JPH01165643U - - Google Patents
Info
- Publication number
- JPH01165643U JPH01165643U JP6237888U JP6237888U JPH01165643U JP H01165643 U JPH01165643 U JP H01165643U JP 6237888 U JP6237888 U JP 6237888U JP 6237888 U JP6237888 U JP 6237888U JP H01165643 U JPH01165643 U JP H01165643U
- Authority
- JP
- Japan
- Prior art keywords
- inspection device
- view
- wafer
- semiconductor inspection
- utility
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 5
- 238000007689 inspection Methods 0.000 claims description 4
- 239000000428 dust Substances 0.000 claims description 2
Landscapes
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Description
第１図、第２図、第３図、第４図は、この考案
の一実施例による半導体検査装置の斜視図、断面
図、斜視図および断面図、第５図、第６図は従来
の半導体検査装置の斜視図および断面図である。
図において、１は半導体検査装置、２はＩＣ（
ウエハ）、３はテスト用針、４はパツド、５はち
り屑、６は吸引クリーナＡ、７はイオン化空気噴
出口、８はイオン化空気、９は吸引クリーナＢを
示す。なお、図中、同一符号は同一、または相当
部分を示す。
1, 2, 3, and 4 are a perspective view, a sectional view, a perspective view, and a sectional view of a semiconductor inspection apparatus according to an embodiment of the present invention, and FIGS. 5 and 6 are a conventional FIG. 1 is a perspective view and a cross-sectional view of a semiconductor inspection device. In the figure, 1 is a semiconductor inspection device, 2 is an IC (
wafer), 3 is a test needle, 4 is a pad, 5 is dust, 6 is a suction cleaner A, 7 is an ionized air outlet, 8 is an ionized air, and 9 is a suction cleaner B. In addition, in the figures, the same reference numerals indicate the same or equivalent parts.
Claims (1)
を吸引する機構を備えたことを特徴とする半導体
検査装置。 A semiconductor inspection device characterized by being equipped with a mechanism for sucking dust during testing of wafer-shaped semiconductor integrated circuits.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6237888U JPH01165643U (en) | 1988-05-11 | 1988-05-11 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6237888U JPH01165643U (en) | 1988-05-11 | 1988-05-11 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01165643U true JPH01165643U (en) | 1989-11-20 |
Family
ID=31287995
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6237888U Pending JPH01165643U (en) | 1988-05-11 | 1988-05-11 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01165643U (en) |
-
1988
- 1988-05-11 JP JP6237888U patent/JPH01165643U/ja active Pending
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