JPH02132942U - - Google Patents
Info
- Publication number
- JPH02132942U JPH02132942U JP4257689U JP4257689U JPH02132942U JP H02132942 U JPH02132942 U JP H02132942U JP 4257689 U JP4257689 U JP 4257689U JP 4257689 U JP4257689 U JP 4257689U JP H02132942 U JPH02132942 U JP H02132942U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- carrier
- drying
- pedestal
- jig
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001035 drying Methods 0.000 claims description 4
- 239000004065 semiconductor Substances 0.000 claims description 4
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 claims description 3
- 235000012431 wafers Nutrition 0.000 claims 7
- 238000004140 cleaning Methods 0.000 claims 2
- 239000007788 liquid Substances 0.000 claims 1
Landscapes
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Cleaning Or Drying Semiconductors (AREA)
Description
第１図及び第２図は本考案の半導体ウエハ乾燥
用治具の一実施例を示す断面図及び側面図、第３
図は従来の治具の断面図である。 １……キヤリア、２……架台、３……ウエハ、
４……ウエハ受台。
用治具の一実施例を示す断面図及び側面図、第３
図は従来の治具の断面図である。 １……キヤリア、２……架台、３……ウエハ、
４……ウエハ受台。
Claims (1)
- 半導体ウエハを支持するキヤリアと該キヤリア
を保持する架台とを備え、洗浄の終了した前記ウ
エハを乾燥処理する半導体ウエハ乾燥用治具にお
いて、前記キヤリアが前記架台に対して傾斜して
取付けられ、且つ該キヤリアの内底に、前記ウエ
ハの最下点を稜線部で支持しつつ該ウエハに滞留
する洗浄液の排出を容易にするウエハ受台が設け
てあることを特徴とする半導体ウエハ乾燥用治具
。
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4257689U JPH02132942U (ja) | 1989-04-12 | 1989-04-12 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4257689U JPH02132942U (ja) | 1989-04-12 | 1989-04-12 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH02132942U true JPH02132942U (ja) | 1990-11-05 |
Family
ID=31554239
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4257689U Pending JPH02132942U (ja) | 1989-04-12 | 1989-04-12 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH02132942U (ja) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2020176786A (ja) * | 2019-04-19 | 2020-10-29 | 株式会社Ｓｃｒｅｅｎ Ｓｐｅ テック | 乾燥装置 |
-
1989
- 1989-04-12 JP JP4257689U patent/JPH02132942U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2020176786A (ja) * | 2019-04-19 | 2020-10-29 | 株式会社Ｓｃｒｅｅｎ Ｓｐｅ テック | 乾燥装置 |