JPH01112488U - - Google Patents

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Publication number
JPH01112488U
JPH01112488U JP591788U JP591788U JPH01112488U JP H01112488 U JPH01112488 U JP H01112488U JP 591788 U JP591788 U JP 591788U JP 591788 U JP591788 U JP 591788U JP H01112488 U JPH01112488 U JP H01112488U
Authority
JP
Japan
Prior art keywords
ion beam
faraday
ground potential
gauges
ion
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP591788U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP591788U priority Critical patent/JPH01112488U/ja
Publication of JPH01112488U publication Critical patent/JPH01112488U/ja
Pending legal-status Critical Current

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  • Electron Sources, Ion Sources (AREA)
JP591788U 1988-01-22 1988-01-22 Pending JPH01112488U (lt)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP591788U JPH01112488U (lt) 1988-01-22 1988-01-22

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP591788U JPH01112488U (lt) 1988-01-22 1988-01-22

Publications (1)

Publication Number Publication Date
JPH01112488U true JPH01112488U (lt) 1989-07-28

Family

ID=31209708

Family Applications (1)

Application Number Title Priority Date Filing Date
JP591788U Pending JPH01112488U (lt) 1988-01-22 1988-01-22

Country Status (1)

Country Link
JP (1) JPH01112488U (lt)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003323858A (ja) * 2002-04-26 2003-11-14 Advantest Corp 電子ビーム処理装置及び電子ビーム形状測定方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003323858A (ja) * 2002-04-26 2003-11-14 Advantest Corp 電子ビーム処理装置及び電子ビーム形状測定方法

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