JPH01268870A - 縦トレイ搬送式スパッタ装置 - Google Patents

縦トレイ搬送式スパッタ装置

Info

Publication number
JPH01268870A
JPH01268870A JP9488788A JP9488788A JPH01268870A JP H01268870 A JPH01268870 A JP H01268870A JP 9488788 A JP9488788 A JP 9488788A JP 9488788 A JP9488788 A JP 9488788A JP H01268870 A JPH01268870 A JP H01268870A
Authority
JP
Japan
Prior art keywords
chamber
tray
carrier
assembly
tray carrier
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP9488788A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0524989B2 (cs
Inventor
Yoshihiro Hirota
広田　喜弘
Tetsuo Nanbu
南部　哲雄
Yoshifumi Azehara
吉史 畦原
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Anelva Corp
Original Assignee
Anelva Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Anelva Corp filed Critical Anelva Corp
Priority to JP9488788A priority Critical patent/JPH01268870A/ja
Publication of JPH01268870A publication Critical patent/JPH01268870A/ja
Publication of JPH0524989B2 publication Critical patent/JPH0524989B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP9488788A 1988-04-18 1988-04-18 縦トレイ搬送式スパッタ装置 Granted JPH01268870A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9488788A JPH01268870A (ja) 1988-04-18 1988-04-18 縦トレイ搬送式スパッタ装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9488788A JPH01268870A (ja) 1988-04-18 1988-04-18 縦トレイ搬送式スパッタ装置

Publications (2)

Publication Number Publication Date
JPH01268870A true JPH01268870A (ja) 1989-10-26
JPH0524989B2 JPH0524989B2 (cs) 1993-04-09

Family

ID=14122555

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9488788A Granted JPH01268870A (ja) 1988-04-18 1988-04-18 縦トレイ搬送式スパッタ装置

Country Status (1)

Country Link
JP (1) JPH01268870A (cs)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0378054U (cs) * 1989-11-30 1991-08-07
JPH04174327A (ja) * 1989-12-26 1992-06-22 Hitachi Ltd 赤外線温度画像測定装置及びそれを備えた成膜装置
WO1996035823A1 (en) * 1995-05-10 1996-11-14 Seagate Technology, Inc. Transport system for thin film sputtering system
US6692209B1 (en) * 1999-11-19 2004-02-17 Litton Systems, Inc. Method and system for manufacturing a photocathode
JP2007126703A (ja) * 2005-11-02 2007-05-24 Dainippon Printing Co Ltd 成膜装置
WO2008129983A1 (ja) * 2007-04-16 2008-10-30 Ulvac, Inc. コンベアおよび成膜装置とそのメンテナンス方法

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0378054U (cs) * 1989-11-30 1991-08-07
JPH04174327A (ja) * 1989-12-26 1992-06-22 Hitachi Ltd 赤外線温度画像測定装置及びそれを備えた成膜装置
WO1996035823A1 (en) * 1995-05-10 1996-11-14 Seagate Technology, Inc. Transport system for thin film sputtering system
US6692209B1 (en) * 1999-11-19 2004-02-17 Litton Systems, Inc. Method and system for manufacturing a photocathode
JP2007126703A (ja) * 2005-11-02 2007-05-24 Dainippon Printing Co Ltd 成膜装置
WO2008129983A1 (ja) * 2007-04-16 2008-10-30 Ulvac, Inc. コンベアおよび成膜装置とそのメンテナンス方法
JP4839405B2 (ja) * 2007-04-16 2011-12-21 株式会社アルバック コンベアおよび成膜装置とそのメンテナンス方法
TWI425587B (zh) * 2007-04-16 2014-02-01 愛發科股份有限公司 輸送器及成膜裝置與其保養方法
US8740205B2 (en) 2007-04-16 2014-06-03 Ulvac, Inc. Conveyor and deposition apparatus, and maintenance method thereof

Also Published As

Publication number Publication date
JPH0524989B2 (cs) 1993-04-09

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