JPH0115135B2 - - Google Patents

Info

Publication number
JPH0115135B2
JPH0115135B2 JP56072464A JP7246481A JPH0115135B2 JP H0115135 B2 JPH0115135 B2 JP H0115135B2 JP 56072464 A JP56072464 A JP 56072464A JP 7246481 A JP7246481 A JP 7246481A JP H0115135 B2 JPH0115135 B2 JP H0115135B2
Authority
JP
Japan
Prior art keywords
nitrogen
mobility
substrate
indium
antimony
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP56072464A
Other languages
English (en)
Japanese (ja)
Other versions
JPS57187934A (en
Inventor
Takeki Matsui
Keiji Kuboyama
Takeo Kimura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Asahi Chemical Industry Co Ltd
Original Assignee
Asahi Chemical Industry Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Asahi Chemical Industry Co Ltd filed Critical Asahi Chemical Industry Co Ltd
Priority to JP56072464A priority Critical patent/JPS57187934A/ja
Priority to US06/361,939 priority patent/US4468415A/en
Priority to DE8282102605T priority patent/DE3271874D1/de
Priority to EP82102605A priority patent/EP0062818B2/fr
Priority to AT82102605T priority patent/ATE20629T1/de
Priority to KR8201347A priority patent/KR860000161B1/ko
Publication of JPS57187934A publication Critical patent/JPS57187934A/ja
Priority to US06/620,645 priority patent/US4539178A/en
Publication of JPH0115135B2 publication Critical patent/JPH0115135B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P14/00—Formation of materials, e.g. in the shape of layers or pillars
    • H10P14/20—Formation of materials, e.g. in the shape of layers or pillars of semiconductor materials
    • H10P14/29—Formation of materials, e.g. in the shape of layers or pillars of semiconductor materials characterised by the substrates
    • H10P14/2901—Materials
    • H10P14/2921—Materials being crystalline insulating materials
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P14/00—Formation of materials, e.g. in the shape of layers or pillars
    • H10P14/20—Formation of materials, e.g. in the shape of layers or pillars of semiconductor materials
    • H10P14/24—Formation of materials, e.g. in the shape of layers or pillars of semiconductor materials using chemical vapour deposition [CVD]
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P14/00—Formation of materials, e.g. in the shape of layers or pillars
    • H10P14/20—Formation of materials, e.g. in the shape of layers or pillars of semiconductor materials
    • H10P14/34—Deposited materials, e.g. layers
    • H10P14/3402—Deposited materials, e.g. layers characterised by the chemical composition
    • H10P14/3414—Deposited materials, e.g. layers characterised by the chemical composition being group IIIA-VIA materials
    • H10P14/3422—Antimonides

Landscapes

  • Hall/Mr Elements (AREA)
  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
JP56072464A 1981-03-30 1981-05-14 Manufacture of indium-antimony system mixing crystal Granted JPS57187934A (en)

Priority Applications (7)

Application Number Priority Date Filing Date Title
JP56072464A JPS57187934A (en) 1981-05-14 1981-05-14 Manufacture of indium-antimony system mixing crystal
US06/361,939 US4468415A (en) 1981-03-30 1982-03-25 Indium-antimony complex crystal semiconductor and process for production thereof
DE8282102605T DE3271874D1 (en) 1981-03-30 1982-03-27 Indium-antimony complex crystal semiconductor and process for production thereof
EP82102605A EP0062818B2 (fr) 1981-03-30 1982-03-27 Procédé de fabrication d un élément Hall ou d un élément magnetoresistif comportant un semiconducteur à structure cristalline complexe d antimonieure d indium
AT82102605T ATE20629T1 (de) 1981-03-30 1982-03-27 Indium-antimon-halbleiter mit komplexer kristalliner struktur und verfahren zu seiner herstellung.
KR8201347A KR860000161B1 (ko) 1981-03-30 1982-03-29 인듐 안티몬계 복합 결정반도체 및 그 제조방법
US06/620,645 US4539178A (en) 1981-03-30 1984-06-14 Indium-antimony complex crystal semiconductor and process for production thereof

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56072464A JPS57187934A (en) 1981-05-14 1981-05-14 Manufacture of indium-antimony system mixing crystal

Publications (2)

Publication Number Publication Date
JPS57187934A JPS57187934A (en) 1982-11-18
JPH0115135B2 true JPH0115135B2 (fr) 1989-03-15

Family

ID=13490047

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56072464A Granted JPS57187934A (en) 1981-03-30 1981-05-14 Manufacture of indium-antimony system mixing crystal

Country Status (1)

Country Link
JP (1) JPS57187934A (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7567078B2 (en) 2004-12-28 2009-07-28 Asahi Kasei Emd Corporation Magnetic rotation-angle sensor and angle-information processing device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7567078B2 (en) 2004-12-28 2009-07-28 Asahi Kasei Emd Corporation Magnetic rotation-angle sensor and angle-information processing device

Also Published As

Publication number Publication date
JPS57187934A (en) 1982-11-18

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