JPH0162363U - - Google Patents
Info
- Publication number
- JPH0162363U JPH0162363U JP15823687U JP15823687U JPH0162363U JP H0162363 U JPH0162363 U JP H0162363U JP 15823687 U JP15823687 U JP 15823687U JP 15823687 U JP15823687 U JP 15823687U JP H0162363 U JPH0162363 U JP H0162363U
- Authority
- JP
- Japan
- Prior art keywords
- boat
- wall
- roughness
- processed
- utility
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 150000001875 compounds Chemical class 0.000 claims 1
- 239000013078 crystal Substances 0.000 claims 1
- 239000004065 semiconductor Substances 0.000 claims 1
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
Description
第１図ａは本考案の一実施例によるボートの平
面図、同図ｂはその断面図である、第２図ａは従
来のボートの平面図、同図ｂはその断面図である
。
１，１１……ボート、２，１２……内壁。
1A is a plan view of a boat according to an embodiment of the present invention, FIG. 1B is a sectional view thereof, FIG. 2A is a plan view of a conventional boat, and FIG. 2B is a sectional view thereof. 1,11...Boat, 2,12...Inner wall.
Claims (1)
を特徴とする化合物半導体単結晶成長用ボート。 A boat for compound semiconductor single crystal growth, characterized in that the inner wall is processed to have a roughness of 20μ to 300μ.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15823687U JPH0162363U (en) | 1987-10-15 | 1987-10-15 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15823687U JPH0162363U (en) | 1987-10-15 | 1987-10-15 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0162363U true JPH0162363U (en) | 1989-04-20 |
Family
ID=31438378
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15823687U Pending JPH0162363U (en) | 1987-10-15 | 1987-10-15 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0162363U (en) |
-
1987
- 1987-10-15 JP JP15823687U patent/JPH0162363U/ja active Pending