JPH044287U - - Google Patents
Info
- Publication number
- JPH044287U JPH044287U JP4526290U JP4526290U JPH044287U JP H044287 U JPH044287 U JP H044287U JP 4526290 U JP4526290 U JP 4526290U JP 4526290 U JP4526290 U JP 4526290U JP H044287 U JPH044287 U JP H044287U
- Authority
- JP
- Japan
- Prior art keywords
- diamond film
- window
- lattice
- utility
- registration request
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000010432 diamond Substances 0.000 claims description 6
- 229910003460 diamond Inorganic materials 0.000 claims description 6
- 239000000463 material Substances 0.000 claims 1
- 230000003287 optical effect Effects 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000005268 plasma chemical vapour deposition Methods 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 238000002834 transmittance Methods 0.000 description 1
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
Description
第１図ａ，ｂは、本考案のダイヤモンドウイン
ドーの平面及び断面図、第２図は、Ｘ線透過率を
示す説明図、第３図は、本考案のダイヤモンドウ
インドーの製造工程を示す工程断面図、第４図は
、マイクロ波プラズマＣＶＤ法の概略説明図であ
る。
１……ダイヤモンド膜、２……線状に厚くした
ダイヤモンド、３……基板、４……レジスト、５
……傷が付いている溝、６……傷が付いていない
面、７……傷が付いた面、８……ろう、９……石
英管反応室、１０……基板、１１……原料ガス、
１２……真空排気系、１３……マイクロ波発振器
、１４……導波管。
Figures 1a and b are plan and cross-sectional views of the diamond window of the present invention, Figure 2 is an explanatory diagram showing X-ray transmittance, and Figure 3 shows the manufacturing process of the diamond window of the present invention. The process sectional view, FIG. 4, is a schematic explanatory diagram of the microwave plasma CVD method. 1...Diamond film, 2...Thick linear diamond, 3...Substrate, 4...Resist, 5
... Scratched groove, 6 ... Unscratched surface, 7 ... Scratched surface, 8 ... Wax, 9 ... Quartz tube reaction chamber, 10 ... Substrate, 11 ... Raw material gas,
12...Evacuation system, 13...Microwave oscillator, 14...Waveguide.
Claims (1)
ドーにおいて、前記ダイヤモンド膜表面に部分的
に厚みの異なる格子型凸波形状を形成したことを
特徴とするダイヤモンドウインドー。 1. An optical window using a synthetic diamond film as a window material, characterized in that a lattice-type convex wave shape with partially different thicknesses is formed on the surface of the diamond film.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1990045262U JP2527009Y2 (en) | 1990-04-27 | 1990-04-27 | Diamond window |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1990045262U JP2527009Y2 (en) | 1990-04-27 | 1990-04-27 | Diamond window |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH044287U true JPH044287U (en) | 1992-01-16 |
| JP2527009Y2 JP2527009Y2 (en) | 1997-02-26 |
Family
ID=31559279
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1990045262U Expired - Lifetime JP2527009Y2 (en) | 1990-04-27 | 1990-04-27 | Diamond window |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2527009Y2 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH10244144A (en) * | 1997-03-04 | 1998-09-14 | Sumitomo Electric Ind Ltd | Pressure bulkhead |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0177976U (en) * | 1987-11-13 | 1989-05-25 |
-
1990
- 1990-04-27 JP JP1990045262U patent/JP2527009Y2/en not_active Expired - Lifetime
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0177976U (en) * | 1987-11-13 | 1989-05-25 |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH10244144A (en) * | 1997-03-04 | 1998-09-14 | Sumitomo Electric Ind Ltd | Pressure bulkhead |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2527009Y2 (en) | 1997-02-26 |
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