JPH01167607U - - Google Patents

Info

Publication number
JPH01167607U
JPH01167607U JP1988064319U JP6431988U JPH01167607U JP H01167607 U JPH01167607 U JP H01167607U JP 1988064319 U JP1988064319 U JP 1988064319U JP 6431988 U JP6431988 U JP 6431988U JP H01167607 U JPH01167607 U JP H01167607U
Authority
JP
Japan
Prior art keywords
measurement
light
types
reference light
beat frequency
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1988064319U
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1988064319U priority Critical patent/JPH01167607U/ja
Priority to US07/351,091 priority patent/US4948251A/en
Publication of JPH01167607U publication Critical patent/JPH01167607U/ja
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02055—Reduction or prevention of errors; Testing; Calibration
    • G01B9/0207—Error reduction by correction of the measurement signal based on independently determined error sources, e.g. using a reference interferometer
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/30—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces
    • G01B11/303—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces using photoelectric detection means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02001—Interferometers characterised by controlling or generating intrinsic radiation properties
    • G01B9/02002—Interferometers characterised by controlling or generating intrinsic radiation properties using two or more frequencies
    • G01B9/02003—Interferometers characterised by controlling or generating intrinsic radiation properties using two or more frequencies using beat frequencies
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
    • G01B2290/70—Using polarization in the interferometer

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
  • Optical Radar Systems And Details Thereof (AREA)

Description

【図面の簡単な説明】
第１図は本考案の一実施例である光ヘテロダイ
ン測定装置の構成を説明する図である。第２図は
第１図の測定装置によつて測定された光磁気デイ
スクのグルーブ形状を示す図である。第３図は本
考案の他の実施例の要部を示す図である。第４図
は本考案の更に別の実施例の要部を示す図である
。第５図は第４図の実施例における光周波数シフ
タの構成を説明する図である。第６図は直交２周
波レーザ光を偏波面に対して４５°傾斜させた方
向で干渉させた場合の光強度を説明するための図
である。第７図は直交２周波レーザ光が定偏波光
フアイバーに入射される際の偏光方向の方位調整
が角度θだけずれている状態を示す図である。第
８図はビート信号に対してノイズが同位相で加え
られた場合を示す図である。第９図はビート信号
に対して位相のずれたノイズが加えられた場合を
示す図である。第１０図は第９図の場合にノイズ
を含むビート信号の位相の変化を示す図である。 １８……定偏波光フアイバー、２０……計測部
、２６，３８……偏光ビームスプリツタ（光学手
段）、２８，３０，４６，４８……光検出器、４
４……測定対象、５０，５２……差動増幅器、Ｒ
ＢＳ１，ＲＢＳ２……参照ビート信号（電気信号
）、ＭＢＳ１，ＭＢＳ２……計測ビート信号（電
気信号）。

Claims (1)

  1. 【実用新案登録請求の範囲】 定偏波光フアイバを介して計測部に伝送された
    レーザ光が、周波数が異なる一対の直線偏光から
    成る参照光と、該参照光と同じ一対の直線偏光か
    ら成る計測光とに分離され、該計測光のビート周
    波数が測定対象によつて変化させられることによ
    り、前記参照光のビート周波数との周波数差に基
    づいて測定を行う光へテロダイン測定装置におい
    て、 ビートの位相が１８０°異なる２種類の参照光
    および計測光をそれぞれ取り出す光学手段と、 前記２種類ずつの参照光および計測光をそれぞ
    れ検出する光検出器と、 該光検出器によつて検出された前記２種類の参
    照光に対応する電気信号および前記２種類の計測
    光に対応する電気信号をそれぞれ差動増幅する差
    動増幅器と を有することを特徴とする光ヘテロダイン測定装
    置。
JP1988064319U 1988-05-16 1988-05-16 Pending JPH01167607U (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP1988064319U JPH01167607U (ja) 1988-05-16 1988-05-16
US07/351,091 US4948251A (en) 1988-05-16 1989-05-12 Optical heterodyne measuring apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1988064319U JPH01167607U (ja) 1988-05-16 1988-05-16

Publications (1)

Publication Number Publication Date
JPH01167607U true JPH01167607U (ja) 1989-11-24

Family

ID=13254796

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1988064319U Pending JPH01167607U (ja) 1988-05-16 1988-05-16

Country Status (2)

Country Link
US (1) US4948251A (ja)
JP (1) JPH01167607U (ja)

Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5298970A (en) * 1990-03-20 1994-03-29 Kabushiki Kaisha Kobe Seiko Sho Sample evaluating method by using thermal expansion displacement
US5434669A (en) * 1990-10-23 1995-07-18 Olympus Optical Co., Ltd. Measuring interferometric endoscope having a laser radiation source
EP0514579B1 (en) * 1991-05-24 1995-07-19 Hewlett-Packard Company A heterodyne interferometer arrangement
JP3244769B2 (ja) * 1991-07-11 2002-01-07 キヤノン株式会社 測定方法及び測定装置
DE69223916T2 (de) * 1991-10-03 1998-05-28 Canon K.K., Tokio/Tokyo Optische Kodiereinrichtung
EP0536655B1 (en) * 1991-10-03 1996-05-29 Canon Kabushiki Kaisha Measuring method and measuring apparatus
US5280340A (en) * 1991-10-23 1994-01-18 Phase Metrics Method and apparatus to calibrate intensity and determine fringe order for interferometric measurement of small spacings
US5457534A (en) * 1991-10-23 1995-10-10 Phase Metrics Method and apparatus to calibrate intensity and determine fringe order for interferometric measurement of small spacings
US5523839A (en) * 1994-02-28 1996-06-04 Minnesota Mining & Manufacturing Differential optical interferometric profilomenty for real time manufacturing control
US5661559A (en) * 1996-03-14 1997-08-26 Phase Metrics, Inc. Optical surface detection for magnetic disks
US6865196B2 (en) * 2002-05-28 2005-03-08 Itt Manufacturing Enterprises, Inc. Laser spectroscopy using a master/slave architecture
US20060145066A1 (en) * 2004-12-13 2006-07-06 Hideaki Tamiya Displacement detection apparatus, displacement gauging apparatus and fixed point detection apparatus
DE102006023687B4 (de) * 2005-05-23 2023-01-19 Mori Seiki Co., Ltd. Versatzdetektor und Einrichtung zur Detektion eines Fixpunktes
JP4673770B2 (ja) * 2006-03-03 2011-04-20 株式会社日立ハイテクノロジーズ 光ヘテロダイン干渉測定方法およびその測定装置
JP5697323B2 (ja) * 2009-10-22 2015-04-08 キヤノン株式会社 ヘテロダイン干渉計測装置

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1979000506A1 (en) * 1978-01-13 1979-08-09 Nat Res Dev Interferometer systems
US4688940A (en) * 1985-03-12 1987-08-25 Zygo Corporation Heterodyne interferometer system
US4824251A (en) * 1987-09-25 1989-04-25 Digital Signal Corporation Optical position sensor using coherent detection and polarization preserving optical fiber

Also Published As

Publication number Publication date
US4948251A (en) 1990-08-14

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