JPH01100093U - - Google Patents
Info
- Publication number
- JPH01100093U JPH01100093U JP19493387U JP19493387U JPH01100093U JP H01100093 U JPH01100093 U JP H01100093U JP 19493387 U JP19493387 U JP 19493387U JP 19493387 U JP19493387 U JP 19493387U JP H01100093 U JPH01100093 U JP H01100093U
- Authority
- JP
- Japan
- Prior art keywords
- reaction tube
- pillar
- clamp
- lid
- flange
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000003795 desorption Methods 0.000 claims 1
- 238000001947 vapour-phase growth Methods 0.000 description 1
Landscapes
- Chemical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19493387U JPH01100093U (th) | 1987-12-24 | 1987-12-24 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19493387U JPH01100093U (th) | 1987-12-24 | 1987-12-24 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01100093U true JPH01100093U (th) | 1989-07-05 |
Family
ID=31485636
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP19493387U Pending JPH01100093U (th) | 1987-12-24 | 1987-12-24 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01100093U (th) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH04163917A (ja) * | 1990-10-29 | 1992-06-09 | Fujitsu Ltd | 半導体の製造装置 |
| JP2008251927A (ja) * | 2007-03-30 | 2008-10-16 | Koyo Thermo System Kk | 熱処理容器 |
-
1987
- 1987-12-24 JP JP19493387U patent/JPH01100093U/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH04163917A (ja) * | 1990-10-29 | 1992-06-09 | Fujitsu Ltd | 半導体の製造装置 |
| JP2008251927A (ja) * | 2007-03-30 | 2008-10-16 | Koyo Thermo System Kk | 熱処理容器 |
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