JPH0132628B2 - - Google Patents

Info

Publication number
JPH0132628B2
JPH0132628B2 JP58162036A JP16203683A JPH0132628B2 JP H0132628 B2 JPH0132628 B2 JP H0132628B2 JP 58162036 A JP58162036 A JP 58162036A JP 16203683 A JP16203683 A JP 16203683A JP H0132628 B2 JPH0132628 B2 JP H0132628B2
Authority
JP
Japan
Prior art keywords
electron beam
deflection plate
auxiliary deflection
annealing
sample
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP58162036A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6054154A (ja
Inventor
Tomoyasu Inoe
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
National Institute of Advanced Industrial Science and Technology
Original Assignee
Agency of Industrial Science and Technology
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agency of Industrial Science and Technology filed Critical Agency of Industrial Science and Technology
Priority to JP58162036A priority Critical patent/JPS6054154A/ja
Publication of JPS6054154A publication Critical patent/JPS6054154A/ja
Publication of JPH0132628B2 publication Critical patent/JPH0132628B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/147—Arrangements for directing or deflecting the discharge along a desired path
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/317—Electron-beam or ion-beam tubes for localised treatment of objects for changing properties of the objects or for applying thin layers thereon, e.g. for ion implantation

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Recrystallisation Techniques (AREA)
  • Electron Sources, Ion Sources (AREA)
JP58162036A 1983-09-05 1983-09-05 電子ビ−ムアニ−ル装置 Granted JPS6054154A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP58162036A JPS6054154A (ja) 1983-09-05 1983-09-05 電子ビ−ムアニ−ル装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58162036A JPS6054154A (ja) 1983-09-05 1983-09-05 電子ビ−ムアニ−ル装置

Publications (2)

Publication Number Publication Date
JPS6054154A JPS6054154A (ja) 1985-03-28
JPH0132628B2 true JPH0132628B2 (ar) 1989-07-07

Family

ID=15746857

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58162036A Granted JPS6054154A (ja) 1983-09-05 1983-09-05 電子ビ−ムアニ−ル装置

Country Status (1)

Country Link
JP (1) JPS6054154A (ar)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0531813U (ja) * 1991-10-09 1993-04-27 豊和工業株式会社 偏心チヤツク

Also Published As

Publication number Publication date
JPS6054154A (ja) 1985-03-28

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