JPH0177976U - - Google Patents
Info
- Publication number
- JPH0177976U JPH0177976U JP1987173518U JP17351887U JPH0177976U JP H0177976 U JPH0177976 U JP H0177976U JP 1987173518 U JP1987173518 U JP 1987173518U JP 17351887 U JP17351887 U JP 17351887U JP H0177976 U JPH0177976 U JP H0177976U
- Authority
- JP
- Japan
- Prior art keywords
- mesh
- ray
- detector
- protective thin
- transmission window
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000005540 biological transmission Effects 0.000 claims description 3
- 239000010409 thin film Substances 0.000 claims description 2
- 230000001681 protective effect Effects 0.000 claims 2
- 238000010030 laminating Methods 0.000 claims 1
- 239000000463 material Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 4
- 239000003507 refrigerant Substances 0.000 description 2
- 229910052790 beryllium Inorganic materials 0.000 description 1
- ATBAMAFKBVZNFJ-UHFFFAOYSA-N beryllium atom Chemical compound [Be] ATBAMAFKBVZNFJ-UHFFFAOYSA-N 0.000 description 1
- 238000010894 electron beam technology Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
Landscapes
- Analysing Materials By The Use Of Radiation (AREA)
Description
１図は本考案の一実施例の構成図、第２図及び
第３図はＸ線透過窓を構成する部材を説明するた
めの図、第４図及び第５図ａ，ｂ，ｃは従来のエ
ネルギー分散型Ｘ線検出器を説明するための図で
ある。
１：検出器保護パイプ、２：冷媒槽、３：冷媒
、４：熱伝導棒、５：半導体検出器、７：試料、
８：電子線、９：特性Ｘ線、１０：Ｘ線透過窓、
１１：ベリリウム薄網、１２：超薄膜。
Figure 1 is a configuration diagram of an embodiment of the present invention, Figures 2 and 3 are diagrams for explaining the members constituting the X-ray transmission window, and Figures 4 and 5 a, b, and c are diagrams of conventional FIG. 2 is a diagram for explaining an energy dispersive X-ray detector. 1: Detector protection pipe, 2: Refrigerant tank, 3: Refrigerant, 4: Heat conduction rod, 5: Semiconductor detector, 7: Sample,
8: Electron beam, 9: Characteristic X-ray, 10: X-ray transmission window,
11: Beryllium thin mesh, 12: Ultra-thin film.
Claims (1)
薄網と、該保護薄網よりＸ線吸収の小さい超薄膜
部材とを張り合せてＸ線透過窓を形成したことを
特徴とするエネルギー分散型Ｘ線検出器。 An energy-dispersive X-ray characterized in that an X-ray transmission window is formed by laminating a protective thin mesh formed in a mesh shape from a light element material and an ultra-thin film member that absorbs less X-rays than the protective thin mesh. Detector.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987173518U JPH0177976U (en) | 1987-11-13 | 1987-11-13 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987173518U JPH0177976U (en) | 1987-11-13 | 1987-11-13 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0177976U true JPH0177976U (en) | 1989-05-25 |
Family
ID=31465422
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987173518U Pending JPH0177976U (en) | 1987-11-13 | 1987-11-13 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0177976U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH044287U (en) * | 1990-04-27 | 1992-01-16 | ||
| JP2007071697A (en) * | 2005-09-07 | 2007-03-22 | Jeol Ltd | X-ray analyzer |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5652283B2 (en) * | 1973-01-29 | 1981-12-11 |
-
1987
- 1987-11-13 JP JP1987173518U patent/JPH0177976U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5652283B2 (en) * | 1973-01-29 | 1981-12-11 |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH044287U (en) * | 1990-04-27 | 1992-01-16 | ||
| JP2007071697A (en) * | 2005-09-07 | 2007-03-22 | Jeol Ltd | X-ray analyzer |
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