JPH01187488A - 放射線モニタの汚染判定方法 - Google Patents

放射線モニタの汚染判定方法

Info

Publication number
JPH01187488A
JPH01187488A JP63012351A JP1235188A JPH01187488A JP H01187488 A JPH01187488 A JP H01187488A JP 63012351 A JP63012351 A JP 63012351A JP 1235188 A JP1235188 A JP 1235188A JP H01187488 A JPH01187488 A JP H01187488A
Authority
JP
Japan
Prior art keywords
alarm level
contamination
stepwise
level
measurement
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP63012351A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0575988B2 (da
Inventor
Shohei Matsubara
昌平 松原
Naoki Tateishi
直樹 立石
Toshio Yanai
柳井　俊男
Akira Koyano
小谷　野明
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Aloka Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Aloka Co Ltd filed Critical Aloka Co Ltd
Priority to JP63012351A priority Critical patent/JPH01187488A/ja
Publication of JPH01187488A publication Critical patent/JPH01187488A/ja
Publication of JPH0575988B2 publication Critical patent/JPH0575988B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H01L23/544—
    • H01L21/0274—
    • H01L21/32139—
    • H01L21/76229—
    • H01L2223/54426—
    • H01L2223/54453—
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S438/00—Semiconductor device manufacturing: process
    • Y10S438/975—Substrate or mask aligning feature

Landscapes

  • Measurement Of Radiation (AREA)
JP63012351A 1988-01-21 1988-01-21 放射線モニタの汚染判定方法 Granted JPH01187488A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP63012351A JPH01187488A (ja) 1988-01-21 1988-01-21 放射線モニタの汚染判定方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP63012351A JPH01187488A (ja) 1988-01-21 1988-01-21 放射線モニタの汚染判定方法

Publications (2)

Publication Number Publication Date
JPH01187488A true JPH01187488A (ja) 1989-07-26
JPH0575988B2 JPH0575988B2 (da) 1993-10-21

Family

ID=11802861

Family Applications (1)

Application Number Title Priority Date Filing Date
JP63012351A Granted JPH01187488A (ja) 1988-01-21 1988-01-21 放射線モニタの汚染判定方法

Country Status (1)

Country Link
JP (1) JPH01187488A (da)

Also Published As

Publication number Publication date
JPH0575988B2 (da) 1993-10-21

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