JPH01100892A - Thin film EL element - Google Patents

Thin film EL element

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Publication number
JPH01100892A
JPH01100892A JP62256604A JP25660487A JPH01100892A JP H01100892 A JPH01100892 A JP H01100892A JP 62256604 A JP62256604 A JP 62256604A JP 25660487 A JP25660487 A JP 25660487A JP H01100892 A JPH01100892 A JP H01100892A
Authority
JP
Japan
Prior art keywords
thin film
laminated
base material
insulating film
elements
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP62256604A
Other languages
Japanese (ja)
Inventor
Naoya Tsurumaki
直哉 鶴巻
Satoshi Tanda
聡 丹田
Takashi Nire
孝 楡
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Komatsu Ltd
Original Assignee
Komatsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Komatsu Ltd filed Critical Komatsu Ltd
Priority to JP62256604A priority Critical patent/JPH01100892A/en
Publication of JPH01100892A publication Critical patent/JPH01100892A/en
Pending legal-status Critical Current

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  • Electroluminescent Light Sources (AREA)

Abstract

PURPOSE:To make it possible to obtain a high brightness with a low driving voltage by adding one or more elements of Sc, Y, La, Li, Na, K, Pb, Cs, Mo, Co, Cr, and Gd as the doping material. CONSTITUTION:On a transparent substrate 1 such as a glass substrate, a trans parent electrode 2 of ITO or the like is laminated. Then the first insulating membrane 3 consisting of Ta2O5 or the like is laminated 0.6mum in the spattering. After that, a luminous layer 4 using ZnS as the basic material, Mn as the lumi nous center, and one or more elements of Sc, Y, La, Li, Na, K, Pb, Cs, Mo, Co, Cr, and Gd as the doping material is laminated 0.35mum in the MSD method.

Description

【発明の詳細な説明】 (産業上の利用分野) 本発明は、低電圧駆動で高輝度を得ることのできる薄膜
EL素子において、その発光層に添加するドープ材に関
するものである。
DETAILED DESCRIPTION OF THE INVENTION (Field of Industrial Application) The present invention relates to a dopant added to a light-emitting layer of a thin film EL element that can achieve high brightness with low voltage driving.

(従来の技術) 薄膜EL素子は、輝度が高く、薄膜で構成されていると
いう点から、次世代のフラットデイスプレィパネルに応
用できる表示素子として有力な候補となっている。
(Prior Art) Thin-film EL elements have high brightness and are composed of thin films, so they are promising candidates as display elements that can be applied to next-generation flat display panels.

従来の薄膜EL素子の二重絶縁膜構造を第4図に示す、
透明基板1上に、ITOなどからなる透明電極2と、T
 a t Osなどからなる第1絶縁膜3と、母材(Z
nS等)と発光中心物質(Mn等)とからなる発光層7
と、T a z Os等からなる第2絶縁膜5と、金属
電極6とを順次積層して構成されている。
The double insulating film structure of a conventional thin film EL element is shown in Figure 4.
On a transparent substrate 1, a transparent electrode 2 made of ITO or the like, and a T
The first insulating film 3 made of a t Os or the like and the base material (Z
A light-emitting layer 7 consisting of a luminescent center substance (Mn, etc.) and a luminescent center substance (Mn, etc.)
, a second insulating film 5 made of T az Os or the like, and a metal electrode 6 are sequentially laminated.

次に、二重絶縁膜構造の薄膜絶縁膜素子の発光メカニズ
ムについて説明する。
Next, a light emitting mechanism of a thin film insulating film element having a double insulating film structure will be explained.

上記説明した、薄膜EL素子の透明電極2と金属電極6
に交流電界を印加すると、第1絶縁膜3と、第2絶縁膜
5を介して発光層7に電界が印加される。そして、その
電界により母材中に存在する価電子帯にある電子が、エ
ネルギーを受けとり伝導帯に多数存在するようになる(
電子なだれ現象)。
Transparent electrode 2 and metal electrode 6 of the thin film EL element explained above
When an alternating current electric field is applied to the light emitting layer 7 through the first insulating film 3 and the second insulating film 5, the electric field is applied to the light emitting layer 7. Then, due to the electric field, electrons in the valence band existing in the base material receive energy and become present in large numbers in the conduction band (
electronic avalanche phenomenon).

この電子なだれ現象がおきたとき、4移、動電筒が増加
し多数の発光中心物質を励起状態にする。
When this electron avalanche phenomenon occurs, the number of 4-transfer electron tubes increases and a large number of luminescent center substances are brought into an excited state.

そして励起状態の電子が基底状態にもどる時、そのエネ
ルギーを光に変換して放出し、薄膜EL素子は発光する
When the electrons in the excited state return to the ground state, the energy is converted into light and released, causing the thin film EL element to emit light.

(発明が解決しようとする問題点) 従来の薄膜EL素子は、前記移動電荷に母材中に存在す
る価電子帯にある電子を用いていたが移動電荷量は充分
ではなく、そのため薄膜EL素子を発光させるためには
、高駆動電圧が必要であり、高電圧を印加する割には、
高輝度を得ることができなかった。
(Problems to be Solved by the Invention) Conventional thin film EL devices use electrons in the valence band existing in the base material as the moving charges, but the amount of moving charges is not sufficient, and therefore thin film EL devices In order to emit light, a high driving voltage is required, and even though a high voltage is applied,
I couldn't get high brightness.

本発明は、上記問題点に鑑み低電圧駆動、高輝度の薄膜
EL素子を得ることのできる構造を提供することを目的
とする。
SUMMARY OF THE INVENTION In view of the above-mentioned problems, an object of the present invention is to provide a structure capable of obtaining a thin film EL element driven at a low voltage and having high brightness.

(問題点を解決するための手段及び作用)上記問題点を
解決するために、本発明では、ドープ材として、Sc、
YS La、L t、NaK、Pb、Cs、Mo、C0
1Cr、Gdのうち1種類あるいは多種類の元素を、発
光層に添加する。
(Means and effects for solving the problems) In order to solve the above problems, the present invention uses Sc,
YS La, Lt, NaK, Pb, Cs, Mo, C0
One or more types of elements among 1Cr and Gd are added to the light emitting layer.

発光層に添加されたドープ材の価電子は、薄膜EL素子
に電界が印加されると、移動電荷となり、発光中心物質
の基底状態の電子にぶつかりそれを励起状態にする。従
来の母材中に存在していた価電子のみを用いたのにくら
べて、ドープ材を添加することにより、移動電荷は、多
量になり発光中心物質の基底状態の電子により多くぶつ
かることになる。
When an electric field is applied to the thin film EL element, the valence electrons of the dopant added to the light emitting layer become mobile charges and collide with the ground state electrons of the luminescent center substance to excite them. Compared to conventional methods that use only valence electrons that exist in the base material, by adding a dopant, the amount of mobile charges increases and more electrons collide with the ground state electrons of the luminescent center substance. .

従って、励起状態の電子が、増加し、発光量が増加する
Therefore, the number of excited-state electrons increases and the amount of light emission increases.

(実施例) 以下、図面に従って本発明の薄膜EL素子を説明する。(Example) The thin film EL device of the present invention will be described below with reference to the drawings.

母材としてZnS、発光中心物質としてMn、ドープ材
とし−てScとKを用いた場合を例にとり説明する。第
1図に、本発明の薄膜EL素子の一実施例の断面図を示
す。
An example will be explained in which ZnS is used as the base material, Mn is used as the luminescent center substance, and Sc and K are used as the dopant materials. FIG. 1 shows a cross-sectional view of an embodiment of the thin film EL element of the present invention.

ガラス基板などの透明基板1上に、ITO等からなる透
明電極2を積層する0次にT a z OS等からなる
第1tPA縁膜3を0.6μmスバ・フタ法で積層する
。そして、母材としてZnS、発光中心としてMn、 
 ドープ材としてScとKとからなる発光層4をMSD
法で0635μm積層する。
On a transparent substrate 1 such as a glass substrate, a transparent electrode 2 made of ITO or the like is laminated, and a first tPA film 3 made of zero-order T az OS or the like is laminated by a 0.6 μm sub-lid method. Then, ZnS is used as the base material, Mn is used as the luminescent center,
The light emitting layer 4 made of Sc and K as dopants is MSD
A thickness of 0635 μm is laminated using the method.

ここで、MSD法での積層方法を説明する。Here, a stacking method using the MSD method will be explained.

第2図にMSD装置の概要図を示す、真空槽11の中に
、原料を入れるルツボ12と、基板13があり、ルツボ
12を独立に温度コントロールし原料を基板13へ蒸着
させる。真空槽ll内は真空ポンプ14によって排気さ
れる0本実施例の場合、ルツボ12に各々Zn、、S、
Mn。
FIG. 2 shows a schematic diagram of the MSD apparatus. In a vacuum chamber 11, there are a crucible 12 into which a raw material is placed and a substrate 13. The temperature of the crucible 12 is independently controlled and the raw material is evaporated onto the substrate 13. The inside of the vacuum chamber 11 is evacuated by a vacuum pump 14. In the case of this embodiment, the crucible 12 is filled with Zn, S,
Mn.

K、Scを投入し、温度をコントロールしMn、K、S
cを含有したZnS薄膜を蒸着する。にとScは、母材
に対して10mo 1%以下としする。
Add K and Sc, control the temperature, and add Mn, K, and S.
A ZnS thin film containing c is deposited. Nito Sc shall be 10mo 1% or less with respect to the base material.

ところで、KとScは各々1価と、3価のイオンである
ため、Znの2価イオンと置換され電価の補償もなされ
る。
By the way, since K and Sc are monovalent and trivalent ions, respectively, they are replaced with the divalent ions of Zn, and their electric charges are compensated.

続いて、T a ! Os等からなる第2絶縁膜をスパ
ッタ法で0.6μm1積層する。最後にAf等からなる
金属電極を積層゛し、配線する。
Next, T a! A second insulating film made of Os or the like is deposited to a thickness of 0.6 μm by sputtering. Finally, metal electrodes made of Af or the like are laminated and wired.

上記説明した薄膜EL素子は、発光層4内にドープ材を
含有しているので低い電圧でも、ドープ材から移動電荷
が多数発生するため低電圧で発光する。そして、移動電
荷の量が多いため、発光中心の基底状態の電子に多数ぶ
つかるため、輝度も向上する。
Since the thin film EL device described above contains a dopant in the light emitting layer 4, it emits light at a low voltage even at a low voltage because a large number of mobile charges are generated from the dopant. In addition, since the amount of moving charges is large, many electrons in the ground state of the luminescent center collide with each other, resulting in improved brightness.

第3図に本発明の薄膜EL素子と、従来の薄膜EL素素
子子の電圧と輝度の関係を示す。
FIG. 3 shows the relationship between voltage and luminance of the thin film EL device of the present invention and the conventional thin film EL device.

図中イが従来のものであり、駆動電圧的15OV、飽和
輝度的1700 c d/cm3トナッテいるのにくら
べて、図中口の本発明の薄膜EL素子は、駆動電圧的8
0V、飽和輝度的2200Cd/c+a”となっており
低電圧駆動、高輝度の薄膜EL素子を得ることができた
The thin-film EL element shown in the figure has a driving voltage of 15OV and a saturation luminance of 1700 c d/cm3.
0V, the saturated luminance was 2200 Cd/c+a'', and a thin film EL element with low voltage drive and high luminance could be obtained.

尚、本実施例においては、母材としてZnS、発光中心
物質としてMn、ドープ材としてKとScを用いる場合
を説明したがこの組み合わせに限ることなく、母材とし
てはSrS、CaSでもよく、発光中心物質としてはM
n、Tb、Ce、Euでもよい。ドープ材としてはSc
、Y、  La、  L  i、  Na、  K、 
 Rh、  Cs  、、 M、o。
In this example, a case where ZnS is used as the base material, Mn is used as the luminescent center substance, and K and Sc are used as the doping materials is explained, but the combination is not limited to this, and the base material may be SrS or CaS, M as the central substance
It may also be n, Tb, Ce, or Eu. Sc as a dope material
, Y, La, Li, Na, K,
Rh, Cs,, M, o.

Co、Cr、Gdの中から1種類以上の元素を用いても
よい。
One or more elements from among Co, Cr, and Gd may be used.

(発明の成果) 以上述べたように本発明では発光層にドープ材を添加す
ることにより移動電荷の発生する電界値を下げ、さらに
従来と同じ電界値での移動電荷数を増加できる。従って
低駆動電圧で高輝度が得られるという優れた効果がある
(Achievements of the Invention) As described above, in the present invention, by adding a dopant to the light-emitting layer, it is possible to lower the electric field value in which mobile charges are generated, and further increase the number of mobile charges at the same electric field value as in the conventional method. Therefore, there is an excellent effect that high brightness can be obtained with a low driving voltage.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は本発明薄膜EL素子の断面図、第2図は本発明
薄膜EL素子の発光層を積層するMSD法装置の概要図
、第3図は本発明および従来例の電圧対輝度の関係を比
較して表わすグラフである。第4図は従来の薄膜EL素
子の断面図。 l・・・透明基板     2・・・透明電極3・・・
第1絶縁膜 4・・・ドープ材を含有している発光層5・・・第2絶
縁膜    6・・・金属電極7・・・発光層 特許出願人 株式会社小松製作所 代理人 (弁理士)岡 1)和 喜 第1図 第2図 電圧(Vσ−p) 第3図 第4図
FIG. 1 is a cross-sectional view of the thin film EL device of the present invention, FIG. 2 is a schematic diagram of an MSD method apparatus for laminating the light emitting layers of the thin film EL device of the present invention, and FIG. 3 is the relationship between voltage and luminance of the present invention and the conventional example. This is a graph showing a comparison. FIG. 4 is a cross-sectional view of a conventional thin film EL element. l...Transparent substrate 2...Transparent electrode 3...
First insulating film 4...Emissive layer containing dope material 5...Second insulating film 6...Metal electrode 7...Emissive layer Patent applicant Komatsu Ltd. representative (patent attorney) Oka 1) Kazuyoshi Figure 1 Figure 2 Voltage (Vσ-p) Figure 3 Figure 4

Claims (1)

【特許請求の範囲】[Claims]  二重絶縁膜構造の薄膜EL素子で、ZnS・SrS・
CaS等の母材とMn・Tb・Ce・Eu・Sm等の発
光中心物質とから成る薄膜EL素子において、ドープ材
としてSc・Y・La・Li・Na・K・Pb・Cs・
Mo・Co・Cr・Gdのうち、1種類以上を添加させ
ることを特徴とする薄膜EL素子。
Thin film EL element with double insulating film structure, made of ZnS, SrS,
In a thin film EL device consisting of a base material such as CaS and a luminescent center substance such as Mn, Tb, Ce, Eu, Sm, etc., doping materials such as Sc, Y, La, Li, Na, K, Pb, Cs,
A thin film EL device characterized by adding one or more of Mo, Co, Cr, and Gd.
JP62256604A 1987-10-12 1987-10-12 Thin film EL element Pending JPH01100892A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62256604A JPH01100892A (en) 1987-10-12 1987-10-12 Thin film EL element

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62256604A JPH01100892A (en) 1987-10-12 1987-10-12 Thin film EL element

Publications (1)

Publication Number Publication Date
JPH01100892A true JPH01100892A (en) 1989-04-19

Family

ID=17294938

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62256604A Pending JPH01100892A (en) 1987-10-12 1987-10-12 Thin film EL element

Country Status (1)

Country Link
JP (1) JPH01100892A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0311591A (en) * 1989-06-09 1991-01-18 Komatsu Ltd EL element for blue display
WO1992008333A1 (en) * 1990-11-02 1992-05-14 Kabushiki Kaisha Komatsu Seisakusho Thin-film el element
JP2010048085A (en) * 2009-12-04 2010-03-04 Oiles Eco Corp Louver device

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0311591A (en) * 1989-06-09 1991-01-18 Komatsu Ltd EL element for blue display
WO1992008333A1 (en) * 1990-11-02 1992-05-14 Kabushiki Kaisha Komatsu Seisakusho Thin-film el element
JP2010048085A (en) * 2009-12-04 2010-03-04 Oiles Eco Corp Louver device

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