JPH01312801A - Formation of insulating coat - Google Patents

Formation of insulating coat

Info

Publication number
JPH01312801A
JPH01312801A JP63144357A JP14435788A JPH01312801A JP H01312801 A JPH01312801 A JP H01312801A JP 63144357 A JP63144357 A JP 63144357A JP 14435788 A JP14435788 A JP 14435788A JP H01312801 A JPH01312801 A JP H01312801A
Authority
JP
Japan
Prior art keywords
cylindrical surface
element body
rollers
insulating paint
insulating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP63144357A
Other languages
Japanese (ja)
Other versions
JPH0834137B2 (en
Inventor
Masami Ishihara
石原 雅己
Yukio Fujiwara
幸雄 藤原
Tatsuo Tsuruoka
鶴岡 達生
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP63144357A priority Critical patent/JPH0834137B2/en
Publication of JPH01312801A publication Critical patent/JPH01312801A/en
Publication of JPH0834137B2 publication Critical patent/JPH0834137B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Apparatuses And Processes For Manufacturing Resistors (AREA)
  • Thermistors And Varistors (AREA)

Abstract

PURPOSE:To enable the film thickness of an insulating coat to be uniform, prevent electrical characteristics from varying, and prevent insulating paint from being adhered to the edge surface of an element body by heating the element body to 70-150 deg.C, placing it onto two rollers, and then rotating the rollers to allow a film of insulating paint of specified thickness adhered to the cylindrical surface of the rollers to be transferred and adhered to the cylindrical surface of the element body. CONSTITUTION:An element body 3 is loaded into a conveyer consisting of metal mesh, is moved, and then is continuously heated to 70-150 deg.C. While maintaining this temperature, the element body 3 is placed on two rollers 22 and each roller 22 is allowed to rotate in the same direction at the same speed to enable an insulating paint 14 adhered to the cylindrical surface 22 of the roller 22 to become a film of specified thickness corresponding to a specified gap between the cylindrical surface of the rollers 22 and a drip-proof plate 23. Rotation of the rollers 22 allows the element body 3 placed above to rotate and to allow the film of the insulating paint 14 adhered to the cylindrical surface of the rollers 22 to be transferred and adhered to the cylindrical surface of the element body 3. It allows the film thickness of the insulation to be uniform, prevents electrical characteristics of each non-linear resistor from varying, and prevents insulation paint from being adhered to the edge surface of the element body.

Description

【発明の詳細な説明】 〔産業上の利用分野〕 この発明は例えば電力用避雷器に適用する酸化亜鉛を主
成分とすた非直viI抵抗体の円筒面に絶縁被膜形成方
法に関するものである。
DETAILED DESCRIPTION OF THE INVENTION [Industrial Field of Application] The present invention relates to a method for forming an insulating film on the cylindrical surface of a non-linear viI resistor whose main component is zinc oxide, which is applied, for example, to power surge arresters.

〔従来の技術〕[Conventional technology]

第4図(A)は従来周知の酸化亜鉛を主成分とする非直
線抵抗体を示す側面図、第4図(B)は第4図(A)の
非直線抵抗体を示す正面図、第5図はノド直線抵抗体の
円筒面に絶縁被膜を形成する従来の絶縁膜形成方法の一
工程を示す概念図である。
FIG. 4(A) is a side view showing a conventionally well-known nonlinear resistor mainly composed of zinc oxide, FIG. 4(B) is a front view showing the nonlinear resistor of FIG. 4(A), and FIG. FIG. 5 is a conceptual diagram showing one step of a conventional insulating film forming method for forming an insulating film on the cylindrical surface of a grooved linear resistor.

第4図(A)(B)において(1)は酸化亜鉛を主成分
とする円筒形の非直線抵抗体、(3)はこの非直線抵抗
体の素体、(4)はこの素体の円筒面に形成した繊密な
絶縁被膜である。また第5図においてOυは作業台、0
3はこの作業台の上に載置したタブ、θ蕩はごのタブの
上に装着した金網、041は上記絶縁被膜(4)の素材
の絶縁塗料、0りはこの絶縁塗料を容れた容器である。
In Figure 4 (A) and (B), (1) is a cylindrical nonlinear resistor whose main component is zinc oxide, (3) is the element of this nonlinear resistor, and (4) is the element of this element. It is a delicate insulating coating formed on a cylindrical surface. Also, in Figure 5, Oυ is the work table, 0
3 is the tab placed on this workbench, the wire mesh attached to the tab of the θ ladder, 041 is the insulating paint made of the material of the above insulating coating (4), and 0 is the container containing this insulating paint. be.

次に従来の絶縁被膜形成方法の操作について説明する。Next, the operation of the conventional insulating film forming method will be explained.

まず作業台(Illの上にタブ0zを載置したその上に
金網0濁を装着する。この金網0濁の上に所定数の素体
(3)を堆積したものを必要数だけ載置する。
First, place the tab 0z on the workbench (Ill) and attach the wire mesh 0z on top of it.Place the required number of the predetermined number of element bodies (3) on top of this wire mesh 0z. .

第5図では3個の素体(3)を堆積したものを31J1
ml置した例を示している。そして容器Q51に容れた
絶縁塗料を所定数の素体(3)を堆積したものの上方か
ら順次浴びせ素体(3)の円筒面全体に絶縁塗料0船を
塗着する。素体(3)に塗着しない絶縁塗料0りは金網
0争を透過してタブ側に溜集する。このようにして円筒
面に絶縁塗料041の塗着した素体(3)を高温で乾燥
させるかあるいは焼成すると円筒面に絶縁被膜(4)を
形成した非直線抵抗体(1)となる。非直線抵抗体fi
+の絶縁液11 +41は非直線抵抗体(1)の円筒面
の電気絶縁性能を決定するものであって均一な膜厚が上
記のような従来の絶縁被膜形成方法では金網0コの上に
所定数の素体(3)を堆積したものを載置しその上方か
ら絶8!塗料を浴びせて素体(3)の円筒面全体に絶縁
塗料θ滲を塗着するのでその塗膜の厚さしたがって絶縁
被膜(4)の膜厚が不均一となり個々の非直線抵抗体f
i+の電気的特性にばらつきを生じるほか所定数の素体
(3)を堆積してその上方から絶8i塗料を浴びせるの
で最上段の素体(3)の上端面にも絶縁塗料−が塗着す
るので乾燥あるいは焼成する前にこの塗着した絶縁塗料
を除去しなければならないなどの解決すべき課題があっ
た。
In Figure 5, 31J1 is a stack of three element bodies (3).
An example is shown in which ml was placed. Then, the insulating paint contained in the container Q51 is sequentially poured from above the predetermined number of element bodies (3) deposited to apply the insulating paint 0 to the entire cylindrical surface of the element bodies (3). The insulating paint that is not applied to the base body (3) passes through the wire mesh and collects on the tab side. When the element body (3) with the insulating paint 041 coated on the cylindrical surface in this manner is dried or fired at a high temperature, it becomes a non-linear resistor (1) with an insulating coating (4) formed on the cylindrical surface. nonlinear resistor fi
+ insulating liquid 11 +41 determines the electrical insulation performance of the cylindrical surface of the non-linear resistor (1), and in the conventional insulating film forming method as described above, a uniform film thickness is obtained on the wire mesh 0. Place a predetermined number of element bodies (3) stacked on top of each other and shoot from above! Since the insulating paint θ is applied to the entire cylindrical surface of the element body (3) by spraying the paint, the thickness of the paint film and therefore the film thickness of the insulating coating (4) becomes uneven, and the individual non-linear resistors f
In addition to causing variations in the electrical characteristics of the i+, since a predetermined number of elements (3) are deposited and the insulating paint is applied from above, the upper end surface of the uppermost element (3) is also coated with insulating paint. Therefore, there were problems to be solved, such as the need to remove the applied insulating paint before drying or firing.

この発明はかかる課題を解決するためになされたもので
あって絶縁被膜(4)の膜厚を均一にして個々の非直線
抵抗体の電気的特性にばらつきを生しることがなくまた
素体の端面に絶縁塗料の塗着することのない絶縁被膜形
成方法を得ることを目的とする。
The present invention has been made to solve this problem, and the thickness of the insulating film (4) is made uniform to prevent variations in the electrical characteristics of individual non-linear resistors. An object of the present invention is to obtain a method for forming an insulating film without applying an insulating paint to the end face of the insulating film.

〔課題を解決するための手段〕[Means to solve the problem]

この発明に係る絶縁膜形成方法は酸化亜鉛を主成分とす
る円筒形の非直線抵抗体の素体を70〜150℃の温度
に加熱する工程、タンク内の絶縁塗料に下部を浸?Mし
て回転自在に保持した2本の平行なローラの上に素体を
[置しローラを同じ方向に同じ回転数で回転させてロー
ラの円筒面と所定の間隙を保持した除滴板によりローラ
の円筒面に塗着する絶縁塗料を所定の厚さの塗膜にした
うえ素体の円筒面に転移塗着する工程、絶縁塗料を円筒
面に塗着した上記素体を高温で乾燥するかあるいは焼成
して円筒面に絶縁被膜を形成した非直線抵抗体にする工
程を備えたものである。
The method for forming an insulating film according to the present invention includes a step of heating a cylindrical nonlinear resistor element whose main component is zinc oxide to a temperature of 70 to 150°C, and dipping the lower part of the body into an insulating paint in a tank. The element body is placed on two parallel rollers that are held rotatably in the same direction, and the rollers are rotated in the same direction at the same number of rotations to maintain a predetermined gap from the cylindrical surface of the rollers. The process of applying the insulating paint to the cylindrical surface of the roller to a predetermined thickness and transferring it to the cylindrical surface of the element, and drying the above element with the insulating paint applied to the cylindrical surface at a high temperature. Alternatively, the resistor may be fired to form a non-linear resistor with an insulating film formed on the cylindrical surface.

〔作用〕[Effect]

この発明においては素体を70〜150℃の温度に加熱
して2本のローラの上に蔵置しローラを回転させてロー
ラの円筒面に塗着した所定の厚さの絶縁塗料の塗膜を素
体の円筒面に転移塗着するから非直線抵抗体の円筒面に
形成する絶縁被膜の膜Tが均一になる。
In this invention, the element body is heated to a temperature of 70 to 150°C and placed on two rollers, and the rollers are rotated to form a coating film of insulating paint of a predetermined thickness on the cylindrical surface of the rollers. Since the insulating film T is transferred onto the cylindrical surface of the element body, the insulating film T formed on the cylindrical surface of the nonlinear resistor becomes uniform.

〔発明の実施例〕[Embodiments of the invention]

第1図はこの発明の一実施例に使用する絶縁塗料塗着装
置を示す概念図、第2図は素体の加熱温度と素体の円筒
面に塗着した絶縁塗料の平均膜厚との関係を示す特性曲
線図、第3図は素体の加熱温度と素体の円筒面に塗着し
た絶縁塗料の膜厚のばらつきとの関係を示す特性曲線図
である。第1図において+31,041は上記従来の絶
縁被膜形成方法におけるものと同一のものである。(2
1)は上記絶縁塗料Q41を溜めたタンク、(22)は
下部を上記絶縁塗料α旬に浸漬した2本のローラ、(2
3)はこのローラの円筒面と所定の間隙を保持した除滴
板である。
Fig. 1 is a conceptual diagram showing an insulating paint application device used in an embodiment of the present invention, and Fig. 2 shows the relationship between the heating temperature of the element body and the average film thickness of the insulating paint applied to the cylindrical surface of the element body. FIG. 3 is a characteristic curve diagram showing the relationship between the heating temperature of the element body and the variation in the film thickness of the insulating paint applied to the cylindrical surface of the element body. In FIG. 1, +31,041 is the same as in the conventional insulating film forming method. (2
1) is a tank containing the above-mentioned insulating paint Q41, (22) is two rollers whose lower parts are dipped in the above-mentioned insulating paint
3) is a drip removal plate that maintains a predetermined gap from the cylindrical surface of this roller.

次にこの発明の一実施例の操作について説明する。まず
素体(3)を図示はしないが金属メツシュからなるコン
ベアに載せて移動させながら連続加熱して70〜150
 ℃の温度にする。この温度を維持しながら素体(3)
を2本のローラ(22)の上に載置し各ローラ(22)
を同じ方向に同じ回転数で回転させるとローラ(22)
の円筒面(22)に塗着した絶縁塗料a優はローラ(2
2)の円筒面と除滴板(23)との所定の間隙に対応し
た所定の厚さの塗膜になる。ローラ(22)の回転によ
りその上にR置した素体(3)も回転しローラ(22)
の円筒面に塗着した絶縁塗料αaの塗膜が素体(3)の
円筒面に転移塗着する。素体(3)の円筒面に塗着する
絶縁塗料の平均膜厚は素体(3)の加熱温度と関係し7
0〜150℃の範囲においてもっとも安定した膜厚が得
られる(第2回参照)。また素体(3)の円筒面に塗着
する絶縁塗料の膜厚のばらつきすなわち〔(最大膜厚−
最小膜厚)/平均膜厚)X100%も素体(3)の加熱
温度と関係して同じ<70〜150 ℃の範囲において
もっとも小さくなる(第3図参照)。この絶縁塗料0旬
を円筒面に塗着した素体(3)を図示しないが高温で乾
燥するか焼成すると円筒面に絶縁被膜(4)を形成した
非直線抵抗体+11が得られる。
Next, the operation of one embodiment of the present invention will be explained. First, the element body (3) is placed on a conveyor made of metal mesh (not shown) and heated continuously while being moved to a temperature of 70 to 150
bring the temperature to ℃. While maintaining this temperature, the element body (3)
is placed on the two rollers (22), and each roller (22)
When the rollers (22) are rotated in the same direction and at the same number of rotations,
The insulating paint a applied to the cylindrical surface (22) of the roller (2
2) The coating film has a predetermined thickness corresponding to the predetermined gap between the cylindrical surface and the drip removal plate (23). As the roller (22) rotates, the element (3) placed R on it also rotates and the roller (22)
The coating film of the insulating paint αa applied to the cylindrical surface of the element body (3) transfers and adheres to the cylindrical surface of the element body (3). The average film thickness of the insulating paint applied to the cylindrical surface of the element body (3) is related to the heating temperature of the element body (3).7
The most stable film thickness can be obtained in the range of 0 to 150°C (see Part 2). Also, variations in the film thickness of the insulating paint applied to the cylindrical surface of the element body (3), i.e. [(maximum film thickness -
Minimum film thickness)/average film thickness) When the element body (3) with the insulating paint applied to the cylindrical surface is dried or fired at a high temperature (not shown), a non-linear resistor +11 having an insulating coating (4) formed on the cylindrical surface is obtained.

〔発明の効果〕〔Effect of the invention〕

この発明は以上説明したとおり酸化亜鉛を主成分とする
円筒形の非直線抵抗体の素体を70〜150℃の温度に
加熱する工程、タンク内の絶縁塗料に下部を浸漬して回
転自在に保持した2本の平行なローラの上に素体を載置
しローラを同じ方向に同じ回転数で回転させてローラの
円筒面と所定の間隙を保持した除/iI板によりローラ
の円筒面に塗着する絶縁塗料を所定の厚さの塗膜にした
うえ素体の円筒面に転移塗着する工程、絶縁塗料を円筒
面に塗着した上記素体を高温で乾燥するかあるいは焼成
して円筒面に絶縁被膜を形成した非直線抵抗体にする工
程を備えたので絶縁被膜の膜厚を均一にして個々の非直
線抵抗体の電気的特性がばらつかずまた素体の端面に絶
縁塗料の塗着することがないと云う効果がある。
As explained above, this invention involves the process of heating a cylindrical non-linear resistor element whose main component is zinc oxide to a temperature of 70 to 150 degrees Celsius, and immersing the lower part in an insulating paint in a tank to make it rotatable. The element body is placed on two parallel rollers that are held, and the rollers are rotated in the same direction and at the same number of rotations, and the cylindrical surface of the rollers is held by a plate that maintains a predetermined gap with the cylindrical surface of the rollers. The step of applying the insulating paint to a predetermined thickness and transferring it to the cylindrical surface of the element body, and drying or baking the above element body with the insulating paint applied to the cylindrical surface at a high temperature. The process of forming a non-linear resistor with an insulating film formed on the cylindrical surface makes the thickness of the insulating film uniform, preventing variations in the electrical characteristics of each non-linear resistor, and adding insulation paint to the end face of the element. This has the effect that there is no chance of any staining.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図はこの発明の一実施例に使用する絶縁塗料塗着装
置を示す概念図、第2図は素体の加熱温度と素体の円筒
面に塗着した絶縁塗料の平均膜圧との関係を示す特性曲
線図、第3図は素体の加熱温度と素体の円筒面に塗着し
た絶縁塗料の膜厚のばらつきとの関係を示す特性曲線図
、第4図(A)(B)はそれぞれ従来周知の酸化亜鉛を
主成分とする非直線抵抗体を示す側面図と正面図、第5
図は従来の絶縁被膜形成方法の一工程を示す概念図であ
る。 図において+11は非直線抵抗体、(3)は素体、(4
)は絶縁被膜々、(141は絶縁塗料、(21)はタン
ク、(22)ばローラ、(23)は除滴板である。 なお各図中同一符号は同一または相当部分を示す。
Fig. 1 is a conceptual diagram showing an insulating paint application device used in an embodiment of the present invention, and Fig. 2 shows the relationship between the heating temperature of the element body and the average film thickness of the insulating paint applied to the cylindrical surface of the element body. Figure 3 is a characteristic curve diagram showing the relationship between the heating temperature of the element body and the variation in the film thickness of the insulating paint applied to the cylindrical surface of the element body. Figure 4 (A) (B) ) are a side view and a front view respectively showing a conventionally well-known non-linear resistor whose main component is zinc oxide.
The figure is a conceptual diagram showing one step of a conventional insulating film forming method. In the figure, +11 is a nonlinear resistor, (3) is an element body, and (4
) are insulating coatings, (141 is an insulating paint, (21) is a tank, (22) is a roller, and (23) is a drip removal plate. In each figure, the same reference numerals indicate the same or corresponding parts.

Claims (1)

【特許請求の範囲】[Claims]  酸化亜鉛を主成分とする円筒形の非直線抵抗体の素体
を70〜150℃の温度に加熱する工程、タンク内の絶
縁塗料に下部を浸漬して回転自在に保持した2本の平行
なローラの上に上記素体を載置し上記ローラを同じ方向
に同じ回転数で回転させて上記ローラの円筒面と所定の
間隙を保持した除滴板により上記ローラの円筒面に塗着
する上記絶縁塗料を所定の厚さの塗膜にしたうえ上記素
体の円筒面に転移塗着する工程、上記絶縁塗料を円筒面
に塗着した上記素体を高温で乾燥するかあるいは焼成し
て円筒面に絶縁被膜を形成した上記非直線抵抗体にする
工程を備えたことを特徴とする絶縁被膜形成方法。
The process of heating a cylindrical non-linear resistor element whose main component is zinc oxide to a temperature of 70 to 150 degrees Celsius, the lower part of which is immersed in insulating paint in a tank and held in a rotatable manner. The above-mentioned material is placed on a roller, and the roller is rotated in the same direction at the same number of rotations, and the coating is applied to the cylindrical surface of the roller using a drip removal plate that maintains a predetermined gap with the cylindrical surface of the roller. A step of forming an insulating paint into a film of a predetermined thickness and then transfer-coating it onto the cylindrical surface of the element, and drying or firing the element with the insulating paint applied to the cylindrical surface at a high temperature to form a cylinder. A method for forming an insulating film, comprising the step of forming the non-linear resistor with an insulating film formed on its surface.
JP63144357A 1988-06-10 1988-06-10 Insulation film forming method Expired - Lifetime JPH0834137B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP63144357A JPH0834137B2 (en) 1988-06-10 1988-06-10 Insulation film forming method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP63144357A JPH0834137B2 (en) 1988-06-10 1988-06-10 Insulation film forming method

Publications (2)

Publication Number Publication Date
JPH01312801A true JPH01312801A (en) 1989-12-18
JPH0834137B2 JPH0834137B2 (en) 1996-03-29

Family

ID=15360225

Family Applications (1)

Application Number Title Priority Date Filing Date
JP63144357A Expired - Lifetime JPH0834137B2 (en) 1988-06-10 1988-06-10 Insulation film forming method

Country Status (1)

Country Link
JP (1) JPH0834137B2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2017208794A1 (en) * 2016-05-31 2017-12-07 エヌ・イーケムキャット株式会社 Method for producing cylindrical honeycomb structure with film and method for producing catalyst

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7101099B1 (en) 1998-08-19 2006-09-05 Canon Kabushiki Kaisha Printing head, head cartridge having printing head, printing apparatus using printing head, and printing head substrate

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5464167U (en) * 1977-10-17 1979-05-07
JPS61101942U (en) * 1984-12-12 1986-06-28
JPS61196501A (en) * 1985-02-26 1986-08-30 株式会社東芝 Insulation film former for non-linear resistor

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5464167U (en) * 1977-10-17 1979-05-07
JPS61101942U (en) * 1984-12-12 1986-06-28
JPS61196501A (en) * 1985-02-26 1986-08-30 株式会社東芝 Insulation film former for non-linear resistor

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2017208794A1 (en) * 2016-05-31 2017-12-07 エヌ・イーケムキャット株式会社 Method for producing cylindrical honeycomb structure with film and method for producing catalyst
CN109219590A (en) * 2016-05-31 2019-01-15 恩亿凯嘉股份有限公司 Method for producing cylindrical honeycomb structure with film and method for producing catalyst
JPWO2017208794A1 (en) * 2016-05-31 2019-05-16 エヌ・イーケムキャット株式会社 Method of manufacturing coated cylindrical honeycomb structure and method of manufacturing catalyst

Also Published As

Publication number Publication date
JPH0834137B2 (en) 1996-03-29

Similar Documents

Publication Publication Date Title
US7115302B2 (en) Paste coating method
US2786925A (en) Metal film resistor
JPH01312801A (en) Formation of insulating coat
JPH06290989A (en) Chip shape circuit component
US3602190A (en) Multiple vaporizing system
JPH04282802A (en) Manufacture of ceramic electronic parts
JPH08130170A (en) Method of forming terminal electrodes for electronic components
JP2001060530A (en) Formation of external electrode of laminated ceramic electronic component
JPS6227258Y2 (en)
JPH04107277A (en) Formation of glass coating layer on thin film resistor element
US2110011A (en) Enameling and varnishing wire, ribbons, and the like
JP3067177B2 (en) Rotary coating device
JP2000232041A (en) Capacitor manufacturing equipment
JPH0255280A (en) Production of ceramic form
GB863881A (en) Improvements in or relating to methods of coating cylindrical members by thermal evaporation in a vacuum and apparatus for carrying out such methods
JPS55164862A (en) Forming method of resistance heating element layer in heating roller for heat fixing
JPS5830734B2 (en) Electrode coating method for ceramic elements
JPH0352202A (en) Method of manufacturing thick film resistors
JP2958391B2 (en) Ink for forming dielectric film and method for forming dielectric film
JPS6439016A (en) Formation of capacitor and device therefor
SU597517A1 (en) Device for tinning articles
JPS61196501A (en) Insulation film former for non-linear resistor
JPH0416958B2 (en)
JPH0738326B2 (en) Non-linear resistor manufacturing method
JPH11294949A (en) Method and device for drying hard substrate

Legal Events

Date Code Title Description
S111 Request for change of ownership or part of ownership

Free format text: JAPANESE INTERMEDIATE CODE: R313111

R350 Written notification of registration of transfer

Free format text: JAPANESE INTERMEDIATE CODE: R350

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

S111 Request for change of ownership or part of ownership

Free format text: JAPANESE INTERMEDIATE CODE: R313113

R350 Written notification of registration of transfer

Free format text: JAPANESE INTERMEDIATE CODE: R350

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20080329

Year of fee payment: 12

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20090329

Year of fee payment: 13

EXPY Cancellation because of completion of term
FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20090329

Year of fee payment: 13