JPH0180682U - - Google Patents
Info
- Publication number
- JPH0180682U JPH0180682U JP1987176124U JP17612487U JPH0180682U JP H0180682 U JPH0180682 U JP H0180682U JP 1987176124 U JP1987176124 U JP 1987176124U JP 17612487 U JP17612487 U JP 17612487U JP H0180682 U JPH0180682 U JP H0180682U
- Authority
- JP
- Japan
- Prior art keywords
- vacuum pump
- pump series
- vacuum
- status
- operating
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000007704 transition Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
Description
第１図はこの考案の一実施例である真空装置の
概略構成図、第２図はその真空装置の操作パネル
を示す正面図、第３図はその真空装置の真空ポン
プ系列の運転状態を説明する図、第４図は一つの
真空ポンプ系列が停止状態から準備状態へ移行す
る際の動作を示すフローチヤート、第５図は一つ
の真空ポンプ系列が準備状態から排気状態へ移行
する際の動作を示すフローチヤート、第６図は一
つの真空ポンプ系列が準備状態から大気導入状態
へ移行する際の動作を示すフローチヤート、第７
図は一つの真空ポンプ系列が準備状態から停止状
態へ移行する際の動作を示すフローチヤート、第
８図は従来の真空装置の操作パネルを示す正面図
である。
２１……起動ボタン、２２……準備ボタン、２
３……排気ボタン、２４……大気導入ボタン、２
５……バルブ閉ボタン、２６……停止ボタン、２
７ａ，２７ｂ，２７ｃ，２７ｄ……選択スイツチ
、Ａ，Ｂ，Ｃ，Ｄ……真空ポンプ系列。
Fig. 1 is a schematic configuration diagram of a vacuum device that is an embodiment of this invention, Fig. 2 is a front view showing the operation panel of the vacuum device, and Fig. 3 is an explanation of the operating status of the vacuum pump system of the vacuum device. Figure 4 is a flowchart showing the operation of one vacuum pump series moving from the stopped state to the ready state, and Figure 5 is a flowchart showing the operation of one vacuum pump series moving from the ready state to the evacuation state. FIG. 6 is a flowchart showing the operation of one vacuum pump series when it transitions from the preparation state to the atmosphere introduction state.
The figure is a flowchart showing the operation of one vacuum pump series when it transitions from a ready state to a stopped state, and FIG. 8 is a front view showing an operation panel of a conventional vacuum device. 21... Start button, 22... Ready button, 2
3...Exhaust button, 24...Atmosphere introduction button, 2
5... Valve close button, 26... Stop button, 2
7a, 27b, 27c, 27d...Selection switch, A, B, C, D...Vacuum pump series.
Claims (1)
状態を状態指示スイツチの操作により制御するよ
うにした真空装置において、 前記状態指示スイツチを１組だけ設けるととも
に、前記複数の真空ポンプ系列に対応して複数の
選択スイツチを設け、前記状態指示スイツチによ
り運転制御される前記真空ポンプ系列を前記選択
スイツチにより選択するようにした真空装置。[Claims for Utility Model Registration] In a vacuum device in which the operating status of a plurality of vacuum pump series connected in parallel is controlled by operating a status indicating switch, only one set of the status indicating switches is provided, and the operating status of a plurality of vacuum pump series connected in parallel is 1. A vacuum apparatus, wherein a plurality of selection switches are provided corresponding to the vacuum pump series, and the selection switch selects the vacuum pump series whose operation is controlled by the status indicating switch.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17612487U JPH0240312Y2 (en) | 1987-11-18 | 1987-11-18 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17612487U JPH0240312Y2 (en) | 1987-11-18 | 1987-11-18 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0180682U true JPH0180682U (en) | 1989-05-30 |
| JPH0240312Y2 JPH0240312Y2 (en) | 1990-10-26 |
Family
ID=31467883
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP17612487U Expired JPH0240312Y2 (en) | 1987-11-18 | 1987-11-18 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0240312Y2 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2012074099A1 (en) * | 2010-12-03 | 2012-06-07 | 東京エレクトロン株式会社 | Evacuation apparatus control method and evacuation apparatus control apparatus |
-
1987
- 1987-11-18 JP JP17612487U patent/JPH0240312Y2/ja not_active Expired
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2012074099A1 (en) * | 2010-12-03 | 2012-06-07 | 東京エレクトロン株式会社 | Evacuation apparatus control method and evacuation apparatus control apparatus |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0240312Y2 (en) | 1990-10-26 |