JP2017227657A - 生体分子を特徴付けるためのナノ細孔センサー - Google Patents
生体分子を特徴付けるためのナノ細孔センサー Download PDFInfo
- Publication number
- JP2017227657A JP2017227657A JP2017196050A JP2017196050A JP2017227657A JP 2017227657 A JP2017227657 A JP 2017227657A JP 2017196050 A JP2017196050 A JP 2017196050A JP 2017196050 A JP2017196050 A JP 2017196050A JP 2017227657 A JP2017227657 A JP 2017227657A
- Authority
- JP
- Japan
- Prior art keywords
- graphene
- nanopore
- biomolecule
- dna
- nanopores
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/26—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating electrochemical variables; by using electrolysis or electrophoresis
- G01N27/416—Systems
- G01N27/447—Systems using electrophoresis
- G01N27/44756—Apparatus specially adapted therefor
- G01N27/44791—Microapparatus
-
- C—CHEMISTRY; METALLURGY
- C12—BIOCHEMISTRY; BEER; SPIRITS; WINE; VINEGAR; MICROBIOLOGY; ENZYMOLOGY; MUTATION OR GENETIC ENGINEERING
- C12Q—MEASURING OR TESTING PROCESSES INVOLVING ENZYMES, NUCLEIC ACIDS OR MICROORGANISMS; COMPOSITIONS OR TEST PAPERS THEREFOR; PROCESSES OF PREPARING SUCH COMPOSITIONS; CONDITION-RESPONSIVE CONTROL IN MICROBIOLOGICAL OR ENZYMOLOGICAL PROCESSES
- C12Q1/00—Measuring or testing processes involving enzymes, nucleic acids or microorganisms; Compositions therefor; Processes of preparing such compositions
- C12Q1/68—Measuring or testing processes involving enzymes, nucleic acids or microorganisms; Compositions therefor; Processes of preparing such compositions involving nucleic acids
- C12Q1/6813—Hybridisation assays
- C12Q1/6827—Hybridisation assays for detection of mutation or polymorphism
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/26—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating electrochemical variables; by using electrolysis or electrophoresis
- G01N27/416—Systems
- G01N27/447—Systems using electrophoresis
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N33/00—Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
- G01N33/48—Biological material, e.g. blood, urine; Haemocytometers
- G01N33/483—Physical analysis of biological material
- G01N33/487—Physical analysis of biological material of liquid biological material
- G01N33/48707—Physical analysis of biological material of liquid biological material by electrical means
- G01N33/48721—Investigating individual macromolecules, e.g. by translocation through nanopores
Landscapes
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Molecular Biology (AREA)
- Organic Chemistry (AREA)
- Biomedical Technology (AREA)
- Biochemistry (AREA)
- Immunology (AREA)
- General Health & Medical Sciences (AREA)
- Analytical Chemistry (AREA)
- Wood Science & Technology (AREA)
- Zoology (AREA)
- Proteomics, Peptides & Aminoacids (AREA)
- Biophysics (AREA)
- Pathology (AREA)
- General Physics & Mathematics (AREA)
- General Engineering & Computer Science (AREA)
- Bioinformatics & Cheminformatics (AREA)
- Genetics & Genomics (AREA)
- Biotechnology (AREA)
- Microbiology (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Medicinal Chemistry (AREA)
- Food Science & Technology (AREA)
- Urology & Nephrology (AREA)
- Hematology (AREA)
- Nanotechnology (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Electrochemistry (AREA)
- Dispersion Chemistry (AREA)
- Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
Abstract
Description
で示される回転半径で高次コイル状のボール形であると推測される。ナノ細孔中に捕捉されると、(ii)パートで示されるように伸長及びねじ切り過程が起こる。図3bは、それに対応する、1MのKCl、10mMトリス、1mMのEDTA(pH10.4)中で、400mVの印加電圧でλ−DNAが直径11.3nmの細孔を通過するときにλ−DNAにより誘導された電流遮断を説明する。これらの実験で用いられるλ−DNA濃度は、100ng/μlである。高いpHの緩衝液を用いて、ナノ細孔底部のグラフェン表面と負電荷を有するdsDNA分子との静電的相互作用を最小化する。さらに、Al2O3はこのpH値では負電荷を有するため(Al2O3の等電点は8〜9である)、DNAとは静電的に結合しないと予想されることに留意することも重要である。従って、これらの実験条件により、繰り返し可能なグラフェン−Al2O3ナノ細孔を通るDNAの移動が起こる。
Claims (46)
- 生体分子パラメーターを特徴付けるための方法であって、
導体−誘電体スタックを含む膜中にナノ細孔を設けるステップであって、前記膜が、第一の流体区画と第二の流体区画とを隔てており、前記ナノ細孔が、前記第一の流体区画と前記第二の流体区画とを流体接続しており、前記導体が、グラフェン、又は二硫化モリブデン(MoS2)、ドープシリコン、シリセン若しくは極薄金属の原子レベルの薄さの導電層を含む、ステップと、
前記第一の流体区画に生体分子を供給するステップと、
前記膜全域に電界を印加するステップと、
前記印加された電界下で、前記生体分子を前記ナノ細孔を通って前記第二の流体区画に推進させるステップと、
生体分子がナノ細孔を通過するときに、膜全域で、又は膜によって形成された面で電気的パラメーターをモニターし、それにより前記生体分子パラメーターを特徴付けるステップと、
を含む、方法。 - 前記生体分子パラメーターが、
ポリヌクレオチド配列、
改変されたヌクレオチドの存在、
ポリヌクレオチドのメチル化状態、
ポリヌクレオチドのヒドロキシメチル化状態、
ポリヌクレオチド配列上の1つ又は複数のメチル化又はヒドロキシメチル化部位に結合した、メチル依存性又はヒドロキシメチル依存性の結合タンパク質、
タンパク質−ポリヌクレオチド結合イベントの存在、
ポリペプチド配列、
生体分子の2次構造、及び
アミノ酸配列
からなる群より選択される、請求項1に記載の方法。 - 前記ポリヌクレオチドが、有機又は合成核酸を含む、請求項2に記載の方法。
- 前記導体−誘電体スタックが、隣接するグラフェン層が誘電体層で隔てられている複数のグラフェン層を含む、請求項1に記載の方法。
- 前記グラフェン層の1つ又は複数が、グラフェンマイクロリボン、グラフェンナノリボン、又はグラフェンナノギャップを含み、これを前記ナノ細孔が、前記グラフェンマイクロリボン、グラフェンナノリボン、又はグラフェンナノギャップの長軸方向に対して横方向に通っており、前記方法が、
前記生体分子が前記ナノ細孔を通過する間の、前記グラフェンマイクロリボン若しくはグラフェンナノリボンの、又は前記グラフェンナノギャップの電位又は横方向電流の経時変化を測定し、それにより前記生体分子の配列、組成、流動、持続時間又は長さを特徴付けるステップをさらに含み、前記測定ステップが、移動する生体分子の異なる位置での同時多重測定である、請求項4に記載の方法。 - 前記導電層の1つ又は複数に独立して電気的にバイアスをかけて、前記ナノ細孔の電気的なゲーティングを行うステップをさらに含む、請求項1〜5のいずれか一項に記載の方法。
- 前記バイアスをかけるステップが、グラフェン−誘電体スタックに組込まれた個々のグラフェン層に電極を電気的に接続することによってなされ、前記バイアスをかけるステップが、膜全域に印加された電界によって生じたナノ細孔中の電界を改変する、請求項6に記載の方法。
- 前記誘電体層が、酸化アルミニウム、酸化タンタル、酸化チタン、二酸化ケイ素、酸化ハフニウム、酸化ジルコニウム、窒化ホウ素、窒化ケイ素、それらのナノ積層体、又はそれらの任意の組み合わせを含む、請求項1〜5又は請求項7のいずれか一項に記載の方法。
- 前記電気的パラメーターが、
ナノ細孔を通る電流又は電流遮断、
ナノ細孔のトンネル電流、
横方向の電極を通る電気化学的電流、
コンダクタンス、
抵抗、
インピーダンス、
電位、
前記ナノ細孔を通る前記生体分子の移動時間、及び
生体分子の流動又は移動頻度
からなる群のうち1つ又は複数から選択される、請求項1に記載の方法。 - 露出したナノ細孔グラフェン縁に化学成分を取り付けることによって、ナノ細孔中のグラフェンの露出した縁を機能化するステップをさらに含み、前記化学成分が、生体分子の一部への親和性を有し、前記生体分子の前記一部と相互作用する前記化学成分が、前記生体分子が前記ナノ細孔を通過するときにモニターされる電気的パラメーターを変化させる、請求項1に記載の方法。
- 前記化学成分が、
前記生体分子中の配列に結合する配列を有するタンパク質、ポリペプチド、及びポリヌクレオチド、並びに
ポリヌクレオチドである前記生体分子中の特異的なヌクレオチドへの結合親和性を有する化学的構築物
からなる群より選択される、請求項10に記載の方法。 - 前記生体分子中の前記特異的なヌクレオチドが、前記化学成分と前記特異的なヌクレオチドとの親和性を強化する重原子、化学官能基、又はタグで標識されている、請求項11に記載の方法。
- ポリヌクレオチド配列を有する生体分子と、グラフェン−誘電体スタックに固定されたエキソヌクレアーゼとを接触させることによって、前記生体分子を消化して複数のより小さい配列にし、それにより、消化による配列決定を行うステップをさらに含む、請求項1に記載の方法。
- 前記複数のより小さい配列の少なくとも一部が、個々の塩基に相当する、請求項13に記載の方法。
- 前記ナノ細孔を通過している前記生体分子にヌクレオチドを付加することによってポリヌクレオチド配列を合成し、それにより、合成による配列決定を行うステップをさらに含む、請求項1に記載の方法。
- 前記合成による配列決定が、前記グラフェン−誘電体スタックに固定されたポリメラーゼによってなされ、前記付加されるヌクレオチド及び試薬が、前記第一の流体区画又は前記第二の流体区画におけるヌクレオチド源のものである、請求項15に記載の方法。
- 前記合成による配列決定が、前記細孔を通過している生体分子にヌクレオチドが付加される間に放出されたH+又はピロリン酸を検出するステップをさらに含む、請求項16に記載の方法。
- 前記放出されたH+又はピロリン酸を検出するステップが、ナノ細孔電流の変化を測定することによってなされる、請求項17に記載の方法。
- 前記ナノ細孔が、前記ナノ細孔である内部チャネルを有するタンパク質複合体を含む生物学的なナノ細孔を含み、前記タンパク質が、転写因子、ポリメラーゼ、ヌクレアーゼ、及びヒストンを含むDNA結合タンパク質、アルファ溶血素、マイコバクテリウム・スメグマチスのポリンA及びGP10からなる群より選択される、請求項1に記載の方法。
- 最上部のグラフェン層が、前記第一の流体区画及び/又は前記第二の流体区画中で流体中にあり流体と電気的に接触しており、前記電気的パラメーターが、生体分子が前記細孔を通過するときに、前記第一の流体区画及び/又は前記第二の流体区画中で流体中にあり前記流体と電気的に接触しているグラフェン層によって電気化学的に測定されるものである、請求項1〜5のいずれか一項に記載の方法。
- 前記電気的パラメーターが、前記流体区画中及び前記ナノ細孔中の流体から電気的に絶縁されたグラフェン層による電界効果ゲーティング又は電界効果感知によって測定される、請求項1〜5のいずれか一項に記載の方法。
- 前記生体分子が、二本鎖ポリヌクレオチド配列であり、前記方法が、二本鎖ポリヌクレオチド配列をほどき、二本鎖ポリヌクレオチド配列の一本鎖を前記ナノ細孔を通して推進させ、それにより、前記生体分子の配列決定を行うステップをさらに含む、請求項1に記載の方法。
- 前記ほどくステップが、グラフェン−誘電体スタックに固定されたヘリカーゼによってなされる、請求項22に記載の方法。
- 埋込みグラフェン層が、別のグラフェン層を通る電気化学的電流を測定する、請求項4に記載の方法。
- 膜であって、
第一の表面及び前記第一の表面と反対側の第二の表面であり、前記膜が、前記第一の表面を備える第一の流体区画を前記第二の表面を備える第二の流体区画から隔てている、第一の表面及び第二の表面、
前記第一の表面と前記第二の表面との間に配置されたグラフェン/誘電体/グラフェン/誘電体スタック、並びに
前記第一の区画と前記第二の区画とを流体接続する、前記膜を通るナノ細孔
を備える膜と、
前記膜と電気的に接触して、前記第一の流体区画と前記第二の流体区画との間に電位差をもたらす電源と、
前記第一と第二の流体区画との間の印加される電位差の下で生体分子が前記ナノ細孔を通過するときに前記ナノ細孔を通る電流を検出するための検出器と
を具備する、生体分子パラメーターを特徴付けるための装置。 - 1つ又は複数のゲート電極をさらに具備し、前記1つ又は複数のゲート電極がそれぞれ、前記スタック中のグラフェン層である、請求項25に記載の装置。
- 前記グラフェン層が、前記ナノ細孔のところで3nm以下の厚さを有し、前記電気的な接触部が、前記グラフェン層と電気的に接触した金属パッドを備え、前記金属パッドが、前記第一及び第二の流体区画のいずれもから電気的に隔離されている、請求項26に記載の装置。
- 前記ゲート電極が、前記電源によって電力が供給されるソース電極に電気的に接続されている、請求項27に記載の装置。
- 前記グラフェン層の1つ又は複数がナノリボンを含み、これを前記ナノ細孔が、前記ナノリボンの長軸に対して横方向に通過する、請求項25〜28のいずれか一項に記載の装置。
- 前記ナノリボンが、生体分子が前記ナノ細孔を通過する間に前記ナノリボンの横方向電流を測定するための電気的な接触部をさらに備え、前記グラフェン層の別の層が、前記グラフェン層に電気的にバイアスをかけるためのゲート電極に接続されている、請求項29に記載の装置。
- 前記ナノ細孔が、前記ナノリボンの幅の5%より大きい、又は前記ナノリボンの幅の5%〜95%の範囲から選択される直径を有する、請求項29に記載の装置。
- 前記検出器が、互いに向かい合い、前記ナノ細孔中の生体分子の通過方向に対して横方向に前記ナノ細孔内の中心に配置されたグラフェン電極対を備えるトンネル検出器であり、生体分子が前記電極対の間を通過する、請求項25に記載の装置。
- 生体分子パラメーターを特徴付けるためのナノ細孔を含む膜を製造する方法であって、
前記自立型誘電体膜中に通路を形成するステップと、
前記化学蒸着法でグラフェン層を成長させるステップと、
前記自立型誘電体膜に前記グラフェン層の一部を移動させるステップと、
前記移動したグラフェン層上に誘電体層を形成するステップと、
前記グラフェン層のステップを繰り返して、第二のグラフェン層を作製するステップと、
前記誘電体層を形成するステップを繰り返して、第二の誘電体層を作製するステップと、
前記グラフェン層及び誘電体層それぞれを通る、前記膜の第一の表面から前記膜の第二の表面に伸長するナノ細孔を形成し、それによりグラフェン/誘電体/グラフェン/誘電体スタック中にナノ細孔を含む膜を作製するステップと、
を含む、方法。 - 前記第一のグラフェン層、前記第二のグラフェン層又は前記第一のグラフェン層及び前記第二のグラフェン層の両方を、電気的な接触部と独立して電気的に接触させて、電気的にゲーティングされたナノ細孔を形成するステップをさらに含む、請求項33に記載の方法。
- 前記繰り返しステップを繰り返して、隣接するグラフェン層が誘電体層で隔てられた3つ以上のグラフェン層を作製する、請求項33に記載の方法。
- 前記グラフェン層の1つ又は複数を電気的な接触部と電気的に接触させて、電気的にゲーティングされたナノ細孔を形成するステップをさらに含む、請求項35に記載の方法。
- 前記ナノ細孔膜中にゲート電極を組込んで、前記ナノ細孔中の又は前記ナノ細孔に隣接する局所電界を改変するステップをさらに含む、請求項33に記載の方法。
- 前記組込まれたゲート電極が、前記膜のグラフェン層のいずれかを含む、請求項37に記載の方法。
- 前記誘電体層が、原子層堆積により堆積させた誘電体を含む、請求項33に記載の方法。
- 前記誘電体層が、酸化アルミニウム、酸化タンタル、酸化ハフニウム、酸化ジルコニウム、二酸化ケイ素、若しくは窒化ケイ素、又はそれらの組み合わせを含む、請求項33又は39に記載の方法。
- 前記ナノ細孔で電気的パラメーターを測定するためにホイートストンブリッジ配置で前記グラフェン層を電気的に接続するステップをさらに含み、前記電気的パラメーターが、差動インピーダンス、トンネル電流、抵抗、キャパシタンス、電流又は電圧のうち1つ又は複数である、請求項33に記載の方法。
- AC電圧シグナルで1つ又は複数のグラフェン層に電気的にバイアスをかけるステップをさらに含む、請求項33に記載の方法。
- 中央のグラフェン層と外部グラフェン層との間のインピーダンスをモニターするステップ、又はグラフェン層間のインピーダンス電流又は電圧を測定するステップをさらに含む、請求項42に記載の方法。
- 生体分子のメチル化又はヒドロメチル化の状態を同定する、特徴付ける、又は定量するための方法であって、
第一の流体区画を第二の流体区画から隔てている浮遊膜中にナノ細孔を設けるステップであり、前記膜が、酸化アルミニウム、酸化タンタル、酸化チタン、二酸化ケイ素、酸化ハフニウム、酸化ジルコニウム、窒化ホウ素、窒化ケイ素、グラフェン若しくはそれらのナノ積層体、又はそれらの任意の組み合わせを含む、ステップ、
特異的なタンパク質、オリゴヌクレオチド又は化学的タグを、標的生体分子上のメチル化又はヒドロキシメチル化部位に結合させるステップ、及び
前記第一の流体区画から前記第二の流体区画まで前記膜全域に電界を印加して、生体分子を前記ナノ細孔を通して推進させるステップ
を含む方法。 - 前記生体分子上の前記結合したタンパク質又はタグが、イオン電流、トンネル電流、電圧、コンダクタンス又はインピーダンスの変化をモニターすることによって検出される、請求項44に記載の方法。
- 生体分子が前記ナノ細孔を通過するときに、結合したタンパク質又はタグを生体分子から連続的に切り離すステップをさらに含む、請求項44に記載の方法。
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US201161512095P | 2011-07-27 | 2011-07-27 | |
| US61/512,095 | 2011-07-27 |
Related Parent Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2014522982A Division JP2014521956A (ja) | 2011-07-27 | 2012-07-26 | 生体分子を特徴付けるためのナノ細孔センサー |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2017227657A true JP2017227657A (ja) | 2017-12-28 |
| JP6679106B2 JP6679106B2 (ja) | 2020-04-15 |
Family
ID=47601526
Family Applications (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2014522982A Pending JP2014521956A (ja) | 2011-07-27 | 2012-07-26 | 生体分子を特徴付けるためのナノ細孔センサー |
| JP2017196050A Active JP6679106B2 (ja) | 2011-07-27 | 2017-10-06 | 生体分子を特徴付けるためのナノ細孔センサー |
Family Applications Before (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2014522982A Pending JP2014521956A (ja) | 2011-07-27 | 2012-07-26 | 生体分子を特徴付けるためのナノ細孔センサー |
Country Status (6)
| Country | Link |
|---|---|
| US (2) | US10175195B2 (ja) |
| EP (2) | EP3385992B1 (ja) |
| JP (2) | JP2014521956A (ja) |
| KR (1) | KR102023754B1 (ja) |
| CN (1) | CN104011866B (ja) |
| WO (1) | WO2013016486A1 (ja) |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2020013256A1 (ja) * | 2018-07-11 | 2020-01-16 | 国立大学法人大阪大学 | 流路、流路の製造方法、電極構造体、および、電極構造体の製造方法 |
| WO2020218489A1 (ja) * | 2019-04-26 | 2020-10-29 | 国立大学法人大阪大学 | トンネル電流を使用したマイクロrna解析 |
| KR20210087303A (ko) * | 2020-01-02 | 2021-07-12 | 서강대학교산학협력단 | CRISPR/Cas12a를 이용한 표면증강 라만산란 기반 표적 DNA 검출용 센서 |
| JP2021517647A (ja) * | 2018-04-09 | 2021-07-26 | エフ.ホフマン−ラ ロシュ アーゲーF. Hoffmann−La Roche Aktiengesellschaft | 分子認識のためのナノポアを備えたトンネリング接合の製造 |
| JP2023524575A (ja) * | 2020-05-07 | 2023-06-12 | グラップヒール | アクセスが制限されたエリアにアクセスするための携帯型且つ使い捨て型の装置、関連するアクセスキー生成システム、及び関連するアクセス制御方法 |
| JP2026041720A (ja) * | 2019-08-09 | 2026-03-10 | ナットクラッカー セラピューティクス, インコーポレイテッド | マイクロ流体装置およびその使用方法 |
Families Citing this family (539)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP1919497B1 (en) | 2005-07-22 | 2020-02-12 | The Board of Trustees of the Leland Stanford Junior University | Light-activated cation channel and uses thereof |
| US10052497B2 (en) | 2005-07-22 | 2018-08-21 | The Board Of Trustees Of The Leland Stanford Junior University | System for optical stimulation of target cells |
| US9274099B2 (en) | 2005-07-22 | 2016-03-01 | The Board Of Trustees Of The Leland Stanford Junior University | Screening test drugs to identify their effects on cell membrane voltage-gated ion channel |
| US8926959B2 (en) | 2005-07-22 | 2015-01-06 | The Board Of Trustees Of The Leland Stanford Junior University | System for optical stimulation of target cells |
| US9238150B2 (en) | 2005-07-22 | 2016-01-19 | The Board Of Trustees Of The Leland Stanford Junior University | Optical tissue interface method and apparatus for stimulating cells |
| WO2008086470A1 (en) | 2007-01-10 | 2008-07-17 | The Board Of Trustees Of The Leland Stanford Junior University | System for optical stimulation of target cells |
| US8401609B2 (en) | 2007-02-14 | 2013-03-19 | The Board Of Trustees Of The Leland Stanford Junior University | System, method and applications involving identification of biological circuits such as neurological characteristics |
| WO2008106694A2 (en) | 2007-03-01 | 2008-09-04 | The Board Of Trustees Of The Leland Stanford Junior University | Systems, methods and compositions for optical stimulation of target cells |
| US10434327B2 (en) | 2007-10-31 | 2019-10-08 | The Board Of Trustees Of The Leland Stanford Junior University | Implantable optical stimulators |
| US10035027B2 (en) | 2007-10-31 | 2018-07-31 | The Board Of Trustees Of The Leland Stanford Junior University | Device and method for ultrasonic neuromodulation via stereotactic frame based technique |
| GB0724736D0 (en) | 2007-12-19 | 2008-01-30 | Oxford Nanolabs Ltd | Formation of layers of amphiphilic molecules |
| JP5801188B2 (ja) | 2008-04-23 | 2015-10-28 | ザ ボード オブ トラスティーズ オブ ザ レランド スタンフォード ジュニア ユニバーシティー | 標的細胞を光刺激するためのシステム、方法、および組成物 |
| MY152003A (en) | 2008-05-29 | 2014-08-15 | Univ Leland Stanford Junior | Cell line, system and method for optical control of secondary messengers |
| US9101759B2 (en) | 2008-07-08 | 2015-08-11 | The Board Of Trustees Of The Leland Stanford Junior University | Materials and approaches for optical stimulation of the peripheral nervous system |
| US9650668B2 (en) | 2008-09-03 | 2017-05-16 | Nabsys 2.0 Llc | Use of longitudinally displaced nanoscale electrodes for voltage sensing of biomolecules and other analytes in fluidic channels |
| US8262879B2 (en) | 2008-09-03 | 2012-09-11 | Nabsys, Inc. | Devices and methods for determining the length of biopolymers and distances between probes bound thereto |
| NZ602416A (en) | 2008-11-14 | 2014-08-29 | Univ Leland Stanford Junior | Optically-based stimulation of target cells and modifications thereto |
| US9194838B2 (en) | 2010-03-03 | 2015-11-24 | Osaka University | Method and device for identifying nucleotide, and method and device for determining nucleotide sequence of polynucleotide |
| EP2547762B1 (en) | 2010-03-17 | 2018-04-25 | The Board of Trustees of the Leland Stanford Junior University | Light-sensitive ion-passing molecules |
| WO2011163058A2 (en) | 2010-06-21 | 2011-12-29 | The Board Of Trustees Of The University Of Illinois | Cell mass measurement and apparatus |
| US9475709B2 (en) | 2010-08-25 | 2016-10-25 | Lockheed Martin Corporation | Perforated graphene deionization or desalination |
| US8715933B2 (en) | 2010-09-27 | 2014-05-06 | Nabsys, Inc. | Assay methods using nicking endonucleases |
| EP2635111B1 (en) | 2010-11-05 | 2018-05-23 | The Board of Trustees of the Leland Stanford Junior University | Stabilized step function opsin proteins and methods of using the same |
| US9522288B2 (en) | 2010-11-05 | 2016-12-20 | The Board Of Trustees Of The Leland Stanford Junior University | Upconversion of light for use in optogenetic methods |
| CA2816972C (en) | 2010-11-05 | 2019-12-03 | The Board Of Trustees Of The Leland Stanford Junior University | Control and characterization of memory function |
| WO2012061679A2 (en) | 2010-11-05 | 2012-05-10 | The Board Of Trustees Of The Leland Stanford Junior University | Light-activated chimeric opsins and methods of using the same |
| WO2012061688A1 (en) | 2010-11-05 | 2012-05-10 | The Board Of Trustees Of The Leland Stanford Junior University | Optogenetic control of reward-related behaviors |
| CA2816968C (en) | 2010-11-05 | 2019-11-26 | The Board Of Trustees Of The Leland Stanford Junior University | Optically-controlled cns dysfunction |
| US8859201B2 (en) | 2010-11-16 | 2014-10-14 | Nabsys, Inc. | Methods for sequencing a biomolecule by detecting relative positions of hybridized probes |
| US8696722B2 (en) | 2010-11-22 | 2014-04-15 | The Board Of Trustees Of The Leland Stanford Junior University | Optogenetic magnetic resonance imaging |
| WO2012083249A2 (en) | 2010-12-17 | 2012-06-21 | The Trustees Of Columbia University In The City Of New York | Dna sequencing by synthesis using modified nucleotides and nanopore detection |
| WO2012109574A2 (en) | 2011-02-11 | 2012-08-16 | Nabsys, Inc. | Assay methods using dna binding proteins |
| CN108051578B (zh) | 2011-04-04 | 2020-07-24 | 哈佛大学校长及研究员协会 | 通过局部电位测量进行的纳米孔感测 |
| EP2697394A4 (en) | 2011-04-12 | 2015-01-14 | Electronic Biosciences Inc | CHEMICALLY MODIFIED NANOPORA DEVICES AT A SPECIFIC SITE |
| US20130307029A1 (en) * | 2011-04-19 | 2013-11-21 | Mingsheng Xu | High-Resolution Biosensor |
| US20130023129A1 (en) | 2011-07-20 | 2013-01-24 | Asm America, Inc. | Pressure transmitter for a semiconductor processing environment |
| WO2013074796A1 (en) | 2011-11-15 | 2013-05-23 | The Board Of Trustees Of The University Of Illinois | Thermal control of droplets by nanoscale field effect transistors |
| US20130186758A1 (en) * | 2011-12-09 | 2013-07-25 | University Of Delaware | Current-carrying nanowire having a nanopore for high-sensitivity detection and analysis of biomolecules |
| ES2724803T3 (es) | 2011-12-16 | 2019-09-16 | Univ Leland Stanford Junior | Polipéptidos opsinas y métodos de utilización de los mismos |
| GB201202519D0 (en) | 2012-02-13 | 2012-03-28 | Oxford Nanopore Tech Ltd | Apparatus for supporting an array of layers of amphiphilic molecules and method of forming an array of layers of amphiphilic molecules |
| IN2014DN06796A (ja) | 2012-02-15 | 2015-05-22 | Oxford Nanopore Tech Ltd | |
| CN104363961B (zh) | 2012-02-21 | 2017-10-03 | 斯坦福大学托管董事会 | 用于治疗盆底神经源性病症的组合物和方法 |
| GB201204727D0 (en) * | 2012-03-16 | 2012-05-02 | Base4 Innovation Ltd | Method and apparatus |
| WO2013154999A2 (en) | 2012-04-09 | 2013-10-17 | The Trustees Of Columbia University In The City Of New York | Method of preparation of nanopore and uses thereof |
| US9758821B2 (en) | 2012-04-17 | 2017-09-12 | International Business Machines Corporation | Graphene transistor gated by charges through a nanopore for bio-molecular sensing and DNA sequencing |
| US9835634B2 (en) | 2012-05-17 | 2017-12-05 | The Board Of Trustees Of The University Of Illinois | Coupled heterogeneous devices for pH sensing |
| US10653824B2 (en) | 2012-05-25 | 2020-05-19 | Lockheed Martin Corporation | Two-dimensional materials and uses thereof |
| US9744617B2 (en) | 2014-01-31 | 2017-08-29 | Lockheed Martin Corporation | Methods for perforating multi-layer graphene through ion bombardment |
| US9834809B2 (en) | 2014-02-28 | 2017-12-05 | Lockheed Martin Corporation | Syringe for obtaining nano-sized materials for selective assays and related methods of use |
| US9844757B2 (en) | 2014-03-12 | 2017-12-19 | Lockheed Martin Corporation | Separation membranes formed from perforated graphene and methods for use thereof |
| US10376845B2 (en) | 2016-04-14 | 2019-08-13 | Lockheed Martin Corporation | Membranes with tunable selectivity |
| US9610546B2 (en) | 2014-03-12 | 2017-04-04 | Lockheed Martin Corporation | Separation membranes formed from perforated graphene and methods for use thereof |
| ITTO20120516A1 (it) * | 2012-06-14 | 2013-12-15 | St Microelectronics Srl | Metodo di fabbricazione di un sensore elettrochimico basato su grafene e sensore elettrochimico |
| EP2861998B1 (en) * | 2012-06-18 | 2020-07-22 | Electronic Biosciences Inc. | Cell-free assay device and methods of use |
| EP3674412A1 (en) | 2012-06-20 | 2020-07-01 | The Trustees of Columbia University in the City of New York | Nucleic acid sequencing by nanopore detection of tag molecules |
| EP2912461A2 (en) * | 2012-09-26 | 2015-09-02 | Nabsys, Inc. | Method and system for analysis of protein and other modifications on dna and rna |
| US10876157B2 (en) * | 2012-09-27 | 2020-12-29 | The Trustees Of The University Of Pennsylvania | Insulated nanoelectrode-nanopore devices and related methods |
| US10714315B2 (en) | 2012-10-12 | 2020-07-14 | Asm Ip Holdings B.V. | Semiconductor reaction chamber showerhead |
| US9488614B2 (en) | 2012-10-16 | 2016-11-08 | Abbott Laboratories | Localized desalting systems and methods |
| GB201313121D0 (en) | 2013-07-23 | 2013-09-04 | Oxford Nanopore Tech Ltd | Array of volumes of polar medium |
| US9605309B2 (en) | 2012-11-09 | 2017-03-28 | Genia Technologies, Inc. | Nucleic acid sequencing using tags |
| US9914966B1 (en) | 2012-12-20 | 2018-03-13 | Nabsys 2.0 Llc | Apparatus and methods for analysis of biomolecules using high frequency alternating current excitation |
| US10294516B2 (en) | 2013-01-18 | 2019-05-21 | Nabsys 2.0 Llc | Enhanced probe binding |
| US20160376700A1 (en) | 2013-02-01 | 2016-12-29 | Asm Ip Holding B.V. | System for treatment of deposition reactor |
| WO2014138253A1 (en) * | 2013-03-05 | 2014-09-12 | Arizona Board Of Regents, Acting For And On Behalf Of Arizona State University | Translocation of a polymer through a nanopore |
| JP5904958B2 (ja) | 2013-03-07 | 2016-04-20 | 株式会社東芝 | 半導体マイクロ分析チップ及びその製造方法 |
| JP5951527B2 (ja) * | 2013-03-07 | 2016-07-13 | 株式会社東芝 | 検体検出装置及び検出方法 |
| GB201318465D0 (en) | 2013-10-18 | 2013-12-04 | Oxford Nanopore Tech Ltd | Method |
| TW201504140A (zh) | 2013-03-12 | 2015-02-01 | Lockheed Corp | 形成具有均勻孔尺寸之多孔石墨烯之方法 |
| WO2014144883A1 (en) | 2013-03-15 | 2014-09-18 | The Trustees Of Columbia University In The City Of New York | Raman cluster tagged molecules for biological imaging |
| US10732183B2 (en) | 2013-03-15 | 2020-08-04 | The Trustees Of Columbia University In The City Of New York | Method for detecting multiple predetermined compounds in a sample |
| US9636380B2 (en) | 2013-03-15 | 2017-05-02 | The Board Of Trustees Of The Leland Stanford Junior University | Optogenetic control of inputs to the ventral tegmental area |
| JP6594854B2 (ja) | 2013-03-15 | 2019-10-23 | ザ ボード オブ トラスティーズ オブ ザ レランド スタンフォード ジュニア ユニバーシティー | 行動状態の光遺伝学的制御方法 |
| US9250206B2 (en) | 2013-04-04 | 2016-02-02 | International Business Machines Corporation | Controlled translocation of macromolecules employing a funnel nanopore structure and a gel |
| US10345289B2 (en) | 2013-04-18 | 2019-07-09 | The Board Of Trustees Of The University Of Illinois | Method and apparatus for analyzing a target material |
| US10677752B2 (en) * | 2013-04-18 | 2020-06-09 | The Board Of Trustees Of The University Of Illinois | Method and apparatus analyzing a target material |
| JP6549559B2 (ja) | 2013-04-29 | 2019-07-24 | ザ ボード オブ トラスティーズ オブ ザ レランド スタンフォード ジュニア ユニバーシティー | 標的細胞における活動電位の光遺伝学的調節のための装置、システム及び方法 |
| WO2014190299A2 (en) * | 2013-05-23 | 2014-11-27 | Arizona Board Of Regents Acting For And On Behalf Of Arizona State University | Chemistry, systems and methods of translocation of a polymer through a nanopore |
| AU2014270410B2 (en) * | 2013-05-24 | 2020-07-16 | Illumina Cambridge Limited | Pyrophosphorolytic sequencing |
| US9572918B2 (en) | 2013-06-21 | 2017-02-21 | Lockheed Martin Corporation | Graphene-based filter for isolating a substance from blood |
| WO2014206568A1 (en) * | 2013-06-26 | 2014-12-31 | Universität Konstanz | Direct, programmable detection of epigenetic dna cytosine modifications using tal effectors |
| US9377431B2 (en) * | 2013-07-24 | 2016-06-28 | Globalfoundries Inc. | Heterojunction nanopore for sequencing |
| US9410243B2 (en) | 2013-08-06 | 2016-08-09 | Brookhaven Science Associates, Llc | Method for forming monolayer graphene-boron nitride heterostructures |
| JP6151128B2 (ja) | 2013-08-12 | 2017-06-21 | 株式会社東芝 | 半導体マイクロ分析チップ及びその製造方法 |
| JP6621747B2 (ja) | 2013-08-14 | 2019-12-18 | ザ ボード オブ トラスティーズ オブ ザ レランド スタンフォード ジュニア ユニバーシティー | 疼痛を制御するための組成物及び方法 |
| WO2015025993A1 (ko) * | 2013-08-21 | 2015-02-26 | 나노칩스(주) | 적층 나노리본을 이용한 실시간 분자서열 분석시스템 및 분석방법 |
| KR102144995B1 (ko) * | 2013-09-12 | 2020-08-14 | 삼성전자주식회사 | 그래핀 나노포어를 포함하는 나노포어 소자 및 그 제조 방법 |
| US10058821B2 (en) * | 2013-09-13 | 2018-08-28 | Infineon Technologies Ag | Ion pump |
| EP3047282B1 (en) | 2013-09-18 | 2019-05-15 | Quantum Biosystems Inc. | Biomolecule sequencing devices, systems and methods |
| CN103542941B (zh) * | 2013-09-24 | 2015-12-23 | 北京大学 | 一种高灵敏度的热电子热辐射探测计及其制备方法 |
| WO2015051378A1 (en) * | 2013-10-04 | 2015-04-09 | University Of Washington Through Its Center For Commercialization | Systems and methods for nanopore-based analysis of nucleic acids |
| JP2015077652A (ja) | 2013-10-16 | 2015-04-23 | クオンタムバイオシステムズ株式会社 | ナノギャップ電極およびその製造方法 |
| WO2015077751A1 (en) * | 2013-11-25 | 2015-05-28 | Northeastern University | Freestanding ultra thin membranes and transfer-free fabrication thereof |
| SI3074534T1 (sl) | 2013-11-26 | 2019-08-30 | Illumina, Inc. | Postopki določanja zaporedja polinukleotidov |
| CN106029596A (zh) | 2014-01-31 | 2016-10-12 | 洛克希德马丁公司 | 采用多孔非牺牲性支撑层的二维材料形成复合结构的方法 |
| CN105940479A (zh) | 2014-01-31 | 2016-09-14 | 洛克希德马丁公司 | 使用宽离子场穿孔二维材料 |
| CN103868969B (zh) * | 2014-02-14 | 2016-05-04 | 中国科学院物理研究所 | 一种氮化硼纳米孔传感器及其制造方法 |
| WO2015138405A2 (en) * | 2014-03-10 | 2015-09-17 | The Board Of Trustees Of The University Of Illinois | Detection and quantification of methylation in dna |
| US11015245B2 (en) | 2014-03-19 | 2021-05-25 | Asm Ip Holding B.V. | Gas-phase reactor and system having exhaust plenum and components thereof |
| MA39774A (fr) | 2014-03-24 | 2021-05-12 | Roche Sequencing Solutions Inc | Procédés chimiques pour produire des nucléotides étiquetés |
| US10527579B2 (en) | 2014-03-28 | 2020-01-07 | The Board Of Trustees Of The University Of Illinois | Label free analyte detection by electronic desalting and field effect transistors |
| US10438811B1 (en) | 2014-04-15 | 2019-10-08 | Quantum Biosystems Inc. | Methods for forming nano-gap electrodes for use in nanosensors |
| WO2015170782A1 (en) | 2014-05-08 | 2015-11-12 | Osaka University | Devices, systems and methods for linearization of polymers |
| CN106662568A (zh) * | 2014-05-13 | 2017-05-10 | 韦克福里斯特大学健康学院 | 利用固态纳米孔选择性分析改性的生物分子 |
| US9812604B2 (en) * | 2014-05-30 | 2017-11-07 | Klaus Y. J. Hsu | Photosensing device with graphene |
| US10137150B2 (en) | 2014-06-17 | 2018-11-27 | Elena Molokanova | Graphene and graphene-related materials for manipulation of cell membrane potential |
| US9921181B2 (en) * | 2014-06-26 | 2018-03-20 | International Business Machines Corporation | Detection of translocation events using graphene-based nanopore assemblies |
| US9869658B2 (en) | 2014-07-22 | 2018-01-16 | International Business Machines Corporation | Electronic label free detection of DNA complexes using nanogap |
| US10858737B2 (en) | 2014-07-28 | 2020-12-08 | Asm Ip Holding B.V. | Showerhead assembly and components thereof |
| CA3163156C (en) | 2014-07-31 | 2025-07-08 | Illumina, Inc. | HYBRID NANOPORE SENSORS |
| JP2017534311A (ja) | 2014-09-02 | 2017-11-24 | ロッキード・マーチン・コーポレーション | 二次元膜材料をベースとする血液透析膜および血液濾過膜、ならびにそれを用いた方法 |
| JP6285040B2 (ja) * | 2014-09-11 | 2018-02-28 | 株式会社日立製作所 | 生体分子構造解析用デバイスおよび生体分子構造解析用デバイスの形成方法 |
| US10941490B2 (en) | 2014-10-07 | 2021-03-09 | Asm Ip Holding B.V. | Multiple temperature range susceptor, assembly, reactor and system including the susceptor, and methods of using the same |
| CN104328037A (zh) * | 2014-10-09 | 2015-02-04 | 中国科学院物理研究所 | 一种纳米孔中瞬态电流的补偿方法和补偿电路 |
| US20160100778A1 (en) * | 2014-10-10 | 2016-04-14 | Korea Institute Of Science And Technology | Biosensor and wearable device for detecting bioinformation including hybrid electronic sheet |
| US10480026B2 (en) | 2014-10-17 | 2019-11-19 | Oxford Nanopore Technologies Ltd. | Method for nanopore RNA characterisation |
| CN107002126B (zh) * | 2014-10-24 | 2021-05-25 | 昆塔波尔公司 | 使用纳米结构阵列的聚合物的高效光学分析 |
| CN104713924B (zh) * | 2014-10-27 | 2017-06-20 | 北京航空航天大学 | 一种氧化铝纳米通道薄膜及其制备方法、应用方法 |
| JP6309882B2 (ja) * | 2014-11-21 | 2018-04-11 | 日本電信電話株式会社 | インプレーンダブルゲートトランジスタ |
| US9557294B2 (en) * | 2014-12-19 | 2017-01-31 | Genia Technologies, Inc. | Nanopore-based sequencing with varying voltage stimulus |
| JP6495806B2 (ja) * | 2014-12-26 | 2019-04-03 | 株式会社東芝 | 検体検出方法および検体検出装置 |
| KR102412965B1 (ko) * | 2014-12-30 | 2022-06-24 | 삼성전자주식회사 | 2차원 물질층을 포함하는 전자소자 및 잉크젯 프린팅을 이용한 전자소자의 제조방법 |
| CN107110817B (zh) * | 2014-12-31 | 2019-09-24 | 卡尤迪生物科技(北京)有限公司 | 使用纳米孔和标签的核酸分子检测 |
| WO2016115522A2 (en) | 2015-01-16 | 2016-07-21 | University Of Kentucky Research Foundation | Lipid bilayer-integrated spp1 connector protein nanopore and spp1 connector protein variants for use as lipid bilayer-integrated nanopore |
| CN112816679B (zh) | 2015-02-05 | 2024-05-28 | 哈佛大学校长及研究员协会 | 一种用于感测分子穿过纳米孔的移位的方法 |
| CN104649215B (zh) * | 2015-02-12 | 2016-06-08 | 中国科学院重庆绿色智能技术研究院 | 一种适用于液态环境的纳米结构筛选层及工艺及检测系统 |
| US10276355B2 (en) | 2015-03-12 | 2019-04-30 | Asm Ip Holding B.V. | Multi-zone reactor, system including the reactor, and method of using the same |
| KR101878358B1 (ko) | 2015-04-02 | 2018-07-16 | 한국과학기술연구원 | 하이브리드 전자 시트를 포함하는 압력 센서 및 그를 포함하는 웨어러블 디바이스 |
| MX2017012742A (es) | 2015-04-03 | 2017-11-15 | Abbott Lab | Dispositivos y metodos para el analisis de muestras. |
| EP3278108B1 (en) | 2015-04-03 | 2021-03-17 | Abbott Laboratories | Devices and methods for sample analysis |
| EP3090803B1 (en) | 2015-05-07 | 2019-08-07 | Paris Sciences et Lettres - Quartier Latin | Improved device for the analysis of nucleic acid molecules |
| GB201508003D0 (en) | 2015-05-11 | 2015-06-24 | Oxford Nanopore Tech Ltd | Apparatus and methods for measuring an electrical current |
| GB201508669D0 (en) | 2015-05-20 | 2015-07-01 | Oxford Nanopore Tech Ltd | Methods and apparatus for forming apertures in a solid state membrane using dielectric breakdown |
| US9219402B2 (en) * | 2015-06-11 | 2015-12-22 | Dennis D McCrady | EcoCharge power plant |
| WO2016209654A1 (en) | 2015-06-22 | 2016-12-29 | The Board Of Trustees Of The Leland Stanford Junior University | Methods and devices for imaging and/or optogenetic control of light-responsive neurons |
| CA3021580A1 (en) | 2015-06-25 | 2016-12-29 | Barry L. Merriman | Biomolecular sensors and methods |
| US10458018B2 (en) | 2015-06-26 | 2019-10-29 | Asm Ip Holding B.V. | Structures including metal carbide material, devices including the structures, and methods of forming same |
| WO2017004463A1 (en) | 2015-07-01 | 2017-01-05 | Abbott Laboratories | Devices and methods for sample analysis |
| JP2018528144A (ja) | 2015-08-05 | 2018-09-27 | ロッキード・マーチン・コーポレーション | グラフェン系材料の穿孔可能なシート |
| WO2017023377A1 (en) | 2015-08-06 | 2017-02-09 | Lockheed Martin Corporation | Nanoparticle modification and perforation of graphene |
| WO2017049101A2 (en) * | 2015-09-18 | 2017-03-23 | University Of Kentucky Research Foundation | Protein variants for use as lipid bilayer-integrated nanopore, and methods thereof |
| US10811388B2 (en) | 2015-09-28 | 2020-10-20 | Invensas Corporation | Capacitive coupling in a direct-bonded interface for microelectronic devices |
| US10032751B2 (en) | 2015-09-28 | 2018-07-24 | Invensas Corporation | Ultrathin layer for forming a capacitive interface between joined integrated circuit components |
| US20170107565A1 (en) * | 2015-10-20 | 2017-04-20 | Purdue Research Foundation | Functionalized particles for label-free dna impedimetric biosensor for dna and rna sensing |
| US10211308B2 (en) | 2015-10-21 | 2019-02-19 | Asm Ip Holding B.V. | NbMC layers |
| JP6714924B2 (ja) * | 2015-11-30 | 2020-07-01 | 国立大学法人大阪大学 | サンプル検出用デバイス、サンプル検出装置及びイオン電流の検出方法 |
| US11139308B2 (en) | 2015-12-29 | 2021-10-05 | Asm Ip Holding B.V. | Atomic layer deposition of III-V compounds to form V-NAND devices |
| CA3050062A1 (en) | 2016-01-14 | 2017-07-20 | Roswell Biotechnologies, Inc. | Molecular sensors and related methods |
| US10718737B2 (en) * | 2016-01-21 | 2020-07-21 | Roche Sequencing Solutions, Inc. | Molded flow channel |
| KR101838687B1 (ko) | 2016-01-26 | 2018-03-15 | 한국생명공학연구원 | 나노포어를 이용한 단백질-단백질 상호작용 저해제 스크리닝 방법 |
| EP3408219B1 (en) | 2016-01-28 | 2022-08-17 | Roswell Biotechnologies, Inc | Massively parallel dna sequencing apparatus |
| JP7280590B2 (ja) | 2016-01-28 | 2023-05-24 | ロズウェル バイオテクノロジーズ,インコーポレイテッド | 大スケールの分子電子工学センサアレイを使用する被分析物を測定するための方法および装置 |
| US10737263B2 (en) | 2016-02-09 | 2020-08-11 | Roswell Biotechnologies, Inc. | Electronic label-free DNA and genome sequencing |
| WO2017138149A1 (ja) * | 2016-02-12 | 2017-08-17 | 株式会社日立製作所 | 溶液槽デバイス |
| US10529554B2 (en) | 2016-02-19 | 2020-01-07 | Asm Ip Holding B.V. | Method for forming silicon nitride film selectively on sidewalls or flat surfaces of trenches |
| US10597767B2 (en) | 2016-02-22 | 2020-03-24 | Roswell Biotechnologies, Inc. | Nanoparticle fabrication |
| US10438662B2 (en) | 2016-02-29 | 2019-10-08 | Iridia, Inc. | Methods, compositions, and devices for information storage |
| CN105779279A (zh) * | 2016-02-29 | 2016-07-20 | 东南大学 | 一种基于二维层状材料的纳米孔传感器件及其构建方法 |
| US10859562B2 (en) | 2016-02-29 | 2020-12-08 | Iridia, Inc. | Methods, compositions, and devices for information storage |
| US10640822B2 (en) | 2016-02-29 | 2020-05-05 | Iridia, Inc. | Systems and methods for writing, reading, and controlling data stored in a polymer |
| US10343920B2 (en) | 2016-03-18 | 2019-07-09 | Asm Ip Holding B.V. | Aligned carbon nanotubes |
| CN105883838B (zh) * | 2016-03-31 | 2018-08-21 | 北京大学 | 单层云母片及其纳米孔电子器件的制备方法和应用 |
| EP3442697A4 (en) | 2016-04-14 | 2020-03-18 | Lockheed Martin Corporation | SELECTIVE INTERFACE REDUCTION OF GRAPH DEFECTS |
| EP3442786A4 (en) | 2016-04-14 | 2020-03-18 | Lockheed Martin Corporation | TWO-DIMENSIONAL MEMBRANE STRUCTURES HAVING FLOW PASSAGES |
| EP3442739A4 (en) | 2016-04-14 | 2020-03-04 | Lockheed Martin Corporation | PROCESS FOR PROCESSING GRAPHENE SHEETS FOR LARGE SCALE TRANSFER USING A FREE FLOATING PROCESS |
| KR20180133430A (ko) | 2016-04-14 | 2018-12-14 | 록히드 마틴 코포레이션 | 결함 형성 또는 힐링의 인 시츄 모니터링 및 제어를 위한 방법 |
| WO2017180134A1 (en) | 2016-04-14 | 2017-10-19 | Lockheed Martin Corporation | Methods for in vivo and in vitro use of graphene and other two-dimensional materials |
| KR20190075010A (ko) | 2016-04-27 | 2019-06-28 | 퀀텀 바이오시스템즈 가부시키가이샤 | 생체분자의 측정 및 시퀀싱을 위한 시스템 및 방법 |
| US10367080B2 (en) | 2016-05-02 | 2019-07-30 | Asm Ip Holding B.V. | Method of forming a germanium oxynitride film |
| CN105820947B (zh) * | 2016-05-13 | 2018-04-10 | 北京交通大学 | Dna测序装置及使用方法 |
| CN105838592B (zh) * | 2016-05-13 | 2018-04-10 | 北京交通大学 | Dna测序装置及制作方法 |
| US11453943B2 (en) | 2016-05-25 | 2022-09-27 | Asm Ip Holding B.V. | Method for forming carbon-containing silicon/metal oxide or nitride film by ALD using silicon precursor and hydrocarbon precursor |
| US10612137B2 (en) | 2016-07-08 | 2020-04-07 | Asm Ip Holdings B.V. | Organic reactants for atomic layer deposition |
| US9859151B1 (en) | 2016-07-08 | 2018-01-02 | Asm Ip Holding B.V. | Selective film deposition method to form air gaps |
| GB201612458D0 (en) | 2016-07-14 | 2016-08-31 | Howorka Stefan And Pugh Genevieve | Membrane spanning DNA nanopores for molecular transport |
| US10669579B2 (en) * | 2016-07-15 | 2020-06-02 | International Business Machines Corporation | DNA sequencing with stacked nanopores |
| US9829456B1 (en) | 2016-07-26 | 2017-11-28 | Roswell Biotechnologies, Inc. | Method of making a multi-electrode structure usable in molecular sensing devices |
| KR102532607B1 (ko) | 2016-07-28 | 2023-05-15 | 에이에스엠 아이피 홀딩 비.브이. | 기판 가공 장치 및 그 동작 방법 |
| US9887082B1 (en) | 2016-07-28 | 2018-02-06 | Asm Ip Holding B.V. | Method and apparatus for filling a gap |
| US9812320B1 (en) | 2016-07-28 | 2017-11-07 | Asm Ip Holding B.V. | Method and apparatus for filling a gap |
| CN106244712B (zh) * | 2016-08-31 | 2019-11-19 | 北京大学 | Dna测序方法 |
| EP3523640B1 (en) | 2016-10-05 | 2023-01-18 | Abbott Laboratories | Devices for sample analysis |
| EP3532843B1 (en) * | 2016-10-26 | 2020-11-18 | F. Hoffmann-La Roche AG | Multi-chip packaging of integrated circuits and flow cells for nanopore sequencing |
| US11532757B2 (en) | 2016-10-27 | 2022-12-20 | Asm Ip Holding B.V. | Deposition of charge trapping layers |
| US10714350B2 (en) | 2016-11-01 | 2020-07-14 | ASM IP Holdings, B.V. | Methods for forming a transition metal niobium nitride film on a substrate by atomic layer deposition and related semiconductor device structures |
| KR102592145B1 (ko) * | 2016-11-02 | 2023-10-20 | 삼성전자주식회사 | 멀티스택 그래핀 구조와 이를 포함하는 디바이스 |
| KR102546317B1 (ko) | 2016-11-15 | 2023-06-21 | 에이에스엠 아이피 홀딩 비.브이. | 기체 공급 유닛 및 이를 포함하는 기판 처리 장치 |
| EP3545076A4 (en) * | 2016-11-22 | 2020-07-29 | Roswell Biotechnologies, Inc | NUCLEIC ACID SEQUENCING DEVICE CONTAINING GRAPHEN |
| US10381107B2 (en) * | 2016-12-05 | 2019-08-13 | Government Of The United States Of America, As Represented By The Secretary Of Commerce | Nucleic acid sequencer for electrically determining a sequence of nitrogenous bases in a single stranded nucleic acid |
| US11127590B2 (en) | 2016-12-05 | 2021-09-21 | The Regents Of The University Of California | Method for ALD deposition on inert surfaces via Al2O3 nanoparticles |
| KR102762543B1 (ko) | 2016-12-14 | 2025-02-05 | 에이에스엠 아이피 홀딩 비.브이. | 기판 처리 장치 |
| US11581186B2 (en) | 2016-12-15 | 2023-02-14 | Asm Ip Holding B.V. | Sequential infiltration synthesis apparatus |
| US11447861B2 (en) | 2016-12-15 | 2022-09-20 | Asm Ip Holding B.V. | Sequential infiltration synthesis apparatus and a method of forming a patterned structure |
| KR102700194B1 (ko) | 2016-12-19 | 2024-08-28 | 에이에스엠 아이피 홀딩 비.브이. | 기판 처리 장치 |
| US10269558B2 (en) | 2016-12-22 | 2019-04-23 | Asm Ip Holding B.V. | Method of forming a structure on a substrate |
| CN106770482A (zh) * | 2016-12-28 | 2017-05-31 | 电子科技大学 | 一种用于检测氨基酸分子的GeSi core/shell纳米器件 |
| WO2018132457A1 (en) | 2017-01-10 | 2018-07-19 | Roswell Biotechnologies, Inc. | Methods and systems for dna data storage |
| US11390950B2 (en) | 2017-01-10 | 2022-07-19 | Asm Ip Holding B.V. | Reactor system and method to reduce residue buildup during a film deposition process |
| CN110520517A (zh) | 2017-01-19 | 2019-11-29 | 罗斯威尔生命技术公司 | 包括二维层材料的固态测序装置 |
| US10468261B2 (en) | 2017-02-15 | 2019-11-05 | Asm Ip Holding B.V. | Methods for forming a metallic film on a substrate by cyclical deposition and related semiconductor device structures |
| US10529563B2 (en) | 2017-03-29 | 2020-01-07 | Asm Ip Holdings B.V. | Method for forming doped metal oxide films on a substrate by cyclical deposition and related semiconductor device structures |
| US11294165B2 (en) | 2017-03-30 | 2022-04-05 | The Board Of Trustees Of The Leland Stanford Junior University | Modular, electro-optical device for increasing the imaging field of view using time-sequential capture |
| US10508296B2 (en) | 2017-04-25 | 2019-12-17 | Roswell Biotechnologies, Inc. | Enzymatic circuits for molecular sensors |
| KR102879682B1 (ko) | 2017-04-25 | 2025-10-30 | 로스웰 엠이 아이엔씨. | 분자 센서들을 위한 효소 회로들 |
| US10770286B2 (en) | 2017-05-08 | 2020-09-08 | Asm Ip Holdings B.V. | Methods for selectively forming a silicon nitride film on a substrate and related semiconductor device structures |
| CA3057155A1 (en) | 2017-05-09 | 2018-11-15 | Roswell Biotechnologies, Inc. | Binding probe circuits for molecular sensors |
| KR102076592B1 (ko) * | 2017-05-25 | 2020-02-13 | 가천대학교 산학협력단 | 나노기공 센서를 사용한 dna 농도 측정 장치 및 방법 |
| US12040200B2 (en) | 2017-06-20 | 2024-07-16 | Asm Ip Holding B.V. | Semiconductor processing apparatus and methods for calibrating a semiconductor processing apparatus |
| US11306395B2 (en) | 2017-06-28 | 2022-04-19 | Asm Ip Holding B.V. | Methods for depositing a transition metal nitride film on a substrate by atomic layer deposition and related deposition apparatus |
| KR20190009245A (ko) | 2017-07-18 | 2019-01-28 | 에이에스엠 아이피 홀딩 비.브이. | 반도체 소자 구조물 형성 방법 및 관련된 반도체 소자 구조물 |
| US11018002B2 (en) | 2017-07-19 | 2021-05-25 | Asm Ip Holding B.V. | Method for selectively depositing a Group IV semiconductor and related semiconductor device structures |
| US11374112B2 (en) | 2017-07-19 | 2022-06-28 | Asm Ip Holding B.V. | Method for depositing a group IV semiconductor and related semiconductor device structures |
| US10541333B2 (en) | 2017-07-19 | 2020-01-21 | Asm Ip Holding B.V. | Method for depositing a group IV semiconductor and related semiconductor device structures |
| US10590535B2 (en) | 2017-07-26 | 2020-03-17 | Asm Ip Holdings B.V. | Chemical treatment, deposition and/or infiltration apparatus and method for using the same |
| TWI815813B (zh) | 2017-08-04 | 2023-09-21 | 荷蘭商Asm智慧財產控股公司 | 用於分配反應腔內氣體的噴頭總成 |
| US10692741B2 (en) | 2017-08-08 | 2020-06-23 | Asm Ip Holdings B.V. | Radiation shield |
| US10770336B2 (en) | 2017-08-08 | 2020-09-08 | Asm Ip Holding B.V. | Substrate lift mechanism and reactor including same |
| US11139191B2 (en) | 2017-08-09 | 2021-10-05 | Asm Ip Holding B.V. | Storage apparatus for storing cassettes for substrates and processing apparatus equipped therewith |
| US11769682B2 (en) | 2017-08-09 | 2023-09-26 | Asm Ip Holding B.V. | Storage apparatus for storing cassettes for substrates and processing apparatus equipped therewith |
| US10900067B2 (en) | 2017-08-23 | 2021-01-26 | The Board Of Trustees Of The University Of Illinois | Nucleic acid nanoparticles for analyte detection |
| US11830730B2 (en) | 2017-08-29 | 2023-11-28 | Asm Ip Holding B.V. | Layer forming method and apparatus |
| US11056344B2 (en) | 2017-08-30 | 2021-07-06 | Asm Ip Holding B.V. | Layer forming method |
| KR102491945B1 (ko) | 2017-08-30 | 2023-01-26 | 에이에스엠 아이피 홀딩 비.브이. | 기판 처리 장치 |
| US11295980B2 (en) | 2017-08-30 | 2022-04-05 | Asm Ip Holding B.V. | Methods for depositing a molybdenum metal film over a dielectric surface of a substrate by a cyclical deposition process and related semiconductor device structures |
| EP3676389A4 (en) | 2017-08-30 | 2021-06-02 | Roswell Biotechnologies, Inc | PROCESSIVE ENZYMATIC MOLECULAR ELECTRONIC SENSORS FOR STORING DNA DATA |
| CN109427986A (zh) * | 2017-09-01 | 2019-03-05 | Tcl集团股份有限公司 | 非金属元素掺杂的金属硫族化合物及其制备方法和应用 |
| TW201928340A (zh) * | 2017-09-27 | 2019-07-16 | 日商量子生物系統公司 | 奈米電極裝置及其製造方法 |
| US10658205B2 (en) | 2017-09-28 | 2020-05-19 | Asm Ip Holdings B.V. | Chemical dispensing apparatus and methods for dispensing a chemical to a reaction chamber |
| US11041844B2 (en) | 2017-09-29 | 2021-06-22 | Palogen, Inc. | Nanopore device and method of manufacturing same |
| WO2019068015A1 (en) | 2017-09-29 | 2019-04-04 | Theoremdx Inc. | METHODS, DEVICES AND SYSTEMS FOR DETECTION OF ANALYTES |
| US10403504B2 (en) | 2017-10-05 | 2019-09-03 | Asm Ip Holding B.V. | Method for selectively depositing a metallic film on a substrate |
| WO2019071142A1 (en) | 2017-10-06 | 2019-04-11 | The Board Of Trustees Of The University Of Illinois | DETECTION OF BIOMARKERS IN FLUID SAMPLES |
| EP3694990A4 (en) | 2017-10-10 | 2022-06-15 | Roswell Biotechnologies, Inc. | METHODS, DEVICE AND SYSTEMS FOR AMPLIFICATION-FREE DNA DATA STORAGE |
| US10923344B2 (en) | 2017-10-30 | 2021-02-16 | Asm Ip Holding B.V. | Methods for forming a semiconductor structure and related semiconductor structures |
| US11131646B2 (en) * | 2017-11-03 | 2021-09-28 | Robert Bosch Gmbh | Electrochemical sequencing of DNA using an edge electrode |
| US11022879B2 (en) | 2017-11-24 | 2021-06-01 | Asm Ip Holding B.V. | Method of forming an enhanced unexposed photoresist layer |
| TWI791689B (zh) | 2017-11-27 | 2023-02-11 | 荷蘭商Asm智慧財產控股私人有限公司 | 包括潔淨迷你環境之裝置 |
| JP7214724B2 (ja) | 2017-11-27 | 2023-01-30 | エーエスエム アイピー ホールディング ビー.ブイ. | バッチ炉で利用されるウェハカセットを収納するための収納装置 |
| GB2568895B (en) | 2017-11-29 | 2021-10-27 | Oxford Nanopore Tech Ltd | Microfluidic device |
| JP6959121B2 (ja) * | 2017-12-05 | 2021-11-02 | 株式会社日立ハイテク | 孔形成方法及び孔形成装置 |
| US11067561B2 (en) | 2017-12-31 | 2021-07-20 | Palogen, Inc. | Nanopore device and methods of electrical array addressing and sensing |
| CN108300805A (zh) * | 2018-01-15 | 2018-07-20 | 成都齐碳科技有限公司 | 一种确认生命体的方法 |
| US10872771B2 (en) | 2018-01-16 | 2020-12-22 | Asm Ip Holding B. V. | Method for depositing a material film on a substrate within a reaction chamber by a cyclical deposition process and related device structures |
| TWI799494B (zh) | 2018-01-19 | 2023-04-21 | 荷蘭商Asm 智慧財產控股公司 | 沈積方法 |
| KR102695659B1 (ko) | 2018-01-19 | 2024-08-14 | 에이에스엠 아이피 홀딩 비.브이. | 플라즈마 보조 증착에 의해 갭 충진 층을 증착하는 방법 |
| US11081345B2 (en) | 2018-02-06 | 2021-08-03 | Asm Ip Holding B.V. | Method of post-deposition treatment for silicon oxide film |
| US11685991B2 (en) | 2018-02-14 | 2023-06-27 | Asm Ip Holding B.V. | Method for depositing a ruthenium-containing film on a substrate by a cyclical deposition process |
| US10896820B2 (en) | 2018-02-14 | 2021-01-19 | Asm Ip Holding B.V. | Method for depositing a ruthenium-containing film on a substrate by a cyclical deposition process |
| US10731249B2 (en) | 2018-02-15 | 2020-08-04 | Asm Ip Holding B.V. | Method of forming a transition metal containing film on a substrate by a cyclical deposition process, a method for supplying a transition metal halide compound to a reaction chamber, and related vapor deposition apparatus |
| NZ759671A (en) * | 2018-02-16 | 2022-07-01 | Illumina Inc | Device for sequencing |
| KR102636427B1 (ko) | 2018-02-20 | 2024-02-13 | 에이에스엠 아이피 홀딩 비.브이. | 기판 처리 방법 및 장치 |
| US10975470B2 (en) | 2018-02-23 | 2021-04-13 | Asm Ip Holding B.V. | Apparatus for detecting or monitoring for a chemical precursor in a high temperature environment |
| US11473195B2 (en) | 2018-03-01 | 2022-10-18 | Asm Ip Holding B.V. | Semiconductor processing apparatus and a method for processing a substrate |
| CN108279312B (zh) * | 2018-03-08 | 2021-06-01 | 冯建东 | 一种基于纳米孔的蛋白质组学分析装置及血清检测方法及应用 |
| US11629406B2 (en) | 2018-03-09 | 2023-04-18 | Asm Ip Holding B.V. | Semiconductor processing apparatus comprising one or more pyrometers for measuring a temperature of a substrate during transfer of the substrate |
| US11114283B2 (en) | 2018-03-16 | 2021-09-07 | Asm Ip Holding B.V. | Reactor, system including the reactor, and methods of manufacturing and using same |
| KR102646467B1 (ko) | 2018-03-27 | 2024-03-11 | 에이에스엠 아이피 홀딩 비.브이. | 기판 상에 전극을 형성하는 방법 및 전극을 포함하는 반도체 소자 구조 |
| US11230766B2 (en) | 2018-03-29 | 2022-01-25 | Asm Ip Holding B.V. | Substrate processing apparatus and method |
| US11088002B2 (en) | 2018-03-29 | 2021-08-10 | Asm Ip Holding B.V. | Substrate rack and a substrate processing system and method |
| KR102600229B1 (ko) | 2018-04-09 | 2023-11-10 | 에이에스엠 아이피 홀딩 비.브이. | 기판 지지 장치, 이를 포함하는 기판 처리 장치 및 기판 처리 방법 |
| TWI843623B (zh) | 2018-05-08 | 2024-05-21 | 荷蘭商Asm Ip私人控股有限公司 | 藉由循環沉積製程於基板上沉積氧化物膜之方法及相關裝置結構 |
| US12025484B2 (en) | 2018-05-08 | 2024-07-02 | Asm Ip Holding B.V. | Thin film forming method |
| US12272527B2 (en) | 2018-05-09 | 2025-04-08 | Asm Ip Holding B.V. | Apparatus for use with hydrogen radicals and method of using same |
| KR102082694B1 (ko) * | 2018-05-09 | 2020-02-28 | 한국과학기술연구원 | 그래핀 적용 대상의 표면에 그래핀을 직접 합성하는 방법 및 상기 방법을 이용하여 형성된 그래핀을 포함하는 소자 |
| AU2019270160B2 (en) | 2018-05-16 | 2024-09-19 | Catalog Technologies, Inc. | Printer-finisher system for data storage in DNA |
| CN108680344B (zh) * | 2018-05-23 | 2020-04-03 | 中国科学技术大学 | 一种含百纳米尺寸通孔的光学高分辨率测试靶的制造方法 |
| GB2574048B (en) | 2018-05-24 | 2021-06-16 | Oxford Nanopore Tech Ltd | Nanopore sensor component with electrostatic discharge protection |
| KR102596988B1 (ko) | 2018-05-28 | 2023-10-31 | 에이에스엠 아이피 홀딩 비.브이. | 기판 처리 방법 및 그에 의해 제조된 장치 |
| US11718913B2 (en) | 2018-06-04 | 2023-08-08 | Asm Ip Holding B.V. | Gas distribution system and reactor system including same |
| TWI840362B (zh) | 2018-06-04 | 2024-05-01 | 荷蘭商Asm Ip私人控股有限公司 | 水氣降低的晶圓處置腔室 |
| US11286562B2 (en) | 2018-06-08 | 2022-03-29 | Asm Ip Holding B.V. | Gas-phase chemical reactor and method of using same |
| US11099170B2 (en) | 2018-06-13 | 2021-08-24 | The Board Of Trustees Of The University Of Illinois | Parallel DNA detection by solid-state multi-pore systems and associated methods |
| KR102568797B1 (ko) | 2018-06-21 | 2023-08-21 | 에이에스엠 아이피 홀딩 비.브이. | 기판 처리 시스템 |
| US10797133B2 (en) | 2018-06-21 | 2020-10-06 | Asm Ip Holding B.V. | Method for depositing a phosphorus doped silicon arsenide film and related semiconductor device structures |
| US11499222B2 (en) | 2018-06-27 | 2022-11-15 | Asm Ip Holding B.V. | Cyclic deposition methods for forming metal-containing material and films and structures including the metal-containing material |
| TWI871083B (zh) | 2018-06-27 | 2025-01-21 | 荷蘭商Asm Ip私人控股有限公司 | 用於形成含金屬材料之循環沉積製程 |
| US10612136B2 (en) | 2018-06-29 | 2020-04-07 | ASM IP Holding, B.V. | Temperature-controlled flange and reactor system including same |
| US10755922B2 (en) | 2018-07-03 | 2020-08-25 | Asm Ip Holding B.V. | Method for depositing silicon-free carbon-containing film as gap-fill layer by pulse plasma-assisted deposition |
| US10388513B1 (en) | 2018-07-03 | 2019-08-20 | Asm Ip Holding B.V. | Method for depositing silicon-free carbon-containing film as gap-fill layer by pulse plasma-assisted deposition |
| KR102826391B1 (ko) * | 2018-07-27 | 2025-06-26 | 팔로젠 인코포레이티드 | 나노포어 디바이스 및 이를 사용하여 하전된 입자들을 검출하는 방법 |
| GB201812615D0 (en) | 2018-08-02 | 2018-09-19 | Ucl Business Plc | Membrane bound nucleic acid nanopores |
| US11053591B2 (en) | 2018-08-06 | 2021-07-06 | Asm Ip Holding B.V. | Multi-port gas injection system and reactor system including same |
| US10829852B2 (en) * | 2018-08-16 | 2020-11-10 | Asm Ip Holding B.V. | Gas distribution device for a wafer processing apparatus |
| US11430674B2 (en) | 2018-08-22 | 2022-08-30 | Asm Ip Holding B.V. | Sensor array, apparatus for dispensing a vapor phase reactant to a reaction chamber and related methods |
| JP2020031557A (ja) * | 2018-08-28 | 2020-03-05 | 株式会社日立ハイテクノロジーズ | 生体分子分析装置 |
| US11024523B2 (en) | 2018-09-11 | 2021-06-01 | Asm Ip Holding B.V. | Substrate processing apparatus and method |
| KR102707956B1 (ko) | 2018-09-11 | 2024-09-19 | 에이에스엠 아이피 홀딩 비.브이. | 박막 증착 방법 |
| US11049751B2 (en) | 2018-09-14 | 2021-06-29 | Asm Ip Holding B.V. | Cassette supply system to store and handle cassettes and processing apparatus equipped therewith |
| CN110970344B (zh) | 2018-10-01 | 2024-10-25 | Asmip控股有限公司 | 衬底保持设备、包含所述设备的系统及其使用方法 |
| US11232963B2 (en) | 2018-10-03 | 2022-01-25 | Asm Ip Holding B.V. | Substrate processing apparatus and method |
| KR102592699B1 (ko) | 2018-10-08 | 2023-10-23 | 에이에스엠 아이피 홀딩 비.브이. | 기판 지지 유닛 및 이를 포함하는 박막 증착 장치와 기판 처리 장치 |
| CN109306317A (zh) * | 2018-10-08 | 2019-02-05 | 天津大学 | 多层薄膜结构以及基于其的dna测序器件和测序方法 |
| KR102605121B1 (ko) | 2018-10-19 | 2023-11-23 | 에이에스엠 아이피 홀딩 비.브이. | 기판 처리 장치 및 기판 처리 방법 |
| KR102546322B1 (ko) | 2018-10-19 | 2023-06-21 | 에이에스엠 아이피 홀딩 비.브이. | 기판 처리 장치 및 기판 처리 방법 |
| USD948463S1 (en) | 2018-10-24 | 2022-04-12 | Asm Ip Holding B.V. | Susceptor for semiconductor substrate supporting apparatus |
| US12378665B2 (en) | 2018-10-26 | 2025-08-05 | Asm Ip Holding B.V. | High temperature coatings for a preclean and etch apparatus and related methods |
| US11249067B2 (en) * | 2018-10-29 | 2022-02-15 | Applied Materials, Inc. | Nanopore flow cells and methods of fabrication |
| US11175260B2 (en) | 2018-10-30 | 2021-11-16 | International Business Machines Corporation | Adjusting nanopore diameter in situ for molecule characterization |
| US11087997B2 (en) | 2018-10-31 | 2021-08-10 | Asm Ip Holding B.V. | Substrate processing apparatus for processing substrates |
| KR102748291B1 (ko) | 2018-11-02 | 2024-12-31 | 에이에스엠 아이피 홀딩 비.브이. | 기판 지지 유닛 및 이를 포함하는 기판 처리 장치 |
| US11572620B2 (en) | 2018-11-06 | 2023-02-07 | Asm Ip Holding B.V. | Methods for selectively depositing an amorphous silicon film on a substrate |
| US11031242B2 (en) | 2018-11-07 | 2021-06-08 | Asm Ip Holding B.V. | Methods for depositing a boron doped silicon germanium film |
| US10847366B2 (en) | 2018-11-16 | 2020-11-24 | Asm Ip Holding B.V. | Methods for depositing a transition metal chalcogenide film on a substrate by a cyclical deposition process |
| US10818758B2 (en) | 2018-11-16 | 2020-10-27 | Asm Ip Holding B.V. | Methods for forming a metal silicate film on a substrate in a reaction chamber and related semiconductor device structures |
| CN109455662B (zh) * | 2018-11-26 | 2020-07-03 | 广东工业大学 | 一种固态纳米孔结构 |
| US12040199B2 (en) | 2018-11-28 | 2024-07-16 | Asm Ip Holding B.V. | Substrate processing apparatus for processing substrates |
| US11217444B2 (en) | 2018-11-30 | 2022-01-04 | Asm Ip Holding B.V. | Method for forming an ultraviolet radiation responsive metal oxide-containing film |
| KR102636428B1 (ko) | 2018-12-04 | 2024-02-13 | 에이에스엠 아이피 홀딩 비.브이. | 기판 처리 장치를 세정하는 방법 |
| US11158513B2 (en) | 2018-12-13 | 2021-10-26 | Asm Ip Holding B.V. | Methods for forming a rhenium-containing film on a substrate by a cyclical deposition process and related semiconductor device structures |
| JP7504584B2 (ja) | 2018-12-14 | 2024-06-24 | エーエスエム・アイピー・ホールディング・ベー・フェー | 窒化ガリウムの選択的堆積を用いてデバイス構造体を形成する方法及びそのためのシステム |
| TWI866480B (zh) | 2019-01-17 | 2024-12-11 | 荷蘭商Asm Ip 私人控股有限公司 | 藉由循環沈積製程於基板上形成含過渡金屬膜之方法 |
| KR102727227B1 (ko) | 2019-01-22 | 2024-11-07 | 에이에스엠 아이피 홀딩 비.브이. | 기판 처리 장치 |
| CN109775659A (zh) * | 2019-01-28 | 2019-05-21 | 中国科学院微电子研究所 | 纳米孔结构、控制纳米孔大小的装置及方法 |
| CN111524788B (zh) | 2019-02-01 | 2023-11-24 | Asm Ip私人控股有限公司 | 氧化硅的拓扑选择性膜形成的方法 |
| WO2020160559A1 (en) * | 2019-02-01 | 2020-08-06 | Northeastern University | Mxene nanopore sequencer of biopolymers |
| US20220106638A1 (en) * | 2019-02-08 | 2022-04-07 | Universal Sequencing Technology Corporation | Peptide Nanostructure for Biopolymer Sensing |
| TWI845607B (zh) | 2019-02-20 | 2024-06-21 | 荷蘭商Asm Ip私人控股有限公司 | 用來填充形成於基材表面內之凹部的循環沉積方法及設備 |
| KR102626263B1 (ko) | 2019-02-20 | 2024-01-16 | 에이에스엠 아이피 홀딩 비.브이. | 처리 단계를 포함하는 주기적 증착 방법 및 이를 위한 장치 |
| TWI873122B (zh) | 2019-02-20 | 2025-02-21 | 荷蘭商Asm Ip私人控股有限公司 | 填充一基板之一表面內所形成的一凹槽的方法、根據其所形成之半導體結構、及半導體處理設備 |
| KR20200102357A (ko) | 2019-02-20 | 2020-08-31 | 에이에스엠 아이피 홀딩 비.브이. | 3-d nand 응용의 플러그 충진체 증착용 장치 및 방법 |
| TWI842826B (zh) | 2019-02-22 | 2024-05-21 | 荷蘭商Asm Ip私人控股有限公司 | 基材處理設備及處理基材之方法 |
| CN109852678B (zh) * | 2019-03-01 | 2024-11-12 | 天津大学 | 基于碳纳米管和单链dna缠绕结构的dna测序方法 |
| KR102782593B1 (ko) | 2019-03-08 | 2025-03-14 | 에이에스엠 아이피 홀딩 비.브이. | SiOC 층을 포함한 구조체 및 이의 형성 방법 |
| KR102762833B1 (ko) | 2019-03-08 | 2025-02-04 | 에이에스엠 아이피 홀딩 비.브이. | SiOCN 층을 포함한 구조체 및 이의 형성 방법 |
| KR102858005B1 (ko) | 2019-03-08 | 2025-09-09 | 에이에스엠 아이피 홀딩 비.브이. | 실리콘 질화물 층을 선택적으로 증착하는 방법, 및 선택적으로 증착된 실리콘 질화물 층을 포함하는 구조체 |
| JP7492200B2 (ja) * | 2019-03-12 | 2024-05-29 | オックスフォード ナノポール テクノロジーズ ピーエルシー | ナノ細孔センシングデバイスと操作方法およびその成形方法 |
| JP2020167398A (ja) | 2019-03-28 | 2020-10-08 | エーエスエム・アイピー・ホールディング・ベー・フェー | ドアオープナーおよびドアオープナーが提供される基材処理装置 |
| KR102809999B1 (ko) | 2019-04-01 | 2025-05-19 | 에이에스엠 아이피 홀딩 비.브이. | 반도체 소자를 제조하는 방법 |
| CN113994013A (zh) | 2019-04-12 | 2022-01-28 | 罗斯威尔生命技术公司 | 用于分子电子学传感器的多环芳族桥 |
| US11507135B2 (en) | 2019-04-15 | 2022-11-22 | Government Of The United States Of America, As Represented By The Secretary Of Commerce | Molecular scrivener for reading or writing data to a macromolecule |
| US11860123B2 (en) | 2019-04-16 | 2024-01-02 | The Board Of Trustees Of The University Of Illinois | Classification of epigenetic biomarkers and/or DNA conformational superstructures via use of atomically thin nanopores |
| KR102897355B1 (ko) | 2019-04-19 | 2025-12-08 | 에이에스엠 아이피 홀딩 비.브이. | 층 형성 방법 및 장치 |
| KR20200125453A (ko) | 2019-04-24 | 2020-11-04 | 에이에스엠 아이피 홀딩 비.브이. | 기상 반응기 시스템 및 이를 사용하는 방법 |
| CN113874524A (zh) * | 2019-04-30 | 2021-12-31 | 根特罗玛有限公司 | 一种用于核酸测序的石墨烯纳米孔装置 |
| KR102929471B1 (ko) | 2019-05-07 | 2026-02-20 | 에이에스엠 아이피 홀딩 비.브이. | 딥 튜브가 있는 화학물질 공급원 용기 |
| KR102869364B1 (ko) | 2019-05-07 | 2025-10-10 | 에이에스엠 아이피 홀딩 비.브이. | 비정질 탄소 중합체 막을 개질하는 방법 |
| KR102929472B1 (ko) | 2019-05-10 | 2026-02-20 | 에이에스엠 아이피 홀딩 비.브이. | 표면 상에 재료를 증착하는 방법 및 본 방법에 따라 형성된 구조 |
| JP7598201B2 (ja) | 2019-05-16 | 2024-12-11 | エーエスエム・アイピー・ホールディング・ベー・フェー | ウェハボートハンドリング装置、縦型バッチ炉および方法 |
| JP7612342B2 (ja) | 2019-05-16 | 2025-01-14 | エーエスエム・アイピー・ホールディング・ベー・フェー | ウェハボートハンドリング装置、縦型バッチ炉および方法 |
| USD947913S1 (en) | 2019-05-17 | 2022-04-05 | Asm Ip Holding B.V. | Susceptor shaft |
| USD975665S1 (en) | 2019-05-17 | 2023-01-17 | Asm Ip Holding B.V. | Susceptor shaft |
| USD935572S1 (en) | 2019-05-24 | 2021-11-09 | Asm Ip Holding B.V. | Gas channel plate |
| USD922229S1 (en) | 2019-06-05 | 2021-06-15 | Asm Ip Holding B.V. | Device for controlling a temperature of a gas supply unit |
| KR20200141002A (ko) | 2019-06-06 | 2020-12-17 | 에이에스엠 아이피 홀딩 비.브이. | 배기 가스 분석을 포함한 기상 반응기 시스템을 사용하는 방법 |
| KR102918757B1 (ko) | 2019-06-10 | 2026-01-28 | 에이에스엠 아이피 홀딩 비.브이. | 석영 에피택셜 챔버를 세정하는 방법 |
| KR20200143254A (ko) | 2019-06-11 | 2020-12-23 | 에이에스엠 아이피 홀딩 비.브이. | 개질 가스를 사용하여 전자 구조를 형성하는 방법, 상기 방법을 수행하기 위한 시스템, 및 상기 방법을 사용하여 형성되는 구조 |
| USD944946S1 (en) | 2019-06-14 | 2022-03-01 | Asm Ip Holding B.V. | Shower plate |
| USD931978S1 (en) | 2019-06-27 | 2021-09-28 | Asm Ip Holding B.V. | Showerhead vacuum transport |
| CN112147185B (zh) | 2019-06-29 | 2022-07-01 | 清华大学 | 一种控制多肽穿过纳米孔速度的方法及其应用 |
| KR102911421B1 (ko) | 2019-07-03 | 2026-01-12 | 에이에스엠 아이피 홀딩 비.브이. | 기판 처리 장치용 온도 제어 조립체 및 이를 사용하는 방법 |
| JP7499079B2 (ja) | 2019-07-09 | 2024-06-13 | エーエスエム・アイピー・ホールディング・ベー・フェー | 同軸導波管を用いたプラズマ装置、基板処理方法 |
| CN112216646B (zh) | 2019-07-10 | 2026-02-10 | Asmip私人控股有限公司 | 基板支撑组件及包括其的基板处理装置 |
| CN114651179A (zh) * | 2019-07-15 | 2022-06-21 | 通用测序技术公司 | 通过运动控制的电子隧穿对生物聚合物测序 |
| KR102895115B1 (ko) | 2019-07-16 | 2025-12-03 | 에이에스엠 아이피 홀딩 비.브이. | 기판 처리 장치 |
| KR102860110B1 (ko) | 2019-07-17 | 2025-09-16 | 에이에스엠 아이피 홀딩 비.브이. | 실리콘 게르마늄 구조를 형성하는 방법 |
| TWI826704B (zh) | 2019-07-17 | 2023-12-21 | 荷蘭商Asm Ip私人控股有限公司 | 自由基輔助引燃電漿系統和方法 |
| US11643724B2 (en) | 2019-07-18 | 2023-05-09 | Asm Ip Holding B.V. | Method of forming structures using a neutral beam |
| KR102903090B1 (ko) | 2019-07-19 | 2025-12-19 | 에이에스엠 아이피 홀딩 비.브이. | 토폴로지-제어된 비정질 탄소 중합체 막을 형성하는 방법 |
| TWI839544B (zh) | 2019-07-19 | 2024-04-21 | 荷蘭商Asm Ip私人控股有限公司 | 形成形貌受控的非晶碳聚合物膜之方法 |
| CN112309843B (zh) | 2019-07-29 | 2026-01-23 | Asmip私人控股有限公司 | 实现高掺杂剂掺入的选择性沉积方法 |
| CN112309900B (zh) | 2019-07-30 | 2025-11-04 | Asmip私人控股有限公司 | 基板处理设备 |
| CN112309899B (zh) | 2019-07-30 | 2025-11-14 | Asmip私人控股有限公司 | 基板处理设备 |
| KR20210015655A (ko) | 2019-07-30 | 2021-02-10 | 에이에스엠 아이피 홀딩 비.브이. | 기판 처리 장치 및 방법 |
| US11587815B2 (en) | 2019-07-31 | 2023-02-21 | Asm Ip Holding B.V. | Vertical batch furnace assembly |
| US11227782B2 (en) | 2019-07-31 | 2022-01-18 | Asm Ip Holding B.V. | Vertical batch furnace assembly |
| US11587814B2 (en) | 2019-07-31 | 2023-02-21 | Asm Ip Holding B.V. | Vertical batch furnace assembly |
| KR20210018759A (ko) | 2019-08-05 | 2021-02-18 | 에이에스엠 아이피 홀딩 비.브이. | 화학물질 공급원 용기를 위한 액체 레벨 센서 |
| KR20210018761A (ko) | 2019-08-09 | 2021-02-18 | 에이에스엠 아이피 홀딩 비.브이. | 냉각 장치를 포함한 히터 어셈블리 및 이를 사용하는 방법 |
| USD965524S1 (en) | 2019-08-19 | 2022-10-04 | Asm Ip Holding B.V. | Susceptor support |
| USD965044S1 (en) | 2019-08-19 | 2022-09-27 | Asm Ip Holding B.V. | Susceptor shaft |
| JP7810514B2 (ja) | 2019-08-21 | 2026-02-03 | エーエスエム・アイピー・ホールディング・ベー・フェー | 成膜原料混合ガス生成装置及び成膜装置 |
| USD949319S1 (en) | 2019-08-22 | 2022-04-19 | Asm Ip Holding B.V. | Exhaust duct |
| USD979506S1 (en) | 2019-08-22 | 2023-02-28 | Asm Ip Holding B.V. | Insulator |
| USD940837S1 (en) | 2019-08-22 | 2022-01-11 | Asm Ip Holding B.V. | Electrode |
| USD930782S1 (en) | 2019-08-22 | 2021-09-14 | Asm Ip Holding B.V. | Gas distributor |
| KR20210024423A (ko) | 2019-08-22 | 2021-03-05 | 에이에스엠 아이피 홀딩 비.브이. | 홀을 구비한 구조체를 형성하기 위한 방법 |
| WO2021036995A1 (en) * | 2019-08-23 | 2021-03-04 | Nanjing University | Direct microrna sequencing using enzyme assisted sequencing |
| KR102928101B1 (ko) | 2019-08-23 | 2026-02-13 | 에이에스엠 아이피 홀딩 비.브이. | 비스(디에틸아미노)실란을 사용하여 peald에 의해 개선된 품질을 갖는 실리콘 산화물 막을 증착하기 위한 방법 |
| US11286558B2 (en) | 2019-08-23 | 2022-03-29 | Asm Ip Holding B.V. | Methods for depositing a molybdenum nitride film on a surface of a substrate by a cyclical deposition process and related semiconductor device structures including a molybdenum nitride film |
| KR102868968B1 (ko) | 2019-09-03 | 2025-10-10 | 에이에스엠 아이피 홀딩 비.브이. | 칼코지나이드 막 및 상기 막을 포함한 구조체를 증착하기 위한 방법 및 장치 |
| KR102806450B1 (ko) | 2019-09-04 | 2025-05-12 | 에이에스엠 아이피 홀딩 비.브이. | 희생 캡핑 층을 이용한 선택적 증착 방법 |
| KR102733104B1 (ko) | 2019-09-05 | 2024-11-22 | 에이에스엠 아이피 홀딩 비.브이. | 기판 처리 장치 |
| WO2021045900A1 (en) | 2019-09-06 | 2021-03-11 | Roswell Biotechnologies, Inc. | Methods of fabricating nanoscale structures usable in molecular sensors and other devices |
| US12469693B2 (en) | 2019-09-17 | 2025-11-11 | Asm Ip Holding B.V. | Method of forming a carbon-containing layer and structure including the layer |
| US11562901B2 (en) | 2019-09-25 | 2023-01-24 | Asm Ip Holding B.V. | Substrate processing method |
| CN112593212B (zh) | 2019-10-02 | 2023-12-22 | Asm Ip私人控股有限公司 | 通过循环等离子体增强沉积工艺形成拓扑选择性氧化硅膜的方法 |
| KR102948143B1 (ko) | 2019-10-08 | 2026-04-07 | 에이에스엠 아이피 홀딩 비.브이. | 활성 종을 이용하기 위한 가스 분배 어셈블리를 포함한 반응기 시스템 및 이를 사용하는 방법 |
| TWI846953B (zh) | 2019-10-08 | 2024-07-01 | 荷蘭商Asm Ip私人控股有限公司 | 基板處理裝置 |
| TW202128273A (zh) | 2019-10-08 | 2021-08-01 | 荷蘭商Asm Ip私人控股有限公司 | 氣體注入系統、及將材料沉積於反應室內之基板表面上的方法 |
| TWI846966B (zh) | 2019-10-10 | 2024-07-01 | 荷蘭商Asm Ip私人控股有限公司 | 形成光阻底層之方法及包括光阻底層之結構 |
| US12009241B2 (en) | 2019-10-14 | 2024-06-11 | Asm Ip Holding B.V. | Vertical batch furnace assembly with detector to detect cassette |
| TWI834919B (zh) | 2019-10-16 | 2024-03-11 | 荷蘭商Asm Ip私人控股有限公司 | 氧化矽之拓撲選擇性膜形成之方法 |
| US11637014B2 (en) | 2019-10-17 | 2023-04-25 | Asm Ip Holding B.V. | Methods for selective deposition of doped semiconductor material |
| CN110669660B (zh) * | 2019-10-19 | 2023-03-24 | 上海新微技术研发中心有限公司 | 基于运动蛋白的基因转运速度控制装置的制造方法 |
| KR102845724B1 (ko) | 2019-10-21 | 2025-08-13 | 에이에스엠 아이피 홀딩 비.브이. | 막을 선택적으로 에칭하기 위한 장치 및 방법 |
| FR3102306B1 (fr) * | 2019-10-22 | 2025-10-24 | Commissariat Energie Atomique | Électrode électrochimique |
| US11996292B2 (en) | 2019-10-25 | 2024-05-28 | Asm Ip Holding B.V. | Methods for filling a gap feature on a substrate surface and related semiconductor structures |
| US11646205B2 (en) | 2019-10-29 | 2023-05-09 | Asm Ip Holding B.V. | Methods of selectively forming n-type doped material on a surface, systems for selectively forming n-type doped material, and structures formed using same |
| KR102890638B1 (ko) | 2019-11-05 | 2025-11-25 | 에이에스엠 아이피 홀딩 비.브이. | 도핑된 반도체 층을 갖는 구조체 및 이를 형성하기 위한 방법 및 시스템 |
| US11501968B2 (en) | 2019-11-15 | 2022-11-15 | Asm Ip Holding B.V. | Method for providing a semiconductor device with silicon filled gaps |
| KR102861314B1 (ko) | 2019-11-20 | 2025-09-17 | 에이에스엠 아이피 홀딩 비.브이. | 기판의 표면 상에 탄소 함유 물질을 증착하는 방법, 상기 방법을 사용하여 형성된 구조물, 및 상기 구조물을 형성하기 위한 시스템 |
| KR20210065848A (ko) | 2019-11-26 | 2021-06-04 | 에이에스엠 아이피 홀딩 비.브이. | 제1 유전체 표면과 제2 금속성 표면을 포함한 기판 상에 타겟 막을 선택적으로 형성하기 위한 방법 |
| CN112951697B (zh) | 2019-11-26 | 2025-07-29 | Asmip私人控股有限公司 | 基板处理设备 |
| CN112885692B (zh) | 2019-11-29 | 2025-08-15 | Asmip私人控股有限公司 | 基板处理设备 |
| CN120432376A (zh) | 2019-11-29 | 2025-08-05 | Asm Ip私人控股有限公司 | 基板处理设备 |
| JP7527928B2 (ja) | 2019-12-02 | 2024-08-05 | エーエスエム・アイピー・ホールディング・ベー・フェー | 基板処理装置、基板処理方法 |
| CN114761799A (zh) * | 2019-12-02 | 2022-07-15 | 牛津纳米孔科技公开有限公司 | 使用纳米孔表征靶多肽的方法 |
| KR20210070898A (ko) | 2019-12-04 | 2021-06-15 | 에이에스엠 아이피 홀딩 비.브이. | 기판 처리 장치 |
| US11885013B2 (en) | 2019-12-17 | 2024-01-30 | Asm Ip Holding B.V. | Method of forming vanadium nitride layer and structure including the vanadium nitride layer |
| KR102943768B1 (ko) | 2019-12-19 | 2026-03-26 | 에이에스엠 아이피 홀딩 비.브이. | 기판 상의 갭 피처를 충진하는 방법 및 이와 관련된 반도체 소자 구조 |
| KR102389396B1 (ko) * | 2020-01-29 | 2022-04-20 | 연세대학교 산학협력단 | 전기식 계수기 및 전기식 계수기를 이용하는 입자 계수기 |
| TWI887322B (zh) | 2020-01-06 | 2025-06-21 | 荷蘭商Asm Ip私人控股有限公司 | 反應器系統、抬升銷、及處理方法 |
| JP7730637B2 (ja) | 2020-01-06 | 2025-08-28 | エーエスエム・アイピー・ホールディング・ベー・フェー | ガス供給アセンブリ、その構成要素、およびこれを含む反応器システム |
| US11993847B2 (en) | 2020-01-08 | 2024-05-28 | Asm Ip Holding B.V. | Injector |
| EP4091201A4 (en) * | 2020-01-15 | 2024-05-15 | The Methodist Hospital System | ELECTROSTATIC GATE NANOFLUIDIC MEMBRANES FOR THE REGULATION OF MOLECULAR TRANSPORT |
| KR102882467B1 (ko) | 2020-01-16 | 2025-11-05 | 에이에스엠 아이피 홀딩 비.브이. | 고 종횡비 피처를 형성하는 방법 |
| KR102675856B1 (ko) | 2020-01-20 | 2024-06-17 | 에이에스엠 아이피 홀딩 비.브이. | 박막 형성 방법 및 박막 표면 개질 방법 |
| TWI889744B (zh) | 2020-01-29 | 2025-07-11 | 荷蘭商Asm Ip私人控股有限公司 | 污染物捕集系統、及擋板堆疊 |
| TW202513845A (zh) | 2020-02-03 | 2025-04-01 | 荷蘭商Asm Ip私人控股有限公司 | 半導體裝置結構及其形成方法 |
| KR20210100010A (ko) | 2020-02-04 | 2021-08-13 | 에이에스엠 아이피 홀딩 비.브이. | 대형 물품의 투과율 측정을 위한 방법 및 장치 |
| KR20220134015A (ko) * | 2020-02-06 | 2022-10-05 | 팔로젠 인코포레이티드 | 나노포어 센서 디바이스 및 그 제조 방법들 |
| US11776846B2 (en) | 2020-02-07 | 2023-10-03 | Asm Ip Holding B.V. | Methods for depositing gap filling fluids and related systems and devices |
| KR20210103953A (ko) | 2020-02-13 | 2021-08-24 | 에이에스엠 아이피 홀딩 비.브이. | 가스 분배 어셈블리 및 이를 사용하는 방법 |
| KR102916725B1 (ko) | 2020-02-13 | 2026-01-23 | 에이에스엠 아이피 홀딩 비.브이. | 수광 장치를 포함하는 기판 처리 장치 및 수광 장치의 교정 방법 |
| US11781243B2 (en) | 2020-02-17 | 2023-10-10 | Asm Ip Holding B.V. | Method for depositing low temperature phosphorous-doped silicon |
| TWI895326B (zh) | 2020-02-28 | 2025-09-01 | 荷蘭商Asm Ip私人控股有限公司 | 專用於零件清潔的系統 |
| KR102943116B1 (ko) | 2020-03-04 | 2026-03-23 | 에이에스엠 아이피 홀딩 비.브이. | 반응기 시스템용 정렬 고정구 |
| KR20210116240A (ko) | 2020-03-11 | 2021-09-27 | 에이에스엠 아이피 홀딩 비.브이. | 조절성 접합부를 갖는 기판 핸들링 장치 |
| US11876356B2 (en) | 2020-03-11 | 2024-01-16 | Asm Ip Holding B.V. | Lockout tagout assembly and system and method of using same |
| KR102775390B1 (ko) | 2020-03-12 | 2025-02-28 | 에이에스엠 아이피 홀딩 비.브이. | 타겟 토폴로지 프로파일을 갖는 층 구조를 제조하기 위한 방법 |
| US12173404B2 (en) | 2020-03-17 | 2024-12-24 | Asm Ip Holding B.V. | Method of depositing epitaxial material, structure formed using the method, and system for performing the method |
| US12222346B2 (en) | 2020-04-01 | 2025-02-11 | The Trustees Of The University Of Pennsylvania | Stable nanopores and nanopore arrays for ionic and other measurements |
| KR102755229B1 (ko) | 2020-04-02 | 2025-01-14 | 에이에스엠 아이피 홀딩 비.브이. | 박막 형성 방법 |
| TWI887376B (zh) | 2020-04-03 | 2025-06-21 | 荷蘭商Asm Ip私人控股有限公司 | 半導體裝置的製造方法 |
| TWI888525B (zh) | 2020-04-08 | 2025-07-01 | 荷蘭商Asm Ip私人控股有限公司 | 用於選擇性蝕刻氧化矽膜之設備及方法 |
| KR20210128343A (ko) | 2020-04-15 | 2021-10-26 | 에이에스엠 아이피 홀딩 비.브이. | 크롬 나이트라이드 층을 형성하는 방법 및 크롬 나이트라이드 층을 포함하는 구조 |
| US11821078B2 (en) | 2020-04-15 | 2023-11-21 | Asm Ip Holding B.V. | Method for forming precoat film and method for forming silicon-containing film |
| US11996289B2 (en) | 2020-04-16 | 2024-05-28 | Asm Ip Holding B.V. | Methods of forming structures including silicon germanium and silicon layers, devices formed using the methods, and systems for performing the methods |
| KR102901748B1 (ko) | 2020-04-21 | 2025-12-17 | 에이에스엠 아이피 홀딩 비.브이. | 기판을 처리하기 위한 방법 |
| KR20210132600A (ko) | 2020-04-24 | 2021-11-04 | 에이에스엠 아이피 홀딩 비.브이. | 바나듐, 질소 및 추가 원소를 포함한 층을 증착하기 위한 방법 및 시스템 |
| KR102934380B1 (ko) | 2020-04-24 | 2026-03-05 | 에이에스엠 아이피 홀딩 비.브이. | 바나듐 보라이드 및 바나듐 포스파이드 층을 포함한 구조체를 형성하는 방법 |
| TW202539998A (zh) | 2020-04-24 | 2025-10-16 | 荷蘭商Asm Ip私人控股有限公司 | 包含釩化合物之組成物與容器及用於穩定釩化合物之方法及系統 |
| KR102866804B1 (ko) | 2020-04-24 | 2025-09-30 | 에이에스엠 아이피 홀딩 비.브이. | 냉각 가스 공급부를 포함한 수직형 배치 퍼니스 어셈블리 |
| CN113555279A (zh) | 2020-04-24 | 2021-10-26 | Asm Ip私人控股有限公司 | 形成含氮化钒的层的方法及包含其的结构 |
| KR102783898B1 (ko) | 2020-04-29 | 2025-03-18 | 에이에스엠 아이피 홀딩 비.브이. | 고체 소스 전구체 용기 |
| KR20210134869A (ko) | 2020-05-01 | 2021-11-11 | 에이에스엠 아이피 홀딩 비.브이. | Foup 핸들러를 이용한 foup의 빠른 교환 |
| JP7726664B2 (ja) | 2020-05-04 | 2025-08-20 | エーエスエム・アイピー・ホールディング・ベー・フェー | 基板を処理するための基板処理システム |
| JP7736446B2 (ja) | 2020-05-07 | 2025-09-09 | エーエスエム・アイピー・ホールディング・ベー・フェー | 同調回路を備える反応器システム |
| KR102788543B1 (ko) | 2020-05-13 | 2025-03-27 | 에이에스엠 아이피 홀딩 비.브이. | 반응기 시스템용 레이저 정렬 고정구 |
| KR102936676B1 (ko) | 2020-05-15 | 2026-03-10 | 에이에스엠 아이피 홀딩 비.브이. | 다중 전구체를 사용하여 실리콘 게르마늄 균일도를 제어하기 위한 방법 |
| KR102905441B1 (ko) | 2020-05-19 | 2025-12-30 | 에이에스엠 아이피 홀딩 비.브이. | 기판 처리 장치 |
| KR102795476B1 (ko) | 2020-05-21 | 2025-04-11 | 에이에스엠 아이피 홀딩 비.브이. | 다수의 탄소 층을 포함한 구조체 및 이를 형성하고 사용하는 방법 |
| KR20210145079A (ko) | 2020-05-21 | 2021-12-01 | 에이에스엠 아이피 홀딩 비.브이. | 기판을 처리하기 위한 플랜지 및 장치 |
| TWI873343B (zh) | 2020-05-22 | 2025-02-21 | 荷蘭商Asm Ip私人控股有限公司 | 用於在基材上形成薄膜之反應系統 |
| JP7591247B2 (ja) * | 2020-05-25 | 2024-11-28 | ティーイーアイソリューションズ株式会社 | ナノギャップ電極構造体、およびその製造方法、分析装置、分析方法 |
| KR20210146802A (ko) | 2020-05-26 | 2021-12-06 | 에이에스엠 아이피 홀딩 비.브이. | 붕소 및 갈륨을 함유한 실리콘 게르마늄 층을 증착하는 방법 |
| TWI876048B (zh) | 2020-05-29 | 2025-03-11 | 荷蘭商Asm Ip私人控股有限公司 | 基板處理方法 |
| TW202212620A (zh) | 2020-06-02 | 2022-04-01 | 荷蘭商Asm Ip私人控股有限公司 | 處理基板之設備、形成膜之方法、及控制用於處理基板之設備之方法 |
| KR20210156219A (ko) | 2020-06-16 | 2021-12-24 | 에이에스엠 아이피 홀딩 비.브이. | 붕소를 함유한 실리콘 게르마늄 층을 증착하는 방법 |
| TWI908816B (zh) | 2020-06-24 | 2025-12-21 | 荷蘭商Asm Ip私人控股有限公司 | 形成含矽層之方法 |
| TWI873359B (zh) | 2020-06-30 | 2025-02-21 | 荷蘭商Asm Ip私人控股有限公司 | 基板處理方法 |
| US12431354B2 (en) | 2020-07-01 | 2025-09-30 | Asm Ip Holding B.V. | Silicon nitride and silicon oxide deposition methods using fluorine inhibitor |
| KR102707957B1 (ko) | 2020-07-08 | 2024-09-19 | 에이에스엠 아이피 홀딩 비.브이. | 기판 처리 방법 |
| KR20220010438A (ko) | 2020-07-17 | 2022-01-25 | 에이에스엠 아이피 홀딩 비.브이. | 포토리소그래피에 사용하기 위한 구조체 및 방법 |
| EP4675256A3 (en) | 2020-07-17 | 2026-01-28 | Oxford Nanopore Technologies PLC | Nanopore sensing device |
| KR20220011092A (ko) | 2020-07-20 | 2022-01-27 | 에이에스엠 아이피 홀딩 비.브이. | 전이 금속층을 포함하는 구조체를 형성하기 위한 방법 및 시스템 |
| TWI878570B (zh) | 2020-07-20 | 2025-04-01 | 荷蘭商Asm Ip私人控股有限公司 | 用於沉積鉬層之方法及系統 |
| US12535457B2 (en) | 2020-07-22 | 2026-01-27 | Oxford Nanopore Technologies Plc | Solid state nanopore formation |
| TW202219303A (zh) | 2020-07-27 | 2022-05-16 | 荷蘭商Asm Ip私人控股有限公司 | 薄膜沉積製程 |
| US11837302B1 (en) | 2020-08-07 | 2023-12-05 | Iridia, Inc. | Systems and methods for writing and reading data stored in a polymer using nano-channels |
| KR20220020210A (ko) | 2020-08-11 | 2022-02-18 | 에이에스엠 아이피 홀딩 비.브이. | 기판 상에 티타늄 알루미늄 카바이드 막 구조체 및 관련 반도체 구조체를 증착하는 방법 |
| KR102915124B1 (ko) | 2020-08-14 | 2026-01-19 | 에이에스엠 아이피 홀딩 비.브이. | 기판 처리 방법 |
| US12040177B2 (en) | 2020-08-18 | 2024-07-16 | Asm Ip Holding B.V. | Methods for forming a laminate film by cyclical plasma-enhanced deposition processes |
| TWI911263B (zh) | 2020-08-25 | 2026-01-11 | 荷蘭商Asm Ip私人控股有限公司 | 清潔基板的方法、選擇性沉積的方法、及反應器系統 |
| TW202534193A (zh) | 2020-08-26 | 2025-09-01 | 荷蘭商Asm Ip私人控股有限公司 | 形成金屬氧化矽層及金屬氮氧化矽層的方法 |
| TWI911265B (zh) | 2020-08-27 | 2026-01-11 | 荷蘭商Asm Ip私人控股有限公司 | 形成圖案化結構的方法、操控機械特性的方法、及裝置結構 |
| TWI904232B (zh) | 2020-09-10 | 2025-11-11 | 荷蘭商Asm Ip私人控股有限公司 | 沉積間隙填充流體之方法及相關系統和裝置 |
| USD990534S1 (en) | 2020-09-11 | 2023-06-27 | Asm Ip Holding B.V. | Weighted lift pin |
| KR20220036866A (ko) | 2020-09-16 | 2022-03-23 | 에이에스엠 아이피 홀딩 비.브이. | 실리콘 산화물 증착 방법 |
| USD1012873S1 (en) | 2020-09-24 | 2024-01-30 | Asm Ip Holding B.V. | Electrode for semiconductor processing apparatus |
| TWI889903B (zh) | 2020-09-25 | 2025-07-11 | 荷蘭商Asm Ip私人控股有限公司 | 基板處理方法 |
| RS20201166A1 (sr) | 2020-09-28 | 2022-03-31 | Univerzitet U Beogradu | Detekcija toksina korišćenjem nanopora |
| US12009224B2 (en) | 2020-09-29 | 2024-06-11 | Asm Ip Holding B.V. | Apparatus and method for etching metal nitrides |
| TW202229612A (zh) | 2020-10-06 | 2022-08-01 | 荷蘭商Asm Ip私人控股有限公司 | 在部件的側壁上形成氮化矽的方法及系統 |
| KR20220045900A (ko) | 2020-10-06 | 2022-04-13 | 에이에스엠 아이피 홀딩 비.브이. | 실리콘 함유 재료를 증착하기 위한 증착 방법 및 장치 |
| CN114293174A (zh) | 2020-10-07 | 2022-04-08 | Asm Ip私人控股有限公司 | 气体供应单元和包括气体供应单元的衬底处理设备 |
| KR102855834B1 (ko) | 2020-10-14 | 2025-09-04 | 에이에스엠 아이피 홀딩 비.브이. | 단차형 구조 상에 재료를 증착하는 방법 |
| KR102873665B1 (ko) | 2020-10-15 | 2025-10-17 | 에이에스엠 아이피 홀딩 비.브이. | 반도체 소자의 제조 방법, 및 ether-cat을 사용하는 기판 처리 장치 |
| TW202217037A (zh) | 2020-10-22 | 2022-05-01 | 荷蘭商Asm Ip私人控股有限公司 | 沉積釩金屬的方法、結構、裝置及沉積總成 |
| TW202223136A (zh) | 2020-10-28 | 2022-06-16 | 荷蘭商Asm Ip私人控股有限公司 | 用於在基板上形成層之方法、及半導體處理系統 |
| TW202229620A (zh) | 2020-11-12 | 2022-08-01 | 特文特大學 | 沉積系統、用於控制反應條件之方法、沉積方法 |
| US11248265B1 (en) | 2020-11-19 | 2022-02-15 | Clear Labs, Inc | Systems and processes for distinguishing pathogenic and non-pathogenic sequences from specimens |
| TW202229795A (zh) | 2020-11-23 | 2022-08-01 | 荷蘭商Asm Ip私人控股有限公司 | 具注入器之基板處理設備 |
| TW202235649A (zh) | 2020-11-24 | 2022-09-16 | 荷蘭商Asm Ip私人控股有限公司 | 填充間隙之方法與相關之系統及裝置 |
| TW202235675A (zh) | 2020-11-30 | 2022-09-16 | 荷蘭商Asm Ip私人控股有限公司 | 注入器、及基板處理設備 |
| KR20220077875A (ko) | 2020-12-02 | 2022-06-09 | 에이에스엠 아이피 홀딩 비.브이. | 샤워헤드 어셈블리용 세정 고정구 |
| CN112698024B (zh) * | 2020-12-08 | 2022-04-26 | 华中农业大学 | 一种基于差分阻抗颗粒计数的免疫分析方法 |
| US12255053B2 (en) | 2020-12-10 | 2025-03-18 | Asm Ip Holding B.V. | Methods and systems for depositing a layer |
| US12159788B2 (en) | 2020-12-14 | 2024-12-03 | Asm Ip Holding B.V. | Method of forming structures for threshold voltage control |
| CN114639631A (zh) | 2020-12-16 | 2022-06-17 | Asm Ip私人控股有限公司 | 跳动和摆动测量固定装置 |
| TW202232639A (zh) | 2020-12-18 | 2022-08-16 | 荷蘭商Asm Ip私人控股有限公司 | 具有可旋轉台的晶圓處理設備 |
| KR20220090438A (ko) | 2020-12-22 | 2022-06-29 | 에이에스엠 아이피 홀딩 비.브이. | 전이금속 증착 방법 |
| TW202226899A (zh) | 2020-12-22 | 2022-07-01 | 荷蘭商Asm Ip私人控股有限公司 | 具匹配器的電漿處理裝置 |
| KR20220090435A (ko) | 2020-12-22 | 2022-06-29 | 에이에스엠 아이피 홀딩 비.브이. | 전구체 캡슐, 용기 및 방법 |
| CN113189178A (zh) * | 2021-03-10 | 2021-07-30 | 山东大学齐鲁医院 | 金属纳米颗粒复合二维材料异质结构传感器及制备方法 |
| CN115125098B (zh) * | 2021-03-29 | 2025-05-27 | 上海近观科技有限责任公司 | 基于分子封层及加热密封结构的纳米孔检测装置及方法 |
| US12493024B2 (en) | 2021-03-31 | 2025-12-09 | Illumina, Inc. | Scalable circuit for molecular detection |
| WO2022236068A1 (en) * | 2021-05-07 | 2022-11-10 | Cornell University | Method for protecting reactive materials with atomically thin film |
| USD980814S1 (en) | 2021-05-11 | 2023-03-14 | Asm Ip Holding B.V. | Gas distributor for substrate processing apparatus |
| USD981973S1 (en) | 2021-05-11 | 2023-03-28 | Asm Ip Holding B.V. | Reactor wall for substrate processing apparatus |
| USD980813S1 (en) | 2021-05-11 | 2023-03-14 | Asm Ip Holding B.V. | Gas flow control plate for substrate processing apparatus |
| USD1023959S1 (en) | 2021-05-11 | 2024-04-23 | Asm Ip Holding B.V. | Electrode for substrate processing apparatus |
| GB202108820D0 (en) | 2021-06-18 | 2021-08-04 | Ucl Business Ltd | Nucleic acid nanopore with enhanced sensing functionality |
| GB202108821D0 (en) | 2021-06-18 | 2021-08-04 | Ucl Business Ltd | Nanomechanically actuated nucleic acid nanopore |
| EP4355904A1 (en) | 2021-06-18 | 2024-04-24 | UCL Business Ltd | Nucleic acid nanopore with enhanced sensing functionality |
| EP4113112B1 (en) | 2021-06-30 | 2026-02-25 | Imec VZW | A method of operating a pore field-effect transistor sensor for detecting particles |
| CN115725685B (zh) * | 2021-08-30 | 2023-12-12 | 四川大学 | 一种基于生物埃米孔检测药物分子的方法 |
| USD990441S1 (en) | 2021-09-07 | 2023-06-27 | Asm Ip Holding B.V. | Gas flow control plate |
| CN113691162B (zh) * | 2021-09-09 | 2023-09-19 | 西南交通大学 | 一种基于纳流体二极管的水伏器件及其制备方法 |
| CN113804869B (zh) * | 2021-09-29 | 2023-09-05 | 中国科学院重庆绿色智能技术研究院 | 纳米孔在电化学检测植物抗性基因表达多肽中的应用及检测方法 |
| EP4160199B1 (en) * | 2021-10-04 | 2025-02-12 | Depixus | Apparatus for biomolecule analysis with a well and a cavity below the well |
| WO2023086630A2 (en) * | 2021-11-15 | 2023-05-19 | Arizona Board Of Regents On Behalf Of Arizona State University | Direct sequencing biomolecules and modifications thereof with tunneling enhanced optical spectroscopy on nanopore chip |
| USD1099184S1 (en) | 2021-11-29 | 2025-10-21 | Asm Ip Holding B.V. | Weighted lift pin |
| USD1060598S1 (en) | 2021-12-03 | 2025-02-04 | Asm Ip Holding B.V. | Split showerhead cover |
| AU2023228860A1 (en) * | 2022-03-04 | 2024-09-19 | Catalog Technologies, Inc. | Dna microarrays and component level sequencing for nucleic acid-based data storage and processing |
| CN117229363A (zh) * | 2022-06-06 | 2023-12-15 | 天津赛德生物制药有限公司 | 用于肺癌早期诊断的肽核酸功能化核孔膜及制备方法与应用 |
| CN115266876A (zh) * | 2022-06-22 | 2022-11-01 | 浙江大学 | 一种石墨烯-二硫化钼异质结纳米孔生物传感器结构及其制备方法 |
| CN115932264B (zh) * | 2022-08-26 | 2025-02-18 | 青岛科技大学 | 一种具有抗生物大分子污染性能的高灵敏度双光电极免疫传感器及其制备方法和应用 |
| US20240077474A1 (en) * | 2022-09-06 | 2024-03-07 | Seagate Technology Llc | System and methods for positioning biomaterial on a substrate |
| US20240210343A1 (en) * | 2022-12-23 | 2024-06-27 | Imec Vzw | Nanopore sensing device with multiple sensing layers |
| WO2025063893A2 (en) * | 2023-09-20 | 2025-03-27 | Massachusetts Institute Of Technology | A nanopore system and method for determining properties of nanoparticles |
| WO2025111147A1 (en) | 2023-11-21 | 2025-05-30 | Abbott Laboratories | Two-dimensional matrix droplet array |
| WO2025120150A1 (en) | 2023-12-08 | 2025-06-12 | Oxford Nanopore Technologies Plc | Methods and apparatus for forming apertures, methods and apparatus for unblocking apertures, methods of sensing molecular entities in apertures, and measurement systems |
| WO2025129046A1 (en) * | 2023-12-15 | 2025-06-19 | The Board Of Trustees Of The Leland Stanford Junior University | Electrochemical sensors and methods cross-reference to related applications |
| GB2637334A (en) * | 2024-01-18 | 2025-07-23 | Jesus Jara Fornerod Maximiliano | A nanoporous electrode for electrochemical detection of nucleic acids |
| CN118183749B (zh) * | 2024-03-26 | 2025-11-14 | 昆明理工大学 | 一种纳米硅@SiOx/MXene复合负极材料及其制备方法 |
| CN118501231B (zh) * | 2024-07-16 | 2024-10-18 | 天津大学 | 一种pH传感器、pH传感器的制备方法和pH测量方法 |
| CN119470870B (zh) * | 2024-11-19 | 2025-10-17 | 广东工业大学 | 一种基于组合式纳米孔结构的蛋白质检测方法 |
| CN120971522A (zh) * | 2025-08-15 | 2025-11-18 | 上海佰测科技有限公司 | 一种固态纳米孔结构、测试装置及其制作方法 |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20050019784A1 (en) * | 2002-05-20 | 2005-01-27 | Xing Su | Method and apparatus for nucleic acid sequencing and identification |
| US20080187915A1 (en) * | 2007-02-02 | 2008-08-07 | Stanislav Polonsky | Systems and Methods for Controlling the Position of a Charged Polymer Inside a Nanopore |
| JP2008536124A (ja) * | 2005-04-06 | 2008-09-04 | ザ プレジデント アンド フェロウズ オブ ハーバード カレッジ | カーボンナノチューブコントロールを用いる分子特性解析 |
| US20100327847A1 (en) * | 2007-09-12 | 2010-12-30 | President And Fellows Of Harvard College | High-Resolution Molecular Sensor |
| WO2011046706A1 (en) * | 2009-09-18 | 2011-04-21 | President And Fellows Of Harvard College | Bare single-layer graphene membrane having a nanopore enabling high-sensitivity molecular detection and analysis |
| WO2011047582A1 (zh) * | 2009-10-22 | 2011-04-28 | 浙江大学 | 一种纳米孔电学传感器 |
Family Cites Families (30)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US2656508A (en) | 1949-08-27 | 1953-10-20 | Wallace H Coulter | Means for counting particles suspended in a fluid |
| US5795782A (en) | 1995-03-17 | 1998-08-18 | President & Fellows Of Harvard College | Characterization of individual polymer molecules based on monomer-interface interactions |
| US6616895B2 (en) | 2000-03-23 | 2003-09-09 | Advanced Research Corporation | Solid state membrane channel device for the measurement and characterization of atomic and molecular sized samples |
| WO2005017025A2 (en) | 2003-08-15 | 2005-02-24 | The President And Fellows Of Harvard College | Study of polymer molecules and conformations with a nanopore |
| US7238485B2 (en) | 2004-03-23 | 2007-07-03 | President And Fellows Of Harvard College | Methods and apparatus for characterizing polynucleotides |
| WO2006137891A2 (en) * | 2004-09-29 | 2006-12-28 | University Of Florida Research Foundation, Inc. | Membrane with nanochannels for detection of molecules |
| US20060231419A1 (en) * | 2005-04-15 | 2006-10-19 | Barth Philip W | Molecular resonant tunneling sensor and methods of fabricating and using the same |
| WO2007041621A2 (en) | 2005-10-03 | 2007-04-12 | Xingsheng Sean Ling | Hybridization assisted nanopore sequencing |
| US8673567B2 (en) | 2006-03-08 | 2014-03-18 | Atila Biosystems, Inc. | Method and kit for nucleic acid sequence detection |
| US7849581B2 (en) * | 2006-05-05 | 2010-12-14 | University Of Utah Research Foundation | Nanopore electrode, nanopore membrane, methods of preparation and surface modification, and use thereof |
| GB0622956D0 (en) * | 2006-11-17 | 2006-12-27 | Univ Birmingham | Molecular detection system |
| US20080280776A1 (en) | 2006-12-04 | 2008-11-13 | Rashid Bashir | Method and apparatus for detection of molecules using a sensor array |
| JP5274130B2 (ja) | 2008-07-15 | 2013-08-28 | キヤノン株式会社 | 像振れ補正装置及び光学機器、撮像装置並びに像振れ補正装置の制御方法 |
| US8262879B2 (en) * | 2008-09-03 | 2012-09-11 | Nabsys, Inc. | Devices and methods for determining the length of biopolymers and distances between probes bound thereto |
| US8945912B2 (en) | 2008-09-29 | 2015-02-03 | The Board Of Trustees Of The University Of Illinois | DNA sequencing and amplification systems using nanoscale field effect sensor arrays |
| WO2010080617A2 (en) | 2008-12-19 | 2010-07-15 | The Board Of Trustees Of The University Of Illinois | Detecting and sorting methylated dna using a synthetic nanopore |
| US20120003438A1 (en) | 2009-02-20 | 2012-01-05 | University Of Florida Research Foundation, Inc. | Graphene processing for device and sensor applications |
| US8110410B2 (en) | 2009-06-29 | 2012-02-07 | International Business Machines Corporation | Nanofludic field effect transistor based on surface charge modulated nanochannel |
| US9035281B2 (en) * | 2009-06-30 | 2015-05-19 | Nokia Technologies Oy | Graphene device and method of fabricating a graphene device |
| US9376713B2 (en) | 2009-09-23 | 2016-06-28 | The Board Of Trustees Of The University Of Illinois | Label free detection of nucleic acid amplification |
| US8748091B2 (en) | 2009-12-18 | 2014-06-10 | The Board Of Trustees Of The University Of Illinois | Characterizing stretched polynucleotides in a synthetic nanopassage |
| EP2521796B1 (en) * | 2010-01-04 | 2015-07-29 | Life Technologies Corporation | Dna sequencing methods and detectors and systems for carrying out the same |
| US8828211B2 (en) * | 2010-06-08 | 2014-09-09 | President And Fellows Of Harvard College | Nanopore device with graphene supported artificial lipid membrane |
| WO2011163058A2 (en) | 2010-06-21 | 2011-12-29 | The Board Of Trustees Of The University Of Illinois | Cell mass measurement and apparatus |
| WO2012078340A1 (en) | 2010-12-08 | 2012-06-14 | The Board Of Trustees Of The University Of Illinois | Reliable nanofet biosensor process with high-k dielectric |
| KR20120065792A (ko) * | 2010-12-13 | 2012-06-21 | 삼성전자주식회사 | 나노 센서 및 그의 제조 방법 |
| US20120193231A1 (en) * | 2011-01-28 | 2012-08-02 | International Business Machines Corporation | Dna sequencing using multiple metal layer structure with organic coatings forming transient bonding to dna bases |
| US10761043B2 (en) | 2011-07-22 | 2020-09-01 | The Trustees Of The University Of Pennsylvania | Graphene-based nanopore and nanostructure devices and methods for macromolecular analysis |
| WO2013074796A1 (en) | 2011-11-15 | 2013-05-23 | The Board Of Trustees Of The University Of Illinois | Thermal control of droplets by nanoscale field effect transistors |
| US9835634B2 (en) | 2012-05-17 | 2017-12-05 | The Board Of Trustees Of The University Of Illinois | Coupled heterogeneous devices for pH sensing |
-
2012
- 2012-07-26 KR KR1020147004719A patent/KR102023754B1/ko active Active
- 2012-07-26 US US14/234,590 patent/US10175195B2/en active Active
- 2012-07-26 JP JP2014522982A patent/JP2014521956A/ja active Pending
- 2012-07-26 WO PCT/US2012/048248 patent/WO2013016486A1/en not_active Ceased
- 2012-07-26 EP EP18171231.6A patent/EP3385992B1/en active Active
- 2012-07-26 EP EP12818129.4A patent/EP2737536B1/en active Active
- 2012-07-26 CN CN201280046866.5A patent/CN104011866B/zh active Active
-
2017
- 2017-10-06 JP JP2017196050A patent/JP6679106B2/ja active Active
-
2018
- 2018-08-31 US US16/119,697 patent/US11698359B2/en active Active
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20050019784A1 (en) * | 2002-05-20 | 2005-01-27 | Xing Su | Method and apparatus for nucleic acid sequencing and identification |
| JP2008536124A (ja) * | 2005-04-06 | 2008-09-04 | ザ プレジデント アンド フェロウズ オブ ハーバード カレッジ | カーボンナノチューブコントロールを用いる分子特性解析 |
| US20080187915A1 (en) * | 2007-02-02 | 2008-08-07 | Stanislav Polonsky | Systems and Methods for Controlling the Position of a Charged Polymer Inside a Nanopore |
| US20100327847A1 (en) * | 2007-09-12 | 2010-12-30 | President And Fellows Of Harvard College | High-Resolution Molecular Sensor |
| WO2011046706A1 (en) * | 2009-09-18 | 2011-04-21 | President And Fellows Of Harvard College | Bare single-layer graphene membrane having a nanopore enabling high-sensitivity molecular detection and analysis |
| WO2011047582A1 (zh) * | 2009-10-22 | 2011-04-28 | 浙江大学 | 一种纳米孔电学传感器 |
Non-Patent Citations (1)
| Title |
|---|
| HENK W. CH. POSTMA: "Rapid Sequencing of Individual DNA Molecules in Graphene Nanogaps", NANO LETTERS, vol. 10, JPN6016021169, 2010, pages 420 - 425, XP055043958, ISSN: 0004111904, DOI: 10.1021/nl9029237 * |
Cited By (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2021517647A (ja) * | 2018-04-09 | 2021-07-26 | エフ.ホフマン−ラ ロシュ アーゲーF. Hoffmann−La Roche Aktiengesellschaft | 分子認識のためのナノポアを備えたトンネリング接合の製造 |
| JP7090733B2 (ja) | 2018-04-09 | 2022-06-24 | エフ.ホフマン-ラ ロシュ アーゲー | 分子認識のためのナノポアを備えたトンネリング接合の製造 |
| WO2020013256A1 (ja) * | 2018-07-11 | 2020-01-16 | 国立大学法人大阪大学 | 流路、流路の製造方法、電極構造体、および、電極構造体の製造方法 |
| JPWO2020013256A1 (ja) * | 2018-07-11 | 2021-07-15 | アイポア株式会社 | 流路、流路の製造方法、電極構造体、および、電極構造体の製造方法 |
| WO2020218489A1 (ja) * | 2019-04-26 | 2020-10-29 | 国立大学法人大阪大学 | トンネル電流を使用したマイクロrna解析 |
| JPWO2020218489A1 (ja) * | 2019-04-26 | 2020-10-29 | ||
| JP7418024B2 (ja) | 2019-04-26 | 2024-01-19 | 国立大学法人大阪大学 | トンネル電流を使用したマイクロrna解析 |
| JP2026041720A (ja) * | 2019-08-09 | 2026-03-10 | ナットクラッカー セラピューティクス, インコーポレイテッド | マイクロ流体装置およびその使用方法 |
| KR20210087303A (ko) * | 2020-01-02 | 2021-07-12 | 서강대학교산학협력단 | CRISPR/Cas12a를 이용한 표면증강 라만산란 기반 표적 DNA 검출용 센서 |
| KR102422254B1 (ko) | 2020-01-02 | 2022-07-19 | 서강대학교산학협력단 | CRISPR/Cas12a를 이용한 표면증강 라만산란 기반 표적 DNA 검출용 센서 |
| JP2023524575A (ja) * | 2020-05-07 | 2023-06-12 | グラップヒール | アクセスが制限されたエリアにアクセスするための携帯型且つ使い捨て型の装置、関連するアクセスキー生成システム、及び関連するアクセス制御方法 |
| JP7696924B2 (ja) | 2020-05-07 | 2025-06-23 | グラップヒール | アクセスが制限されたエリアにアクセスするための携帯型且つ使い捨て型の装置、関連するアクセスキー生成システム、及び関連するアクセス制御方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| CN104011866A (zh) | 2014-08-27 |
| EP3385992B1 (en) | 2024-09-04 |
| US20190178840A1 (en) | 2019-06-13 |
| US20140174927A1 (en) | 2014-06-26 |
| WO2013016486A1 (en) | 2013-01-31 |
| EP3385992A1 (en) | 2018-10-10 |
| JP2014521956A (ja) | 2014-08-28 |
| EP2737536B1 (en) | 2018-05-09 |
| CN104011866B (zh) | 2017-06-09 |
| EP2737536A4 (en) | 2015-03-18 |
| EP2737536A1 (en) | 2014-06-04 |
| US11698359B2 (en) | 2023-07-11 |
| JP6679106B2 (ja) | 2020-04-15 |
| KR102023754B1 (ko) | 2019-09-20 |
| KR20140046471A (ko) | 2014-04-18 |
| US10175195B2 (en) | 2019-01-08 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JP6679106B2 (ja) | 生体分子を特徴付けるためのナノ細孔センサー | |
| US11067562B2 (en) | Method of sequencing multiple copies of a sequence in a circular template | |
| Larkin et al. | Slow DNA transport through nanopores in hafnium oxide membranes | |
| US10065154B2 (en) | Nanofluidic sorting system for gene synthesis and pcr reaction products | |
| CN102186989B (zh) | 用于流体通道中生物分子和其它分析物的电压感测的纵向移位纳米级电极的使用 | |
| Shim et al. | Detection of methylation on dsDNA using nanopores in a MoS 2 membrane | |
| US20180180567A1 (en) | Microwell electrode and method for analysis of a chemical substance | |
| CN106471369B (zh) | 利用纳米细孔的目标检测 | |
| US20250067722A1 (en) | Devices for single-molecule sequencing, including related methods and processes | |
| Loh et al. | Electric single-molecule hybridization detector for short DNA fragments | |
| Mussi et al. | DNA-functionalized solid state nanopore for biosensing | |
| Shi et al. | Recent advances in nanopore-based nucleic acid analysis and sequencing | |
| Bahrami et al. | Solid-state nanopores for biosensing with submolecular resolution | |
| Wang et al. | Recent progress in electrochemical assessment of DNA based on nanostructured sensors | |
| Shepherd et al. | Ångström-and nano-scale pore-based nucleic acid sequencing of current and emergent pathogens | |
| CN106662568A (zh) | 利用固态纳米孔选择性分析改性的生物分子 | |
| 이민현 | Investigation on a single molecule analysis through a solid-state nanopore and its application for DNA sensor | |
| Lund et al. | Electronic DNA Sequencing | |
| Doğan | Solid-state nanopores for biosensing with submolecular resolution |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20171006 |
|
| A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20171031 |
|
| A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20180921 |
|
| A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20181023 |
|
| A601 | Written request for extension of time |
Free format text: JAPANESE INTERMEDIATE CODE: A601 Effective date: 20190123 |
|
| A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20190423 |
|
| A02 | Decision of refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A02 Effective date: 20190910 |
|
| RD04 | Notification of resignation of power of attorney |
Free format text: JAPANESE INTERMEDIATE CODE: A7424 Effective date: 20190920 |
|
| A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20200109 |
|
| A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A821 Effective date: 20200110 |
|
| A911 | Transfer to examiner for re-examination before appeal (zenchi) |
Free format text: JAPANESE INTERMEDIATE CODE: A911 Effective date: 20200203 |
|
| TRDD | Decision of grant or rejection written | ||
| A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20200218 |
|
| A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20200312 |
|
| R150 | Certificate of patent or registration of utility model |
Ref document number: 6679106 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |