JP2013186108A5 - - Google Patents

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Publication number
JP2013186108A5
JP2013186108A5 JP2012054188A JP2012054188A JP2013186108A5 JP 2013186108 A5 JP2013186108 A5 JP 2013186108A5 JP 2012054188 A JP2012054188 A JP 2012054188A JP 2012054188 A JP2012054188 A JP 2012054188A JP 2013186108 A5 JP2013186108 A5 JP 2013186108A5
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JP
Japan
Prior art keywords
physical quantity
quantity sensor
sensor module
substrate
module according
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2012054188A
Other languages
English (en)
Japanese (ja)
Other versions
JP5982889B2 (ja
JP2013186108A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2012054188A priority Critical patent/JP5982889B2/ja
Priority claimed from JP2012054188A external-priority patent/JP5982889B2/ja
Publication of JP2013186108A publication Critical patent/JP2013186108A/ja
Publication of JP2013186108A5 publication Critical patent/JP2013186108A5/ja
Application granted granted Critical
Publication of JP5982889B2 publication Critical patent/JP5982889B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

JP2012054188A 2012-03-12 2012-03-12 物理量センサーモジュール及び電子機器 Expired - Fee Related JP5982889B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2012054188A JP5982889B2 (ja) 2012-03-12 2012-03-12 物理量センサーモジュール及び電子機器

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2012054188A JP5982889B2 (ja) 2012-03-12 2012-03-12 物理量センサーモジュール及び電子機器

Publications (3)

Publication Number Publication Date
JP2013186108A JP2013186108A (ja) 2013-09-19
JP2013186108A5 true JP2013186108A5 (2) 2015-04-23
JP5982889B2 JP5982889B2 (ja) 2016-08-31

Family

ID=49387632

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2012054188A Expired - Fee Related JP5982889B2 (ja) 2012-03-12 2012-03-12 物理量センサーモジュール及び電子機器

Country Status (1)

Country Link
JP (1) JP5982889B2 (2)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6373318B2 (ja) * 2016-05-17 2018-08-15 エーエーシー テクノロジーズ ピーティーイー リミテッドＡａｃ Ｔｅｃｈｎｏｌｏｇｉｅｓ Ｐｔｅ．Ｌｔｄ． 圧力センサー
JP6378269B2 (ja) * 2016-05-17 2018-08-22 エーエーシー テクノロジーズ ピーティーイー リミテッドＡａｃ Ｔｅｃｈｎｏｌｏｇｉｅｓ Ｐｔｅ．Ｌｔｄ． 加速度センサー
CN110243343B (zh) 2018-03-09 2022-07-29 精工爱普生株式会社 传感器模块、倾斜仪以及结构物监视装置

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0639335Y2 (ja) * 1988-03-14 1994-10-12 三菱油化株式会社 加速度センサ
JPH0943270A (ja) * 1995-07-26 1997-02-14 Ngk Spark Plug Co Ltd 圧電型力学量センサ
JP2003028892A (ja) * 2001-07-16 2003-01-29 Matsushita Electric Works Ltd 加速度センサ
JP2007040766A (ja) * 2005-08-01 2007-02-15 Toyota Motor Corp センサユニット
JP2007127607A (ja) * 2005-11-07 2007-05-24 Mitsutoyo Corp センサブロック

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