JPH0543537U - N2 gas replacement device inside the robot inside the road lock chamber - Google Patents
N2 gas replacement device inside the robot inside the road lock chamberInfo
- Publication number
- JPH0543537U JPH0543537U JP10195591U JP10195591U JPH0543537U JP H0543537 U JPH0543537 U JP H0543537U JP 10195591 U JP10195591 U JP 10195591U JP 10195591 U JP10195591 U JP 10195591U JP H0543537 U JPH0543537 U JP H0543537U
- Authority
- JP
- Japan
- Prior art keywords
- robot
- lock chamber
- load lock
- gas
- replacement device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Abstract
(57)【要約】
【目的】 ロボット内部を速やかに、かつ確実にＮ2 ガ
ス置換する。
【構成】 ロードロック室１内のロボット２にフィルタ
３を取付け、該ロボット２にはこのフィルタ３に内部を
経て連通しロードロック室１外に導出した配管４を接続
し、この配管４にエア弁６を介して真空吸気口８に接続
する。
(57) [Summary] [Purpose] The inside of the robot is swiftly and reliably replaced with N 2 gas. [Structure] A filter 3 is attached to a robot 2 in a load lock chamber 1, and a pipe 4 connected to the robot 2 through the inside and led out of the load lock chamber 1 is connected to the robot 2. It is connected to the vacuum intake port 8 via the valve 6.
Description
【０００１】[0001]
本考案は、Ｎ2 ガスによるロードロック室を有する半導体製造装置に係り、特 に、そのロードロック室内のロボット内部のＮ2 ガス置換装置に関する。The present invention relates to a semiconductor manufacturing apparatus having a load lock chamber for N 2 gas, and more particularly to an N 2 gas replacement device inside a robot in the load lock chamber.
【０００２】[0002]
図２は従来装置の１例の要部の説明用断面図である。 この従来例はロードロック室１内部の雰囲気を大気からＮ2 ガスパージもしく は真空置換によりＮ2 ガスにする際、同時にフィルタ３を介してロボット２内部 をＮ2 ガスに置換する装置である。FIG. 2 is a sectional view for explaining a main part of an example of a conventional device. This conventional example is N 2 gas purge also properly load lock chamber 1 inside the atmosphere from the atmosphere when the N 2 gas by the vacuum substitution is a device to replace the inside of the robot 2 in N 2 gas through the filter 3 at the same time.
【０００３】[0003]
しかしながら上記従来例にあっては、ロボット内部に滞留部が生じやすく、Ｎ 2 ガスの置換に長時間要し、またロボット内部を確実にＮ2 ガスに置換すること が困難であるという課題がある。 However, in the above-mentioned conventional example, a stagnant portion is likely to occur inside the robot, and N 2 It takes a long time to replace the gas, and N2There is a problem that it is difficult to substitute gas.
【０００４】 本考案の目的は、従来技術のロードロック室内に設置されたロボット内部をＮ2 ガス置換する際、置換時間が長く、確実性に欠けるという課題を解決し、ロボ ット内部を速やかに、かつ確実にＮ2 ガス置換する装置を提供することにある。An object of the present invention is to solve the problem that the replacement time is long and lacks certainty when the inside of the robot installed in the load lock chamber of the prior art is replaced with N 2 gas, and the inside of the robot is quickly replaced. In addition, it is to provide a device for surely substituting N 2 gas.
【０００５】[0005]
本考案装置は、上記課題を解決し上記目的を達成するため、図１に示すように Ｎ2 ガスにより大気を遮断したロードロック室１を有する半導体製造装置におい て、ロードロック室１内のロボット２にフィルタ３を取付け、該ロボット２には このフィルタ３に内部を経て連通しロードロック室１外に導出した配管４を接続 し、この配管４にエア弁６を介して真空吸気口８に接続してなる。In order to solve the above problems and achieve the above object, the device of the present invention is a robot in the load lock chamber 1 in a semiconductor manufacturing device having a load lock chamber 1 whose atmosphere is shut off by N 2 gas as shown in FIG. A filter 3 is attached to the robot 2, and a pipe 4 is connected to the robot 2 through the inside of the filter 3 and led out of the load lock chamber 1. The pipe 4 is connected to a vacuum intake port 8 via an air valve 6. Connected.
【０００６】[0006]
【作用】 真空吸気口８に真空ポンプ等の排気装置を接続してこれを駆動し、エア弁６を 開くことによりロボット２内部にフィルタ３を介してロードロック室１内部のＮ 2 ガスを吸入し、置換所要時間経過後、エア弁６を閉じることによりロボット２ 内部のＮ2 ガス置換動作を完了する。[Operation] An exhaust device such as a vacuum pump is connected to the vacuum intake port 8 and is driven to open the air valve 6 so that the N inside the load lock chamber 1 is introduced into the robot 2 via the filter 3. 2 After the gas is inhaled and the time required for the replacement has elapsed, the air valve 6 is closed to close the N inside the robot 2.2The gas replacement operation is completed.
【０００７】[0007]
図１は本考案装置の１実施例の要部の説明用断面図である。 本実施例は、Ｎ2 ガスにより大気を遮断したロードロック室１内のロボット２ にフィルタ３を取付け、該ロボット２にはこのフィルタ３に内部を経て連通しロ ードロック室１外に導出した配管４を接続し、この配管４に流量計５及びエア弁 ６を介して真空吸気口８を接続し、かつ該配管４に圧力計７を設けてなる。FIG. 1 is a sectional view for explaining an essential part of one embodiment of the device of the present invention. In this embodiment, a filter 3 is attached to the robot 2 in the load lock chamber 1 which is shielded from the atmosphere by N 2 gas, and the robot 2 is connected to the filter 3 through the inside and is connected to the outside of the load lock chamber 1 by a pipe. 4, a vacuum suction port 8 is connected to the pipe 4 via a flow meter 5 and an air valve 6, and a pressure gauge 7 is provided on the pipe 4.
【０００８】 上記構成の本実施例において真空吸気口８に真空ポンプ等の排気装置を接続し てこれを駆動し、エア弁６を開くことによりロボット２内部にフィルタ３を介し てロードロック室１内部のＮ2 ガスを吸入し、置換所要時間経過後、エア弁６を 閉じることによりロボット２内部のＮ2 ガス置換動作を完了する。In the present embodiment having the above-mentioned configuration, an exhaust device such as a vacuum pump is connected to the vacuum intake port 8 and driven, and the air valve 6 is opened to open the air valve 6 inside the robot 2 via the filter 3 to the load lock chamber 1 The N 2 gas inside is sucked in, and after the time required for replacement has elapsed, the air valve 6 is closed to complete the N 2 gas replacement operation inside the robot 2.
【０００９】 又、配管４に流量計５を設けることにより流量のコントロール即ち置換時間の 確認ができ、又圧力計７を設けることにより、フィルタ３等のロボット２に加わ る圧力差による応力の確認が可能となる。Further, by providing a flow meter 5 in the pipe 4, the flow rate can be controlled, that is, the replacement time can be confirmed, and by providing the pressure gauge 7, the stress due to the pressure difference applied to the robot 2 such as the filter 3 can be confirmed. Is possible.
【００１０】[0010]
上述の説明より明らかなように本考案によれば、ロボット２内部を真空吸気口 ８に接続するため、ロボット２内部に滞留部がなくなり、従ってロボット内部を 速やかにかつ確実にＮ2 ガス置換することができる。As is apparent from the above description, according to the present invention, since the inside of the robot 2 is connected to the vacuum suction port 8, there is no stagnant portion inside the robot 2 and therefore the inside of the robot is quickly and reliably replaced with N 2 gas. be able to.
【００１１】 置換時に、ロボット２からロードロック室１内部への流れが存在しないため、 ロボット２内部のパーティクルが、ロードロック室１内に拡散することを抑制す ることができる。At the time of replacement, since there is no flow from the robot 2 into the load lock chamber 1, it is possible to prevent particles inside the robot 2 from diffusing into the load lock chamber 1.
【図面の簡単な説明】[Brief description of drawings]
【図１】本考案装置の１実施例の要部の説明用断面図で
ある。FIG. 1 is a sectional view for explaining an essential part of an embodiment of the device of the present invention.
【図２】従来装置の１例の要部の説明用断面図である。FIG. 2 is a sectional view for explaining a main part of an example of a conventional device.
１ ロードロック室 ２ ロボット ３ フィルタ ４ 配管 ５ 流量計 ６ エア弁 ７ 圧力計 ８ 真空吸気口 1 load lock chamber 2 robot 3 filter 4 piping 5 flow meter 6 air valve 7 pressure gauge 8 vacuum inlet
Claims (2)
ック室（１）を有する半導体製造装置において、ロード
ロック室（１）内のロボット（２）にフィルタ（３）を
取付け、該ロボット（２）にはこのフィルタ（３）に内
部を経て連通しロードロック室（１）外に導出した配管
（４）を接続し、この配管（４）にエア弁（６）を介し
て真空吸気口（８）に接続してなるロードロック室内の
ロボット内部のＮ2 ガス置換装置。1. In a semiconductor manufacturing apparatus having a load lock chamber (1) which is shielded from the atmosphere by N 2 gas, a filter (3) is attached to a robot (2) in the load lock chamber (1), and the robot (2) is attached. ) Is connected to a pipe (4) communicating with the filter (3) through the inside and led out to the outside of the load lock chamber (1), and the pipe (4) is connected to a vacuum inlet (6) via an air valve (6). N 2 gas replacement device in the robot of the load lock chamber formed by connecting 8).
（７）を設けてなる請求項１のロードロック室内のロボ
ット内部のＮ2 ガス置換装置。 2. The N 2 gas replacement device inside the robot in the load lock chamber according to claim 1, wherein the pipe (4) is provided with a flow meter (5) and a pressure gauge (7).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10195591U JP2564355Y2 (en) | 1991-11-15 | 1991-11-15 | N 2 lower gas replacement device inside the robot in the load lock chamber |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10195591U JP2564355Y2 (en) | 1991-11-15 | 1991-11-15 | N 2 lower gas replacement device inside the robot in the load lock chamber |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0543537U true JPH0543537U (en) | 1993-06-11 |
| JP2564355Y2 JP2564355Y2 (en) | 1998-03-09 |
Family
ID=14314306
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10195591U Expired - Fee Related JP2564355Y2 (en) | 1991-11-15 | 1991-11-15 | N 2 lower gas replacement device inside the robot in the load lock chamber |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2564355Y2 (en) |
-
1991
- 1991-11-15 JP JP10195591U patent/JP2564355Y2/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JP2564355Y2 (en) | 1998-03-09 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| LAPS | Cancellation because of no payment of annual fees |