JPH0117251B2 - - Google Patents

Info

Publication number
JPH0117251B2
JPH0117251B2 JP58052531A JP5253183A JPH0117251B2 JP H0117251 B2 JPH0117251 B2 JP H0117251B2 JP 58052531 A JP58052531 A JP 58052531A JP 5253183 A JP5253183 A JP 5253183A JP H0117251 B2 JPH0117251 B2 JP H0117251B2
Authority
JP
Japan
Prior art keywords
light
tip
optical fiber
semiconductor
metal contact
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP58052531A
Other languages
English (en)
Japanese (ja)
Other versions
JPS59178742A (ja
Inventor
Hideki Isaka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP58052531A priority Critical patent/JPS59178742A/ja
Publication of JPS59178742A publication Critical patent/JPS59178742A/ja
Publication of JPH0117251B2 publication Critical patent/JPH0117251B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P74/00—Testing or measuring during manufacture or treatment of wafers, substrates or devices

Landscapes

  • Light Receiving Elements (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP58052531A 1983-03-30 1983-03-30 半導体受光素子の特性測定方法 Granted JPS59178742A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP58052531A JPS59178742A (ja) 1983-03-30 1983-03-30 半導体受光素子の特性測定方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58052531A JPS59178742A (ja) 1983-03-30 1983-03-30 半導体受光素子の特性測定方法

Publications (2)

Publication Number Publication Date
JPS59178742A JPS59178742A (ja) 1984-10-11
JPH0117251B2 true JPH0117251B2 (pl) 1989-03-29

Family

ID=12917336

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58052531A Granted JPS59178742A (ja) 1983-03-30 1983-03-30 半導体受光素子の特性測定方法

Country Status (1)

Country Link
JP (1) JPS59178742A (pl)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0617292Y2 (ja) * 1987-12-09 1994-05-02 日本電気株式会社 半導体受光素子の検査装置
JP2727799B2 (ja) * 1991-07-11 1998-03-18 日本電気株式会社 半導体集積回路
US6731122B2 (en) 2001-08-14 2004-05-04 International Business Machines Corporation Wafer test apparatus including optical elements and method of using the test apparatus

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5791534A (en) * 1980-11-28 1982-06-07 Nec Corp Lifetime tester for light receiving semiconductor device

Also Published As

Publication number Publication date
JPS59178742A (ja) 1984-10-11

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