JP2564355Y2 - N 2 lower gas replacement device inside the robot in the load lock chamber - Google Patents
N 2 lower gas replacement device inside the robot in the load lock chamberInfo
- Publication number
- JP2564355Y2 JP2564355Y2 JP10195591U JP10195591U JP2564355Y2 JP 2564355 Y2 JP2564355 Y2 JP 2564355Y2 JP 10195591 U JP10195591 U JP 10195591U JP 10195591 U JP10195591 U JP 10195591U JP 2564355 Y2 JP2564355 Y2 JP 2564355Y2
- Authority
- JP
- Japan
- Prior art keywords
- robot
- load lock
- lock chamber
- gas
- replacement device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Description
【０００１】[0001]
【産業上の利用分野】本考案は、Ｎ2 ガスによるロード
ロック室を有する半導体製造装置に係り、特に、そのロ
ードロック室内のロボット内部のＮ2 ガス置換装置に関
する。INVENTION The present invention relates to a relates to a semiconductor manufacturing apparatus having a load lock chamber by N 2 gas, in particular, relates to N 2 gas replacement device in the robot that load lock chamber.
【０００２】[0002]
【従来の技術】図２は従来装置の１例の要部の説明用断
面図である。この従来例はロードロック室１内部の雰囲
気を大気からＮ2 ガスパージもしくは真空置換によりＮ
2 ガスにする際、同時にフィルタ３を介してロボット２
内部をＮ2 ガスに置換する装置である。2. Description of the Related Art FIG. 2 is a sectional view for explaining a main part of an example of a conventional apparatus. N This conventional example N 2 gas purge or vacuum replace the load lock chamber 1 inside the atmosphere from the atmosphere
At the same time as the two gases, the robot 2
This is a device for replacing the inside with N 2 gas.
【０００３】[0003]
【考案が解決しようとする課題】しかしながら上記従来
例にあっては、ロボット内部に滞留部が生じやすく、Ｎ
2 ガスの置換に長時間要し、またロボット内部を確実に
Ｎ2 ガスに置換することが困難であるという課題があ
る。However, in the above-described conventional example, a stagnant portion is easily generated inside the robot, and N
Takes a long time to replace the 2 gas, also there is a problem that it is difficult to replace the internal robot reliably N 2 gas.
【０００４】本考案の目的は、従来技術のロードロック
室内に設置されたロボット内部をＮ2 ガス置換する際、
置換時間が長く、確実性に欠けるという課題を解決し、
ロボット内部を速やかに、かつ確実にＮ2 ガス置換する
装置を提供することにある。An object of the present invention is to replace the inside of a robot installed in a conventional load lock chamber with N 2 gas.
Solving the problem of long replacement time and lack of certainty,
It is an object of the present invention to provide a device for quickly and reliably replacing the inside of a robot with N 2 gas.
【０００５】[0005]
【課題を解決するための手段】本考案装置は、上記課題
を解決し上記目的を達成するため、図１に示すようにＮ
2 ガスにより大気を遮断したロードロック室１を有する
半導体製造装置において、ロードロック室１内のロボッ
ト２にフィルタ３を取付け、該ロボット２にはこのフィ
ルタ３に内部を経て連通しロードロック室１外に導出し
た配管４を接続し、この配管４にエア弁６を介して真空
吸気口８に接続してなる。In order to solve the above-mentioned problems and to achieve the above-mentioned object, the present invention has a device as shown in FIG.
(2) In a semiconductor manufacturing apparatus having a load lock chamber 1 in which the atmosphere is shut off by a gas, a filter 3 is attached to a robot 2 in the load lock chamber 1, and the robot 2 communicates with the filter 3 via the interior thereof. A pipe 4 led out is connected to the pipe 4, and the pipe 4 is connected to a vacuum suction port 8 via an air valve 6.
【０００６】[0006]
【作用】真空吸気口８に真空ポンプ等の排気装置を接続
してこれを駆動し、エア弁６を開くことによりロボット
２内部にフィルタ３を介してロードロック室１内部のＮ
2 ガスを吸入し、置換所要時間経過後、エア弁６を閉じ
ることによりロボット２内部のＮ2 ガス置換動作を完了
する。An exhaust device such as a vacuum pump is connected to the vacuum suction port 8 and driven, and the air valve 6 is opened.
After the two gases are sucked in and the required replacement time has elapsed, the air valve 6 is closed to complete the N 2 gas replacement operation inside the robot 2.
【０００７】[0007]
【実施例】図１は本考案装置の１実施例の要部の説明用
断面図である。本実施例は、Ｎ2 ガスにより大気を遮断
したロードロック室１内のロボット２にフィルタ３を取
付け、該ロボット２にはこのフィルタ３に内部を経て連
通しロードロック室１外に導出した配管４を接続し、こ
の配管４に流量計５及びエア弁６を介して真空吸気口８
を接続し、かつ該配管４に圧力計７を設けてなる。FIG. 1 is an explanatory sectional view of a main part of an embodiment of the present invention. In this embodiment, a filter 3 is mounted on a robot 2 in a load lock chamber 1 in which the atmosphere is shut off by N 2 gas. 4 and a vacuum suction port 8 is connected to the pipe 4 through a flow meter 5 and an air valve 6.
And a pressure gauge 7 is provided on the pipe 4.
【０００８】上記構成の本実施例において真空吸気口８
に真空ポンプ等の排気装置を接続してこれを駆動し、エ
ア弁６を開くことによりロボット２内部にフィルタ３を
介してロードロック室１内部のＮ2 ガスを吸入し、置換
所要時間経過後、エア弁６を閉じることによりロボット
２内部のＮ2 ガス置換動作を完了する。In this embodiment having the above-described structure, the vacuum suction port 8
An exhaust device such as a vacuum pump or the like is connected and driven, and the air valve 6 is opened to suck the N 2 gas inside the load lock chamber 1 through the filter 3 into the robot 2 and after the required replacement time elapses By closing the air valve 6, the N 2 gas replacement operation inside the robot 2 is completed.
【０００９】又、配管４に流量計５を設けることにより
流量のコントロール即ち置換時間の確認ができ、又圧力
計７を設けることにより、フィルタ３等のロボット２に
加わる圧力差による応力の確認が可能となる。Also, by providing a flow meter 5 in the pipe 4, the flow rate can be controlled, that is, the replacement time can be confirmed. By providing the pressure gauge 7, the stress due to the pressure difference applied to the robot 2 such as the filter 3 can be confirmed. It becomes possible.
【００１０】[0010]
【考案の効果】上述の説明より明らかなように本考案に
よれば、ロボット２内部を真空吸気口８に接続するた
め、ロボット２内部に滞留部がなくなり、従ってロボッ
ト内部を速やかにかつ確実にＮ2 ガス置換することがで
きる。As is apparent from the above description, according to the present invention, since the inside of the robot 2 is connected to the vacuum suction port 8, there is no stagnation portion inside the robot 2, so that the inside of the robot 2 is quickly and reliably. N 2 gas can be replaced.
【００１１】置換時に、ロボット２からロードロック室
１内部への流れが存在しないため、ロボット２内部のパ
ーティクルが、ロードロック室１内に拡散することを抑
制することができる。Since there is no flow from the robot 2 into the load lock chamber 1 at the time of replacement, it is possible to suppress the particles inside the robot 2 from diffusing into the load lock chamber 1.
【図１】本考案装置の１実施例の要部の説明用断面図で
ある。FIG. 1 is an explanatory sectional view of a main part of an embodiment of the present invention.
【図２】従来装置の１例の要部の説明用断面図である。FIG. 2 is an explanatory sectional view of a main part of an example of a conventional device.
１ ロードロック室 ２ ロボット ３ フィルタ ４ 配管 ５ 流量計 ６ エア弁 ７ 圧力計 ８ 真空吸気口 DESCRIPTION OF SYMBOLS 1 Load lock room 2 Robot 3 Filter 4 Piping 5 Flow meter 6 Air valve 7 Pressure gauge 8 Vacuum inlet
Claims (2)
ック室（１）を有する半導体製造装置において、ロード
ロック室（１）内のロボット（２）にフィルタ（３）を
取付け、該ロボット（２）にはこのフィルタ（３）に内
部を経て連通しロードロック室（１）外に導出した配管
（４）を接続し、この配管（４）にエア弁（６）を介し
て真空吸気口（８）に接続してなるロードロック室内の
ロボット内部のＮ2 ガス置換装置。In a semiconductor manufacturing apparatus having a load lock chamber (1) whose atmosphere is blocked by N 2 gas, a filter (3) is attached to a robot (2) in the load lock chamber (1), and the robot (2) is mounted. ) Is connected to a pipe (4) which communicates with the filter (3) through the inside thereof and is led out of the load lock chamber (1), and the pipe (4) is connected to the vacuum intake port (5) via an air valve (6). N 2 gas replacement device in the robot of the load lock chamber formed by connecting 8).
（７）を設けてなる請求項１のロードロック室内のロボ
ット内部のＮ2 ガス置換装置。2. A pipe (4) to the flow meter (5) and a pressure gauge (7) formed by providing a first aspect of the load lock chamber robot inside the N 2 gas replacement device.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10195591U JP2564355Y2 (en) | 1991-11-15 | 1991-11-15 | N 2 lower gas replacement device inside the robot in the load lock chamber |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10195591U JP2564355Y2 (en) | 1991-11-15 | 1991-11-15 | N 2 lower gas replacement device inside the robot in the load lock chamber |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0543537U JPH0543537U (en) | 1993-06-11 |
| JP2564355Y2 true JP2564355Y2 (en) | 1998-03-09 |
Family
ID=14314306
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10195591U Expired - Fee Related JP2564355Y2 (en) | 1991-11-15 | 1991-11-15 | N 2 lower gas replacement device inside the robot in the load lock chamber |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2564355Y2 (en) |
-
1991
- 1991-11-15 JP JP10195591U patent/JP2564355Y2/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0543537U (en) | 1993-06-11 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JP2731080B2 (en) | Gas control device | |
| CN118548342B (en) | A semiconductor high-cleanliness vacuum transmission valve | |
| JPH0543537U (en) | N2 gas replacement device inside the robot inside the road lock chamber | |
| CN112610466B (en) | An air intake flow regulating device for a vacuum pump test system | |
| CN218820713U (en) | Air Conditioning Modules and Air Conditioning Systems | |
| CN116877931B (en) | A device for measuring gas flow rate and concentration under high negative pressure conditions in a pipeline. | |
| TWI296024B (en) | ||
| US20240151323A1 (en) | Vacuum switching valve and suction system using vacuum switching valve | |
| CN212510518U (en) | a purge valve | |
| CN217030141U (en) | Pneumatic regulating valve protection device of sintering furnace | |
| JP3994002B2 (en) | Ejector | |
| CN205706655U (en) | A kind of Car Relay Valve assembly | |
| JPH0437253Y2 (en) | ||
| CN217613651U (en) | Gas ballast valve and vacuum pump | |
| CN216044274U (en) | Gas protection device of vacuum pump | |
| CN116786028B (en) | Device and method for preventing smoke diffusion during separation process of vacuum equipment in vacuum pipeline | |
| CN117899583B (en) | A tail gas emission device suitable for vertical TEOS equipment | |
| CN221570263U (en) | Valve separating box of liquid phase air source | |
| CN222503502U (en) | A RTO lifting valve compressed air buffer tank | |
| CN223612381U (en) | A LOADLOCK anti-backflow air path structure | |
| JP2505727Y2 (en) | Silent piezoelectric pump | |
| CN218816848U (en) | Vacuum pump electromagnetism inflation valve air inlet of external muffler | |
| CN216154960U (en) | Sucker structure with multi-material simultaneous grabbing function | |
| KR20100073338A (en) | Vacuum pump system for semiconductor process chamber | |
| CN214466334U (en) | Check valve for air pipe |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| LAPS | Cancellation because of no payment of annual fees |