JPH0157413B2 - - Google Patents
Info
- Publication number
- JPH0157413B2 JPH0157413B2 JP58015655A JP1565583A JPH0157413B2 JP H0157413 B2 JPH0157413 B2 JP H0157413B2 JP 58015655 A JP58015655 A JP 58015655A JP 1565583 A JP1565583 A JP 1565583A JP H0157413 B2 JPH0157413 B2 JP H0157413B2
- Authority
- JP
- Japan
- Prior art keywords
- magnetic
- layer
- coercive force
- servo
- film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/62—Record carriers characterised by the selection of the material
- G11B5/64—Record carriers characterised by the selection of the material comprising only the magnetic material without bonding agent
- G11B5/66—Record carriers characterised by the selection of the material comprising only the magnetic material without bonding agent the record carriers consisting of several layers
- G11B5/672—Record carriers characterised by the selection of the material comprising only the magnetic material without bonding agent the record carriers consisting of several layers having different compositions in a plurality of magnetic layers, e.g. layer compositions having differing elemental components or differing proportions of elements
Landscapes
- Magnetic Record Carriers (AREA)
Description
【発明の詳細な説明】
本発明は磁気記憶装置に用いられる磁気デイス
ク等の磁気記憶体にかかる。DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a magnetic storage medium such as a magnetic disk used in a magnetic storage device.
現在主に用いられている長手記録方式において
は、最近高密度記憶媒体として、記憶媒体がめつ
き法又はスパツタ法により製作された連続磁性薄
膜型のめつき磁気デイスク、フエライトスパツタ
磁気デイスクが用いられ始めた。これらの連続磁
性薄膜を記憶媒体とする磁気デイスクを用いた高
性能磁気デイスク装置が1981年に開発され、線密
度14000BPI、トラツク密度1100TPIの高記録密
度が達成されている。 In the longitudinal recording system mainly used at present, continuous magnetic thin film type plated magnetic disks and ferrite sputtered magnetic disks are recently used as high-density storage media. I started. A high-performance magnetic disk device using a magnetic disk using these continuous magnetic thin films as a storage medium was developed in 1981, achieving high recording densities of 14,000 BPI in linear density and 1,100 TPI in track density.
今後、更に高密度化が進む状況にあり、線密度
及びトラツク密度の向上の為の研究開発が活発に
行なわれている。トラツク密度に関しては、従来
からサーボデイスクを用いたサーボ面サーボ方式
が採用されているが、この方式ではサーボデイス
クとデータデイスク間の物理的距離及び構造等に
基因する温度差による熱膨張の違いが生じてトラ
ツク密度の増大の大きな障害になつている。この
欠点を除去する方法として、二層の記憶媒体を有
する磁気デイスクを用いることが報告されてい
る。即ち主に使用されているγ−Fe2O3塗布型デ
イスクにおいて、下層媒体層にサーボ情報を記録
し、上層媒体層にデータ情報を記録することによ
り、温度差によるトラツク位置ずれを避ける方法
である。しかしながらγ−Fe2O3塗布型デイスク
においては、媒体層を薄くすることが困難な為に
記録密度を大巾に増加することは難しく且つ高密
度時の媒体S/Nが小さいという欠点を有してい
る。 In the future, the density will continue to increase, and research and development to improve the linear density and track density are actively being carried out. Regarding track density, a servo surface servo method using a servo disk has been used for a long time, but with this method, differences in thermal expansion due to temperature differences caused by the physical distance and structure between the servo disk and data disk are considered. This has become a major obstacle to increasing track density. As a method to eliminate this drawback, it has been reported that a magnetic disk having a two-layer storage medium is used. In other words, in the mainly used γ-Fe 2 O 3 coated disk, servo information is recorded in the lower medium layer and data information is recorded in the upper medium layer, thereby avoiding track position deviation due to temperature differences. be. However, in γ-Fe 2 O 3 coated disks, it is difficult to make the medium layer thinner, so it is difficult to greatly increase the recording density, and the medium S/N ratio at high density is small. are doing.
一方垂直記録においては、現在コバルト・クロ
ム合金スパツタ媒体を中心にして研究開発が行な
われているが、リジツドデイスクにおいては線密
度が70000FRPI(Flux Reversal Per Inch)の可
能性があることが報告されており、又フロツピデ
イスクではD50で80000FRPI程度の線密度の可能
性があることが報告されている。 On the other hand, in perpendicular recording, research and development is currently being carried out mainly on cobalt-chromium alloy sputter media, but it has been reported that the linear density of rigid disks may be as high as 70,000 FRPI (Flux Reversal Per Inch). It has also been reported that a floppy disk may have a linear density of about 80,000 FRPI at D50 .
しかしながらこれらの報告で示されたトラツク
密度は非常に小さく、長手記録の現状のトラツク
密度(1100TPI)より大幅に小さい。又メツキ法
によるコバルト・ニツケル・リン合金を下層のサ
ーボ用磁性膜として使用する場合、保磁力を
1100Oc以上にすることが出来ないという欠点が
ある。 However, the track densities shown in these reports are very small, much smaller than the current track density of longitudinal records (1100 TPI). Also, when using a cobalt-nickel-phosphorus alloy produced by the Metsuki method as the lower layer magnetic film for servo, the coercive force must be increased.
The drawback is that it cannot be increased above 1100Oc.
本発明の目的は高線密度及び高トラツク密度が
可能でかつ高密度時の媒体S/Nが良好なデータ
サーボ方式を実現させるために、下層のサーボ情
報媒体に長手記録用高保磁力酸化鉄磁性薄膜媒体
を有し、上層のデータ情報媒体にコバルト・クロ
ム垂直記録用磁性媒体を有する磁気2重層垂直磁
気記憶体を提供することにある。 The purpose of the present invention is to realize a data servo system that is capable of high linear density and high track density and has a good medium S/N ratio at high density. An object of the present invention is to provide a magnetic double-layer perpendicular magnetic storage body having a thin film medium and having a cobalt chromium perpendicular recording magnetic medium as an upper layer data information medium.
本発明による磁気2重層磁気記憶体は、非磁性
基板と、この非磁性基板を被覆するサーボ信号用
高保磁力酸化鉄層と、この高保磁力酸化鉄層を被
覆する非磁性層と、この非磁性層(例えばSiO2
スパツタ膜)を被覆するデータ信号用垂直磁気異
方性磁性層(例えばCo−Crスパツタ膜)と、こ
の垂直磁気異方性磁性膜を被覆する保護膜とから
なる多層構造を有している。 The magnetic double-layer magnetic memory according to the present invention includes a non-magnetic substrate, a high coercive force iron oxide layer for servo signals covering the non-magnetic substrate, a non-magnetic layer covering the high coercive force iron oxide layer, and a non-magnetic layer (e.g. SiO 2
It has a multilayer structure consisting of a data signal perpendicular anisotropic magnetic layer (for example, a Co--Cr sputtered film) covering a perpendicular magnetic anisotropic magnetic film (a sputtered film), and a protective film covering this perpendicular anisotropic magnetic film.
本磁気記憶体において、サーボ用磁性媒体とな
る下層の高保磁力酸化物磁性層は長手記録でサー
ボ情報が記録され、データ用磁性媒体となる上層
の垂直磁気異方性磁性層は垂直記録でデータ情報
が記録される。垂直磁気異方性磁性媒体として、
コバルト・クロムスパツタ膜を使用した場合、コ
バルト・クロム膜は耐食性を有するために、保護
膜層を薄膜化出来るので、スペーシングを小さく
出来、垂直磁気記録媒体として高線密度を達成出
来、下層のサーボ用高保磁力酸化鉄磁性層により
データ面サーボが可能なために高トラツク密度が
可能となる。 In this magnetic storage body, servo information is recorded in the lower high coercive force oxide magnetic layer, which serves as the magnetic medium for servo, by longitudinal recording, and data is recorded in the upper perpendicular magnetic anisotropic magnetic layer, which serves as the magnetic medium for data, by perpendicular recording. Information is recorded. As a perpendicular magnetic anisotropic magnetic medium,
When a cobalt-chromium spatter film is used, since the cobalt-chromium film has corrosion resistance, the protective film layer can be made thinner, so the spacing can be reduced, and a high linear density can be achieved as a perpendicular magnetic recording medium. The high coercive force iron oxide magnetic layer enables data plane servo, thereby enabling high track densities.
以下本発明による磁気2重層垂直磁気記憶体の
特徴を実施例により説明する。 The features of the magnetic double layer perpendicular magnetic storage body according to the present invention will be explained below using examples.
実施例 1 本発明の一実施例を第1図に示す。Example 1 An embodiment of the present invention is shown in FIG.
第1図においてアルミニウム素板にメツキさ
れ、研磨された非磁性ニツケル合金の非磁性基板
1の上に膜厚0.2〜0.5μmのγ−Fe2O3を主成分と
する高保磁力(例えば1000Oe以上)酸化鉄層2
を被覆し、この高保磁力酸化鉄層2の上に膜厚
0.2〜0.6μmの非磁性層(例えばSiO2スパツタ層)
3を被覆し、この非磁性層3の上にスパツタ法に
より膜厚0.5μmのコバルト・クロム合金を主成分
とする垂直磁気異方性磁性層4を被覆し、このコ
バルト・クロムを主成分とする垂直磁気異方性磁
性層4上に膜厚0.02μmの保護膜層(例えばSiO2
スパツタ層)5を形成する。 In Fig. 1, a film with a film thickness of 0.2 to 0.5 μm and having a high coercive force (e.g. 1000 Oe or more ) is coated on a non-magnetic substrate 1 made of a non - magnetic nickel alloy plated and polished on an aluminum plate. ) Iron oxide layer 2
on this high coercive force iron oxide layer 2.
0.2-0.6μm non-magnetic layer (e.g. SiO2 sputtered layer)
3, and on this nonmagnetic layer 3, a perpendicularly magnetic anisotropic magnetic layer 4 having a film thickness of 0.5 μm mainly composed of a cobalt-chromium alloy is coated by a sputtering method. A protective film layer (for example, SiO 2
A sputter layer) 5 is formed.
この様にして得られる磁気2重層垂直磁気記憶
体をギヤツプ長の大きいサーボ記録用ヘツドによ
りスペーシングの小さい条件で、サーボ情報を高
保磁力酸化鉄層2と垂直異方性磁性層4に記録
し、その後ギヤツプ長の小さいデータ記録再生用
ヘツドによりスペーシングの大きい条件で、垂直
磁気異方性磁性層2に記録されたサーボ情報だけ
を消去する。高保磁力酸化鉄2には保磁力が高い
ために、前記データ記録再生用ヘツドによるデー
タの記録・再生に際し何ら変更を受けず、先に記
録されたサーボ情報のみが残り、そのサーボ情報
をギヤツプ長の小さい前記データ記録再生用ヘツ
ドで再生し、サーボ信号として使用する。 Servo information is recorded on the high coercive force iron oxide layer 2 and the perpendicular anisotropic magnetic layer 4 using the thus obtained magnetic double layer perpendicular magnetic storage body under conditions of small spacing using a servo recording head with a large gap length. Thereafter, only the servo information recorded on the perpendicular magnetic anisotropic magnetic layer 2 is erased under conditions of large spacing using a data recording/reproducing head with a small gap length. Since the high coercive force iron oxide 2 has a high coercive force, it is not changed in any way when data is recorded or reproduced by the data recording/reproducing head, and only the previously recorded servo information remains, and the servo information is transferred to the gap length. The data is reproduced by the data recording/reproducing head having a small value and used as a servo signal.
上層のコバルト・クロム合金を主成分とする垂
直磁気異方性磁性層4はギヤツプ長の小さいデー
タヘツドにより高線密度(70000FRPI)の達成を
可能にし、下層のγ−Fe2O3を主成分とする高保
磁力酸化鉄層2を高トラツク密度(1500〜
3000TPI)の達成を可能にする。 The perpendicular magnetic anisotropic magnetic layer 4 mainly composed of cobalt-chromium alloy in the upper layer makes it possible to achieve high linear density (70000 FRPI) due to the data head with a small gap length, and the perpendicular magnetic anisotropic magnetic layer 4 mainly composed of cobalt-chromium alloy in the lower layer makes it possible to achieve high linear density ( 70000 FRPI). The high coercive force iron oxide layer 2 has a high track density (1500~
3000TPI).
実施例 2
第2図は実施例1と同様な2重層磁性膜の構成
であるが、基板が異なる。Example 2 FIG. 2 shows the structure of a double-layer magnetic film similar to Example 1, but the substrate is different.
即ち、フレキシブルデイスクに適用した場合
で、ポリイミド膜6を非磁性基体として、その上
に実施例1と同様な磁気2重層磁性膜を構成し
た。 That is, when applied to a flexible disk, the polyimide film 6 was used as a nonmagnetic substrate, and a magnetic double layer magnetic film similar to that in Example 1 was formed thereon.
この様にして作製したフレキシブルデイスクは
線密度80000FRPIを達成し、十分高密度化が可能
であつた。又下層の高保磁力酸化鉄膜のサーボ情
報により高トラツク密度化が可能となつた。又フ
レキシブルデイスクの基板としてポリイミド以外
の樹脂を用いても何らかまわない。 The flexible disk produced in this manner achieved a linear density of 80,000 FRPI, making it possible to achieve a sufficiently high density. Also, the servo information of the underlying high coercive force iron oxide film makes it possible to achieve high track density. Furthermore, there is no problem in using resins other than polyimide as the substrate of the flexible disk.
第1図は実施例1で用いた磁気2重層垂直磁気
記憶体の断面図である。
1…非磁性基板、2…高保磁力酸化鉄層、3…
非磁性層、4…垂直磁気異方性磁性層(例えばコ
バルト・クロム)、5…保護膜層。
第2図は、実施例2で用いた磁気2重層垂直磁
気記憶体の断面図である。
6…ポリイミド膜。
FIG. 1 is a sectional view of the magnetic double layer perpendicular magnetic memory used in Example 1. 1... Nonmagnetic substrate, 2... High coercive force iron oxide layer, 3...
Non-magnetic layer, 4... Perpendicular magnetic anisotropic magnetic layer (for example, cobalt chromium), 5... Protective film layer. FIG. 2 is a cross-sectional view of the magnetic double layer perpendicular magnetic memory used in Example 2. 6...Polyimide film.
Claims (1)
ーボ信号用高保磁力酸化鉄と、この高保磁力酸化
鉄層を被覆する非磁性層と、この非磁性層を被覆
するデータ信号用コバルト・クロム垂直磁気異方
性層と、この垂直磁気異方性層を被覆する保護膜
層とからなることを特徴とする磁気2重層垂直磁
気記憶体。1 A non-magnetic substrate, a high coercive force iron oxide for servo signals that covers this non-magnetic substrate, a non-magnetic layer that covers this high coercive force iron oxide layer, and a cobalt chromium vertical layer for data signals that covers this non-magnetic layer. A magnetic double-layer perpendicular magnetic memory comprising a magnetic anisotropic layer and a protective film layer covering the perpendicular magnetic anisotropic layer.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP58015655A JPS59142737A (en) | 1983-02-02 | 1983-02-02 | Vertical magnetic storage body with two magnetic layers |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP58015655A JPS59142737A (en) | 1983-02-02 | 1983-02-02 | Vertical magnetic storage body with two magnetic layers |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS59142737A JPS59142737A (en) | 1984-08-16 |
| JPH0157413B2 true JPH0157413B2 (en) | 1989-12-05 |
Family
ID=11894733
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP58015655A Granted JPS59142737A (en) | 1983-02-02 | 1983-02-02 | Vertical magnetic storage body with two magnetic layers |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS59142737A (en) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61172218A (en) * | 1985-01-25 | 1986-08-02 | Nec Corp | Magnetic storage body |
| JPS61284831A (en) * | 1985-06-10 | 1986-12-15 | Nec Corp | Magnetic double-layered vertical magnetic storage medium |
| JP2016029357A (en) | 2014-07-24 | 2016-03-03 | 株式会社デンソー | Temperature sensor |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5410703A (en) * | 1977-06-27 | 1979-01-26 | Hokushin Electric Works | Magnetic recording medium |
| JPS5434205A (en) * | 1977-08-22 | 1979-03-13 | Canon Inc | Magnetic recording medium |
| JPS5891B2 (en) * | 1977-09-30 | 1983-01-05 | 俊一 岩崎 | magnetic recording medium |
| JPS54145105A (en) * | 1978-05-02 | 1979-11-13 | Matsushita Electric Ind Co Ltd | Magnetic recording medium |
-
1983
- 1983-02-02 JP JP58015655A patent/JPS59142737A/en active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS59142737A (en) | 1984-08-16 |
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