JP3426257B2 - Scanning drawing equipment - Google Patents

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a scanning type drawing apparatus which performs optical scanning with a laser for drawing.

[0002]

2. Description of the Related Art As shown in FIG. 9, a scanning type drawing apparatus divides a drawing surface 92 on a table 91 into a plurality of lanes, and a spot of a laser beam sequentially scans each lane. .

In such a scanning drawing apparatus, for example,
The spot is the initial position of the lane 92A, that is, the starting point 201.
If this spot exists, this spot moves in the lane 92A in the main scanning direction which is the same direction as the arrow Q by the scanning of the light beam performed by the scanning optical system (not shown), and when the table 91 moves in the same direction as the arrow R. , Moves in the lane 92A in the sub-scanning direction. By these main scanning and sub-scanning, the spot moves from the start point 201 to the end point 202 on the drawing surface 92.
Are scanned, and a scanning line (the line actually drawn) inclined with respect to the main scanning direction is drawn. Then, the spot is
From the end point 202 to the next start point 203, a scanning line inclined with respect to the main scanning direction is drawn again.

When the spot reaches the end point 204 of the lane 92A, the spot 91 is moved by moving the table 91.
From 4, the start point 205 which is the initial position of the next lane 92B
Then, the scanning line tilted with respect to the main scanning direction is drawn again.

[0005]

By the way, in such a scanning type drawing apparatus, that is, the scanning type drawing apparatus in which the main scanning is divided into a plurality of lanes and the number of sub-scanning is plural, the following problems occur. is there. (1) When the scanning line is drawn, the conventional scanning drawing apparatus keeps the sub-scanning direction constant, and once the table sent for the sub-scanning is returned to the initial position again, the drawing of the next lane is performed. As a result, there is a loss of time. In particular, in an apparatus that requires high drawing accuracy, the table moving speed is generally low because the table moving also requires high accuracy. Therefore, in such a device, the drawing time increases due to the low table moving speed and the loss time for returning the table to the initial position.

(2) When the scanning line is drawn, when the table 91 of FIG. 9 is moved back and forth in order to reduce the loss of time, as shown in FIG. 10, for example, the scanning lines of the adjacent lanes 92A and 92B are moved. , The inverted "C" shape is formed, and the continuity of the drawn scan line pattern is lost at the lane boundary.

(3) When the main scan is tilted in order to make the scan line perpendicular to the sub-scan, it becomes perpendicular to the lane in one direction, but rather to the lane in the opposite direction. The inclination increases.

[0008]

SUMMARY OF THE INVENTION The present invention has been made in view of these problems, and when drawing a scanning line by reciprocating a table, the directions of all the drawn scanning lines are aligned and the drawing is performed by the reciprocating movement. It is an object of the present invention to provide a scanning drawing device that enables the above.

[0009]

In order to achieve the object, the present invention deflects a light source for emitting a light beam for drawing and a light beam from the light source, and deflects the deflected light beam in a predetermined direction or in the opposite direction. Deflecting means for scanning in the direction of, and a scanning lens for converging the light flux from the polarizing means on the drawing surface,
The drawing surface is moved stepwise in a predetermined direction, and the drawing surface is reciprocated in a direction substantially perpendicular to the predetermined direction so that the drawing surface can be scanned for each lane. The control means controls the deflecting means every time the lane is switched to switch the scanning direction of the light beam to the opposite direction .

[0010]

DESCRIPTION OF THE PREFERRED EMBODIMENTS The present invention will be described below with reference to the drawings.

[0011]

First Embodiment FIG. 1 shows a first embodiment of a scanning drawing apparatus according to the present invention.

The scanning drawing apparatus comprises a light source 11, a deflecting means 12, a control section 13 which is a control means, a scanning lens 14 and a table 15.

The light source 11 includes a scanning laser 11A which emits a drawing light beam, a converging lens 11B which converges the laser light beam emitted from the scanning laser 11A, and a converging lens 1.
A / 0 modulator 11 for modulating the light flux converged by 1B
C and a collimator lens 11D that converts the light flux from the A / 0 modulator 11C into a parallel light flux.

The deflecting means 12 is a polygon mirror 12A.
And a motor drive unit 12C that can rotate the motor 12B in the normal or reverse direction under the control of the control unit 13.

When the motor 12B rotates in the normal direction, the polygon mirror 12A rotates in the direction of arrow A, and the light source 11
The drawing light flux from is reflected and this light flux is scanned in the direction of arrow B. When the motor 12B rotates in the reverse direction, the motor 12B rotates in the direction opposite to the arrow A, and the light beam is scanned in the direction opposite to the arrow B.

The scanning lens 14 is a polygon mirror 12A.
The light flux reflected by is converged on the drawing surface 16 of the table 15.

The table 15 is, as shown in FIG.
It moves stepwise in the direction of arrow C for each width W, and reciprocates in a direction substantially perpendicular to the direction of arrow C, that is, in the direction of arrow D or in the direction opposite to arrow D.

The control unit 13 controls the forward / reverse rotation of the motor 12B as described above. At this time, the control unit 13
Performs control such that the rotation direction of the motor 12B is switched every time the table 15 moves stepwise in the direction of arrow C in FIG.

Next, the operation of the first embodiment will be described.

The light beam from the light source 11 is deflected and scanned by the polygon mirror 12A of the deflecting means 12 in which the motor 12B is rotating normally, and the scanning lens 14 is used to scan the table 1.
5 is converged on the drawing surface 16. The spot of the light flux converged on the drawing surface 16 first scans the lane 16A in FIG.

At this time, the main scanning direction of the spot is changed by the rotation of the polygon mirror 12A in the direction of arrow A in FIG.
The direction is opposite to the arrow C. On the other hand, the sub-scanning direction of the spot is changed by the movement of the table 15 in the arrow D direction.
The direction is opposite to the arrow D.

By such main scanning and sub-scanning of the spot, the spot moves from the start point 101 to the end point 102. As a result, one scan is performed and a scan line inclined with respect to the main scan direction is drawn. When this scanning ends, the spot moves to the next start point 103, and the same scanning is performed. When the spot reaches end point 104, scanning in lane 16A ends.

When the scan in the lane 16A is completed, the table 15 moves in the direction C by the width W, and the next lane 16 is moved.
The scan at B is started.

At this time, the control unit 13 controls the drive unit 12C to switch the rotation of the motor 12B from normal rotation to reverse rotation. As a result, the polygon mirror 12A rotates in the direction opposite to the arrow A and causes the light beam from the light source 11 to scan in the direction opposite to the arrow B. As a result, the main scanning direction of the spot on the drawing surface 16 is the direction of arrow C in FIG.

Further, the table 15 starts moving in the direction opposite to the arrow D. As a result, the sub-scanning direction of the spot becomes the direction of arrow D.

By these main and sub scans, the spot is
The lane 16B moves from the start point 105 to the end point 106.
As a result, one scan is performed and a scan line inclined with respect to the main scan direction is drawn. When this scanning ends, the spot moves to the next start point 107, and the same scanning is performed.

When the spot reaches the end point 108 of the lane 16B, the scanning in the lane 16B is completed and the table 15
Moves the width W in the direction of arrow C, and then moves the arrow D
Start moving in the direction of. At the same time, the control unit 13 controls the drive unit 12C to switch the rotation of the motor 12B from reverse rotation to forward rotation. As a result, the polygon mirror 12A is
By rotating in the direction of arrow A and scanning the light beam from the light source 11 in the direction of arrow B, the spot performs the same scanning as in lane 16A in the next lane. Thereafter, scanning is performed in each lane in the same manner.

As described above, the first embodiment switches the rotation direction of the polygon mirror when scanning the next lane,
By reversing the main scanning direction of the spots, the directions of the drawn scanning lines can be aligned, and the scanning lines can be drawn by the reciprocating movement of the table, and the drawing time can be shortened.

[0029]

Second Embodiment FIG. 3 shows a second embodiment of the scanning drawing apparatus according to the present invention.

In the second embodiment, the deflection means shown in FIG.
As shown in FIG. 3, the deflection unit 31 and the drive unit 36 are used, but the other parts are the same as those in the embodiment of FIG.

The deflection unit 31 includes a first motor 32 that constantly rotates in the direction of arrow E, a second motor 34 that always rotates in the opposite direction of arrow E, and a first polygon mirror 33. And a second polygon mirror 35.

The polygon mirror 33 is rotated in the direction of arrow E by the motor 32, and when a light beam from the light source is incident, it reflects this light beam and, as shown in FIG.
The main scanning direction of the spot on the drawing surface 16 is opposite to the arrow C.

The polygon mirror 35 is rotated in the direction opposite to the arrow E by the motor 34, and when the drawing light beam from the light source is incident, the polygon mirror 35 reflects this light beam and the main spot of the spot on the drawing surface 16 is reflected. The scanning direction is the direction of arrow C.

The drive unit 36 is connected to the deflection unit 31 by an arm 36B, and slides the deflection unit 31 in the arrow F direction or the opposite direction under the control of the control unit 13. In this case, when the table 15 in FIG. 2 moves in the direction of arrow D, the drive unit 36 causes the drawing light beam from the light source to enter the polygon mirror 33, and the table 15 moves in the direction opposite to arrow D. At this time, the deflection unit 31 is slid so that the drawing light beam from the light source is incident on the polygon mirror 35.

The deflection unit 31 and the driving unit 3 having the above structure
With 6, the scanning on the drawing surface is performed as follows.

The drawing light beam from the light source 11 is deflected and scanned by the polygon mirror 33 of the deflection unit 31, and converged on the drawing surface 16 of the table 15 by the scanning lens 14. The spot of the light flux converged on the drawing surface 16 is
First, scan lane 16A in FIG.

At this time, the main scanning direction of the spot is opposite to the direction of arrow C in FIG. 2 due to the rotation of the polygon mirror 33 in the direction of arrow E. On the other hand, the sub-scanning direction of the spot is changed by the movement of the table 15 in the direction of arrow D.
The direction is opposite to the arrow D. With such main / sub scanning, the spot scans the lane 16A.

When the scan in the lane 16A is completed, the table 15 moves in the direction of the arrow C by the width W, and the scan in the next lane 16B is started.

At this time, the drive section 36 slides the deflection unit 31 in the direction of arrow F under the control of the control section 13 so that the light flux from the light source is incident on the polygon mirror 35. The polygon mirror 35 rotating in the opposite direction to the polygon mirror 33 reflects this luminous flux and sends it to the table 15. As a result, the main scanning direction of the spot becomes the direction of arrow C in FIG.

Further, the table 15 starts moving in the direction opposite to the arrow D. As a result, the sub-scanning direction of the spot becomes the same direction as the arrow D. With such main / sub scanning, the spot scans the lane 16B.

When the spot reaches the end point 108 of the lane 16B, the scanning in the lane 16B is completed and the table 15
Moves the width W in the direction of arrow C, and then moves the arrow D
Start moving in the direction of. At the same time, the drive unit 36 slides the deflection unit 31 in the direction opposite to the arrow F under the control of the control unit 13 so that the light flux from the light source is reflected by the polygon mirror 3.
3. As a result, the spot is in lane 16
The same scan as in A is performed in lane 16C. Thereafter, scanning is performed in each lane in the same manner.

As described above, in the second embodiment, when scanning the next lane, the entire deflection unit is slid to switch the main scanning direction of the spot, so that the directions of the drawn scanning lines are aligned and the table reciprocates. Scan lines can be drawn by moving, and the drawing time can be shortened. In addition, the second embodiment is
Compared to the first embodiment in which the rotation of the polygon mirror is reversed and the scanning direction of the spot is changed, the time until the scanning of the next lane can be further shortened.

[0043]

Third Embodiment FIG. 4 shows a third embodiment of the scanning drawing apparatus according to the present invention.

In the third embodiment, the deflection means shown in FIG.
1 is used, but the others are the same as the embodiment of FIG.

The deflecting means is always rotating in the direction of arrow G, the first motor 41, the second motor 43 is always rotating in the opposite direction of arrow G, and the first polygon mirror 42.
And a second polygon mirror 44 and a mirror section 45.

The polygon mirror 42 is rotated in the direction of arrow G by the motor 41, reflects the light beam from the mirror portion 45 and sends it to the scanning lens 14. For this reason, the reflecting surface of the polygon mirror 42 is inclined. The polygon mirror 42 deflects and scans the light flux from the mirror portion 45 so that the main scanning direction of the spot on the drawing surface 16 in FIG. 2 is opposite to the arrow C.

The polygon mirror 44 is rotated in the direction opposite to the arrow G by the motor 43, reflects the light beam from the mirror portion 45 and sends it to the scanning lens 14. For this reason, the reflecting surface of the polygon mirror 42 is inclined. The polygon mirror 44 deflects and scans the light flux from the mirror section 45 so that the main scanning direction of the spot on the drawing surface 16 in FIG.

The mirror section 45 includes a mirror 45A and a rotating device 45B.

The mirror 45A is rotated by a certain angle in the direction of arrow H or the opposite direction by the rotating device 45B, and the drawing light beam from the light source is polygon mirror 42 or 4.
Reflect toward 4.

Under the control of the controller 13, the rotating device 45B rotates the mirror 45A about the shaft 45C in the direction of arrow H or in the opposite direction by a certain angle. In this case, the rotating device 45B reflects the light flux from the light source to the polygon mirror 42 when the table 15 of FIG. 2 moves in the direction of arrow D, and when the table 15 moves in the direction opposite to arrow D. The mirror 45A is rotated so that the light flux is reflected by the polygon mirror 44.

When such a deflecting means is used, the scanning on the drawing surface is performed as follows.

The light beam from the light source is deflected and scanned by the polygon mirror 42, and the scanning lens 14 causes the table 1 to move.
5 is converged on the drawing surface 16. The spot of the light flux converged on the drawing surface 16 first scans the lane 16A in FIG.

At this time, the main scanning direction of the spot is opposite to the arrow C in FIG. 2 due to the rotation of the polygon mirror 42 in the direction of the arrow G. On the other hand, the sub-scanning direction of the spot is changed by the movement of the table 15 in the arrow D direction.
The direction is opposite to arrow D. With such main / sub scanning, the spot scans the lane 16A.

When the scan in the lane 16A is completed, the table 15 moves in the direction of the arrow C by the width W, and the scan in the next lane 16B is started.

At this time, the rotating device 45B of the mirror unit 45
Under the control of the control unit 13, the mirror 45A is rotated by a certain angle in the direction of the arrow H, and the mirror 45A reflects the light flux from the light source toward the polygon mirror 44. As a result, the main scanning direction of the spot becomes the direction of arrow C in FIG.

Further, the table 15 starts moving in the direction opposite to the arrow D. As a result, the sub-scanning direction of the spot becomes the direction of arrow D. With such main / sub scanning, the spot scans the lane 16B.

When the spot reaches the end point 108 of the lane 16B, the scanning in the lane 16B ends, and the table 15
Moves the width W in the direction of arrow C, and then moves the arrow D
Start moving in the direction of. At the same time, under the control of the control unit 13, the rotation device 45B rotates the mirror 45A in the direction opposite to the arrow H by a certain angle to reflect the light flux from the light source to the polygon mirror 42. This makes the spot
The same scan as in lane 16A is performed in lane 16C. Thereafter, scanning is performed in each lane in the same manner.

As described above, in the third embodiment, when scanning the next lane, the mirror is rotated by a certain angle to switch the main scanning direction of the spot, so that the directions of the drawn scanning lines are aligned and the table is moved. The scanning line can be drawn by the reciprocating movement of, and the drawing time can be shortened. In addition, in Example 3,
Compared with the second embodiment in which the entire deflection unit is slid to switch the scanning direction of the spot, the scanning direction of the spot can be switched with a simple structure.

In the second and third embodiments, if the incident light beam is deflected and scanned by tilting and rotating the rotation axis of the polygon mirror, it is possible to draw on the drawing surface without tilting the scanning line. For example, as shown in FIG. 5, the main scanning direction of the spot on the lane 16A is tilted in the direction of arrow J, and the main scanning direction of the lane 16B is tilted in the direction of arrow K without tilting the scanning line. You can draw.

[0060]

Fourth Embodiment FIG. 6 shows a fourth embodiment of the scanning drawing apparatus according to the present invention.

This scanning drawing apparatus comprises a light source 11, a deflecting means 61, a switching means 62, a control section 63 for controlling the switching means 62, a scanning lens 14 and a table 15. In FIG. 6, the same parts as those in FIG. 1 are designated by the same reference numerals and the description thereof will be omitted.

The deflecting means 61 comprises a motor 61A which rotates in a fixed direction, and a polygon mirror 61B which is rotated by the motor 61A and which reflects and scans the drawing light beam from the light source 11.

The switching means 62 comprises a relay lens 64 for relaying the light flux from the deflecting means 61, a switching portion 65, and a relay lens 67 for relaying the light flux from the switching portion 65 to the scanning lens 14.

The switching section 65 includes an image rotator 66 as shown in FIG.

The image rotator 66 has an incident end face 66.
The image incident on A is reflected by the reflection surfaces 66B, 66C, 66D and emitted from the emission end surface 66E. At this time, the image L1 parallel to the short side 66F of the reflecting surface 66B is emitted as the same image L2 as the image L1. Further, the image M1 which is orthogonal to the image L1 is
The image is output as an image M2 rotated by 180 °. Due to this property, the light beam scanning in the direction indicated by the image L1 is scanned in the direction indicated by the image L2 after being emitted from the image rotator 66, and the light beam scanning in the direction indicated by the image M1 is scanned in the direction indicated by the image M2. To do.

Furthermore, when the table 15 moves in the direction of arrow D in FIG. 2 under the control of the control unit 63, the switching unit 65, as shown in FIG.
The light flux from is incident on the image rotator 66. That is, the relay lens 6 is scanned in the direction of the arrow N1.
The light flux from No. 4 is incident on the incident end surface 66A as a light flux scanned in a direction parallel to the short side of the reflecting surface 66B. Therefore, the image rotator 66 emits the light flux scanned in the same direction as the incident light flux, that is, the direction of the arrow N2, from the emission end surface 66E. Further, when the table 15 moves in the direction opposite to the arrow D in FIG.
Under the control of the control unit 63, the image rotator 66 is rotated 90 ° in the direction of arrow P about the optical axis 301,
The state shown in FIG. As a result, the relay lens 6
The light flux from No. 4 is incident on the incident end surface 66A as a light flux scanned in a direction perpendicular to the short side of the reflecting surface 66B. Therefore, the image rotator 66 emits the light beam scanned in the direction opposite to the incident light beam, that is, the direction of the arrow N3.

Next, the operation of the fourth embodiment will be described.

The light flux from the light source 11 is incident on the switching section 65 via the deflecting means 61 and the relay lens 64. The switching unit 65 emits the light flux scanned in the same direction as the incident light flux to the table 15 via the relay lens 67. The spot of the light flux converged on the drawing surface 16 of the table 15 first scans the lane 16A in FIG. At this time, the main scanning direction of the spot is opposite to the arrow C of FIG. On the other hand, the sub-scanning direction of the spot is the opposite direction of the arrow D due to the movement of the table 15 in the arrow D direction. By such main / sub scanning of the spot, scanning in the lane 16A is performed as shown in FIG.

When the scan in the lane 16A is completed, the table 15 moves in the direction C by the width W, and the next lane 16A is moved.
The scan at B is started. At this time, the switching unit 65 controls the image rotator 66 to 90 by the control of the control unit 63.
It rotates by a degree and emits a light beam which is scanned in the direction opposite to the incident direction. As a result, the main scanning direction of the spot on the drawing surface 16 is the direction of arrow C in FIG. On the other hand, the table 15 moves in the direction opposite to the arrow D of FIG. 2, and the sub-scanning direction of the spot is the direction of the arrow D. The scan in the lane 16B is performed by these main / sub scans.

When the scanning of the lane 16B is completed, the table 15 moves in the direction of arrow C by the width W, and then starts moving in the direction of arrow D. At the same time, the control unit 63
Controls the switching unit 65 to rotate the image rotator 66 by 90 °. As a result, the spot is in lane 1.
A scan similar to 6A is performed in lane 16C. Thereafter, scanning is performed in each lane in the same manner.

As described above, in the fourth embodiment, when the next lane is scanned, the main scanning direction of the spot is reversed by the rotation of the image rotator of the switching unit, so that the directions of the drawn scanning lines are aligned. The scanning line can be drawn by the reciprocating movement of the table, and the drawing time can be shortened. Further, in the fourth embodiment, as in the second and third embodiments, the polygon mirror is replaced by two.
Therefore, the structure of the deflecting means can be simplified.

[0072]

As described above, according to the present invention, when the lane to be scanned next moves, the directions of all the scanning lines drawn on the drawing surface are reversed by reversing the main scanning direction of the spot. Since the lines are aligned, it is possible to draw a scanning line by reciprocating the table. Furthermore, this can reduce the drawing time of the scanning line.

[Brief description of drawings]

FIG. 1 is an explanatory diagram of a scanning drawing apparatus according to a first embodiment.

FIG. 2 is an explanatory diagram of drawing according to the first embodiment.

FIG. 3 is an explanatory diagram of a scanning drawing apparatus according to a second embodiment.

FIG. 4 is an explanatory diagram of a scanning drawing apparatus according to a third embodiment.

FIG. 5 is an explanatory diagram of drawing.

FIG. 6 is an explanatory diagram of a scanning drawing apparatus according to a fourth embodiment.

FIG. 7 is an explanatory diagram of an image rotator according to a fourth embodiment.

FIG. 8 is an explanatory diagram of an image rotator according to a fourth embodiment.

FIG. 9 is an explanatory diagram of drawing by a conventional scanning drawing apparatus.

FIG. 10 is an explanatory diagram of drawing by a conventional scanning drawing apparatus.

[Explanation of symbols]

11 light source 12 Deflection means 13 Control means (control section) 14 Scan lens 15 tables 16 Drawing surface

Claims (6)

(57) [Claims] 1. A light source for emitting a light beam for drawing, a deflecting means for deflecting the light beam from the light source, and for scanning the deflected light beam in a predetermined direction or in a direction opposite to this direction, and from the polarizing means. A scanning lens for converging a light flux on the drawing surface, and the drawing surface moving in the predetermined direction and in stages, and reciprocating the drawing surface in a direction substantially perpendicular to the predetermined direction to perform the drawing. A table that allows the surface to be scanned for each lane, and each time the lane of the drawing surface is switched by the table, the deflection unit is controlled,
A scanning drawing apparatus comprising: a control unit that switches a scanning direction of a light beam to a reverse direction . 2. The deflection means switches a forward / reverse rotatable motor, a polygon mirror driven by the motor to reflect a light beam from the light source to the scanning lens, and a lane on the drawing surface. The scanning drawing apparatus according to claim 1, further comprising: a motor drive unit that rotates the motor forward or backward under the control of the control unit. 3. The deflecting means includes first and second motors for normal rotation and reverse rotation, respectively, a light beam from the light source is reflected by the scanning lens, and is rotationally driven by the first and second motors. Each time the lane of the drawing surface is switched to the first and second polygon mirrors, respectively, the first and second polygon mirrors are moved by the control of the control means so that the light flux from the light source is emitted. The scanning drawing apparatus according to claim 1, further comprising a driving unit that reflects the light on the first or second polygon mirror. 4. The deflecting means includes first and second motors for normal rotation and reverse rotation, respectively, and a second motor for reflecting a light beam to the scanning lens and rotationally driven by the first and second motors, respectively. The first and second polygon mirrors, and a mirror unit that reflects the light flux from the light source to the first or second polygon mirror under the control of the control unit each time the lane of the drawing surface is switched. The scanning drawing apparatus according to claim 1, wherein: 5. A light source that emits a light beam for drawing, a deflection unit that deflects the light beam from the light source and scans the deflected light beam in a predetermined direction, and a light beam from the deflection unit in a predetermined direction or in this direction. Switching means for switching in the opposite direction, a scanning lens for converging the light flux from the switching means on the drawing surface, and moving the drawing surface in the predetermined direction stepwise and substantially in the predetermined direction. A table that reciprocally moves the drawing surface in a direction perpendicular to each other so that the drawing surface can be scanned for each lane, and each time the lane of the drawing surface is switched by the table, the switching means is controlled to control the luminous flux. And a control means for switching the scanning direction of the scanning direction to the opposite direction . 6. The switching means comprises an image rotator capable of switching the scanning direction of the light flux, and the control means controls the image rotator to rotate the image rotator by a predetermined angle to shift the light flux from the deflection means. The scanning drawing apparatus according to claim 5, further comprising a switching unit that switches to a predetermined direction or a direction opposite to this direction and emits the light to the scanning lens.