JPH01401A - Fine movement element attachment/detachment mechanism for STM - Google Patents

Abstract

(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a mounting mechanism for a fine movement element in an STM (scanning tunneling microscope).

[Summary of the invention]

In this invention, a probe is set in the fine movement element in advance, and in this state it can be attached to and detached from the STM body with a single touch.

[Conventional technology]

In the 37M apparatus, atomic image observation is performed by controlling the distance between the sample surface and the detection probe tip so that the tunnel current flowing between the sample surface and the detection probe tip fixed to the fine movement element is constant. Generally, the fine movement element I shown in the figure is fixed to the fine movement element holder 5 attached to the STM body with adhesive or screws, and only the probe 2 is attached to the fine movement element 1 as needed. .

[Problem that the invention seeks to solve]

In the conventional method described above, the probe 2 is inserted into the needle attachment 11 of the fine movement element 1 as shown in FIG. If a defect was discovered in the device and the device was to be replaced, or if measurements were to be taken using a needle with a different tip diameter, it was necessary to work through the gap in the device. In this case, the diameter of the tip of the needle is 0.1 μm or less and is very sharp, so care must be taken when removing the plate.

Moreover, unless the length i of the needle is adjusted accurately, the measurement conditions will change, which also takes a lot of time.

[Means for solving problems]

In order to solve the above-mentioned problems, the present invention allows a probe to be accurately placed in the fine movement element in advance, and the fine movement element with the probe set thereon to be detachable from the STM apparatus main body with a single touch.

[Effect]

According to the above method, for example, when the probe needs to be replaced during measurement, it can be replaced with one touch, so that measurements can be continued smoothly without spending a lot of effort on replacing the probe.

〔Example〕

Embodiments according to the present invention will be described below based on the drawings.

In FIG. 1, 1 is a fine movement element, and 2 is a probe.

3. ．． 3□, 33.3. is the electrode for driving the fine movement element (first
In the figure, X is formed on the fine movement element l.

y, z electrodes).

FIG. 2 shows a fine movement element holder 6 for holding the fine movement element 1, and this holder 6 has terminals 71, 7□.

73 and 74 are provided, and the fine movement element 1 is connected to each terminal 31+3.
It is in contact with L3s and 34. Furthermore, the terminals 71, 7□, 72.74 are as shown in FIG. 2 (C1).
It has spring properties and is formed to hold the fine movement element 1. Also, 3. is a terminal connected to the probe, and is the terminal 7. of the fine movement element holder in FIG. It has come into contact with. Reference numeral 5 denotes a groove for positioning, which is adapted to engage with the alignment protrusion 8 at the position of the sample holder 6.

The fine movement element holder 6 shown in FIG. 2 is attached to a 37M device as shown in FIG. 4, for example.

(Effects of the invention) Therefore, when the probe needs to be replaced, the fine movement element can be replaced with a single touch in the holder attached to the 37M device.Furthermore, since the probe can be centered at the time of the fine movement element alone, the needle can be replaced. Fixation can now be done reliably.

In this case, several fine movement elements are prepared and used ones can be used repeatedly by replacing the needles, so the total running cost remains the same.

In addition, in this example, a cylindrical type was used for the fine movement element;
For example, other shapes such as cubic can also be implemented using the same concept.

[Brief explanation of the drawing]

FIG. 1(a) is a perspective view of the fine movement element according to this embodiment, and FIG. (in the figure) is a plan view thereof, the same figure (C1 is a partial sectional view, Figure 3 is a perspective view showing the conventional system, and Figure 4 is a
FIG. 3 is a side view of the M device. l......Fine movement element 2......Tip 31.3□, 33,3. ．． 3%... Electrode terminal 4...
・・・・・・Needle presser spring 5・・・・・・・・・Positioning groove 6・・・・・・・・・Fine movement element holder 71.7□,
1s, 1-=1s... Electrode terminal 8...
More than positioning protrusion

Claims (1)

[Claims] A fine movement element attachment/detachment mechanism for STM, which is characterized by the ability to replace the fine movement element with a probe attached in advance with one touch.