JPH0121621B2 - - Google Patents

Info

Publication number
JPH0121621B2
JPH0121621B2 JP56155873A JP15587381A JPH0121621B2 JP H0121621 B2 JPH0121621 B2 JP H0121621B2 JP 56155873 A JP56155873 A JP 56155873A JP 15587381 A JP15587381 A JP 15587381A JP H0121621 B2 JPH0121621 B2 JP H0121621B2
Authority
JP
Japan
Prior art keywords
sealing
electrode
jig
sealing hole
hole
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP56155873A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5856351A (ja
Inventor
Masanori Kuroki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Home Electronics Ltd
Original Assignee
NEC Home Electronics Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Home Electronics Ltd filed Critical NEC Home Electronics Ltd
Priority to JP56155873A priority Critical patent/JPS5856351A/ja
Publication of JPS5856351A publication Critical patent/JPS5856351A/ja
Publication of JPH0121621B2 publication Critical patent/JPH0121621B2/ja
Granted legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10PGENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P74/00Testing or measuring during manufacture or treatment of wafers, substrates or devices
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00Interconnections or connectors in packages

Landscapes

  • Testing Of Individual Semiconductor Devices (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP56155873A 1981-09-29 1981-09-29 半導体装置の検査方法 Granted JPS5856351A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP56155873A JPS5856351A (ja) 1981-09-29 1981-09-29 半導体装置の検査方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56155873A JPS5856351A (ja) 1981-09-29 1981-09-29 半導体装置の検査方法

Publications (2)

Publication Number Publication Date
JPS5856351A JPS5856351A (ja) 1983-04-04
JPH0121621B2 true JPH0121621B2 (2) 1989-04-21

Family

ID=15615364

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56155873A Granted JPS5856351A (ja) 1981-09-29 1981-09-29 半導体装置の検査方法

Country Status (1)

Country Link
JP (1) JPS5856351A (2)

Also Published As

Publication number Publication date
JPS5856351A (ja) 1983-04-04

Similar Documents

Publication Publication Date Title
KR100470970B1 (ko) 반도체 검사장치용 프로브카드의 니들고정장치 및 방법
CA1264868A (en) Semiconductor defect monitor for diagnosing processing-induced defects
US4441248A (en) On-line inspection method and system for bonds made to electronic components
CN102998606B (zh) 半导体元件的特性试验装置和半导体元件的特性试验方法
US10495668B2 (en) Evaluation apparatus for semiconductor device and evaluation method for semiconductor device
JPH0121621B2 (2)
JP2021027175A (ja) 検査装置
CN116008616A (zh) 一种高混合钽电容器批量老炼和筛选共用的夹具
EP0105003B1 (en) Method of screening resin-sealed semiconductor devices
JP2001110858A (ja) 半導体装置およびその製造方法、ならびにバーンイン装置
JPH05288802A (ja) 半導体チップの電気特性検査方法およびウェーハプローバ
JP4334684B2 (ja) 基板検査用センサおよび基板検査装置
JP2000193705A (ja) 回路基板検査装置
JP4983174B2 (ja) ダイオード素子およびダイオード素子の検査方法
US7253632B2 (en) Method for qualifying joints and contacts of electric circuits
JP2000304768A (ja) 電子部品の電気検査用ボード
JPH06242177A (ja) 半導体装置のテスト装置
JPS59111341A (ja) Ic素子試験用治工具
KR20060104366A (ko) 반도체 웨이퍼 검사기의 프로브 장치
KR960010115Y1 (ko) 리드 온 칩용 다이 어태치 검출장치
JPH07244106A (ja) 電気部品接続部とその電気回路の検査方法及び装置
JP2005002407A (ja) めっき治具通電検査装置及びめっき治具通電検査方法
JP2011122980A (ja) 半導体パッケージ検査装置及び半導体パッケージ検査方法
JPH0439949A (ja) 半導体装置のテスト治具
JPS62203343A (ja) 半導体部品の性能検査装置におけるチエツク方法