JPH0158968U - - Google Patents

Info

Publication number
JPH0158968U
JPH0158968U JP15432287U JP15432287U JPH0158968U JP H0158968 U JPH0158968 U JP H0158968U JP 15432287 U JP15432287 U JP 15432287U JP 15432287 U JP15432287 U JP 15432287U JP H0158968 U JPH0158968 U JP H0158968U
Authority
JP
Japan
Prior art keywords
laser
medium
gas
excimer
oscillator
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP15432287U
Other languages
English (en)
Other versions
JPH0731554Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1987154322U priority Critical patent/JPH0731554Y2/ja
Publication of JPH0158968U publication Critical patent/JPH0158968U/ja
Application granted granted Critical
Publication of JPH0731554Y2 publication Critical patent/JPH0731554Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Lasers (AREA)

Description

【図面の簡単な説明】
第１図は本考案の一実施例の構成を示す構成図
である。 主要部分の符号の説明、１……ガス混合容器、
２……レーザガス容器、３……ハロゲンガス用バ
ルブ、４……希ガス用バルブ、５……バツフアガ
ス用バルブ、６……圧力計、１０……排気バルブ
。

Claims (1)

    【実用新案登録請求の範囲】
  1. レーザガス容器に封入されたレーザ媒質を放電
    励起することによりレーザ発振を行うエキシマレ
    ーザ発振器であつて、前記レーザ媒質を混合して
    生成するガス混合手段を設け、前記ガス混合手段
    により生成された前記レーザ媒質を前記レーザガ
    ス容器に注入するようにしたことを特徴とするエ
    キシマレーザ発振器。
JP1987154322U 1987-10-08 1987-10-08 エキシマレーザ発振器 Expired - Lifetime JPH0731554Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987154322U JPH0731554Y2 (ja) 1987-10-08 1987-10-08 エキシマレーザ発振器

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987154322U JPH0731554Y2 (ja) 1987-10-08 1987-10-08 エキシマレーザ発振器

Publications (2)

Publication Number Publication Date
JPH0158968U true JPH0158968U (ja) 1989-04-13
JPH0731554Y2 JPH0731554Y2 (ja) 1995-07-19

Family

ID=31430949

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987154322U Expired - Lifetime JPH0731554Y2 (ja) 1987-10-08 1987-10-08 エキシマレーザ発振器

Country Status (1)

Country Link
JP (1) JPH0731554Y2 (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002198603A (ja) * 2001-12-11 2002-07-12 Cymer Inc エキシマレーザ用のガス補充の方法と装置

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6048267U (ja) * 1983-09-09 1985-04-04 日本電気株式会社 炭酸ガスレ−ザ用ガス混合装置

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6048267U (ja) * 1983-09-09 1985-04-04 日本電気株式会社 炭酸ガスレ−ザ用ガス混合装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002198603A (ja) * 2001-12-11 2002-07-12 Cymer Inc エキシマレーザ用のガス補充の方法と装置

Also Published As

Publication number Publication date
JPH0731554Y2 (ja) 1995-07-19

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