JPH01201808A - Manufacture of composite type magnetic head - Google Patents

Abstract

PURPOSE:To obtain a magnetic head having a superior magnetic characteristic and a long service life by constituting a magnetic gap with narrow track width at the part of a thin film of ferromagnetic metal. CONSTITUTION:Plural grooves 3, 3... inclined at a prescribed angle are formed on the plane 1b of a block material 1 of ferrite magnetic material, and a thin film of nonmagnetic substance is formed on a side wall plane by a PVD method, and next, the thin film 7 of metallic magnetic material on the side wall plane and a nonmagnetic thin film 8 on the film are formed by digging the groove 6. Next, a winding groove 11 and a groove 17 for filling a coupling member are formed on the plane 1a, and a pair of core half bodies are butted in a state where the end parts of the thin film 7 are confronted with each other, then, both are joined by using glass with a low m.p. Next, by cutting it at parts of (m)-(n), (o)-(p), and (q)-(r), etc., a magnetic core can be obtained, respectively. In such a way, it is possible to realize the mass production of a composite magnetic head having the superior magnetic characteristic and the long service life with a high yield rate.

Description

DETAILED DESCRIPTION OF THE INVENTION (Field of Industrial Application) The present invention relates to a method of manufacturing a magnetic head, and particularly to a method of manufacturing a composite magnetic head used for high-density magnetic recording and reproducing.

(Prior Art) Conventionally, magnetic recording and reproducing methods, in which recording and reproducing operations of information signals are performed magnetically, have been used in many technical fields because of their ease of configuration and operation. However, as the demand for recording and reproducing broadband information signals and high-density recording and reproducing information signals increases, recording linear density has been increased by using magnetic materials with high coercive force in magnetic recording media. By increasing the height and narrowing the track, high-density recording and reproduction of information signals has become possible. As the coercive force of the magnetic material used in magnetic recording media increases, a larger gap magnetic field is required to sufficiently record data on these recording media using magnetic heads. For example, the main magnetic path is made of a metal-based magnetic material such as sendust or amorphous, and the main magnetic path is made of an oxide-based magnetic material such as ferrite magnetic material, which has a low saturation magnetic flux density but has excellent high frequency characteristics. There is a so-called composite magnetic head.

(Problems to be Solved) In the composite magnetic head of the conventional structure described above, in order to construct the sliding surface with wear resistance, the magnetic head is A block material of ferrite magnetic material corresponding to the part to be formed as the core and a block material of high hardness non-magnetic wear-resistant material constituting the sliding surface, such as a glass block material, are welded together. There is.

However, when manufacturing a magnetic head, it is necessary to weld the above-mentioned materials, that is, the block material of ferrite magnetic material as described above, and the block material of high hardness non-magnetic wear-resistant material, such as glass block material. When this material is used as a material for a magnetic head, (1) the number of steps for manufacturing the magnetic head becomes extremely large. (2) Since the two blocks to be welded must have a difference in coefficient of thermal expansion of at least 8%, the materials that can be used are limited. (3) Instead of welding a glass block material to a ferrite magnetic block material, it is possible to apply a highly hard non-magnetic wear-resistant material to the ferrite magnetic block material by applying a sputtering method, for example. However, it is impractical because it takes a very long time to form a layer of highly hard, non-magnetic wear-resistant material with a predetermined thickness. Even if it is possible to deposit an abrasive material layer, it is difficult to obtain a thick film with high adhesion strength and uniform quality, and there are problems such as cracking and peeling. There is a need for a method for manufacturing a composite magnetic head that does not have the above-mentioned problems.

(Means for Solving the Problems) The present invention has been made to solve the above problems, and a magnetic circuit is formed by forming a thin film of a ferromagnetic metal onto a magnetic core made of a ferromagnetic oxide magnetic material using a vacuum film-forming technique. A method of manufacturing a composite magnetic head in which a magnetic gap in a narrow track is formed in the thin film of ferromagnetic metal by forming a magnetic field in a block of ferromagnetic oxide magnetic material The sliding surface of the magnetic head in the block material of the ferromagnetic oxide magnetic material described above is inclined at a predetermined angle with respect to the boundary line between the surface corresponding to the sliding surface of the head and the surface corresponding to the gap forming surface. The first groove is formed continuously from one end of the surface corresponding to the other end to the other end, and has at least a vertical surface and an inclined surface on the side wall. A step of forming a plurality of grooves on a surface corresponding to the sliding surface of the head, and applying a PVD method to the side wall surface of the first groove from the surface side corresponding to the gap forming surface of the block material of the ferromagnetic oxide magnetic material. a step of depositing and forming a thin film of a non-magnetic material by using a method of depositing a thin film of a non-magnetic material;
1 of the track "IJ" from the surface of the thin film so that the side surface is flush with the surface of the thin film of the non-magnetic material.
A second groove deeper than the first groove with a depth of 72 mm or less.
a step of configuring a portion of the ferromagnetic oxide magnetic substance in a portion including the first groove, and a step of configuring the first side surface of the second groove from the surface side corresponding to the gap forming surface in the block material of the ferromagnetic oxide magnetic material. a step of depositing a thin film of a metal ferromagnetic material by a PVD method, and adhering it to one side of the second layer from the side corresponding to the gap forming surface of the block material of the ferromagnetic oxide magnetic material. A step of depositing a thin film of a non-magnetic material on the formed thin film of a metal ferromagnetic material by a PVD method; Second
filling the space formed in the block material of the ferromagnetic oxide magnetic material by the groove with low melting point glass;
After removing the excess parts protruding from the surface corresponding to the sliding surface of the magnetic head and the surface corresponding to the gap forming surface of the block material of the ferromagnetic oxide magnetic material, both surfaces are mirror-polished to form the core. a step of obtaining a semi-detached core block; a step of forming a groove for filling a coupling member between a winding groove and a core semi-detached block on the gap forming surface side of at least one of the two core semi-detached blocks; After the gap material is attached to the gap forming surface side, the gap forming surfaces of the pair of core semi-closed blocks are so arranged that the ends of the thin films of metal ferromagnetic material in each of the pair of core half-closed blocks are opposite to each other. a step of butting the sides, a step of integrally fixing the pair of core semi-dead blocks with low melting point glass to obtain a core block of the magnetic head, and a step of forming the sliding surface side of the core block of the magnetic head into a predetermined shape. The present invention aims to provide a method for manufacturing a composite magnetic head, which comprises a step of processing the core block of the magnetic head, and a step of cutting the core block of the magnetic head described above to obtain the cores of the individual magnetic heads.

(Example) Hereinafter, specific details of the method for manufacturing a composite magnetic head of the present invention will be described in detail with reference to the accompanying drawings.

? Figures 1 to 2 show a magnetic circuit in which a thin film of ferromagnetic metal is formed on a magnetic core made of a ferromagnetic oxide magnetic material by vacuum film forming technology, and the thin film of ferromagnetic metal is used to form a narrow film. FIG. 1 is a perspective view schematically showing the manufacturing process of a composite magnetic head in the method of manufacturing a composite magnetic head of the present invention, which manufactures a magnetic head in which a magnetic gap is formed in a track. Block material of magnetic oxide magnetic material (ferrite magnetic material) is shown.

Block material 1 of ferrite magnetic material shown in Fig. 1
, 1a indicates a surface corresponding to the gap forming surface in the magnetic head, 1b indicates a surface corresponding to the sliding surface of the magnetic head in block material 1 of ferrite magnetic material, and 2 indicates the surface corresponding to the sliding surface of the magnetic head. The boundary line between 1a and lb is shown.

The ferrite magnetic block 1 shown in FIG. 1 has a plurality of first ? lI3
．． 3... is formed. That is, the plurality of first erasers 3, 3, . Sliding of the magnetic head on the block material 1 of the ferrite magnetic material described above in a state inclined by a predetermined angle θ with respect to the boundary line 2 between the sliding surface of the magnetic head in the block material 1 of the magnetic material and the corresponding surface 1b. It is constructed continuously from one end of the surface corresponding to the moving surface to the other end.

These first erasers 3, 3... are formed as parallel grooves having at least a vertical surface 3a and an inclined surface 3b on the side wall, but the inclined surface 3b does not necessarily have to be a straight line and may be a curved surface. .

As described above, the block material of ferrite magnetic material in the state shown in the second figure, in which the plurality of first holes 3, 3 are formed on the surface 1b of the block material 1 of ferrite magnetic material, which corresponds to the sliding surface of the magnetic head. 1, as shown in the third figure, a non-contact layer is formed by PVD on the side wall surfaces of the first grooves 3, 3, . A thin film 5 of magnetic material is deposited.

The arrow 4 in FIG. 3 is from the surface 1a side corresponding to the gap forming surface in the block material 1 of ferrite magnetic material.
For example, a highly hard non-magnetic material (such as A J 203 or T i 02
) shows fine particles. In addition, in FIG. 3, the illustration of a thin film of a non-magnetic material deposited on the surface la side corresponding to the gap forming surface of the block material 1 of ferrite magnetic material is omitted (such omission is due to other reasons). ).

Next, as described above, the side wall surfaces of the plurality of first troughs 3, 3, . As shown in FIG. 4, each of the first grooves 3, 3, . . . in the one shown in FIG. The surface side corresponding to the surface of the thin film 5 of body material is one side, and the second grooves 6, 6, which are deeper than the first grooves 3. .3 Construct the part containing... At this time, the second eraser 6 may be configured so that the above-mentioned side surface is flush with the surface of the thin film 5 of the non-magnetic material, or alternatively, the second eraser 6 may be formed at a distance d from the surface of the thin film 5. However, the amount of deviation (offset amount) d is set to 1/2 or less of the core thickness t in the final shape of the head chip.

Next, the surface 1alI corresponding to the gap forming surface in the block material 1 of the ferrite magnetic material shown in FIG. 4! PV on the one side of the second groove 6.
A thin film 7 of metal ferromagnetic material (for example, sendust alloy) is deposited and formed by method D, but if the second
The side walls of... are α from the surface of the thin film 5 made of a non-magnetic material.
(However, even if α<Rt), since the plane of this deviation is inclined, it is possible to easily attach the thin JI17 of metal ferromagnetic material to this inclined surface, and the thin film of metal ferromagnetic material This can be done without interrupting the magnetic connection between the magnetic core made of the magnetic core 5 and the magnetic core made of the block material 1 made of ferrite magnetic material, and without reducing the magnetic resistance of the magnetic path.

Next, the thin film 7 of the metal ferromagnetic material is deposited on one side of the second groove 6 from the surface 1a side corresponding to the gap forming surface in the block material 1 of the ferrite magnetic material as described above. A thin film 8 of a highly hard non-magnetic material (e.g. AJ□03 or TiO2) is deposited on top by PVD
is deposited and formed to obtain a state as shown in Fig. 5.
(The thin film of metal ferromagnetic material and the thin film of non-magnetic material formed on the surface 1a side corresponding to the gap forming surface are omitted in the figure).

Next, in the state shown in FIG. Then, after removing the excess portions of the ferrite magnetic block material 1 that protrude from the surface 1b corresponding to the active surface of the magnetic head and the surface 1a corresponding to the gap forming surface, the above-mentioned both surfaces 1a are filled. , 1b are polished to a mirror surface to obtain a half-core block as shown in FIG. 5. Two of the half-core blocks shown in FIG. It is used for this purpose.

At least one of the pair of two core half blocks described above has a winding groove 10 and a groove 1 for filling a connecting member of the core half block on the gear forming surface la side thereof.
1 to create the state shown in Figure 6.

Next, after attaching a gap material to the gear forming surface la side of the half-core blocks shown in FIG. 7. With the ends of the cores facing each other as shown in FIG. 7, the gear forming surfaces la of the pair of half-core blocks are butted against each other.

Next, the object in the state shown in Figure 7 is turned upside down, and low melting glass is placed near the rear end of the gap and digits regulation in the winding groove 10 and in the connecting member filling groove 11 of the core half-dead block, and placed in a furnace. The core block of the magnetic head is produced by heating and melting the two core blocks and fixing them together with the low melting point glass.

Next, the sliding surface side of the core block of the magnetic head made as described above is processed into a predetermined shape, and then the core block of the magnetic head described above is inserted into the straight lines Eero, Harney, and Po in each figure. , torch, etc., the cores of individual magnetic heads as shown in the figure are obtained.

(Effects of the Invention) As is clear from the above detailed explanation, the present invention has a magnetic circuit in which a thin film of ferromagnetic metal is formed on a magnetic core made of a ferromagnetic oxide magnetic material by vacuum film forming technology. ,
A method for manufacturing a composite magnetic head in which a magnetic gap of a narrow track IJ is formed by the thin film of ferromagnetic metal, the magnetic head sliding on a block material of ferromagnetic oxide magnetic material. The surface corresponding to the sliding surface of the magnetic head in the block material of the ferromagnetic oxide magnetic material described above is inclined at a predetermined angle with respect to the boundary line between the surface corresponding to the surface and the surface corresponding to the gap forming surface. The magnetic head slides on the block material of the above-mentioned ferromagnetic oxide magnetic material, with the first layer being continuous from one end to the other end and having at least a vertical surface and an inclined surface on the side wall. A step of configuring a plurality of pieces on a surface corresponding to the above-mentioned ferromagnetic oxide magnetic block material, and a step of forming a non-magnetic material on the side wall surface of the above-mentioned first layer from the surface side corresponding to the gap-forming surface in the block material of the ferromagnetic oxide magnetic material by a PVD method. a step of depositing and forming a thin film of a substance, and setting the surface side corresponding to the surface of the thin film of the non-magnetic substance as one surface;
This side surface is flush with the surface of the thin film of non-magnetic material, or the track ri is formed from the surface of the thin film.
forming a second groove deeper than the first groove in a portion including the first groove, which is spaced apart from the first groove by the following range;
A step of depositing and forming a thin film of metal ferromagnetic material on the one side surface of the second layer from the surface side corresponding to the gap forming surface of the block material of the ferromagnetic oxide magnetic material by a PVD method; A thin film of the metal ferromagnetic material deposited on one side of the second groove from the side corresponding to the gap forming surface of the block material of the ferromagnetic oxide magnetic material is coated by a PVD method. a step of depositing a thin film of non-magnetic material; The step of filling the space formed in the ferromagnetic oxide magnetic material block material with the low melting point glass by the second groove corresponds to the sliding surface of the magnetic head in the ferromagnetic oxide magnetic material block material. After removing the extra parts protruding from the surface corresponding to the gap forming surface and the surface corresponding to the gap forming surface, mirror-polishing both surfaces to obtain a half-core block; A step of forming a groove for filling a coupling member between a winding groove and a half-core block on the gap-forming surface side of at least one of the blocks, and a step of attaching a gap material to the gap-forming surface side of the half-core block, and then forming A step of butting the gap forming surfaces of the pair of half-core blocks so that the ends of the thin films of the respective metal ferromagnetic substances are opposed to each other; a step of fixing the magnetic head core block integrally to obtain a magnetic head core block, a step of processing the sliding surface side of the magnetic head core block described above into a predetermined shape, and a step of cutting the magnetic head core block described above into individual pieces. A method for manufacturing a composite magnetic head comprising the steps of obtaining a core for a magnetic head, the method for manufacturing a composite magnetic head according to the present invention includes a step of obtaining a core for a magnetic head. In order to construct the surface, the materials used in manufacturing the magnetic head are a block material of ferrite magnetic material that corresponds to the part that is to be the magnetic core of the magnetic head, and a high-grade material that constitutes the sliding surface. Since blocks of hard, non-magnetic, wear-resistant materials such as glass blocks are not welded together, the number of steps for manufacturing the magnetic head can be reduced. Since the magnetic wear-resistant material can be deposited using the PVD method, matching with the ferromagnetic oxide magnetic material can be controlled by the deposition conditions, further expanding the selection range of highly hard non-magnetic wear-resistant materials. Therefore, it is possible to easily select and use a highly hard, non-magnetic, wear-resistant material that is most compatible with the magnetic recording medium being used. Because the magnetic bonding with the magnetic core made of the body block material can be performed without creating any breakpoints or reducing the magnetic resistance of the magnetic path, it is possible to produce magnetic heads with high magnetic efficiency at a high yield. Become.

As described above, according to the present invention, it is possible to mass-produce, with high yield, a long-life composite magnetic head with excellent magnetic properties that is compatible with magnetic recording media in which magnetic materials with high coercive force are used. Become.

[Brief explanation of the drawing]

Figures 1 to 3 show a magnetic circuit in which a thin film of ferromagnetic metal is formed on a magnetic core made of a ferromagnetic oxide magnetic material by vacuum film-forming technology, and the thin film of ferromagnetic metal is narrowed in the region of the thin film of ferromagnetic metal. Magnetic gap of track width is 1... Block material of ferrite magnetic material, 1a... Surface corresponding to the gap forming surface in the magnetic head, 1b... Sliding of the magnetic head on block material 1 of ferrite magnetic material A surface corresponding to the surface, 2... Boundary line of surfaces 1a and lb, 3... First groove, 5
...l of the first groove 3! 1. A thin film of non-magnetic material deposited on the wall surface by PVD method, 6... second groove, 7.
...Thin film of metal ferromagnetic material, 8...Thin film of non-magnetic material, 9...Low melting point glass,
10... Winding groove, 11... Groove for filling the connecting member of the core half-dead block. Kari No. 7 Star No. 9 Procedure Ne Ichisho Nori April 1st Z day of 1989

Claims (1)

[Claims] A thin film of ferromagnetic metal is formed on a magnetic core whose magnetic circuit is made of a ferromagnetic oxide magnetic material by vacuum deposition technology, and the magnetic gap of the narrow track 11 is formed by the thin film of ferromagnetic metal. A method of manufacturing a composite magnetic head according to the present invention, wherein a predetermined line is formed with respect to a boundary line between a surface corresponding to a sliding surface of a magnetic head and a surface corresponding to a gap forming surface in a block material of a ferromagnetic oxide magnetic material. The block material of the ferromagnetic oxide magnetic material has a continuous structure from one end to the other end of the surface corresponding to the sliding surface of the magnetic head, and is at least perpendicular to the side wall. forming a plurality of first grooves each having a surface and an inclined surface on a surface corresponding to the sliding surface of the magnetic head in the block material of the ferromagnetic oxide magnetic material; a step of depositing and forming a thin film of a non-magnetic material by a PVD method on the side wall surface of the first groove from the side corresponding to the gap forming surface in the block material; The corresponding surface side is one side, and this one side is flush with the surface of the thin film of the non-magnetic material, or 1/1/2 of the track width from the surface of the thin film.
forming a second groove deeper than the first groove within a range of 2 or less in a portion including the first groove; and forming a gap in the block material of the ferromagnetic oxide magnetic material. A step of depositing a thin film of a metal ferromagnetic material on the one side surface of the second groove from the surface corresponding to the surface by a PVD method, and forming a gap in the block material of the ferromagnetic oxide magnetic material. a step of depositing a thin film of a non-magnetic material by a PVD method on the thin film of the metal ferromagnetic material deposited on one side of the second groove from the surface corresponding to the surface; A step of filling the space formed in the block material of the ferromagnetic oxide magnetic material with low melting point glass by the first and second grooves described above, and a step of filling the space portion of the block material of the ferromagnetic oxide magnetic material with a magnetic head in the block material of the ferromagnetic oxide magnetic material. a step of removing the extra portion protruding from the surface corresponding to the sliding surface and the surface corresponding to the gap forming surface, and mirror-polishing both surfaces to obtain a core half block; forming a groove for filling a coupling member between the winding groove and the core half block on the gap forming surface side of at least one of the core half blocks, and attaching a gap material to the gap forming surface side of the core half block; a step of butting the gap forming surfaces of the pair of core half blocks so that the ends of the thin films of the metal ferromagnetic material in the pair of core half blocks are in a state facing each other; A step of obtaining a core block of a magnetic head by integrally fixing the pair of core half blocks described above with a low melting point glass, a step of processing the sliding surface side of the core block of the magnetic head into a predetermined shape,
A method of manufacturing a composite magnetic head comprising the step of cutting the core block of the magnetic head described above to obtain cores of individual magnetic heads.