JP6722724B2 - 真空ポンプ - Google Patents

真空ポンプ Download PDF

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Publication number
JP6722724B2
JP6722724B2 JP2018133907A JP2018133907A JP6722724B2 JP 6722724 B2 JP6722724 B2 JP 6722724B2 JP 2018133907 A JP2018133907 A JP 2018133907A JP 2018133907 A JP2018133907 A JP 2018133907A JP 6722724 B2 JP6722724 B2 JP 6722724B2
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JP
Japan
Prior art keywords
pump
vacuum pump
tap
rotor
inlet opening
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JP2018133907A
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English (en)
Japanese (ja)
Other versions
JP2019049257A (ja
Inventor
トビアス・シュトル
ミヒャエル・シュヴァイクヘーファー
マルティン・ローゼ
ヤン・ホフマン
フローリアーン・シュナイダー
Original Assignee
プファイファー・ヴァキューム・ゲーエムベーハー
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Publication date
Application filed by プファイファー・ヴァキューム・ゲーエムベーハー filed Critical プファイファー・ヴァキューム・ゲーエムベーハー
Publication of JP2019049257A publication Critical patent/JP2019049257A/ja
Application granted granted Critical
Publication of JP6722724B2 publication Critical patent/JP6722724B2/ja
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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/40—Casings; Connections of working fluid
    • F04D29/52—Casings; Connections of working fluid for axial pumps
    • F04D29/522—Casings; Connections of working fluid for axial pumps especially adapted for elastic fluid pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/60—Mounting; Assembling; Disassembling
    • F04D29/601—Mounting; Assembling; Disassembling specially adapted for elastic fluid pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
    • F05D2250/00—Geometry
    • F05D2250/10—Two-dimensional
    • F05D2250/12—Two-dimensional rectangular
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
    • F05D2250/00—Geometry
    • F05D2250/50—Inlet or outlet
    • F05D2250/51—Inlet

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Structures Of Non-Positive Displacement Pumps (AREA)
JP2018133907A 2017-07-21 2018-07-17 真空ポンプ Active JP6722724B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
EP17182496.4A EP3296571B1 (de) 2017-07-21 2017-07-21 Vakuumpumpe
EP17182496.4 2017-07-21

Publications (2)

Publication Number Publication Date
JP2019049257A JP2019049257A (ja) 2019-03-28
JP6722724B2 true JP6722724B2 (ja) 2020-07-15

Family

ID=59384025

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2018133907A Active JP6722724B2 (ja) 2017-07-21 2018-07-17 真空ポンプ

Country Status (2)

Country Link
EP (1) EP3296571B1 (de)
JP (1) JP6722724B2 (de)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP3564538B1 (de) * 2019-02-20 2021-04-07 Pfeiffer Vacuum Gmbh Vakuumsystem und verfahren zur herstellung eines solchen
EP4293232B1 (de) * 2023-10-17 2026-05-06 Pfeiffer Vacuum Technology AG Turbomolekularpumpe

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4331589C2 (de) * 1992-12-24 2003-06-26 Pfeiffer Vacuum Gmbh Vakuumpumpsystem
US6193461B1 (en) * 1999-02-02 2001-02-27 Varian Inc. Dual inlet vacuum pumps
DE102006020710A1 (de) * 2006-05-04 2007-11-08 Pfeiffer Vacuum Gmbh Vakuumpumpe mit Gehäuse
DE102007010068B4 (de) * 2007-02-28 2024-06-13 Thermo Fisher Scientific (Bremen) Gmbh Vakuumpumpe oder Vakuumapparatur mit Vakuumpumpe
DE102014110078A1 (de) * 2014-07-17 2016-01-21 Pfeiffer Vacuum Gmbh Vakuumsystem
GB2538962B (en) * 2015-06-01 2019-06-26 Edwards Ltd Vacuum pump

Also Published As

Publication number Publication date
EP3296571B1 (de) 2021-11-03
EP3296571A1 (de) 2018-03-21
JP2019049257A (ja) 2019-03-28

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