JPH0113212B2 - - Google Patents

Info

Publication number
JPH0113212B2
JPH0113212B2 JP56058724A JP5872481A JPH0113212B2 JP H0113212 B2 JPH0113212 B2 JP H0113212B2 JP 56058724 A JP56058724 A JP 56058724A JP 5872481 A JP5872481 A JP 5872481A JP H0113212 B2 JPH0113212 B2 JP H0113212B2
Authority
JP
Japan
Prior art keywords
temperature
substrate temperature
indium
substrate
insb
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP56058724A
Other languages
English (en)
Japanese (ja)
Other versions
JPS57173934A (en
Inventor
Takeki Matsui
Keiji Kuboyama
Takeo Kimura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Asahi Chemical Industry Co Ltd
Original Assignee
Asahi Chemical Industry Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Asahi Chemical Industry Co Ltd filed Critical Asahi Chemical Industry Co Ltd
Priority to JP56058724A priority Critical patent/JPS57173934A/ja
Priority to US06/361,939 priority patent/US4468415A/en
Priority to DE8282102605T priority patent/DE3271874D1/de
Priority to EP82102605A priority patent/EP0062818B2/fr
Priority to AT82102605T priority patent/ATE20629T1/de
Priority to KR8201347A priority patent/KR860000161B1/ko
Publication of JPS57173934A publication Critical patent/JPS57173934A/ja
Priority to US06/620,645 priority patent/US4539178A/en
Publication of JPH0113212B2 publication Critical patent/JPH0113212B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P14/00—Formation of materials, e.g. in the shape of layers or pillars
    • H10P14/20—Formation of materials, e.g. in the shape of layers or pillars of semiconductor materials
    • H10P14/34—Deposited materials, e.g. layers
    • H10P14/3402—Deposited materials, e.g. layers characterised by the chemical composition
    • H10P14/3414—Deposited materials, e.g. layers characterised by the chemical composition being group IIIA-VIA materials
    • H10P14/3422—Antimonides

Landscapes

  • Hall/Mr Elements (AREA)
  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
JP56058724A 1981-03-30 1981-04-18 Manufacture of indium-antimony system compound crystal semiconductor Granted JPS57173934A (en)

Priority Applications (7)

Application Number Priority Date Filing Date Title
JP56058724A JPS57173934A (en) 1981-04-18 1981-04-18 Manufacture of indium-antimony system compound crystal semiconductor
US06/361,939 US4468415A (en) 1981-03-30 1982-03-25 Indium-antimony complex crystal semiconductor and process for production thereof
DE8282102605T DE3271874D1 (en) 1981-03-30 1982-03-27 Indium-antimony complex crystal semiconductor and process for production thereof
EP82102605A EP0062818B2 (fr) 1981-03-30 1982-03-27 Procédé de fabrication d un élément Hall ou d un élément magnetoresistif comportant un semiconducteur à structure cristalline complexe d antimonieure d indium
AT82102605T ATE20629T1 (de) 1981-03-30 1982-03-27 Indium-antimon-halbleiter mit komplexer kristalliner struktur und verfahren zu seiner herstellung.
KR8201347A KR860000161B1 (ko) 1981-03-30 1982-03-29 인듐 안티몬계 복합 결정반도체 및 그 제조방법
US06/620,645 US4539178A (en) 1981-03-30 1984-06-14 Indium-antimony complex crystal semiconductor and process for production thereof

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56058724A JPS57173934A (en) 1981-04-18 1981-04-18 Manufacture of indium-antimony system compound crystal semiconductor

Publications (2)

Publication Number Publication Date
JPS57173934A JPS57173934A (en) 1982-10-26
JPH0113212B2 true JPH0113212B2 (fr) 1989-03-03

Family

ID=13092443

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56058724A Granted JPS57173934A (en) 1981-03-30 1981-04-18 Manufacture of indium-antimony system compound crystal semiconductor

Country Status (1)

Country Link
JP (1) JPS57173934A (fr)

Also Published As

Publication number Publication date
JPS57173934A (en) 1982-10-26

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