JPH0178321U - - Google Patents

Info

Publication number
JPH0178321U
JPH0178321U JP1987172682U JP17268287U JPH0178321U JP H0178321 U JPH0178321 U JP H0178321U JP 1987172682 U JP1987172682 U JP 1987172682U JP 17268287 U JP17268287 U JP 17268287U JP H0178321 U JPH0178321 U JP H0178321U
Authority
JP
Japan
Prior art keywords
decompression chamber
stamper
spindle
holding device
elastic material
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1987172682U
Other languages
English (en)
Other versions
JPH065615Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1987172682U priority Critical patent/JPH065615Y2/ja
Publication of JPH0178321U publication Critical patent/JPH0178321U/ja
Application granted granted Critical
Publication of JPH065615Y2 publication Critical patent/JPH065615Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Coating Apparatus (AREA)
  • Manufacturing Optical Record Carriers (AREA)

Description

【図面の簡単な説明】
図は、この考案に係るスタンパ保持装置の実施
例を示す要部断面図である。 主要部分の符号の説明、１：スタンパ、２：回
転テーブル本体、２１：底板、２２：減圧室、２
３：穴、３：スピンドル、３２：通気穴、４：バ
ルブ、５：多孔質シート。

Claims (1)

  1. 【実用新案登録請求の範囲】 スタンパを載置する回転テーブル本体内に減圧
    室を設けるとともに、この減圧室とスタンパの載
    置面との間にスタンパを載置面へ吸着させるため
    の複数個の穴を設け、また、減圧室と回転テーブ
    ルのスピンドルの上部との間に通気穴を設けてス
    ピンドルの上部から減圧室内の空気を抜き、ある
    いは送り込むように構成したスタンパ保持装置で
    あつて、 前記回転テーブル本体内に設けた減圧室を、弾
    性材からなる底板で閉塞して形成し、弾性材の持
    つバネ効果により、減圧室内部圧を保持するよう
    に構成したことを特徴とするスタンパ保持装置。
JP1987172682U 1987-11-13 1987-11-13 スタンパ保持装置 Expired - Lifetime JPH065615Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987172682U JPH065615Y2 (ja) 1987-11-13 1987-11-13 スタンパ保持装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987172682U JPH065615Y2 (ja) 1987-11-13 1987-11-13 スタンパ保持装置

Publications (2)

Publication Number Publication Date
JPH0178321U true JPH0178321U (ja) 1989-05-26
JPH065615Y2 JPH065615Y2 (ja) 1994-02-09

Family

ID=31464639

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987172682U Expired - Lifetime JPH065615Y2 (ja) 1987-11-13 1987-11-13 スタンパ保持装置

Country Status (1)

Country Link
JP (1) JPH065615Y2 (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0439823U (ja) * 1990-07-28 1992-04-03

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62142617A (ja) * 1985-12-18 1987-06-26 Nikka Eng Kk デイスク製造装置

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62142617A (ja) * 1985-12-18 1987-06-26 Nikka Eng Kk デイスク製造装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0439823U (ja) * 1990-07-28 1992-04-03

Also Published As

Publication number Publication date
JPH065615Y2 (ja) 1994-02-09

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