JPH01143122U - - Google Patents

Info

Publication number
JPH01143122U
JPH01143122U JP1988039401U JP3940188U JPH01143122U JP H01143122 U JPH01143122 U JP H01143122U JP 1988039401 U JP1988039401 U JP 1988039401U JP 3940188 U JP3940188 U JP 3940188U JP H01143122 U JPH01143122 U JP H01143122U
Authority
JP
Japan
Prior art keywords
substrate
power source
photoresist
photolithography
rotation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1988039401U
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1988039401U priority Critical patent/JPH01143122U/ja
Publication of JPH01143122U publication Critical patent/JPH01143122U/ja
Pending legal-status Critical Current

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Description

【図面の簡単な説明】
第１図は本考案の第１の実施例の断面図、第２
図は第１図のモータを除いた底面図、第３図は第
２の実施例の正面図、第４図は第３図のモータを
除いた底面図、第５図は従来の装置を示す正面図
である。 １…基板、２…回転テーブル、３，３′…モー
タ、４…ノズル、５…回転速度制御装置、６…制
御信号線、７…サンギア、８ａ，８ｂ，８ｃ…プ
ラネタリーギア、９…大ギア、１０…回転テーブ
ル回転中心の公転軌道、１１…絶対静止系より見
た回転中心の基板上の軌跡、１２…小ギア。

Claims (1)

    【実用新案登録請求の範囲】
  1. 写真蝕刻法による半導体装置の製造のフオトレ
    ジスト塗布工程でフオトレジストを基板上に一様
    に拡散させる装置において、基板を載せて回転す
    るテーブルを、該テーブルの回転中心を遊星運動
    させる遊星歯車機構を介して動力源に連結させた
    ことを特徴とする半導体製造装置。
JP1988039401U 1988-03-25 1988-03-25 Pending JPH01143122U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1988039401U JPH01143122U (ja) 1988-03-25 1988-03-25

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1988039401U JPH01143122U (ja) 1988-03-25 1988-03-25

Publications (1)

Publication Number Publication Date
JPH01143122U true JPH01143122U (ja) 1989-10-02

Family

ID=31265906

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1988039401U Pending JPH01143122U (ja) 1988-03-25 1988-03-25

Country Status (1)

Country Link
JP (1) JPH01143122U (ja)

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