JPH01249634A - 導電性ガラスおよびその製造方法 - Google Patents
導電性ガラスおよびその製造方法Info
- Publication number
- JPH01249634A JPH01249634A JP7788588A JP7788588A JPH01249634A JP H01249634 A JPH01249634 A JP H01249634A JP 7788588 A JP7788588 A JP 7788588A JP 7788588 A JP7788588 A JP 7788588A JP H01249634 A JPH01249634 A JP H01249634A
- Authority
- JP
- Japan
- Prior art keywords
- glass
- transparent conductive
- main component
- conductive film
- zinc oxide
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000011521 glass Substances 0.000 title claims abstract description 35
- 238000004519 manufacturing process Methods 0.000 title claims description 5
- XLOMVQKBTHCTTD-UHFFFAOYSA-N Zinc monoxide Chemical compound [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 claims abstract description 24
- 238000000034 method Methods 0.000 claims abstract description 20
- 239000011787 zinc oxide Substances 0.000 claims abstract description 12
- 239000005341 toughened glass Substances 0.000 claims description 14
- 238000000197 pyrolysis Methods 0.000 claims description 5
- 239000011701 zinc Substances 0.000 abstract description 5
- 239000002994 raw material Substances 0.000 abstract description 4
- HQWPLXHWEZZGKY-UHFFFAOYSA-N diethylzinc Chemical compound CC[Zn]CC HQWPLXHWEZZGKY-UHFFFAOYSA-N 0.000 abstract description 3
- 239000007921 spray Substances 0.000 abstract description 3
- 238000005979 thermal decomposition reaction Methods 0.000 abstract description 3
- HCHKCACWOHOZIP-UHFFFAOYSA-N Zinc Chemical compound [Zn] HCHKCACWOHOZIP-UHFFFAOYSA-N 0.000 abstract description 2
- 238000005229 chemical vapour deposition Methods 0.000 abstract description 2
- 229910052725 zinc Inorganic materials 0.000 abstract description 2
- AXAZMDOAUQTMOW-UHFFFAOYSA-N dimethylzinc Chemical compound C[Zn]C AXAZMDOAUQTMOW-UHFFFAOYSA-N 0.000 abstract 1
- 230000001105 regulatory effect Effects 0.000 abstract 1
- 239000011592 zinc chloride Substances 0.000 abstract 1
- 235000005074 zinc chloride Nutrition 0.000 abstract 1
- JIAARYAFYJHUJI-UHFFFAOYSA-L zinc dichloride Chemical compound [Cl-].[Cl-].[Zn+2] JIAARYAFYJHUJI-UHFFFAOYSA-L 0.000 abstract 1
- 239000010408 film Substances 0.000 description 33
- 239000000758 substrate Substances 0.000 description 13
- 230000015572 biosynthetic process Effects 0.000 description 5
- 238000002834 transmittance Methods 0.000 description 4
- 238000010438 heat treatment Methods 0.000 description 3
- 239000010409 thin film Substances 0.000 description 3
- XOLBLPGZBRYERU-UHFFFAOYSA-N tin dioxide Chemical compound O=[Sn]=O XOLBLPGZBRYERU-UHFFFAOYSA-N 0.000 description 3
- 229910001887 tin oxide Inorganic materials 0.000 description 3
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 239000002253 acid Substances 0.000 description 2
- 239000011248 coating agent Substances 0.000 description 2
- 238000000576 coating method Methods 0.000 description 2
- 230000000052 comparative effect Effects 0.000 description 2
- 239000007789 gas Substances 0.000 description 2
- 239000012535 impurity Substances 0.000 description 2
- 238000004544 sputter deposition Methods 0.000 description 2
- 239000006058 strengthened glass Substances 0.000 description 2
- 238000005728 strengthening Methods 0.000 description 2
- 229910052718 tin Inorganic materials 0.000 description 2
- DJHGAFSJWGLOIV-UHFFFAOYSA-N Arsenic acid Chemical class O[As](O)(O)=O DJHGAFSJWGLOIV-UHFFFAOYSA-N 0.000 description 1
- MYMOFIZGZYHOMD-UHFFFAOYSA-N Dioxygen Chemical compound O=O MYMOFIZGZYHOMD-UHFFFAOYSA-N 0.000 description 1
- PXGOKWXKJXAPGV-UHFFFAOYSA-N Fluorine Chemical compound FF PXGOKWXKJXAPGV-UHFFFAOYSA-N 0.000 description 1
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 1
- 239000003513 alkali Substances 0.000 description 1
- 150000001447 alkali salts Chemical class 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910052786 argon Inorganic materials 0.000 description 1
- 229910052785 arsenic Inorganic materials 0.000 description 1
- RQNWIZPPADIBDY-UHFFFAOYSA-N arsenic atom Chemical compound [As] RQNWIZPPADIBDY-UHFFFAOYSA-N 0.000 description 1
- 239000002585 base Substances 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 229910001882 dioxygen Inorganic materials 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000005357 flat glass Substances 0.000 description 1
- 229910052731 fluorine Inorganic materials 0.000 description 1
- 239000011737 fluorine Substances 0.000 description 1
- 229910052733 gallium Inorganic materials 0.000 description 1
- 229910052738 indium Inorganic materials 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 238000000691 measurement method Methods 0.000 description 1
- 229910044991 metal oxide Inorganic materials 0.000 description 1
- 150000004706 metal oxides Chemical class 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 235000012239 silicon dioxide Nutrition 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- -1 tin Chemical class 0.000 description 1
- 229910052720 vanadium Inorganic materials 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/22—Surface treatment of glass, not in the form of fibres or filaments, by coating with other inorganic material
- C03C17/23—Oxides
- C03C17/25—Oxides by deposition from the liquid phase
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/22—Surface treatment of glass, not in the form of fibres or filaments, by coating with other inorganic material
- C03C17/23—Oxides
- C03C17/245—Oxides by deposition from the vapour phase
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
- C03C17/3411—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions with at least two coatings of inorganic materials
- C03C17/3417—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions with at least two coatings of inorganic materials all coatings being oxide coatings
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
- C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
- C23C16/40—Oxides
- C23C16/407—Oxides of zinc, germanium, cadmium, indium, tin, thallium or bismuth
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C2217/00—Coatings on glass
- C03C2217/20—Materials for coating a single layer on glass
- C03C2217/21—Oxides
- C03C2217/216—ZnO
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C2217/00—Coatings on glass
- C03C2217/20—Materials for coating a single layer on glass
- C03C2217/21—Oxides
- C03C2217/24—Doped oxides
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C2218/00—Methods for coating glass
- C03C2218/10—Deposition methods
- C03C2218/11—Deposition methods from solutions or suspensions
- C03C2218/112—Deposition methods from solutions or suspensions by spraying
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C2218/00—Methods for coating glass
- C03C2218/10—Deposition methods
- C03C2218/15—Deposition methods from the vapour phase
- C03C2218/152—Deposition methods from the vapour phase by cvd
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Materials Engineering (AREA)
- Organic Chemistry (AREA)
- Life Sciences & Earth Sciences (AREA)
- Geochemistry & Mineralogy (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Inorganic Chemistry (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Surface Treatment Of Glass (AREA)
- Non-Insulated Conductors (AREA)
- Manufacturing Of Electric Cables (AREA)
Priority Applications (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7788588A JPH01249634A (ja) | 1988-03-30 | 1988-03-30 | 導電性ガラスおよびその製造方法 |
| EP19890400769 EP0335769B1 (de) | 1988-03-30 | 1989-03-20 | Elektroleitendes Glas und Verfahren zu seiner Herstellung |
| DE1989603980 DE68903980T2 (de) | 1988-03-30 | 1989-03-20 | Elektroleitendes glas und verfahren zu seiner herstellung. |
| ES89400769T ES2037975T3 (es) | 1988-03-30 | 1989-03-20 | Procedimiento de fabricacion de un cristal electro-conductor. |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7788588A JPH01249634A (ja) | 1988-03-30 | 1988-03-30 | 導電性ガラスおよびその製造方法 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01249634A true JPH01249634A (ja) | 1989-10-04 |
Family
ID=13646526
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7788588A Pending JPH01249634A (ja) | 1988-03-30 | 1988-03-30 | 導電性ガラスおよびその製造方法 |
Country Status (4)
| Country | Link |
|---|---|
| EP (1) | EP0335769B1 (de) |
| JP (1) | JPH01249634A (de) |
| DE (1) | DE68903980T2 (de) |
| ES (1) | ES2037975T3 (de) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2008083154A (ja) * | 2006-09-26 | 2008-04-10 | Casio Comput Co Ltd | ガラス基板を薄くする方法、液晶表示素子の製造方法および液晶表示装置の製造方法 |
| JP2010502541A (ja) * | 2006-08-29 | 2010-01-28 | ピルキングトン・グループ・リミテッド | 低い抵抗率のドープ酸化亜鉛でコーティングされたガラス物品の製造方法及びその製造方法により製造されるコーティングされたガラス物品 |
Families Citing this family (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4990286A (en) * | 1989-03-17 | 1991-02-05 | President And Fellows Of Harvard College | Zinc oxyfluoride transparent conductor |
| US5532062A (en) * | 1990-07-05 | 1996-07-02 | Asahi Glass Company Ltd. | Low emissivity film |
| JP3335384B2 (ja) * | 1991-12-26 | 2002-10-15 | 旭硝子株式会社 | 熱線遮断膜 |
| US5106653A (en) * | 1990-12-10 | 1992-04-21 | Ford Motor Company | Zinc oxide film having improved chemical durability |
| US5094882A (en) * | 1990-12-12 | 1992-03-10 | Ford Motor Company | Zinc oxide film growth rate accelerator |
| FR2701474B1 (fr) * | 1993-02-11 | 1995-03-31 | Saint Gobain Vitrage Int | Vitrage muni d'une couche fonctionnelle. |
| NO931606L (no) * | 1992-05-26 | 1993-11-29 | Saint Gobain Vitrage | Vindusplate med en funksjonell film |
| DE10018671C2 (de) * | 2000-04-14 | 2002-09-26 | Nanogate Technologies Gmbh | Verfahren zur Erzeugung einer hydrophoben Oberfläche von Gegenständen aus silikatkeramischen Werkstoffen sowie Gegenstand mit einer hydrophoben Oberfläche |
| CN101547873A (zh) * | 2006-08-29 | 2009-09-30 | 皮尔金顿集团有限公司 | 制备低电阻率掺杂氧化锌涂层及由此制成的物件的方法 |
| DE102015103857A1 (de) * | 2014-12-01 | 2016-06-02 | Schott Ag | Miniaturisiertes elektronisches Bauelement mit verringerter Bruchgefahr sowie Verfahren zu dessen Herstellung |
| JP2018505515A (ja) | 2014-12-01 | 2018-02-22 | ショット アクチエンゲゼルシャフトSchott AG | シート状の独立した部材を有する蓄電システム、独立したシート状の部材、その製造方法、およびその使用 |
| WO2023067206A1 (es) * | 2021-10-21 | 2023-04-27 | Cristalería Pontevedresa S.L | Vidrio calefactable conductivo en masa para automoción, ferrocarril y naval |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62197332A (ja) * | 1986-02-22 | 1987-09-01 | Tokyo Denshi Kagaku Kk | ガラス基板素材の処理方法 |
| JPS62297470A (ja) * | 1986-06-18 | 1987-12-24 | Nippon Soda Co Ltd | 金属酸化物薄膜形成用ペ−スト |
| JPS6452635A (en) * | 1987-08-25 | 1989-02-28 | Matsushita Electric Industrial Co Ltd | Window glass for automobile and production thereof |
| JPH01194208A (ja) * | 1988-01-28 | 1989-08-04 | Asahi Glass Co Ltd | 透明導電膜 |
| JPH01242417A (ja) * | 1988-03-25 | 1989-09-27 | Mitsubishi Metal Corp | 透明導電性酸化亜鉛膜の製造方法 |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3415677A (en) * | 1965-10-13 | 1968-12-10 | Ppg Industries Inc | Treatment of glass surfaces |
| FR2391966A1 (fr) * | 1977-05-23 | 1978-12-22 | Saint Gobain | Article verrier antistatique trempe chimiquement |
| JPS5826052A (ja) * | 1981-08-06 | 1983-02-16 | Asahi Glass Co Ltd | アルカリ拡散防止酸化ケイ素膜付ガラス体 |
| JPH0682625B2 (ja) * | 1985-06-04 | 1994-10-19 | シーメンス ソーラー インダストリーズ,エル.ピー. | 酸化亜鉛膜の蒸着方法 |
-
1988
- 1988-03-30 JP JP7788588A patent/JPH01249634A/ja active Pending
-
1989
- 1989-03-20 DE DE1989603980 patent/DE68903980T2/de not_active Expired - Fee Related
- 1989-03-20 ES ES89400769T patent/ES2037975T3/es not_active Expired - Lifetime
- 1989-03-20 EP EP19890400769 patent/EP0335769B1/de not_active Expired - Lifetime
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62197332A (ja) * | 1986-02-22 | 1987-09-01 | Tokyo Denshi Kagaku Kk | ガラス基板素材の処理方法 |
| JPS62297470A (ja) * | 1986-06-18 | 1987-12-24 | Nippon Soda Co Ltd | 金属酸化物薄膜形成用ペ−スト |
| JPS6452635A (en) * | 1987-08-25 | 1989-02-28 | Matsushita Electric Industrial Co Ltd | Window glass for automobile and production thereof |
| JPH01194208A (ja) * | 1988-01-28 | 1989-08-04 | Asahi Glass Co Ltd | 透明導電膜 |
| JPH01242417A (ja) * | 1988-03-25 | 1989-09-27 | Mitsubishi Metal Corp | 透明導電性酸化亜鉛膜の製造方法 |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2010502541A (ja) * | 2006-08-29 | 2010-01-28 | ピルキングトン・グループ・リミテッド | 低い抵抗率のドープ酸化亜鉛でコーティングされたガラス物品の製造方法及びその製造方法により製造されるコーティングされたガラス物品 |
| JP2008083154A (ja) * | 2006-09-26 | 2008-04-10 | Casio Comput Co Ltd | ガラス基板を薄くする方法、液晶表示素子の製造方法および液晶表示装置の製造方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| EP0335769A3 (en) | 1990-08-29 |
| EP0335769B1 (de) | 1992-12-23 |
| ES2037975T3 (es) | 1993-07-01 |
| EP0335769A2 (de) | 1989-10-04 |
| DE68903980T2 (de) | 1993-06-03 |
| DE68903980D1 (de) | 1993-02-04 |
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