JPH01177277U - - Google Patents
Info
- Publication number
- JPH01177277U JPH01177277U JP1988073600U JP7360088U JPH01177277U JP H01177277 U JPH01177277 U JP H01177277U JP 1988073600 U JP1988073600 U JP 1988073600U JP 7360088 U JP7360088 U JP 7360088U JP H01177277 U JPH01177277 U JP H01177277U
- Authority
- JP
- Japan
- Prior art keywords
- crucible
- heating means
- molecular beam
- shutter
- opening
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988073600U JPH01177277U (da) | 1988-06-02 | 1988-06-02 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988073600U JPH01177277U (da) | 1988-06-02 | 1988-06-02 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01177277U true JPH01177277U (da) | 1989-12-18 |
Family
ID=31298737
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1988073600U Pending JPH01177277U (da) | 1988-06-02 | 1988-06-02 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01177277U (da) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6065792A (ja) * | 1983-09-19 | 1985-04-15 | Fujitsu Ltd | 分子線結晶成長装置 |
| JPS62165318A (ja) * | 1986-01-17 | 1987-07-21 | Agency Of Ind Science & Technol | 分子線結晶成長装置 |
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1988
- 1988-06-02 JP JP1988073600U patent/JPH01177277U/ja active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6065792A (ja) * | 1983-09-19 | 1985-04-15 | Fujitsu Ltd | 分子線結晶成長装置 |
| JPS62165318A (ja) * | 1986-01-17 | 1987-07-21 | Agency Of Ind Science & Technol | 分子線結晶成長装置 |