JPH0524989B2 - - Google Patents
Info
- Publication number
- JPH0524989B2 JPH0524989B2 JP9488788A JP9488788A JPH0524989B2 JP H0524989 B2 JPH0524989 B2 JP H0524989B2 JP 9488788 A JP9488788 A JP 9488788A JP 9488788 A JP9488788 A JP 9488788A JP H0524989 B2 JPH0524989 B2 JP H0524989B2
- Authority
- JP
- Japan
- Prior art keywords
- chamber
- tray
- attached
- substrate
- slider
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9488788A JPH01268870A (ja) | 1988-04-18 | 1988-04-18 | 縦トレイ搬送式スパッタ装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9488788A JPH01268870A (ja) | 1988-04-18 | 1988-04-18 | 縦トレイ搬送式スパッタ装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH01268870A JPH01268870A (ja) | 1989-10-26 |
| JPH0524989B2 true JPH0524989B2 (cs) | 1993-04-09 |
Family
ID=14122555
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9488788A Granted JPH01268870A (ja) | 1988-04-18 | 1988-04-18 | 縦トレイ搬送式スパッタ装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01268870A (cs) |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0378054U (cs) * | 1989-11-30 | 1991-08-07 | ||
| JP2804849B2 (ja) * | 1989-12-26 | 1998-09-30 | 株式会社日立製作所 | 赤外線温度画像測定装置及びそれを備えた成膜装置 |
| US5660114A (en) * | 1995-05-10 | 1997-08-26 | Seagate Technology, Inc. | Transport system for thin film sputtering system |
| US6692209B1 (en) * | 1999-11-19 | 2004-02-17 | Litton Systems, Inc. | Method and system for manufacturing a photocathode |
| JP4580860B2 (ja) * | 2005-11-02 | 2010-11-17 | 大日本印刷株式会社 | 成膜装置 |
| CN101641272B (zh) * | 2007-04-16 | 2011-11-16 | 株式会社爱发科 | 输送机和成膜装置及其维护方法 |
-
1988
- 1988-04-18 JP JP9488788A patent/JPH01268870A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPH01268870A (ja) | 1989-10-26 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| LAPS | Cancellation because of no payment of annual fees |