JPH0166744U - - Google Patents
Info
- Publication number
- JPH0166744U JPH0166744U JP1987161829U JP16182987U JPH0166744U JP H0166744 U JPH0166744 U JP H0166744U JP 1987161829 U JP1987161829 U JP 1987161829U JP 16182987 U JP16182987 U JP 16182987U JP H0166744 U JPH0166744 U JP H0166744U
- Authority
- JP
- Japan
- Prior art keywords
- anode
- negative side
- electrode
- ion extraction
- power source
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000000605 extraction Methods 0.000 claims description 7
- 238000010586 diagram Methods 0.000 description 3
Landscapes
- Electron Sources, Ion Sources (AREA)
Description
第１図は本考案の一実施例を示す斜視図、第２
図は他の実施例を示す図、第３図は従来例を示す
図、第４図は電離真空計の原理を示す説明図であ
る。
３……プラズマ室、５……ウエネルト電極（イ
オンコレクタ電極）、６……イオン引出し電極、
１１……フイラメント、１３……フイラメント電
源、１４……アノード電源、１５……イオン引出
し電源（イオンコレクタ電源）、２０……電流計
。
Fig. 1 is a perspective view showing one embodiment of the present invention;
FIG. 3 is a diagram showing another embodiment, FIG. 3 is a diagram showing a conventional example, and FIG. 4 is an explanatory diagram showing the principle of an ionization vacuum gauge. 3...Plasma chamber, 5...Wehnelt electrode (ion collector electrode), 6...Ion extraction electrode,
11... filament, 13... filament power supply, 14... anode power supply, 15... ion extraction power supply (ion collector power supply), 20... ammeter.
Claims (1)
このプラズマ室の近傍に配置されたウエネルト電
極およびイオン引出し電極からなり、前記フイラ
メントに接続されるフイラメント電源、前記アノ
ードに正側が前記ウエネルト電極に負側が接続さ
れたアノード電源、前記イオン引出し電極に負側
が前記アノード電源の負側に正側が接続されたイ
オン引出し電源を有するイオン発生装置において
、前記プラズマ室内の圧力を測定する際は、前記
アノード電極の負側をグランドに、前記イオン引
出し電源の負側を前記ウエネルト電極側に、正側
を電流計を介してグランド側に接続するようにし
たことを特徴とするイオン発生装置。 a plasma chamber consisting of an anode and a filament;
It consists of a Wehnelt electrode and an ion extraction electrode placed near the plasma chamber, a filament power supply connected to the filament, an anode power supply with a positive side connected to the anode and a negative side connected to the Wehnelt electrode, and a negative side connected to the ion extraction electrode. In an ion generator having an ion extraction power source whose positive side is connected to the negative side of the anode power source, when measuring the pressure in the plasma chamber, the negative side of the anode electrode is grounded and the negative side of the ion extraction power source is connected to the negative side of the ion extraction power source. An ion generating device characterized in that one side is connected to the Wehnelt electrode side and the positive side is connected to a ground side via an ammeter.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987161829U JPH0166744U (en) | 1987-10-22 | 1987-10-22 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987161829U JPH0166744U (en) | 1987-10-22 | 1987-10-22 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0166744U true JPH0166744U (en) | 1989-04-28 |
Family
ID=31445111
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987161829U Pending JPH0166744U (en) | 1987-10-22 | 1987-10-22 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0166744U (en) |
-
1987
- 1987-10-22 JP JP1987161829U patent/JPH0166744U/ja active Pending