JPH0126766Y2 - - Google Patents
Info
- Publication number
- JPH0126766Y2 JPH0126766Y2 JP15937383U JP15937383U JPH0126766Y2 JP H0126766 Y2 JPH0126766 Y2 JP H0126766Y2 JP 15937383 U JP15937383 U JP 15937383U JP 15937383 U JP15937383 U JP 15937383U JP H0126766 Y2 JPH0126766 Y2 JP H0126766Y2
- Authority
- JP
- Japan
- Prior art keywords
- protrusion
- attached
- processed
- holder
- workpiece
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000002184 metal Substances 0.000 claims description 4
- BGPVFRJUHWVFKM-UHFFFAOYSA-N N1=C2C=CC=CC2=[N+]([O-])C1(CC1)CCC21N=C1C=CC=CC1=[N+]2[O-] Chemical compound N1=C2C=CC=CC2=[N+]([O-])C1(CC1)CCC21N=C1C=CC=CC1=[N+]2[O-] BGPVFRJUHWVFKM-UHFFFAOYSA-N 0.000 description 2
- 239000000428 dust Substances 0.000 description 2
- 238000007740 vapor deposition Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 238000007738 vacuum evaporation Methods 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
Description
【考案の詳細な説明】
〔考案の技術分野〕
本考案は真空処理装置用治具に係り、特に蒸着
等の真空処理時に被処理物を取付ける真空処理装
置用治具に関する。[Detailed Description of the Invention] [Technical Field of the Invention] The present invention relates to a jig for a vacuum processing apparatus, and particularly to a jig for a vacuum processing apparatus for mounting a workpiece during vacuum processing such as vapor deposition.
真空蒸着やスパッタリング等の真空処理を行な
う場合には、従来、真空処理装置内に設置された
治具のホルダに、被処理物をボルトおよびナツト
等を用いて取付けるようになされていた。
When performing vacuum processing such as vacuum evaporation or sputtering, the workpiece has conventionally been attached to a holder of a jig installed in a vacuum processing apparatus using bolts, nuts, or the like.
しかし、一度に多数の被処理物を取付ける場合
には、上記のような手段では被処理物の取付けに
手間がかかるため、真空処理を行なうのに非常に
多くの時間が必要となり、作業効率を低下させて
しまうという欠点を有している。 However, when attaching a large number of objects to be processed at once, using the above method requires a lot of time and effort to attach the objects, so vacuum processing requires a large amount of time and reduces work efficiency. It has the disadvantage of lowering the
さらに、ボルトおよびナツトにより被処理物を
取付ける際に、上記ボルト等に付着したごみ等が
被処理物に付着してしまうおそれがあるという欠
点をも有している。 Furthermore, when the object to be processed is attached using bolts and nuts, there is a possibility that dust and the like attached to the bolts and the like may adhere to the object to be processed.
〔考案の目的〕
本考案は上記欠点を解消するためになされたも
ので、容易に被処理物の取付けを行なうことがで
き、しかも被処理物を汚すことのない真空処理装
置用治具を提供することを目的とするものであ
る。[Purpose of the invention] The present invention was made in order to eliminate the above-mentioned drawbacks, and provides a jig for a vacuum processing apparatus that allows for easy installation of objects to be processed and does not contaminate the objects to be processed. The purpose is to
上記目的達成のため本考案の真空処理装置用治
具は、表面に被処理物を係支する突起が設けられ
た平板状のホルダの内部に、複数の磁石を配設
し、上記突起に係合するとともに上記磁石の磁力
により上記突起に吸着される固定金具を設けてな
り、上記被処理物が係支された突起に上記固定金
具を吸着することにより、上記被処理物を取付け
るようにしたことを特徴とするものである。
In order to achieve the above object, the vacuum processing equipment jig of the present invention has a plurality of magnets disposed inside a flat holder whose surface is provided with protrusions that engage the workpiece, and engages with the protrusions. At the same time, a fixing metal fitting is provided which is attracted to the protrusion by the magnetic force of the magnet, and the object to be processed is attached by attracting the fixing metal fitting to the protrusion to which the object to be processed is attached. It is characterized by this.
以下、本考案の実施例を第１図および第２図を
参照して説明する。
Hereinafter, embodiments of the present invention will be described with reference to FIGS. 1 and 2.
第１図および第２図は本考案る一実施例を示し
たもので、平板状のホルダ１の内側には中空部２
が形成されており、このホルダ１の両表面には、
ホルダ１の中心位置であつて長手方向に一定間〓
を有するように円形状の突起３，３…が設けられ
ている。上記ホルダ１の中空部２には、上記突起
３に対応する位置および上記各突起３の中間位置
に複数の磁石４，４…が配設されている。 FIGS. 1 and 2 show an embodiment of the present invention, in which a hollow portion 2 is provided inside a flat holder 1.
is formed on both surfaces of this holder 1.
At the center position of holder 1 and for a certain period in the longitudinal direction
Circular protrusions 3, 3, . . . are provided so as to have circular protrusions 3, 3, . In the hollow portion 2 of the holder 1, a plurality of magnets 4, 4, . . . are arranged at positions corresponding to the projections 3 and intermediate positions between the projections 3.
また、一面側に上記突起３に係合する凹部５が
形成された円板状の固定金具６を設け、この固定
金具６の他面側には把手部７が一体に形成されて
いる。 Further, a disk-shaped fixture 6 is provided on one side in which a recess 5 that engages with the protrusion 3 is formed, and a handle portion 7 is integrally formed on the other side of the fixture 6.
本実施例においては、中央に孔部を有する被処
理物Ａを、ホルダ１の突起３に係合した後、固定
金具６の凹部５を上記突起３に係合させることに
より、被処理物Ａを固定する。この固定金具６
は、上記磁石４の磁力により吸着されるものであ
るため、固定金具６の脱着作業を容易に行なうこ
とができる。 In this embodiment, the workpiece A having a hole in the center is engaged with the protrusion 3 of the holder 1, and then the recess 5 of the fixture 6 is engaged with the protrusion 3. to be fixed. This fixing metal fitting 6
Since these are attracted by the magnetic force of the magnet 4, the fixing fitting 6 can be easily attached and detached.
また、被処理物Ａの周縁部等、蒸着等の処理を
行なう必要がない部分を覆うため、被処理物Ａの
直径より小径の開口８を有するマスク９が取付け
られており、このマスク９も磁石４の磁力により
吸着するようになされている。 In addition, in order to cover parts such as the periphery of the workpiece A that do not need to be subjected to processing such as vapor deposition, a mask 9 having an opening 8 smaller in diameter than the diameter of the workpiece A is attached. It is designed to be attracted by the magnetic force of the magnet 4.
したがつて、本実施例においては固定金具６お
よびマスク９の脱着が容易であるため、被処理物
Ａの取付時間を著しく短縮することができ、さら
に、磁石４が固定金具６およびマスク９ではな
く、ホルダ１側に設けられているので、固定金具
６やマスク９に付着した蒸着物等を容易に洗浄す
ることができる。 Therefore, in this embodiment, since the fixture 6 and the mask 9 can be easily attached and detached, the time required to attach the workpiece A can be significantly shortened. Since it is provided on the holder 1 side, vapor deposits and the like adhering to the fixture 6 and the mask 9 can be easily cleaned.
以上述べたように本考案に係る真空処理装置用
治具は、平板状ホルダの内部に複数の磁石を配設
し、上記ホルダの表面に設けられた突起に係止さ
れる被処理物を、上記磁石の磁力で上記突起に吸
着される固定金具により取付けるように構成した
ので、固定金具の脱着が容易となり、被処理物の
取付時間を大幅に短縮することが可能となる。ま
た、固定金具の突起への吸着を磁力により行なう
ので、ボルトとナツトのように被処理物にごみ等
が付着することがなく、被処理物を清浄な状態に
保つことができる等の効果を奏する。
As described above, the vacuum processing apparatus jig according to the present invention includes a plurality of magnets arranged inside a flat plate-like holder, and a workpiece that is held by a projection provided on the surface of the holder. Since it is configured to be attached using a fixture that is attracted to the protrusion by the magnetic force of the magnet, the fixture can be easily attached and detached, and the time required to attach the object to be processed can be significantly shortened. In addition, since the fixing fittings are attracted to the protrusions by magnetic force, there is no possibility of dust or the like adhering to the workpiece as with bolts and nuts, and the workpiece can be kept clean. play.
第１図および第２図はそれぞれ本考案の一実施
例を示したもので、第１図は正面図、第２図は第
１図のＡ−Ａ線における断面図である。
１……ホルダ、２……中空部、３……突起、４
……磁石、５……凹部、６……固定金具、７……
把手部、８……開口、９……マスク。
FIGS. 1 and 2 each show an embodiment of the present invention, with FIG. 1 being a front view and FIG. 2 being a sectional view taken along the line A--A in FIG. 1...Holder, 2...Hollow part, 3...Protrusion, 4
...Magnet, 5...Recess, 6...Fixing bracket, 7...
Handle portion, 8...opening, 9...mask.
Claims (1)
板状のホルダの内部に、複数の磁石を配設し、上
記突起に係合するとともに上記磁石の磁力により
上記突起に吸着される固定金具を設けてなり、上
記被処理物が係支された突起に上記固定金具を吸
着することにより、上記被処理物を取付けるよう
にしたことを特徴とする真空処理装置用治具。 A fixing metal fitting in which a plurality of magnets are disposed inside a flat holder having a protrusion on its surface that engages the object to be treated, and is engaged with the protrusion and is attracted to the protrusion by the magnetic force of the magnet. A jig for a vacuum processing apparatus, characterized in that the object to be processed is attached by adsorbing the fixture to a protrusion to which the object to be processed is attached.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15937383U JPS6067363U (en) | 1983-10-17 | 1983-10-17 | Jig for vacuum processing equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15937383U JPS6067363U (en) | 1983-10-17 | 1983-10-17 | Jig for vacuum processing equipment |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6067363U JPS6067363U (en) | 1985-05-13 |
| JPH0126766Y2 true JPH0126766Y2 (en) | 1989-08-10 |
Family
ID=30350848
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15937383U Granted JPS6067363U (en) | 1983-10-17 | 1983-10-17 | Jig for vacuum processing equipment |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6067363U (en) |
-
1983
- 1983-10-17 JP JP15937383U patent/JPS6067363U/en active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6067363U (en) | 1985-05-13 |
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