JPH0171058U - - Google Patents

Info

Publication number
JPH0171058U
JPH0171058U JP16487587U JP16487587U JPH0171058U JP H0171058 U JPH0171058 U JP H0171058U JP 16487587 U JP16487587 U JP 16487587U JP 16487587 U JP16487587 U JP 16487587U JP H0171058 U JPH0171058 U JP H0171058U
Authority
JP
Japan
Prior art keywords
main body
center
outer periphery
disk
storage hole
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP16487587U
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP16487587U priority Critical patent/JPH0171058U/ja
Publication of JPH0171058U publication Critical patent/JPH0171058U/ja
Pending legal-status Critical Current

Links

Description

【図面の簡単な説明】
第１図は本考案のキヤリアの一実施例を示す平
面図であり、第２図は従来のキヤリアを示す平面
図であり、第３図は従来のキヤリアを使用した研
摩方法を示す部分平面図である。 １０……キヤリア、１１……円板状本体、１２
……歯、１３……収納孔、Ｏ３……収納孔の中心
、Ｏ４……円板状本体の外周の中心。

Claims (1)

    【実用新案登録請求の範囲】
  1. 円板状本体の外周に歯を有し、前記本体の内部
    に円板状の被研摩物を収納する、断面円状の収納
    孔を一のみ設け、かつ前記収納孔の中心が、前記
    外周の中心と異なつた位置にあることを特徴とす
    るキヤリア。
JP16487587U 1987-10-28 1987-10-28 Pending JPH0171058U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16487587U JPH0171058U (ja) 1987-10-28 1987-10-28

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16487587U JPH0171058U (ja) 1987-10-28 1987-10-28

Publications (1)

Publication Number Publication Date
JPH0171058U true JPH0171058U (ja) 1989-05-11

Family

ID=31450854

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16487587U Pending JPH0171058U (ja) 1987-10-28 1987-10-28

Country Status (1)

Country Link
JP (1) JPH0171058U (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001252864A (ja) * 2000-03-08 2001-09-18 Speedfam Co Ltd 研磨方法及び研磨装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001252864A (ja) * 2000-03-08 2001-09-18 Speedfam Co Ltd 研磨方法及び研磨装置

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