JPS64401A - Mechanism for attaching and detaching fine adjustment element for stm - Google Patents

Mechanism for attaching and detaching fine adjustment element for stm

Info

Publication number
JPS64401A
JPS64401A JP13388487A JP13388487A JPS64401A JP S64401 A JPS64401 A JP S64401A JP 13388487 A JP13388487 A JP 13388487A JP 13388487 A JP13388487 A JP 13388487A JP S64401 A JPS64401 A JP S64401A
Authority
JP
Japan
Prior art keywords
probe
fine adjustment
adjustment element
terminals
holder
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP13388487A
Other languages
Japanese (ja)
Other versions
JPH01401A (en
Inventor
Koji Kajimura
Fumiki Sakai
Chikara Miyata
Shigeru Wakiyama
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Instruments Inc
National Institute of Advanced Industrial Science and Technology AIST
Original Assignee
Agency of Industrial Science and Technology
Seiko Instruments Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agency of Industrial Science and Technology, Seiko Instruments Inc filed Critical Agency of Industrial Science and Technology
Priority to JP62-133884A priority Critical patent/JPH01401A/en
Priority claimed from JP62-133884A external-priority patent/JPH01401A/en
Publication of JPS64401A publication Critical patent/JPS64401A/en
Publication of JPH01401A publication Critical patent/JPH01401A/en
Pending legal-status Critical Current

Links

Landscapes

  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)

Abstract

PURPOSE: To enable the smooth continuation of measurement without spending labor in exchanging a probe by previously setting the probe exactly to a fine adjustment element and exchanging the probe together with the fine adjustment element through one action.
CONSTITUTION: Terminals 31, 32, 33, 34 are connected to the driving electrode of the fine adjustment element 1 mounted with the probe 2. On the other hand, terminals 71, 72, 73, 74 having a spring characteristic are provided to a fine adjustment element holder 6 and the element 1 is held while said terminals are brought into contact with the terminals 31, 32, 33, 34. The terminal 35 connected to the probe 2 of the element 1 comes into contact with the terminal 75 of the holder 6 and a groove 5 for positioning the element 1 engages a positioning projection 8 of the holder 6. The exchange of the probe 2 together with the element 1 through one action is enabled when the exchange of the probe is needed if the mechanism is constituted in such a manner and the holder 6 is mounted on an STM device.
COPYRIGHT: (C)1989,JPO&Japio
JP62-133884A 1987-05-29 Fine movement element attachment/detachment mechanism for STM Pending JPH01401A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62-133884A JPH01401A (en) 1987-05-29 Fine movement element attachment/detachment mechanism for STM

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62-133884A JPH01401A (en) 1987-05-29 Fine movement element attachment/detachment mechanism for STM

Publications (2)

Publication Number Publication Date
JPS64401A true JPS64401A (en) 1989-01-05
JPH01401A JPH01401A (en) 1989-01-05

Family

ID=

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02113104U (en) * 1989-02-23 1990-09-11
JPH0312506A (en) * 1989-06-09 1991-01-21 Jeol Ltd Scan image output system of scanning tunneling microscope
EP0871006A1 (en) * 1997-04-09 1998-10-14 Seiko Instruments Inc. Scanning probe microscope
JPH1130573A (en) * 1997-05-20 1999-02-02 Jeol Ltd Holder holding device
CN106124805A (en) * 2016-07-26 2016-11-16 苏州衡微仪器科技有限公司 A kind of Scan Architecture of PSTM

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4343993A (en) * 1979-09-20 1982-08-10 International Business Machines Corporation Scanning tunneling microscope

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4343993A (en) * 1979-09-20 1982-08-10 International Business Machines Corporation Scanning tunneling microscope

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02113104U (en) * 1989-02-23 1990-09-11
JPH0312506A (en) * 1989-06-09 1991-01-21 Jeol Ltd Scan image output system of scanning tunneling microscope
EP0871006A1 (en) * 1997-04-09 1998-10-14 Seiko Instruments Inc. Scanning probe microscope
JPH1130573A (en) * 1997-05-20 1999-02-02 Jeol Ltd Holder holding device
CN106124805A (en) * 2016-07-26 2016-11-16 苏州衡微仪器科技有限公司 A kind of Scan Architecture of PSTM

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