JPH0143025B2 - - Google Patents

Info

Publication number
JPH0143025B2
JPH0143025B2 JP18348181A JP18348181A JPH0143025B2 JP H0143025 B2 JPH0143025 B2 JP H0143025B2 JP 18348181 A JP18348181 A JP 18348181A JP 18348181 A JP18348181 A JP 18348181A JP H0143025 B2 JPH0143025 B2 JP H0143025B2
Authority
JP
Japan
Prior art keywords
stannous chloride
surfactant
organic polymer
polymer film
solvent
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP18348181A
Other languages
Japanese (ja)
Other versions
JPS5885111A (en
Inventor
Mitsuaki Atobe
Yoshihiro Oono
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Epson Corp
Original Assignee
Seiko Epson Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seiko Epson Corp filed Critical Seiko Epson Corp
Priority to JP18348181A priority Critical patent/JPS5885111A/en
Publication of JPS5885111A publication Critical patent/JPS5885111A/en
Publication of JPH0143025B2 publication Critical patent/JPH0143025B2/ja
Granted legal-status Critical Current

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Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01DMEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/347Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells using displacement encoding scales
    • G01D5/34707Scales; Discs, e.g. fixation, fabrication, compensation

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optical Transform (AREA)
  • Application Of Or Painting With Fluid Materials (AREA)
  • Chemically Coating (AREA)
  • Transmission And Conversion Of Sensor Element Output (AREA)

Description

【発明の詳細な説明】 本発明は比較的、無電解メツキされにくいと言
われるガラス、アクリル等の透明プラスチツク上
に主剤として水溶性ポリビニルブチラール、それ
に架橋剤メラミン、界面活性剤ラピゾール、溶媒
エチルアルコールと水を加えた溶液又は、主剤と
して2ヒドロキシエチルメタアクリレート、それ
に重合剤ベンゾインエチルエーテル、界面活性剤
トリオキシエチレンノニルフエノールエーテル、
溶剤であるエチレングリコールモノエチルエーテ
ルを加えた溶液をデイツピング、スピンナーまた
はロールコーター法により塗布し硬化させた後紫
外線露光による選択的電解メツキによつて形状パ
ターニングを行つて得られるエンコーダースリツ
ト板の製造方法に関している。
Detailed Description of the Invention The present invention uses water-soluble polyvinyl butyral as a main ingredient, melamine as a crosslinking agent, rapizole as a surfactant, and ethyl alcohol as a solvent on transparent plastics such as glass and acrylic, which are said to be relatively difficult to electroless plate. and water, or 2-hydroxyethyl methacrylate as the main ingredient, a polymerizing agent benzoin ethyl ether, a surfactant trioxyethylene nonylphenol ether,
Manufacture of an encoder slit plate obtained by coating a solution containing ethylene glycol monoethyl ether as a solvent by a dipping, spinner or roll coater method, curing it, and patterning it by selective electrolytic plating using ultraviolet light exposure. It's about the method.

従来、エンコーダースリツト板は金属のエツチ
ング又は、ガラス基板にクロム蒸着によりクロム
被膜を形成し、目的とする形状にパターニングす
ることによつて作られていた。しかし金属エツチ
ングの場合、スリツト穴径の微細エツチングには
限度があり、高分解機能を有するエンコーダとし
ては、限界があつた。又、ガラス上にクロム蒸着
して得られた金属クロム膜を目的とする形状にパ
ターニングすることによつて作られたエンコーダ
スリツト板は一度に大量又大表面積のものを作る
ことができず、また真空設備を使用することから
も、コストダウンが困難であつた。
Conventionally, encoder slit plates have been made by etching metal or depositing chromium on a glass substrate to form a chromium coating and patterning it into a desired shape. However, in the case of metal etching, there is a limit to the fine etching of the slit hole diameter, and there is a limit to this as an encoder with a high resolution function. Furthermore, encoder slit plates made by patterning a metallic chromium film obtained by vapor deposition of chromium on glass into a desired shape cannot be made in large quantities or with a large surface area at one time. Furthermore, since vacuum equipment is used, it has been difficult to reduce costs.

本発明はこのような課題を解決しようとするも
ので、その目的とするところは、高品質、高分解
機能を有すると共にコストダウンのできるエンコ
ーダスリツト板の製造方法を提供するところにあ
る。
The present invention aims to solve these problems, and its purpose is to provide a method for manufacturing an encoder slit plate that has high quality, high resolution function, and can reduce costs.

本発明におけるエンコーダスリツト板の製造方
法の要旨は、透明基板上に主剤として水溶性ポリ
ビニルプチラール、架橋剤としてメラミン、界面
活性剤としてラビゾール、溶媒にエチルアルコー
ルと水を成分とした有機高分子被膜又は主剤に2
−ヒドロキシエチルメタアクリレート、重合剤と
してベンゾインエチルエーテル、界面活性剤とし
てトリオキシエチレンノニルフエノールエーテ
ル、溶剤としてエチレングリコールモノエチルエ
ーテルを成分とした有機高分子被膜を形成する工
程と、前記有機高分子被膜上に塩化第一錫を形成
する工程と、前記塩化第一錫上にスリツトパター
ンの形成されたフオトマスクを密着させ紫外線を
照射する工程と、塩化パラジウム溶液に浸漬され
前記塩化第一錫がパターニングされる工程と、パ
ターニングされた前記塩化第一錫上に施こされる
無電解ニツケルメツキ工程とを有することを特徴
とする。
The gist of the method for manufacturing an encoder slit plate in the present invention is to coat an organic polymer containing water-soluble polyvinyl petyral as a main ingredient, melamine as a crosslinking agent, rabisol as a surfactant, and ethyl alcohol and water as a solvent on a transparent substrate. 2 for coating or main agent
- Forming an organic polymer film containing hydroxyethyl methacrylate, benzoin ethyl ether as a polymerization agent, trioxyethylene nonyl phenol ether as a surfactant, and ethylene glycol monoethyl ether as a solvent, and the organic polymer film a step of forming stannous chloride on the stannous chloride, a step of closely contacting a photomask with a slit pattern formed on the stannous chloride and irradiating it with ultraviolet rays, and patterning the stannous chloride by immersing it in a palladium chloride solution. and an electroless nickel plating step performed on the patterned stannous chloride.

本発明に用いられる基板としては、光透過性基
板なら何でもかまわないが平面の平滑性、透過率
(各エンコーダ中のフオトトランジスタの感応波
長で選択)熱膨張係数の低さ等から、アクリル樹
脂、ポリエステル、ポリカーボネート樹脂、CR
−39樹脂、Vポリマー樹脂、ポリサルフオン樹
脂、ポリエーテルサルフオン樹脂、スピラン樹
脂、ガラス等がある。基板としては100μ〜数mm
厚のものが用いられる。これらの基板に無電解メ
ツキを可能にし、しかも密着を向上させるため
に、透明な基板上にポリビニルブチラールを溶
剤、加橋剤、界面活性剤を用い、被覆化する。又
は2−ヒドロキシエチルメタアクリレートを溶
剤、重合剤、界面活性剤を用い、被覆化する。そ
れらのコートの膜厚は、1000Å〜30000Åである。
薄すぎた場合のピンホール、厚すぎた場合の平面
精度を考慮に入れ通常は3000〜10000Åが用いら
れる。これらの被膜は、デイツピング法、スピン
ナー法、スプレー法、ロールコーター法等により
塗布され、基板の耐熱上耐える上限温度で硬化す
る。この有機被膜は基板表面のぬれ性を向上させ
メツキを可能にするためとメツキ被膜の密着性、
光沢性を向上させる重要な役割をもつ。
The substrate used in the present invention may be any optically transparent substrate, but acrylic resin, Polyester, polycarbonate resin, CR
-39 resin, V polymer resin, polysulfone resin, polyethersulfone resin, spiran resin, glass, etc. 100μ to several mm as a substrate
A thick one is used. In order to enable electroless plating on these substrates and to improve adhesion, polyvinyl butyral is coated onto a transparent substrate using a solvent, a crosslinking agent, and a surfactant. Alternatively, 2-hydroxyethyl methacrylate is coated using a solvent, a polymerizing agent, and a surfactant. The thickness of these coats is 1000 Å to 30000 Å.
A thickness of 3,000 to 10,000 Å is usually used, taking into account pinholes if the film is too thin and flatness accuracy if it is too thick. These films are applied by a dipping method, a spinner method, a spray method, a roll coater method, etc., and are cured at the upper limit temperature that the substrate can withstand. This organic film improves the wettability of the substrate surface to enable plating, and improves the adhesion of the plating film.
It plays an important role in improving gloss.

次に、無電解メツキを行う。本製造方法は、低
コスト化、工程短縮も目的の一つであるため、紫
外線露光による選択的無電解メツキによるパター
ニング方法の確立も行い、スリツトパターンを形
成した。紫外線露光による選択的無電解メツキ方
式は、 (1) 先に述べたコート基板をSnCl2(HCl酸性)溶
液に浸漬し、数分後乾燥する。乾燥方法は70〜
80℃以下が適当。又は、アルコール、ダイフロ
ンによる置換乾燥もよい。
Next, electroless plating is performed. Since one of the purposes of this manufacturing method is to reduce costs and shorten the process, we also established a patterning method using selective electroless plating using ultraviolet light exposure to form a slit pattern. The selective electroless plating method using ultraviolet light exposure is as follows: (1) The coated substrate described above is immersed in a SnCl 2 (acidic HCl) solution and dried after a few minutes. The drying method is 70~
A temperature below 80℃ is suitable. Alternatively, substitution drying using alcohol or Diflon may also be used.

(2) 基板に石英ガラスを用いたフオトマスクを密
着し、2000Å以上の波長をもつ紫外線を適度の
時間を持つて照射する。
(2) A photomask made of quartz glass is closely attached to the substrate, and ultraviolet rays with a wavelength of 2000 Å or more are irradiated for an appropriate amount of time.

(3) PdCl2(HCl酸性)溶液に基板を浸漬し、水洗
後、無電解ニツケル浴に数分間入れ、メツキす
る。
(3) Immerse the substrate in PdCl 2 (acidic HCl) solution, rinse with water, and then place in an electroless nickel bath for several minutes to plate.

(2)の紫外線露光により Sn2+UV ――→ Sn4+となり、 (3)のPdCl2溶液の浸漬により非露光部の反応は
Sn2++Pd2+→Sn4++Pd0となり、そのパラジウム
金属にニツケルが析出すると考えらえる。また紫
外線露光部はSn4+となつているためPd2+を還元
することは不可能である。それゆえ、ニツケルが
析出されない。
The UV exposure in (2) changes Sn 2+ UV ---→ Sn 4+ , and the reaction in the non-exposed area is reduced by immersion in the PdCl 2 solution in (3).
Sn 2+ + Pd 2+ → Sn 4+ + Pd 0 , and it is thought that nickel is precipitated on the palladium metal. Furthermore, since the UV-exposed area is Sn 4+ , it is impossible to reduce Pd 2+ . Therefore, no nickel is deposited.

メツキは硬さ及び密着性、安価を考慮に入れ
Ni−Pを使用した。被膜厚は300Å〜1μ程度であ
り、エンコーダースリツト板の場合、スリツトサ
イドエツジがしつかりでていれば多少のピンホー
ルは問題ないので1000Å〜3000Åあれば十分であ
る。
We take into consideration hardness, adhesion, and low price for the metal fittings.
Ni-P was used. The coating thickness is about 300 Å to 1 μm, and in the case of encoder slit plates, a few pinholes are not a problem as long as the slit side edges are firm, so a thickness of 1000 Å to 3000 Å is sufficient.

このようにして得られたエンコーダスリツト板
は微細パターンが可能であり、作成にあたつての
低コスト化、工程短縮もみのがせない。さらに、
レジストなどを用いないので品質向上にもつなが
る。
The encoder slit plate thus obtained can be formed into a fine pattern, and the cost reduction and process shortening of production cannot be overlooked. moreover,
Since no resist is used, quality can be improved.

次に本発明を実施例により詳細に説明する。 Next, the present invention will be explained in detail with reference to examples.

実施例 1 コート成分 水溶性ポリビニルブチラール (主剤) メラミン(加橋剤) ラピゾール(界面活性剤) 100wt% 2 〃 0.2 〃 エチルアルコール 水 50Vol% 50 〃 A:B=1:3 溶媒にを混合しよく撹拌を行う。よく洗浄
したガラスに上の混合液をデイツピング法又はス
ピンナー法により、塗布し、135℃で2hr乾燥する
ことによつて硬化させた。この時の膜厚は2000Å
であつた。次に1%SnCl2溶液に上の基板を1分
間浸漬し、水洗、70℃で乾燥し、適度の時間V・
V照射する。(照射時間は紫外線露光装置の能力
により異る。)基板を一分程度、PdCl2溶液(実
験では日本カニゼン社製レツドシユーマー608の
5倍希釈液)を用い適当に水洗してからNi−P
メツキ浴(日本カニゼン社製シユーマS680を純
水にて8倍希釈)に45℃4分間浸漬し、Ni膜厚
2500Åを得た。密着性も良好で、メツキ被膜は均
一であつた。
Example 1 Coating components Water-soluble polyvinyl butyral (main agent) Melamine (crosslinking agent) Rapizol (surfactant) 100wt% 2 〃 0.2 〃 Ethyl alcohol water 50Vol% 50 〃 A:B=1:3 Mix well with the solvent Stir. The above mixture was applied to well-washed glass using a dipping method or a spinner method, and was cured by drying at 135° C. for 2 hours. The film thickness at this time is 2000Å
It was hot. Next, the upper substrate was immersed in a 1% SnCl 2 solution for 1 minute, washed with water, dried at 70°C, and then
Irradiate with V. (The irradiation time varies depending on the capacity of the ultraviolet exposure equipment.) After washing the substrate with water for about one minute using a PdCl 2 solution (in the experiment, a 5-fold dilution of Red Schumer 608 manufactured by Nippon Kanigen Co., Ltd.), the Ni-P
Ni film thickness was immersed in a metal bath (Shiuma S680 manufactured by Nippon Kanigen Co., Ltd. diluted 8 times with pure water) at 45°C for 4 minutes.
Obtained 2500Å. Adhesion was also good, and the plating film was uniform.

実施例 2 コート成分 2−ヒドロキシエチルメタアクリレート(主
剤) 20c.c. ベンゾインエチルエーテル(重合剤) 0.1g トリオキシエチレンノニルフエノールエーテル
(界面活性剤) 1g エチレングリコールモノエチルエーテル(溶
剤) 80c.c. 上の成分をよく撹拌混合し、十分洗浄されたガ
ラスに混合液をデイツピング法により塗布し190
℃±5で45hr重合することにより硬化させた。こ
の時のコート厚は1.4μmであつた。以下紫外線露
光による選択的無電解メツキ膜の形成方法は実施
例1に上げた通りである。
Example 2 Coating component 2-Hydroxyethyl methacrylate (base ingredient) 20 c.c. Benzoin ethyl ether (polymerization agent) 0.1 g Trioxyethylene nonyl phenol ether (surfactant) 1 g Ethylene glycol monoethyl ether (solvent) 80 c.c. Stir and mix the above ingredients thoroughly and apply the mixture onto thoroughly cleaned glass using the dipping method.
It was cured by polymerization for 45 hours at ±5°C. The coating thickness at this time was 1.4 μm. The method for forming a selective electroless plating film by exposure to ultraviolet light is as described in Example 1 below.

実施例 3 実施例1のコート成分を用いてアクリル板上に
被膜をつくつた。作成方法は、混合撹拌後、スピ
ンナー法により塗布し、80℃で5hr乾燥すること
によつて硬化させた。膜厚は1800Å〜2200Åの間
にしぼられた。以下紫外線露光による選択的無電
解メツキ膜の形成方法は実施例1に上げた通りで
ある。以上述べたように本発明によれば、透明基
板上に前述の如く構成された有機高分子被膜を形
成するので、この有機高分子被膜とその上に形成
される塩化第一錫との密着性が向上されることか
ら、この塩化第一錫に形成されるパターンの輪郭
形状がフオトマスクのパターンの輪郭形状になら
つて正確に形成されることとなり、このパターニ
ングされた塩化第一錫上に無電解ニツケルメツキ
工程により形成されるニツケル層のパターンの輪
郭形状も極わめて高精度に形成されると共に微細
パターンが可能になるという効果を有する。ま
た、例えばガラス上に金属クロム被膜を形成する
従来技術と比較すれば、一度に大量に又大表面積
のものを作れないこと、および真空設備を必要と
する等の制約条件がないことから低コストに製造
できるという効果も有する。
Example 3 Using the coating components of Example 1, a film was formed on an acrylic board. The preparation method was to mix and stir, apply by spinner method, and harden by drying at 80° C. for 5 hours. The film thickness was narrowed down to between 1800 Å and 2200 Å. The method for forming a selective electroless plating film by exposure to ultraviolet light is as described in Example 1 below. As described above, according to the present invention, since an organic polymer film having the above-described structure is formed on a transparent substrate, the adhesion between this organic polymer film and the stannous chloride formed thereon is improved. As a result, the contour shape of the pattern formed on this stannous chloride will be formed accurately following the contour shape of the pattern on the photomask, and the electroless The outline shape of the pattern of the nickel layer formed by the nickel plating process is also formed with extremely high precision, and has the effect that fine patterns can be formed. In addition, compared to the conventional technology of forming a metallic chromium film on glass, for example, the cost is low because it cannot be made in large quantities or with a large surface area at once, and there are no constraints such as the need for vacuum equipment. It also has the advantage that it can be manufactured in a number of ways.

Claims (1)

【特許請求の範囲】[Claims] 1 透明基板上に主剤として水溶性ポリビニルプ
チラール、架橋剤としてメラミン、界面活性剤と
してラビゾール、溶媒にエチルアルコールと水を
成分とした有機高分子被膜又は主剤に2−ヒドロ
キシエチルメタアクリレート、重合剤としてベン
ゾインエチルエーテル、界面活性剤としてトリオ
キシエチレンノニルフエノールエーテル、溶剤と
してエチレングリコールモノエチルエーテルを成
分とした有機高分子被膜を形成する工程と、前記
有機高分子被膜上に塩化第一錫を形成する工程
と、前記塩化第一錫上にスリツトパターンの形成
されたフオトマスクを密着させ紫外線を照射する
工程と、塩化パラジウム溶液に浸漬され前記塩化
第一錫がパターニングされる工程と、パターニン
グされた前記塩化第一錫上に施こされる無電解ニ
ツケルメツキ工程とを有することを特徴とするエ
ンコーダスリツト板の製造方法。
1 On a transparent substrate, an organic polymer film containing water-soluble polyvinyl petyral as a main ingredient, melamine as a crosslinking agent, Ravisol as a surfactant, ethyl alcohol and water as a solvent, or 2-hydroxyethyl methacrylate as a main ingredient, and a polymerization agent. a step of forming an organic polymer film containing benzoin ethyl ether as a surfactant, trioxyethylene nonyl phenol ether as a surfactant, and ethylene glycol monoethyl ether as a solvent; and forming stannous chloride on the organic polymer film. a step of closely contacting a photomask with a slit pattern formed on the stannous chloride and irradiating it with ultraviolet rays; a step of patterning the stannous chloride by being immersed in a palladium chloride solution; A method for manufacturing an encoder slit plate, comprising the step of electroless nickel plating performed on the stannous chloride.
JP18348181A 1981-11-16 1981-11-16 Manufacturing method of encoder slit plate Granted JPS5885111A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18348181A JPS5885111A (en) 1981-11-16 1981-11-16 Manufacturing method of encoder slit plate

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18348181A JPS5885111A (en) 1981-11-16 1981-11-16 Manufacturing method of encoder slit plate

Publications (2)

Publication Number Publication Date
JPS5885111A JPS5885111A (en) 1983-05-21
JPH0143025B2 true JPH0143025B2 (en) 1989-09-18

Family

ID=16136559

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18348181A Granted JPS5885111A (en) 1981-11-16 1981-11-16 Manufacturing method of encoder slit plate

Country Status (1)

Country Link
JP (1) JPS5885111A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2014192287A1 (en) * 2013-05-28 2014-12-04 出光興産株式会社 Composition for forming electroless plating underlayer film

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS621875A (en) * 1985-06-27 1987-01-07 Tokai Rika Co Ltd Electroless-plated complex compound and its production

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2014192287A1 (en) * 2013-05-28 2014-12-04 出光興産株式会社 Composition for forming electroless plating underlayer film

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