JPH01192003A - Magnetic head - Google Patents
Magnetic headInfo
- Publication number
- JPH01192003A JPH01192003A JP1817588A JP1817588A JPH01192003A JP H01192003 A JPH01192003 A JP H01192003A JP 1817588 A JP1817588 A JP 1817588A JP 1817588 A JP1817588 A JP 1817588A JP H01192003 A JPH01192003 A JP H01192003A
- Authority
- JP
- Japan
- Prior art keywords
- magnetic
- sendust
- gap
- thin film
- thin
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
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- Magnetic Heads (AREA)
Abstract
Description
【発明の詳細な説明】
の1
本発明は172インチVTRや81a11VTR等に使
用される磁気ヘッドに関するものである。DETAILED DESCRIPTION OF THE INVENTION (1) The present invention relates to a magnetic head used in 172-inch VTRs, 81a11 VTRs, and the like.
従】じU支蓋−
従来、高密度に磁気記録を行うために、高抗磁力磁気記
録媒体に、高飽和磁束密度コアを有する磁気ヘッドで記
録再生を行っている。Conventionally, in order to perform high-density magnetic recording, recording and reproduction have been performed on a high coercive force magnetic recording medium using a magnetic head having a high saturation magnetic flux density core.
すなわち、実開昭80−169708号や特開昭60−
133507号に述べられているように、高飽和磁束密
度コアは、フェライトコアでは実現が困難で磁気コアを
図2(a)で示すようにセンダスト等の合金で形成した
り、図2(b)で示すようなフェライトコアの磁気ギャ
ップ対向面にセンダスト等の合金薄膜を配設したいわゆ
るMetal−In−Gapミルヘッド下MIGヘッド
と略称)が用いられる。In other words, Utility Model Application Publication No. 169708/1983 and Japanese Patent Application Publication No. 1988-16970-
As stated in No. 133507, it is difficult to achieve a high saturation magnetic flux density core with a ferrite core. A so-called Metal-In-Gap mill head (MIG head) in which a thin alloy film such as sendust is disposed on the surface of a ferrite core facing the magnetic gap is used.
[l イ ゛ ;
しかしながら、応用磁気セミナー382年12月7日、
8日「磁気記録高トラツク密度記録」センダスト等の合
金のみでコアを形成した場合には、センダストの電気抵
抗が低いために、渦電流が流れやすく、高周波数領域で
の透磁率が低下し、記録再生効率が悪い。[L I ゛; However, Applied Magnetic Seminar 382 December 7,
8th ``Magnetic Recording High Track Density Recording'' If the core is formed only from an alloy such as sendust, the low electrical resistance of sendust causes eddy currents to easily flow, reducing magnetic permeability in the high frequency range. Recording/playback efficiency is poor.
さらに第2図(a)、(b)に示すようなMIGヘッド
においても、前述のセンダストのみで形成されたコア程
ではないにしてもコアの磁気飽和が生じない程度の実用
的なセンダストの膜厚は3μm以上となるため、やはり
高周波数領域での渦電流による透磁率の低下はまぬがれ
ない。Furthermore, even in the MIG head shown in FIGS. 2(a) and 2(b), a practical Sendust film that does not cause magnetic saturation of the core, although it is not as strong as the core formed only with Sendust described above. Since the thickness is 3 μm or more, it is inevitable that the magnetic permeability will decrease due to eddy currents in the high frequency range.
更にまたMIGヘッドにおいては、センダスト等の磁性
薄膜をフェライト等の熱膨張係数の異なるコア上にスパ
ッタリング等で形成するため、センダスト薄膜がコアブ
ロック突き合わせ等の製造工程途中で剥離する等の不具
合を生じ歩留りが悪いという問題もあった。Furthermore, in MIG heads, since a magnetic thin film such as sendust is formed by sputtering or the like on a core made of ferrite or the like having a different coefficient of thermal expansion, problems such as the sendust thin film peeling off during the manufacturing process such as when butting core blocks occur. There was also the problem of poor yield.
;・° −の
本発明は上記問題点を解決するために、MIGヘッドの
ギャップ対向面に配設されたセンダスト等の磁性薄膜を
、5102等の電気的絶縁性薄膜でギャップ面に直角方
向の仕切りを設けることにより、センダスト薄膜コア部
の電気抵抗を著しく高くする手段を有すると同時に、セ
ンダスト等の磁性薄膜をスパッタリング等で形成したと
きに生じる磁性膜の内部応力を緩和する手段をも兼ねて
いるものである。In order to solve the above problems, the present invention replaces the magnetic thin film such as Sendust, which is disposed on the surface facing the gap of the MIG head, with an electrically insulating thin film such as 5102 in the direction perpendicular to the gap surface. By providing a partition, it has a means to significantly increase the electrical resistance of the Sendust thin film core part, and at the same time, it also serves as a means to relieve the internal stress of the magnetic film that occurs when a magnetic thin film such as Sendust is formed by sputtering etc. It is something that exists.
1皿
このように、センダスト等の磁性薄膜を5102等の電
気的絶縁性薄膜の壁で仕切ることにより、ギャップ面に
平行方向の電気抵抗は数MΩ以上となり、この方向の渦
電流の発生が抑制され、高周波数領域での透磁率の低下
が著しく改善され、高周波数領域での記録再生効率が高
くなる。By partitioning a magnetic thin film such as Sendust with a wall of electrically insulating thin film such as 5102 in this way, the electrical resistance in the direction parallel to the gap plane becomes several MΩ or more, suppressing the generation of eddy currents in this direction. As a result, the decrease in magnetic permeability in the high frequency range is significantly improved, and the recording and reproducing efficiency in the high frequency range is increased.
更に、510□等の仕切りが存在することによりスパッ
タリング等で形成されたセンダスト等の磁性薄膜の内部
応力が緩和され、製造工程途中での薄膜剥離等の不具合
も少なくなり、製造歩留りも向上する。Furthermore, the presence of partitions such as 510□ relieves the internal stress of magnetic thin films such as sendust formed by sputtering etc., reducing defects such as thin film peeling during the manufacturing process, and improving manufacturing yield.
支敷肚 以下図面をもとに本発明の詳細な説明する。footrest The present invention will be described in detail below based on the drawings.
第1図は本発明の一実施例であり、2つのフェライトコ
ア半体のギャップ対向面に厚さ3〜6μmのセンダスト
薄膜2を配設しこれを厚さ0. 1〜1μm程度の51
02の薄膜3がギャップスペーサ4と直角に仕切ってい
る。FIG. 1 shows an embodiment of the present invention, in which a sendust thin film 2 with a thickness of 3 to 6 μm is arranged on the gap-opposing surfaces of two ferrite core halves, and this is coated with a thickness of 0.5 μm. 51 of about 1 to 1 μm
The thin film 3 of 02 partitions the gap spacer 4 at right angles.
5は2つのフェライトコア半体1どうしを接着している
モールドガラスである。5 is a molded glass that adheres the two ferrite core halves 1 together.
巻線窓6をとおしてコイル7を巻回して磁気ヘッドとな
る。A coil 7 is wound through the winding window 6 to form a magnetic head.
第3図(a)〜(e)に本発明の磁気ヘッドの製造方法
を示す。FIGS. 3(a) to 3(e) show a method of manufacturing the magnetic head of the present invention.
第3図(a)に示すようにフェライトコア半体となる基
板8上にS iO2等の電気的絶縁性薄膜9をスパッタ
リング等により3〜10μm程度形成し、同図(b)に
示すようにフォトリソグラフィーとエツチングにより厚
さ0.1〜1μm程度の5in2の壁3を形成する。こ
の上に、センダスト等の磁性薄膜10をスパッタリング
等により形成し、センダストの盛り上がった部分11を
同図(C)に示すように研磨で平坦化し、同図(d)の
ごとく所定の形状寸法にてトラック溝129巻線窓6を
ダイサー等により切削形成する。As shown in FIG. 3(a), an electrically insulating thin film 9 of SiO2 or the like is formed to a thickness of about 3 to 10 μm by sputtering or the like on a substrate 8 that will become the ferrite core half, and as shown in FIG. 3(b), A 5 in 2 wall 3 having a thickness of about 0.1 to 1 μm is formed by photolithography and etching. On top of this, a magnetic thin film 10 of sendust or the like is formed by sputtering or the like, and the raised part 11 of the sendust is flattened by polishing as shown in FIG. Then, track grooves 129 and winding windows 6 are formed by cutting with a dicer or the like.
このようにしてできたコア半休13と、別にフェライト
のみで形成した別のコア半体14を同図(e)に示すよ
うに突き合わせ、モールドガラス5を500℃〜600
℃の温度で流し込み溶着する。その後、切り離し線15
に沿ってダイサー等で切り離し、第1図のような本発明
の磁気ヘッドを得る。The core half body 13 made in this manner and another core half body 14 formed only of ferrite are butted together as shown in FIG.
Pour and weld at a temperature of ℃. After that, the separation line 15
The magnetic head of the present invention as shown in FIG. 1 is obtained by cutting with a dicer or the like along the lines.
第4図に本発明の第2の実施例を示す。FIG. 4 shows a second embodiment of the invention.
この実施例は両コア半体1,1゛ともS s O23で
仕切られたセンダスト薄膜コア部2を有している。In this embodiment, both core halves 1,1' have a Sendust thin film core portion 2 separated by S s O 23.
第5図に本発明の第3の実施例を示す。FIG. 5 shows a third embodiment of the present invention.
この実施例は第2の実施例のフェライトコア部1を全て
非磁性の基板16で形成したものである。In this embodiment, the ferrite core portion 1 of the second embodiment is entirely formed of a nonmagnetic substrate 16.
i且悲簸1
以上のごとく本発明の磁気ヘッドは高飽和磁束密度を実
現できるセンダスト等の合金薄膜コアを使いながらその
欠点である渦電流による透磁率の低下を来たさず、且つ
合金薄膜にありがちな大きな内部応力を発生させない高
性能で高製造歩留りを実現できる。As described above, the magnetic head of the present invention uses an alloy thin film core such as Sendust that can achieve high saturation magnetic flux density, but does not suffer from the decrease in magnetic permeability due to eddy current, which is the drawback of the thin alloy film core. It is possible to achieve high performance and high manufacturing yield without generating the large internal stress that tends to occur in other products.
第1図は本発明の実施例の斜視図、第4図、第5図は本
発明の第2.第3の実施例を示す斜視図、第3図(a)
〜(e)は本発明の第1の実施例の製造方法を示す斜視
図、第2図(a)、(b)は従来の磁気ヘッドの斜視図
である。
1.1′・・・・・・フェライトコア半体、2・・・・
・・高飽和磁束密度の薄膜コア部(センダスト)、
3・・・・・・電気的絶縁性薄膜による仕切り(510
2)、4・・・・・・ギャップスペーサ、
5・・・・・・モールドガラス、
6・・・・・・巻線窓、
7・・・・・φコイル。
−て I Q’を
第2 図(α) 第2図(b)
第 3 図 <、a>
ス
窮 3 印 (b)
! 3 図 (C)
第 3 図 (d)
S 3 図 (e)FIG. 1 is a perspective view of an embodiment of the invention, and FIGS. 4 and 5 are a perspective view of an embodiment of the invention. A perspective view showing the third embodiment, FIG. 3(a)
-(e) are perspective views showing the manufacturing method of the first embodiment of the present invention, and FIGS. 2(a) and 2(b) are perspective views of a conventional magnetic head. 1.1'...ferrite core half, 2...
... Thin film core part with high saturation magnetic flux density (Sendust), 3... Partition with electrically insulating thin film (510
2), 4... Gap spacer, 5... Molded glass, 6... Winding window, 7... φ coil. -I Q' in Fig. 2 (α) Fig. 2 (b) Fig. 3 <, a> Suspension 3 mark (b)! Figure 3 (C) Figure 3 (d) Figure 3 (e)
Claims (1)
しくは両方に高飽和磁束密度の磁性薄膜が配設された磁
気ヘッドにおいて、その磁性薄膜が電気的絶縁性薄膜に
より、ギャップ面に直角方向に仕切られていることを特
徴とする磁気ヘッド。In a magnetic head in which a magnetic thin film with a high saturation magnetic flux density is disposed on one or both of the facing surfaces of a gap formed by two magnetic cores, the magnetic thin film is arranged in a direction perpendicular to the gap surface by an electrically insulating thin film. A magnetic head characterized by being partitioned.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1817588A JPH01192003A (en) | 1988-01-28 | 1988-01-28 | Magnetic head |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1817588A JPH01192003A (en) | 1988-01-28 | 1988-01-28 | Magnetic head |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01192003A true JPH01192003A (en) | 1989-08-02 |
Family
ID=11964277
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1817588A Pending JPH01192003A (en) | 1988-01-28 | 1988-01-28 | Magnetic head |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01192003A (en) |
-
1988
- 1988-01-28 JP JP1817588A patent/JPH01192003A/en active Pending
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