JPH03216997A - Electro-luminescent element - Google Patents
Electro-luminescent elementInfo
- Publication number
- JPH03216997A JPH03216997A JP2010786A JP1078690A JPH03216997A JP H03216997 A JPH03216997 A JP H03216997A JP 2010786 A JP2010786 A JP 2010786A JP 1078690 A JP1078690 A JP 1078690A JP H03216997 A JPH03216997 A JP H03216997A
- Authority
- JP
- Japan
- Prior art keywords
- phosphor
- electrode
- electrodes
- voltage
- counter electrode
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Electroluminescent Light Sources (AREA)
Abstract
Description
【発明の詳細な説明】
[利用分野]
本発明は相対向しない対電極を形成してなるエレクトロ
ルミネッセンス素子に関する。DETAILED DESCRIPTION OF THE INVENTION [Field of Application] The present invention relates to an electroluminescent device formed with counter electrodes that do not face each other.
[従来技術1
エレクトロルミネッセンス素子(以下EL素子と呼ぶ)
は、平面形固体発光表示装置への応用に対し古くから研
究され、その実用化に対し根強い期待がある。このEL
素子は構造上、基板上に蛍光体の結晶性薄膜を形成させ
ることを特徴とするNL!形と蛍光体粉末を有機系誘電
体バインダー中に均一に分散混合させることを特徴とす
る有機分散形及び蛍光体粉末をガラス等の無機系バイン
ダーで結着させることを特徴とする無機分散形に分けら
れる。無機分散形ELは、しばしばセラミックス形EL
と呼ばれることもあるが、あくまでも蛍光体粉末粒子が
この無機系バインダー中に分散したものに過ぎない。従
来、開発されているEL素子のすべては、(両面に形成
した)相対向する一対の電極(少なくとも片方は光取り
出し用透明電極)の間に発光層や絶縁層を適当に配置し
て扶持する構造を基本としている。[Prior art 1 Electroluminescent device (hereinafter referred to as EL device)
has been studied for a long time for its application to flat solid state light emitting display devices, and there are deep-rooted expectations for its practical application. This EL
The device is structurally characterized by forming a crystalline thin film of phosphor on a substrate. The organic dispersion type is characterized by uniformly dispersing and mixing the phosphor powder in an organic dielectric binder, and the inorganic dispersion type is characterized by binding the phosphor powder with an inorganic binder such as glass. Can be divided. Inorganic dispersion type EL is often ceramic type EL.
Although it is sometimes called phosphor powder, it is simply phosphor powder particles dispersed in this inorganic binder. All of the EL devices that have been developed so far have a light-emitting layer or an insulating layer appropriately placed and supported between a pair of opposing electrodes (formed on both sides) (at least one is a transparent electrode for light extraction). It is based on structure.
最近、発明者らは、マンガン添加硫化亜鉛(以下ZnS
: l[nと呼ぶ)蛍光体粉末を850℃以上の高温
で焼結した蛍光体焼結セラミックス板を基板兼発光層と
して用い、これを相対向する一対の透明電極と対向電極
で挟んだだけの簡単な構造の素子によって数10Vの直
流低電圧駆動にも拘わらず数1000cd/s+”とい
う直流高輝度EL素子(以下PCEL素子と呼ぶ)を実
現している(特開昭61− 224291)[発明が解
決しようとする問題点]
現在までに提案されている平面形発光素子であるEL素
子のすべては、相対向する電極間に電圧を印加すること
により発光させているため、素子駆動電圧を供給するた
めのリード線を必ず2面から取り出して使用している。Recently, the inventors have developed manganese-doped zinc sulfide (ZnS
: A phosphor sintered ceramic plate made by sintering phosphor powder (referred to as ``n'') at a high temperature of 850°C or higher is used as the substrate and light emitting layer, and this is simply sandwiched between a pair of opposing transparent electrodes and a counter electrode. By using an element with a simple structure, we have realized a DC high brightness EL element (hereinafter referred to as a PCEL element) that achieves several thousand cd/s+'' despite being driven at a low DC voltage of several tens of V (Japanese Patent Laid-Open No. 61-224291) [ [Problems to be Solved by the Invention] All EL devices that have been proposed to date are planar light emitting devices that emit light by applying a voltage between opposing electrodes. The lead wires for supplying the product are always taken out from two sides.
すなわち、EL素子の発光面の裏側にも電極配線が必要
である。これは素子作製上のブレーナ技術と相反するた
め、素子の作製−ヒおよび素子の実装し、致命的な欠点
である。That is, electrode wiring is also required on the back side of the light emitting surface of the EL element. This is a fatal drawback in terms of device fabrication and device mounting, since it conflicts with the brainer technology used to fabricate the device.
高性能なPCEL素子が実現している現在、実用的素子
として広く芭及するためには、素子の経時特性が安定で
なければならないこと、またEL素子の応用を考える場
合、電極のバターニングや、素子の実装が容易でなけれ
ばならないことが必要条件である。蛍光体焼結セラミッ
クス板を用いるf)CEL素子では、透明重極と対向電
極の間に肉厚の該セラミックスが挟まれることになり、
素子駆動中に直流EL素子の劣化機構の一つであるファ
ーザーフォーミングが進行するため、経時特性に問題か
あるが、従来のPCEL素子の構造ではパルス電圧駆動
等の駆動方式による以外解決策がない。その結果、応用
節囲が大幅に狭められるという問題点がある。Now that high-performance PCEL devices have been realized, in order to be widely used as a practical device, the characteristics of the device over time must be stable, and when considering the application of EL devices, electrode patterning and , it is a necessary condition that the device must be easy to implement. f) In a CEL element using a phosphor sintered ceramic plate, the thick ceramic is sandwiched between a transparent heavy pole and a counter electrode,
Father forming, which is one of the deterioration mechanisms of DC EL elements, progresses while the element is being driven, so there is a problem with the aging characteristics, but with the conventional PCEL element structure, there is no solution other than using a driving method such as pulse voltage driving. . As a result, there is a problem that the scope of application is significantly narrowed.
[問題点を解決するための千段]
本発明は、前記問題点を解決するための手段として、直
流低電圧駆動が可能であるという特長を持つPCEI.
素子では、発光層と基体を兼ね、I族金属である銅を0
.01〜10%含有する少なくとも一種の硫化物系蛍光
体から成る850℃〜1250℃の範囲で焼結された蛍
光体焼結セラミックス板を利用していることから、処女
状態の該セラミックスは低抵抗であるという点に着目し
、蛍光体セラミックス板の片方の表面側にのみ透明電極
と対向電極からなる対電極を形成することによって、実
装性を著しく向上させるようにしたものである。さらに
、蛍光体セラミックス表面上の電極の形成していない部
分の改質処理および変形加工等により電流制御層や電界
制御層を形成することによって経時特性の改善や、高性
能化を達成することができる。[A Thousand Steps to Solve the Problems] As a means for solving the above-mentioned problems, the present invention provides a PCEI.
In the device, copper, which is a Group I metal, is used as both the light-emitting layer and the substrate.
.. Since a phosphor sintered ceramic plate made of at least one kind of sulfide-based phosphor containing 01 to 10% and sintered in the range of 850 to 1250 degrees Celsius is used, the ceramic in its virgin state has low resistance. By focusing on this point, mounting efficiency is significantly improved by forming a counter electrode consisting of a transparent electrode and a counter electrode only on one surface side of the phosphor ceramic plate. Furthermore, by forming a current control layer or an electric field control layer by modifying or deforming the portion of the surface of the phosphor ceramic where electrodes are not formed, it is possible to improve the aging characteristics and achieve higher performance. can.
[作用]
本発明は以下に述べる作用効果を有する。即ち、PCE
L素子の場合、銅(Cu)を含むことによる低抵抗な蛍
光体焼結セラミックス板が発光層と基板を兼ねることが
出来るBulk材料(厚み0.1mm 〜0.8ms)
であるため、電極面が対向しない対電極を形成すること
により駆動することが可能であるという従来のEL素子
の常識からは想像出来ない素子構成が可能となる。[Action] The present invention has the following effects. That is, PCE
In the case of the L element, a bulk material (thickness 0.1 mm to 0.8 ms) is a phosphor sintered ceramic plate containing copper (Cu) that has low resistance and can serve as both the light emitting layer and the substrate.
Therefore, an element configuration that cannot be imagined from the common sense of conventional EL elements, in which driving is possible by forming a counter electrode whose electrode surfaces do not face each other, becomes possible.
本発明によるPCEL素子の作用効果を、蛍光体として
ZnS : Iinを採用する場合を一例として以下に
説明するが、ここに述べる作用効果が蛍光体ZnS:l
[nおよびその素子作製方法等に限定されるものではな
いことは勿論である。ZnS : Mn蛍光体粒子を、
I族金属であるCuを含む溶液中において、Cuコーテ
ィングし、その後成型、焼結プロセスを経て作製された
蛍光体焼結セラミックス板上に前記対電極を形成し、透
明電極側を正極に、対向電極側を負極になるように直流
電圧を印加すると、Cuコーティングされた蛍光体粒子
からなる該セラミックスは低抵抗であるために大きな電
流が流れる。この電圧を印加し続けるとCuイオンは負
極に至る竃界の向きに沿って移動(マイグレーション)
するため、透明電極下部にCuの枯渇した高抵抗のZn
S : I[n発光層が生成され、電流が減少するとと
もにこの蛍光体層に高電界がかかり始め発光する。一旦
抵抗が高くなると電流はより抵抗の低い部分を流れるた
め、発光部分もそれにつれて広がり最終的には透明電極
下部全体に高抵抗のZnS : l[n蛍光体層が形成
され、全面発光に至る。これがフオーミング現象である
。The effects of the PCEL device according to the present invention will be explained below using an example in which ZnS:Iin is used as the phosphor.
[It goes without saying that the present invention is not limited to n and its device manufacturing method. ZnS: Mn phosphor particles,
The counter electrode is formed on a phosphor sintered ceramic plate that is coated with Cu in a solution containing Cu, which is a group I metal, and then formed through a molding and sintering process. When a DC voltage is applied so that the electrode side becomes the negative electrode, a large current flows because the ceramic made of Cu-coated phosphor particles has a low resistance. If this voltage is continued to be applied, Cu ions will move (migration) along the direction of the furnace to the negative electrode.
Therefore, a high resistance Zn depleted of Cu is placed under the transparent electrode.
S: I[n A light-emitting layer is generated, and as the current decreases, a high electric field begins to be applied to this phosphor layer and it emits light. Once the resistance increases, the current flows through the part with lower resistance, so the light-emitting part also spreads accordingly, and eventually a high-resistance ZnS:l[n phosphor layer is formed over the entire lower part of the transparent electrode, leading to full-surface light emission. . This is the forming phenomenon.
しかしながら、本発明によるEL素子ではフオーミング
完了後、長時間に渡って素子を直流連続駆動すると時間
の経過と共にこの高抵抗層が広くなることにより素子抵
抗が上昇するため、一定駆動電圧の下では輝度が漸次低
下するという劣化モード(ファーザーフt−ミング)が
現れることがある。However, in the EL element according to the present invention, if the element is continuously driven with direct current for a long time after forming is completed, this high resistance layer becomes wider over time and the element resistance increases. A deterioration mode (father-feeding) may occur in which the amount of energy gradually decreases.
本発明になる素子構造では、対電極が同一平面上にあり
、さらに発光層兼基板である蛍光体セラミックスは[f
ulk材料でもあるため、容易に加工することができ、
Cuの移動経路を自由に制御することが可能となる。必
要に応じて、該セラミックスの対電極の付いていない部
分をエッチング、コーティングもしくはドーピング等の
処理によって、高抵抗ZnS:l[n蛍光体層の直流電
界を制御することが出来る。すなわち、Cuの移動経路
に当たる部分に外部から故意に第三元素を注入し、Cu
の移動速度を制御することが可能であり、また、更に電
極間の幾何学的な加工やドーピングにより電流制限層(
部分)を形成すれば、前述の連続駆動時においてさえも
素子の安定動作および長寿命化を実現できる。In the device structure of the present invention, the counter electrode is on the same plane, and the phosphor ceramic that serves as the light emitting layer and substrate is [f
Since it is also a ULK material, it can be easily processed.
It becomes possible to freely control the moving path of Cu. If necessary, the DC electric field of the high-resistance ZnS:l[n phosphor layer can be controlled by etching, coating, doping, or other treatments on the portion of the ceramic where the counter electrode is not attached. That is, by intentionally injecting a third element from the outside into the area corresponding to the Cu movement path, Cu
It is possible to control the moving speed of the current limiting layer (
By forming this part), stable operation and long life of the element can be realized even during the above-mentioned continuous driving.
一方、蛍光体セラミックスの片方の表面上に形成した対
電極と、これらの両電極と相対向する他方の表面上に形
成した金属等からなる電極との間に前者を正、後者を負
とする直流バイアス電圧を印加し、フォーミングを行う
ことによって、上記対電極直下に高抵抗ZnS:lln
蛍光体層を形成させ、しかる後、対電極間に交流電圧を
印加すれば両電極での発光が実現でき、かつCuの移動
方向が電界方向によって変化するため、フγ−ザーフォ
ーミング等による劣化を抑えることができる。On the other hand, between a counter electrode formed on one surface of the phosphor ceramic and an electrode made of metal etc. formed on the other surface facing both of these electrodes, the former is made positive and the latter is made negative. By applying a DC bias voltage and performing forming, high-resistance ZnS:lln is formed directly under the counter electrode.
By forming a phosphor layer and then applying an alternating current voltage between the counter electrodes, light emission can be achieved at both electrodes, and since the direction of movement of Cu changes depending on the direction of the electric field, deterioration due to γ-forming etc. can be achieved. can be suppressed.
以上のように本発明によるEL素子は同一平面上の対電
極に電圧を印加するため、すなわち、電極を一面上に形
成すればよいため、簡単に作製でき、配線の取り出しは
最後にワイヤボンディング等で可能であり、面発光形照
光ランプや平面形固体発光表示装置等への実装上極めて
有利となるのみならず、EL特性の高性能化および高機
能化が可能となる。よって、本発明になる素子構造は従
来の概念を逸脱するものであり画期的といえる。As described above, since the EL element according to the present invention applies a voltage to the counter electrode on the same plane, that is, the electrodes only need to be formed on one surface, it can be easily manufactured, and the wiring can be taken out by wire bonding etc. This is not only extremely advantageous in terms of mounting on surface-emitting type illuminated lamps, flat-type solid-state light-emitting display devices, etc., but also makes it possible to improve the performance and functionality of the EL characteristics. Therefore, the element structure according to the present invention deviates from the conventional concept and can be said to be revolutionary.
以下、本発明を実施例により説明する。The present invention will be explained below using examples.
[実施例l]
市販のZnS:I[n蛍光体粉末に塩化銅(CuCl
z )を0.38%加え、さらにバインダーとしてバラ
フィンを8.5%加え均一に混合した後4t/cm”の
プレス圧力で直径25mI1、厚さ0. 6mmのディ
スク状に金型成型し、減圧下600℃で5時間バインダ
ー除去を行い、その後950℃で1時間アルゴンと二硫
化炭素の混合雰囲気ガス中にて焼結し、第1図に示すよ
うな蛍光体焼結セラミックス板1を作製した。このセラ
ミックス板の片面中心上に、マグネトロンスバッタ法に
より直径16■、厚さ1000n一のアルミニウム(A
I)添加酸化亜鉛(ZnO:Al)円形透明竃極2を形
成し、その周囲に真空蒸着法により内径21簡一、外径
25mm、厚さ約30on一のドーナツ状AI対向電極
3を形成し、第1図に示すような同一表面に対電極を有
するPCEL素子を作製した。透明竃極2を正極に、対
向電極3を負極とする直流バイアス電圧を印加しフォー
ミングを行った後、EL特性を測定した結果、第2図に
見られるように発光開始電圧vth(1i度led/■
2が得られる印加電圧の値)50v、100v印加時の
輝度(L+oo)2000cd/m”(7)黄橙色発光
という、従来の素子構造で得られている特性と同程度の
ものが実現出来た。さらに、駆動電圧を半波整流や直流
パルス波形としても同等のEL特性が得られ、かつ、そ
のEL特性の経時特性は向上した。[Example 1] Copper chloride (CuCl
z) was added at 0.38%, and furthermore, 8.5% of paraffin was added as a binder. After mixing uniformly, the mixture was molded into a disk shape with a diameter of 25 mI1 and a thickness of 0.6 mm using a press pressure of 4 t/cm", and the mixture was depressurized. The binder was removed at 600°C for 5 hours, and then sintered at 950°C for 1 hour in a mixed atmosphere of argon and carbon disulfide to produce a phosphor sintered ceramic plate 1 as shown in Figure 1. On the center of one side of this ceramic plate, a piece of aluminum (A
I) A circular transparent electrode 2 made of added zinc oxide (ZnO:Al) is formed, and a doughnut-shaped AI counter electrode 3 having an inner diameter of 21 mm, an outer diameter of 25 mm, and a thickness of about 30 ounces is formed around it by vacuum evaporation. A PCEL device having a counter electrode on the same surface as shown in FIG. 1 was fabricated. After forming by applying a DC bias voltage with the transparent electrode 2 as the positive electrode and the counter electrode 3 as the negative electrode, the EL characteristics were measured, and as shown in FIG. /■
2) Brightness (L + oo) 2000 cd/m” when applying 50 V and 100 V (7) Yellow-orange light emission, which is comparable to the characteristics obtained with conventional device structures, was achieved. Furthermore, equivalent EL characteristics were obtained even when the drive voltage was half-wave rectified or in a DC pulse waveform, and the aging characteristics of the EL characteristics were improved.
[実施例2]
実施例lと同じ条件で作製した第3図に示すような厚さ
約0.51の蛍光体焼結セラミックス板1の片面上に、
スバッタZnO:AL透明電極2として英文字やセグメ
ントパターンを、対向電極3として内径21mm、外径
25■一、厚さ1000n閣のドーナツ状ZnO:Al
スバッタ膜を形成したPCEL素子を作製した。透明電
極2を正極に、対向電極3を負極として直流電圧を印加
しフオーミングを行った後、各パターンのEL特性を測
定した結果、各パターンは全面均一に発光し、vthは
55V, l+ooは2100cd/cm”と、実施例
1とほぼ同じ特性を示した。また、駆動電圧を半波整流
や直流パルス波形としても同等のEL特性が得られ、か
つ、その経時安定性は向上した。[Example 2] On one side of a phosphor sintered ceramic plate 1 having a thickness of about 0.51 mm as shown in FIG. 3 and manufactured under the same conditions as in Example 1,
The sputtered ZnO:AL transparent electrode 2 was made of English letters or segment patterns, and the counter electrode 3 was a doughnut-shaped ZnO:Al with an inner diameter of 21 mm, an outer diameter of 25 mm, and a thickness of 1000 mm.
A PCEL device with a spatter film formed thereon was manufactured. After forming by applying a DC voltage with the transparent electrode 2 as the positive electrode and the counter electrode 3 as the negative electrode, the EL characteristics of each pattern were measured. As a result, each pattern emitted light uniformly over the entire surface, vth was 55 V, and l+oo was 2100 cd. /cm'', which showed almost the same characteristics as Example 1. Even when the driving voltage was half-wave rectified or a DC pulse waveform, the same EL characteristics were obtained, and the stability over time was improved.
[実施例3]
実施例1と同じ条件で作製した厚さ0.51の蛍光体焼
結セラミックス板1の片面上に、マグネトロンスパッタ
法により第4図に示すような直径16mm,厚さ400
nmのZnO : A 1円形透明電極2およびその周
囲に内径21l.外径25lのドーナツ状対向透明電極
・3を形成し、更に該蛍光体セラミックス板の反対側の
面には電界制御層としてAI金属層もしくは導電ペイン
ト層4を形成した面発光形照光ランプ用PCEL素子を
作製した。同図に示すように対電極2、3と、Al金属
層4との間に、前者を正、後者を負とする直流バイアス
電圧を印加しフォーミングを行った。フt−ミング終了
後、該対電極間に4 0 0 II z交流電圧を印加
し素子を発光させた。EL特性を測定した結果、Lhは
40V, L+ooは5500cd/c+*”の黄橙色
発光を呈した。尚、輝度半減時間は6000時間に達し
た。また、同図の対電極のうち2を正に、3と金属f!
14を接続しこれを負とする直流電圧を印加した場合や
、同じく、対電極のうち2を正、3を負とする直流電圧
を印加すると同時に電極3を正、金属層4を負とする直
流電圧を印加した結果、いずれも前述の交流駆動の場合
とほぼ同等のEL特性が得られた。上記直流駆動の場合
、半波整流や直流パルス駆動いずれにおいても同程麿の
EL特性が得られ、かつ、経時特性の改善ができた。[Example 3] On one side of the 0.51 mm thick phosphor sintered ceramic plate 1 produced under the same conditions as in Example 1, a 16 mm diameter and 400 mm thick plate was formed by magnetron sputtering as shown in FIG.
nm of ZnO: A 1 circular transparent electrode 2 and its surroundings with an inner diameter of 21 l. A PCEL for a surface-emitting illuminated lamp in which a donut-shaped opposed transparent electrode 3 with an outer diameter of 25 l is formed, and an AI metal layer or conductive paint layer 4 is formed as an electric field control layer on the opposite surface of the phosphor ceramic plate. The device was fabricated. As shown in the figure, forming was performed by applying a DC bias voltage between the counter electrodes 2 and 3 and the Al metal layer 4, with the former being positive and the latter being negative. After completion of footing, a 400 II z AC voltage was applied between the counter electrodes to cause the device to emit light. As a result of measuring the EL characteristics, Lh exhibited yellow-orange luminescence of 40 V and L+oo of 5500 cd/c+*''.The luminance half-life time reached 6000 hours.In addition, two of the counter electrodes in the same figure were 3 and metal f!
14 is connected and a DC voltage is applied to make it negative, or similarly, when a DC voltage is applied that makes 2 of the counter electrodes positive and 3 negative, electrode 3 is made positive and metal layer 4 is made negative at the same time. As a result of applying a DC voltage, almost the same EL characteristics as in the case of AC drive described above were obtained in both cases. In the case of the above-mentioned DC drive, equally good EL characteristics were obtained in both half-wave rectification and DC pulse drive, and the aging characteristics were improved.
[実施例4]
実施例lと同じ条件で作製した厚さ0.41■の蛍光体
セラミックス板の片面tに、同実施例1と同じ形状、大
きさの対電極を形成し、各電極をマスクとして、内側と
外側の電極間スペースに、第5図に示すように酸素をイ
オン注入法により打ち込み高抵抗な電流制限層5を形成
し面発光形照光ランプ用PCEL素子を作製した。該対
電極間もしくは該対電極と背面電極4との間に直流電圧
を印加しフォーミング終了後、EL特性を測定した結果
、Lbハ45V, L+oo4t6000cd/m”l
?アッタ。また、この方法により経時特性を著しく改善
することができた。さらに、駆動電圧を半波整流波形や
直流パルス波形にしても同等なEL特性が得られた。[Example 4] A counter electrode having the same shape and size as in Example 1 was formed on one side T of a phosphor ceramic plate with a thickness of 0.41 cm, which was manufactured under the same conditions as in Example 1, and each electrode was As a mask, oxygen was implanted into the space between the inner and outer electrodes by ion implantation to form a high-resistance current limiting layer 5, as shown in FIG. 5, to produce a PCEL element for a surface-emitting illuminated lamp. After forming by applying a DC voltage between the counter electrode or between the counter electrode and the back electrode 4, the EL characteristics were measured.
? Atta. In addition, this method made it possible to significantly improve the aging characteristics. Furthermore, equivalent EL characteristics were obtained even when the driving voltage was set to a half-wave rectified waveform or a DC pulse waveform.
[実施例5]
実施例lと同じ条件で作製した厚さ0.4■■の蛍光体
セラミックス板の片面上に、同実施例1と同じ形状、大
きさの対電極を形成し、各電極にマスキングを施し、内
側と外側の電極間スペースを、スパッタエッチングによ
り第6図に示すように幅2謹1、深さ0.2鳳lのリン
グ状溝6を掘り高抵抗化することによって電流制限層を
形成し、面発光形照光ランプ用PCEL素子を作製した
。該対電極間もしくは該対itIIと背面電極4との間
に直流電圧を印加し7ォーミング終了後、EL特性を測
定した結果、V+kは50V、t, I o oは57
00Cd/lI!テアッタ。[Example 5] A counter electrode having the same shape and size as in Example 1 was formed on one side of a phosphor ceramic plate with a thickness of 0.4■■ manufactured under the same conditions as in Example 1, and each electrode By masking the space between the inner and outer electrodes, a ring-shaped groove 6 with a width of 2 cm and a depth of 0.2 l is dug by sputter etching as shown in Fig. 6 to increase the current resistance. A limiting layer was formed to produce a PCEL element for a surface-emitting illuminated lamp. After applying a DC voltage between the counter electrode or between the counter itII and the back electrode 4 and completing 7 warmings, the EL characteristics were measured, and the result was that V+k was 50V, t, I o o was 57
00Cd/lI! Teatta.
また、実施例4と同様経時特性を大幅に改善することが
できた。さらに、駆動電圧を半波整流や直流パルス波形
にしてもほぼ同様なEL特性が得られた。Further, as in Example 4, the aging characteristics could be significantly improved. Furthermore, almost similar EL characteristics were obtained even when the driving voltage was set to half-wave rectification or a DC pulse waveform.
[実施例6]
実施例lと同じ条件で作製した、第7図に示すような厚
さ0. 5m一の蛍光体セラミックス板1の片面上に、
マグネトロンスパッタ法により直径16l■、厚さ45
0n−のZnO:A1円形透明亀極2およびその周囲に
内径21g++s,外径25一鳳のドーナツ状透明電極
3を形成した。更に、該重極2と同3の電極間スペース
に内径18mm、外径19mmのドーナツ状^l対向電
極7を真空蒸着法により形成し面発光形照光ランプ用P
CEL素子を作製した。該竃極2と3を接続し、これを
正に、At対向電極7を負とする直流バイアス電圧を印
加し、フォーミング終了後、該透明電極2、3と対向竃
極7との間に直流駆動電圧を印加しEL特性を測定した
結果、Lhは34V, L+ooは6400cd/s”
であった。駆動電圧の波形を、半波整流や直流パルスの
いずれに替えてもほぼ同様のEL特性を示した。また、
第7図の楕造は、まず直径25mmのZnO・Al透明
電極を形成した後、スバッタエッチングによってパター
ニングすることにより作製することも可能であった。[Example 6] A film with a thickness of 0.0 mm as shown in FIG. 7 was manufactured under the same conditions as in Example 1. On one side of a 5m phosphor ceramic plate 1,
Diameter 16l, thickness 45cm by magnetron sputtering method
On-ZnO:A1 circular transparent turtle electrode 2 and a donut-shaped transparent electrode 3 having an inner diameter of 21 g++s and an outer diameter of 25 mm were formed around it. Furthermore, a doughnut-shaped counter electrode 7 with an inner diameter of 18 mm and an outer diameter of 19 mm is formed in the space between the heavy poles 2 and 3 by vacuum evaporation to form a P for a surface-emitting illuminated lamp.
A CEL device was produced. The electrodes 2 and 3 are connected, and a DC bias voltage is applied with positive voltage and At counter electrode 7 negative, and after forming, a DC voltage is applied between the transparent electrodes 2 and 3 and the opposite electrode 7. As a result of applying the driving voltage and measuring the EL characteristics, Lh is 34V, L+oo is 6400cd/s"
Met. Almost the same EL characteristics were exhibited even when the waveform of the driving voltage was changed to either half-wave rectification or DC pulse. Also,
The ellipse shown in FIG. 7 could also be produced by first forming a ZnO.Al transparent electrode with a diameter of 25 mm and then patterning it by sputter etching.
この場合のEL特性は、前記特性と同等以上であり、か
つ経時特性も向上した。The EL properties in this case were equal to or better than the above properties, and the aging properties were also improved.
[実施例7]
実施例1のセラミックス作製条件の中で、CuCl2を
全く含まないで作製した厚さ0.5■■の蛍光体焼結セ
ラミックス板lの片面全面にわたって第8図に示すよう
な金属Cu層8を、スバッタ法により、厚さ2000n
鳳形成し、アルゴン雰囲気中700℃で5時間熱拡散処
理を施して得られた第9図に示す蛍光体焼結セラミック
ス板9の上に、スパッタ法により外径16m■のZnO
: A 1円形透明電極2を、その周囲には対向電極
3として内径21置■、外径25一一のスパッタZnO
:^lからなる対電極を形成した。[Example 7] Under the ceramic manufacturing conditions of Example 1, a phosphor sintered ceramic plate l having a thickness of 0.5 mm was manufactured without containing any CuCl2, and the entire surface of one side was coated as shown in FIG. The metal Cu layer 8 is formed to a thickness of 2000 nm by spatter method.
ZnO with an outer diameter of 16 m was deposited by sputtering on the phosphor sintered ceramic plate 9 shown in FIG.
:A 1 A circular transparent electrode 2 is surrounded by sputtered ZnO as a counter electrode 3 with an inner diameter of 21mm and an outer diameter of 25mm.
A counter electrode consisting of :^l was formed.
対電極間に、該円形透明電極2を正極とする直流電圧を
印加してフォーミングしたところ、黄橙色発光が得られ
、EL特性を測定した結果、V+bは35L L+oo
は4000cd/m” ’T:あった。また、半波整流
や直流パルス駆動いずれにおいても同程度のEL特性が
得られた。尚、本実施例の熱拡散によるZnS :11
n焼結体セラミックス中へのCuの導入は、硫酸銅(C
IISO4)水溶液や塩化銅(CuCLz)メタノール
溶液中へセラミックスを浸すことによるCuの導入によ
って置き換えても全く支障がなかった。When forming was performed by applying a DC voltage with the circular transparent electrode 2 as the positive electrode between the counter electrodes, yellow-orange light emission was obtained, and as a result of measuring the EL characteristics, V+b was 35L L+oo
was 4000 cd/m''T:. In addition, similar EL characteristics were obtained in both half-wave rectification and DC pulse driving.
Introducing Cu into n-sintered ceramics is done by using copper sulfate (C
There was no problem at all when replacing Cu by introducing Cu by immersing ceramics in an aqueous solution of IISO4) or a methanol solution of copper chloride (CuCLz).
本実施例に示したようなZnS : In蛍光体へのC
uの導入法を用いた蛍光体焼結セラミックスの場合にお
いても、実施例2から実施例6において示したEL素子
作製法が有効であるは勿論であった。C to ZnS:In phosphor as shown in this example
It goes without saying that the EL element manufacturing methods shown in Examples 2 to 6 are also effective in the case of phosphor sintered ceramics using the method of introducing u.
【実施例8]
実施例lと同じ条件で作製した、第10図・に示すよう
な厚さ0.4−の蛍光体セラミックス板1の片而上にマ
グネトロンスバッタ法により直径24l1厚さ420n
mのZnO:A1円形透明電極2を、該セラミックス板
1の側面外周に導電ペイントを塗布した対向電極3をそ
れぞれ形成した面発光形照光ランプ用PCEL素子を第
10図に示すように10個平面上に並べ、それらを並列
駆動することにより大面積の発光型照光ランプパネルを
作製した。各素子のEL特性は同実施例1で得られた結
果とほぼ同じであった。また、このパネルを直流、半波
整流波、直流パルスのいずれでも駆動することができ、
かつ経時特性の向上を図ることができた。[Example 8] A phosphor ceramic plate 1 with a diameter of 24 l and a thickness of 420 nm was fabricated under the same conditions as in Example 1 and had a thickness of 0.4 mm as shown in FIG. 10 by magnetron scattering.
As shown in FIG. 10, 10 PCEL elements for surface-emitting illuminated lamps were fabricated, each having a ZnO:A1 circular transparent electrode 2 and a counter electrode 3 coated with conductive paint on the outer periphery of the side surface of the ceramic plate 1. By arranging them on top of each other and driving them in parallel, we fabricated a large-area light-emitting illuminated lamp panel. The EL characteristics of each element were almost the same as those obtained in Example 1. Additionally, this panel can be driven with direct current, half-wave rectified waves, or direct current pulses.
Moreover, it was possible to improve the aging characteristics.
尚、第10図に示した各素子の対向電極3の形状やその
配置は同図に制限されるものではなく、さらに、この対
向竃極3と前述した第4図に示すような金属電界制御層
4を併用もしくは組み合わせて使用することは一向に差
し支えなかった。It should be noted that the shape and arrangement of the opposing electrodes 3 of each element shown in FIG. There was no problem in using Layer 4 together or in combination.
以上の実施例1から実施例8は、いずれも蛍光体として
ZnS:llnを採用した場合について説明してきたが
、この蛍光体をZnS:Tb.F, ZnS:Ss,P
等のZnS系や硫化ストロンチウム(SrS)系、硫化
カルシウム(CaS)系および硫化バリウム(BaS)
系に置き換えても全く同様の効果、性能が期待できるこ
とが確認された。In Examples 1 to 8 above, ZnS:lln was used as the phosphor, but this phosphor was used as ZnS:Tb. F, ZnS: Ss, P
ZnS-based, strontium sulfide (SrS)-based, calcium sulfide (CaS)-based, and barium sulfide (BaS), etc.
It was confirmed that exactly the same effects and performance can be expected even if the system is replaced with a new one.
[実施例9]
市販の緑色発光用ZnS:Cu蛍光体粉末に/くイング
ーとしてバラフィンを8.0%加え均一に混合した後、
実施例lと同じ条件で第11図に示すようなZnS:C
u蛍光体焼結セラミックス板10 を作製した。[Example 9] 8.0% of paraffin was added as a coating material to a commercially available green-emitting ZnS:Cu phosphor powder and mixed uniformly.
ZnS:C as shown in FIG. 11 under the same conditions as Example 1.
A u-phosphor sintered ceramic plate 10 was produced.
このセラミックス板の片面全面にマグネトロンスバッタ
法により厚さ300n園の高抵抗ZnS:l[niil
ll11を形成した。更にその上に同じくマグネトロン
スパッタ法により同実施例1と同じ形状、大きさのZn
O:A1円形透明電極2およびAt対向電極3からなる
対電極を形成した。対電極間に該円形透明電極2を正極
とする直流電圧を印加したところ、電圧の値を変えるこ
とにより緑色から黄橙色に変化する発光が得られた。E
L特性を測定した結果、Ytbは30V, L+oJ;
12000cd/l”l?あった。また、該F!4u
iiを青色および赤色蛍光体であるアルカリ土類を含む
SrS系やCaS系に置き換えても問程度の発光輝度を
有するEL特性が得られた。該薄膜を選択することによ
り、また、印加電圧の値を変化させることにより、望み
の発光色をもつPCEL素子を実現することができた。High-resistance ZnS:1 [niil
ll11 was formed. Furthermore, Zn having the same shape and size as in Example 1 was deposited on top of it by the same magnetron sputtering method.
A counter electrode consisting of an O:A1 circular transparent electrode 2 and an At counter electrode 3 was formed. When a DC voltage with the circular transparent electrode 2 as the positive electrode was applied between the counter electrodes, light emission that changed from green to yellow-orange was obtained by changing the voltage value. E
As a result of measuring the L characteristic, Ytb is 30V, L+oJ;
There was 12000cd/l”l? Also, the F!4u
Even when ii was replaced with SrS-based or CaS-based blue and red phosphors containing alkaline earth elements, EL characteristics with acceptable luminance were obtained. By selecting the thin film and changing the value of the applied voltage, it was possible to realize a PCEL element with a desired emission color.
さらに、駆動電圧波形を半波整流波、直流パルス波のい
ずれにおいても、ほぼ同じEL特性が得られた。Furthermore, almost the same EL characteristics were obtained whether the drive voltage waveform was a half-wave rectified wave or a DC pulse wave.
以上の実施例では蛍光体セラミックスの焼結温度を95
0℃としたが、850℃から1250℃の温度範囲であ
れば本発明の発光層として使用可能な蛍光体セラミック
スを作製することができた。また、実施例では素子の横
造を円形としたが、本発明によるPCEL素子の形状は
全く任意であり、前記実施例に制限されるものではない
。さらに、本発明で実施した少なくとも一種の透明電極
は、ZnO系、ITO系あるいは酸化スズCSnOt)
系等いずれでも良く、更に必要に応じて素子の封止加工
を行って使用できる。In the above examples, the sintering temperature of the phosphor ceramics was set at 95%.
Although the temperature was set at 0°C, it was possible to produce phosphor ceramics that could be used as the light emitting layer of the present invention within the temperature range of 850°C to 1250°C. Further, in the embodiment, the horizontal structure of the device is circular, but the shape of the PCEL device according to the present invention is completely arbitrary and is not limited to the above embodiment. Furthermore, at least one type of transparent electrode implemented in the present invention is ZnO-based, ITO-based, or tin oxide (CSnOt).
Any system may be used, and if necessary, the element can be sealed before use.
[発明の効果]
本発明によるPCEL素子は対電極がセラミックスの片
面にのみ形成される故、実装性が著しく改善され、両電
極間のスペースに外から種々の加工を行うことによって
素子の劣化等に結び付く要因を抑制したり、高性能化や
新たな機能を付加することも可能である。薄膜形EL素
子では前述のような加工処理は全く不可能であり、従来
の平行平面対電極形のEL素子でも不可能であったが、
肉厚のバルクセラミックスを使用して片面上に対電極を
形成することによって初めて可能になったものである。[Effects of the Invention] In the PCEL element according to the present invention, since the counter electrode is formed only on one side of the ceramic, mounting performance is significantly improved, and deterioration of the element can be prevented by performing various external processing on the space between the two electrodes. It is also possible to suppress the factors that lead to this, improve performance, and add new functions. The above-mentioned processing is completely impossible with thin film type EL elements, and was also impossible with conventional parallel plane counter electrode type EL elements.
This was made possible for the first time by using thick bulk ceramics and forming a counter electrode on one side.
本発明によるPCEL素子では、面発光体である特長を
活かす各種パターン表示を、発光ダイオード(LED)
並のワイヤボンディング実装技術を駆使して実現できる
ため、直流もしくは交流駆動の安価な平面形固体発光素
子を堤供できる。The PCEL element according to the present invention uses light emitting diodes (LEDs) to display various patterns that take advantage of the characteristics of being a surface light emitter.
Since it can be realized by making full use of ordinary wire bonding mounting technology, it is possible to provide an inexpensive planar solid state light emitting device driven by direct current or alternating current.
第1図は本発明に係る面発光形照光ランプ用PCEL素
子の断面図、第2図は第1図で示したPCEL素子を直
流電圧で駆動した時の印加電圧に対する発光輝廣の変化
、第3図は本発明に係る平面形固体発光表示装置用PC
EL素子の断而図、第4図は該焼結セラミックス板の対
電極が形成されていない表面に電界制御層として金属層
を着けたPCEL素子の断面図、第5図および第6図は
対電極間のスペースに電流制限層を形成したPCEL素
子の断面図をそれぞれ示す、第7図は透明電極間スペー
スに^l対向電極を形成したPCEL素子の断面図、第
8図はCuを含まない蛍光体焼結セラミックス板の片面
上に金属Cuをコーティングしたセラミックスの断面図
、第9図は第8図のCuを熱拡敢処理した後その上に該
対電極を形成したPCEL素子の断面図、第10図は該
セラミックス板の側面上に対向電極を設けたPCEL素
子の断而図、第11図はZnS:Cu蛍光体焼結セラミ
ックス板上にさらに蛍光体発光層を形成したr’cEL
素子の断面図。
■・・・蛍光体焼結セラミックス板、 2・・・透明電
極、 3・・・対向電極、4・・・金属電界制御層、
5・・・酸素イオン注入された電流制限層、 6・・・
スバッタエッチされた溝、7・・・At電極、 8・・
・金属Cu層、9・・・Cuを片面上に熱拡散させた蛍
光体焼結セラミックス板、 10・・・ZnS : C
u蛍光体焼結セラミックス板、 11・・・蛍光体薄膜
・
第1図
第2図
O
50
印加電圧
100 150
Y [Y]
0T3図
第4図
第5図
第7図
第9図
第11図FIG. 1 is a cross-sectional view of a PCEL element for a surface-emitting illuminated lamp according to the present invention, and FIG. 2 shows changes in emission brightness with respect to applied voltage when the PCEL element shown in FIG. Figure 3 shows a PC for a flat solid state light emitting display device according to the present invention.
Figure 4 is a cross-sectional view of a PCEL element in which a metal layer is provided as an electric field control layer on the surface of the sintered ceramic plate on which the counter electrode is not formed, and Figures 5 and 6 are cross-sectional views of the EL element. Figure 7 shows a cross-sectional view of a PCEL element with a current limiting layer formed in the space between the electrodes, Figure 7 is a cross-sectional view of a PCEL element with a counter electrode formed in the space between the transparent electrodes, Figure 8 does not contain Cu. FIG. 9 is a cross-sectional view of a ceramic in which metal Cu is coated on one side of a phosphor sintered ceramic plate, and FIG. 9 is a cross-sectional view of a PCEL element in which the counter electrode is formed on the Cu shown in FIG. 8 after thermal expansion treatment. , Fig. 10 is a schematic diagram of a PCEL element in which a counter electrode is provided on the side surface of the ceramic plate, and Fig. 11 is an r'cEL element in which a phosphor luminescent layer is further formed on a ZnS:Cu phosphor sintered ceramic plate.
A cross-sectional view of the element. ■...phosphor sintered ceramic plate, 2... transparent electrode, 3... counter electrode, 4... metal electric field control layer,
5... Current limiting layer implanted with oxygen ions, 6...
Spatter-etched groove, 7... At electrode, 8...
-Metallic Cu layer, 9...phosphor sintered ceramic plate with Cu thermally diffused on one side, 10...ZnS: C
u Phosphor sintered ceramic plate, 11... Phosphor thin film Fig. 1 Fig. 2 O 50 Applied voltage 100 150 Y [Y] 0T3 Fig. 4 Fig. 5 Fig. 7 Fig. 9 Fig. 11
Claims (2)
有する少なくとも一種の硫化物系蛍光体から成る850
℃〜1250℃の範囲で焼結された蛍光体焼結セラミツ
クスの表面上に、電極面が相対向しない少なくとも一つ
の対電極を形成し、対電極の少なくとも一方を透明電極
とし、対電極間に電圧を印加することにより該透明電極
を通して発光を取り出すことを特徴とするエレクトロル
ミネツセンス素子。(1) 850, which serves both as a light-emitting layer and a substrate, and is made of at least one sulfide-based phosphor containing 0.01 to 10% copper.
At least one counter electrode whose electrode surfaces do not face each other is formed on the surface of phosphor sintered ceramics sintered in the range of ℃ to 1250℃, at least one of the counter electrodes is a transparent electrode, and there is a gap between the counter electrodes. An electroluminescence device characterized in that luminescence is extracted through the transparent electrode by applying a voltage.
を製造するのに使用される特許請求の範囲第1項記載の
エレクトロルミネツセンス素子。(2) The electroluminescent device according to claim 1, which is used for manufacturing a surface-emitting illuminated lamp or a flat solid-state light-emitting display device.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2010786A JPH03216997A (en) | 1990-01-20 | 1990-01-20 | Electro-luminescent element |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2010786A JPH03216997A (en) | 1990-01-20 | 1990-01-20 | Electro-luminescent element |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH03216997A true JPH03216997A (en) | 1991-09-24 |
Family
ID=11760019
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2010786A Pending JPH03216997A (en) | 1990-01-20 | 1990-01-20 | Electro-luminescent element |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH03216997A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI418051B (en) * | 2005-11-29 | 2013-12-01 | 飛利浦露明光學公司 | Luminescent ceramic component for illuminating device |
-
1990
- 1990-01-20 JP JP2010786A patent/JPH03216997A/en active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI418051B (en) * | 2005-11-29 | 2013-12-01 | 飛利浦露明光學公司 | Luminescent ceramic component for illuminating device |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JPS5842960B2 (en) | electroluminescence device | |
| CN102440072A (en) | Direct-current-driven inorganic electroluminescent element and light emitting method | |
| JPH03216997A (en) | Electro-luminescent element | |
| JP4042895B2 (en) | Oxide phosphor for PL, CL or EL, electroluminescence element, and method for producing the same | |
| JP2005203336A (en) | Electroluminescent element and electroluminescent particle | |
| JPH0240891A (en) | Thin film electroluminescent display element | |
| KR100317989B1 (en) | High luminance blue dc-electroluminescent display | |
| JP2006524271A (en) | Europium-doped gallium-indium oxide as a red-emitting electroluminescent phosphor material | |
| JP4433384B2 (en) | Electroluminescence element and display device | |
| JPH0935869A (en) | Manufacture of electroluminescence element | |
| JP3574829B2 (en) | Inorganic electroluminescent material, inorganic electroluminescent device using the same, and image display device | |
| KR20090079810A (en) | Inorganic phosphor | |
| JPH0278190A (en) | Organic dispersion type el element | |
| JPH04363895A (en) | Electroluminescence element | |
| JPH01100892A (en) | Thin film EL element | |
| JPH0529077A (en) | EL element | |
| KR200216106Y1 (en) | An electro luminescence lamp of the tape type | |
| JPS61273894A (en) | Thin film EL element | |
| JPH01272095A (en) | Electroluminescent element and manufacture thereof | |
| JP3349221B2 (en) | Electroluminescent device and method for manufacturing the same | |
| JPH09260060A (en) | Electro-luminescence element and manufacture thereof | |
| JPH04366593A (en) | Thin film el element and manufacture thereof | |
| JP2009004314A (en) | Inorganic electroluminescence device | |
| JPS6391997A (en) | Display with electroluminescence device | |
| JPS5991697A (en) | Thin film el element |