JPH0177937U - - Google Patents

Info

Publication number
JPH0177937U
JPH0177937U JP1987172681U JP17268187U JPH0177937U JP H0177937 U JPH0177937 U JP H0177937U JP 1987172681 U JP1987172681 U JP 1987172681U JP 17268187 U JP17268187 U JP 17268187U JP H0177937 U JPH0177937 U JP H0177937U
Authority
JP
Japan
Prior art keywords
stamper
rotary table
main body
decompression chamber
placement surface
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1987172681U
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1987172681U priority Critical patent/JPH0177937U/ja
Publication of JPH0177937U publication Critical patent/JPH0177937U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Manufacturing Optical Record Carriers (AREA)
  • Holding Or Fastening Of Disk On Rotational Shaft (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Testing Of Optical Devices Or Fibers (AREA)
  • Coating Apparatus (AREA)

Description

【図面の簡単な説明】
図は、この考案に係るスタンパ保持装置の実施
例を示す要部断面図である。 主要部分の符号の説明、１：スタンパ、２：回
転テーブル本体、２１：底板、２２：減圧室、２
３：穴、３：スピンドル、３２：通気穴、４：バ
ルブ、５：多孔質シート。

Claims (1)

  1. 【実用新案登録請求の範囲】 スタンパを載置する回転テーブル本体内に減圧
    室を設けるとともに、この減圧室とスタンパの載
    置面との間に複数個の穴を設けて、スタンパを載
    置面へ吸着させるように構成したスタンパ保持装
    置において、 回転テーブル本体のスタンパ載置面に多孔質シ
    ートを設けて、スタンパを平面度よく吸着させる
    ように構成したことを特徴とするスタンパ保持装
    置。
JP1987172681U 1987-11-13 1987-11-13 Pending JPH0177937U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987172681U JPH0177937U (ja) 1987-11-13 1987-11-13

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987172681U JPH0177937U (ja) 1987-11-13 1987-11-13

Publications (1)

Publication Number Publication Date
JPH0177937U true JPH0177937U (ja) 1989-05-25

Family

ID=31464638

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987172681U Pending JPH0177937U (ja) 1987-11-13 1987-11-13

Country Status (1)

Country Link
JP (1) JPH0177937U (ja)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4995626A (ja) * 1972-10-06 1974-09-11

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4995626A (ja) * 1972-10-06 1974-09-11

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