30 US US12/262,094 patent/US8585825B2/en not_active Expired - Fee Related
-
2009
- 2009-10-14 WO PCT/US2009/005638 patent/WO2010096041A1/en not_active Ceased
- 2009-10-14 CN CN2009801423763A patent/CN102197462B/zh not_active Expired - Fee Related
- 2009-10-14 JP JP2011534486A patent/JP2012507858A/ja not_active Withdrawn
- 2009-10-14 KR KR1020117010010A patent/KR20110079830A/ko not_active Ceased
- 2009-10-23 TW TW098135953A patent/TW201029060A/zh unknown
-
2013
- 2013-10-09 US US14/050,307 patent/US20140034096A1/en not_active Abandoned
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