JPH0183254U - - Google Patents
Info
- Publication number
- JPH0183254U JPH0183254U JP1987178327U JP17832787U JPH0183254U JP H0183254 U JPH0183254 U JP H0183254U JP 1987178327 U JP1987178327 U JP 1987178327U JP 17832787 U JP17832787 U JP 17832787U JP H0183254 U JPH0183254 U JP H0183254U
- Authority
- JP
- Japan
- Prior art keywords
- shutter
- introduction shaft
- particle beam
- shaft
- cushion
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010894 electron beam technology Methods 0.000 claims description 2
- 239000002245 particle Substances 0.000 claims 2
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987178327U JPH0183254U (2) | 1987-11-25 | 1987-11-25 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987178327U JPH0183254U (2) | 1987-11-25 | 1987-11-25 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0183254U true JPH0183254U (2) | 1989-06-02 |
Family
ID=31469950
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987178327U Pending JPH0183254U (2) | 1987-11-25 | 1987-11-25 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0183254U (2) |
-
1987
- 1987-11-25 JP JP1987178327U patent/JPH0183254U/ja active Pending
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