JPH01160829U - - Google Patents
Info
- Publication number
- JPH01160829U JPH01160829U JP4981488U JP4981488U JPH01160829U JP H01160829 U JPH01160829 U JP H01160829U JP 4981488 U JP4981488 U JP 4981488U JP 4981488 U JP4981488 U JP 4981488U JP H01160829 U JPH01160829 U JP H01160829U
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor substrate
- short wavelength
- wavelength light
- support mechanism
- reticle
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4981488U JPH01160829U (mo) | 1988-04-13 | 1988-04-13 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4981488U JPH01160829U (mo) | 1988-04-13 | 1988-04-13 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01160829U true JPH01160829U (mo) | 1989-11-08 |
Family
ID=31275898
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4981488U Pending JPH01160829U (mo) | 1988-04-13 | 1988-04-13 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01160829U (mo) |
-
1988
- 1988-04-13 JP JP4981488U patent/JPH01160829U/ja active Pending
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JPS5928337A (ja) | プロジエクシヨンアライナ | |
| JPH01160829U (mo) | ||
| JPH03106730U (mo) | ||
| JPS63118229U (mo) | ||
| JPH0270427U (mo) | ||
| JPH01160828U (mo) | ||
| JPS62104440U (mo) | ||
| JPH0373428U (mo) | ||
| JPH01198026A (ja) | 半導体ウェハの露光装置 | |
| JPH0450801U (mo) | ||
| JPH0189734U (mo) | ||
| JPS5928330Y2 (ja) | 視野マ−ク投影装置 | |
| JPS5819634Y2 (ja) | 座標読取装置 | |
| JPH01173770U (mo) | ||
| JPS62252135A (ja) | パタ−ン転写装置 | |
| JPH02131334U (mo) | ||
| JPH01145125U (mo) | ||
| JPS63152235U (mo) | ||
| JPH0457854U (mo) | ||
| JPS63164739U (mo) | ||
| JPH01112041U (mo) | ||
| JPH03117829U (mo) | ||
| JPS63115213U (mo) | ||
| JPH0233022U (mo) | ||
| JPS5816239A (ja) | フオトレジスト露光装置 |