JPH01165643U - - Google Patents

Info

Publication number
JPH01165643U
JPH01165643U JP6237888U JP6237888U JPH01165643U JP H01165643 U JPH01165643 U JP H01165643U JP 6237888 U JP6237888 U JP 6237888U JP 6237888 U JP6237888 U JP 6237888U JP H01165643 U JPH01165643 U JP H01165643U
Authority
JP
Japan
Prior art keywords
inspection device
view
wafer
semiconductor inspection
utility
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP6237888U
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP6237888U priority Critical patent/JPH01165643U/ja
Publication of JPH01165643U publication Critical patent/JPH01165643U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Testing Or Measuring Of Semiconductors Or The Like (AREA)

Description

【図面の簡単な説明】
第１図、第２図、第３図、第４図は、この考案
の一実施例による半導体検査装置の斜視図、断面
図、斜視図および断面図、第５図、第６図は従来
の半導体検査装置の斜視図および断面図である。 図において、１は半導体検査装置、２はＩＣ（
ウエハ）、３はテスト用針、４はパツド、５はち
り屑、６は吸引クリーナＡ、７はイオン化空気噴
出口、８はイオン化空気、９は吸引クリーナＢを
示す。なお、図中、同一符号は同一、または相当
部分を示す。

Claims (1)

    【実用新案登録請求の範囲】
  1. ウエハ状の半導体集積回路のテスト中にちり屑
    を吸引する機構を備えたことを特徴とする半導体
    検査装置。
JP6237888U 1988-05-11 1988-05-11 Pending JPH01165643U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6237888U JPH01165643U (ja) 1988-05-11 1988-05-11

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6237888U JPH01165643U (ja) 1988-05-11 1988-05-11

Publications (1)

Publication Number Publication Date
JPH01165643U true JPH01165643U (ja) 1989-11-20

Family

ID=31287995

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6237888U Pending JPH01165643U (ja) 1988-05-11 1988-05-11

Country Status (1)

Country Link
JP (1) JPH01165643U (ja)

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